Compound Nanoimprint Processes and Their Applications for Functional Nanodevices

• Project/Area Number: 18560350
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Waseda University
• Principal Investigator: MIZUNO Jun Waseda University, ナノ理工学研究機構, 准教授 (60386737)
• Co-Investigator(Kenkyū-buntansha): SAITO Mikiko 早稲田大学, ナノ理工学研究機構, 准教授 (80386739)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥4,100,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥600,000); Fiscal Year 2008: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2007: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2006: ¥1,500,000 (Direct Cost: ¥1,500,000)
• Keywords: ナノデバイス造形 / MEMS / マイクロファブリケーション / ナノ構造化学 / 電気化学 / ナノインプリント / ナノメッキ

Research Abstract

高分子材料を基板として、ナノインプリント技術で溝構造の作製、ナノメッキ技術で樹脂上に配線パターンを形成し、そして最終的にプラズマ、エキシマUVによる表面親水化技術によって、溝構造と配線パターンをもつ基板同士を、流路変形の無い低温接合技術で、3次元構造を持つ流路デバイスとして作製することに成功した。本研究の成果は医療・化学分析チップ作製に必要な基礎技術を確立することができたと言える。

Research Products

• [Journal Article] Fabrication of Magnetic Nanodots Array Using UV Nanoimprint Lithography and Electrodeposition for High Density Patterned Media (2008)
  • Author(s): Hidetoshi Shinohara, Makoto Fukuhara, Tamano Hirasawa, Jun Mizuno, Shuichi Shoji
  • Journal Title: Journal of Photopolymer Science and Technology Vol.21, No.4 Pages: 591-596
  • NAID: 130004464689
• [Journal Article] Surface hydrophilic treatment of polyurea film realized by vacuum ultraviolet light irradiation and its application for poly(methylmethacrylate) blood analysis chip (2008)
  • Author(s): H. Shinohara, Y. Takahashi, J. Mizuno, S. Shoji
  • Journal Title: Sensors and Actuators B 132 Pages: 374-379
• [Journal Article] Polymer microchip integrated with nano-electrospray tip for electrophoresis-mass spectrometry (2008)
  • Author(s): Hidetoshi Shinohara, Takafumi Suzuki, Fumihiko Kitagawa, Jun Mizuno, Koji Otsuka, Shuichi Shoji
  • Journal Title: Sensors and Actuators B 132 Pages: 368-373
• [Journal Article] Fabrication of High Light-Extraction Efficiency Light-Emitting Diodes Using Nanostructures by Ultraviolet Nanoimprint Lithography and Electrodeposition (2008)
  • Author(s): Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno, Shuichi Shoji
  • Journal Title: Japanese Journal of Applied Physics Vol.47, No.2 Pages: 933-935
• [Journal Article] Fabrication of Magnetic Nanodots Array Using UV Nanoimprint Lithography and Electrodeposition for High Density Patterned Media (2008)
  • Author(s): H. Shinohara, M. Fukuhara, T. Hirasawa, J . Mizuno, S. Shoji
  • Journal Title: Journal of Photopolymer Science and TechnoIogy Vol. 21, No. 4 Pages: 591-596
  • NAID: 130004464689
  • Peer Reviewed
• [Journal Article] Polymer microchip integrated with nano-electrospray tip for electrophoresis&#8211 ; mass spectrometry (2008)
  • Author(s): H. Shinohara. T. Suzuki, F. Kitagawa, J. M izuno, K. Otsuka, S. Shoji
  • Journal Title: Sensors and Actuators B 132 Pages: 368-373
  • Peer Reviewed
• [Journal Article] Surface hydrophilic treatment of polyurea film realized by vacuum ultraviolet light irradiation and its appiication for poly(methylmethaorylate)blood analysis chip (2008)
  • Author(s): H. Shinohara, Y. Takahashi, J. Mizuno, S. Shoji
  • Journal Title: Sensors and Actuators B 132 Pages: 374-379
  • Peer Reviewed
• [Journal Article] Fabrication of microchannel Device by Hot Embossing and Direct Bonding of poly(methyl methacrrylate) (2007)
  • Author(s): Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji
  • Journal Title: Japanese Journal of Applied Physics Vol.46, No.6A Pages: 3661-3664
• [Journal Article] Low-temperature Direct Bonding of poly(methyl methacrrylate) for polymer Microchips (2007)
  • Author(s): Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji
  • Journal Title: TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING IEEJ Trans 2 Pages: 301-306
• [Journal Article] On-chip Cell Sorting System Using Thermoreversible Gelation Polymer (2007)
  • Author(s): Yoshitaka Shirasaki, Hirokazu Sugino, Masayasu Tatsuoka, Jun Mizuno, Shuichi Shoji, and Takashi Funatsu
  • Journal Title: IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS(MARCH/APRIL) VOL.13, NO.2 Pages: 223-227
• [Journal Article] Fabrication of Metallic Nanopatterns Using the Vacuum Type UV-NIL (2007)
  • Author(s): Makoto Fukuhara, Jun Mizuno, Mikiko Saito, Takayuki Homma, Shuichi Shoji
  • Journal Title: TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING IEEJ Trans 2 Pages: 307-312
• [Journal Article] Application of cycloolefin polymer chip directly integrated with an electronanospray tip to electrophoretic separation and mass spectrometric detection (2007)
  • Author(s): Fumihiko Kitagawa, Hidetoshi Shinohara, Jun Mizuno, Koji Otsuka
  • Journal Title: 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences(uTAS 2007) Pages: 1405-1407
  • Peer Reviewed
• [Journal Article] UV Nanoimprint Lithography and Its Application for Nanodevices (2007)
  • Author(s): Makoto Fukuhara, Hiroshi Ono, Tamano Hirasawa, Jun Mizuno, Shuichi Shoji
  • Journal Title: Journal of 24th Conference of Photopolymer Science and Technology Pages: 549-554
  • NAID: 130004464583
  • Peer Reviewed
• [Journal Article] (2007)
  • Author(s): Hiroshi ONO, Yoshinobu ONO, Kenji KASAHARA, Jun MIZUNO, and Shuichi SHOJI
  • Journal Title: Japanese Journa l of Applied Physics Vol.47 Pages: 2-2
  • Peer Reviewed
• [Journal Article] (2007)
  • Author(s): Hidetoshi SHINOHARA, Jun MIZUNO, and Shuichi SHOJI
  • Journal Title: Japanese Journal of Applied Physics Vol.46.No.6A Pages: 3661-3664
  • Peer Reviewed
• [Journal Article] Low-temperature Direct Bonding of poiy(methyl methacrrylate)for polymer Microchips (2007)
  • Author(s): Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji
  • Journal Title: TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING IEEJ Trans 2007 2 Pages: 301-306
  • Peer Reviewed
• [Journal Article] Fabrication of integrated nano ESI tip for microchip electrophoresis-mass spectrometry (2007)
  • Author(s): F.Kitagawa, T.Suzuki, H.Shinohara, J.Mizuno, S.Shoji, K.Otsuka
  • Journal Title: 21st International Symposium on Microscale Bioseparations (MSB 2007), Vancouver, Canada; 14-18 January 2007 Pages: 277-277
• [Journal Article] High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips, In Micro Total Analysis Systems 2006 (2006)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Journal Title: Society for Chemistry and Micro-Nano Systems : Tokyo(Kitamori, T. ; Fujita, H. ; Hasebe, S. Eds) Vol.1 Pages: 362-364
• [Journal Article] アクリル製マイクロチャネルアレイを用いた血液通過時間の再現性の検討 (2006)
  • Author(s): 西泰治, 萩原清道, 福田始弘, 木下藤寿, 伊藤克之, 菊池佑二, 庄子習一, 水野潤, 篠原秀敏
  • Journal Title: 日本ヘモレオロジー学会 9巻2号
• [Journal Article] High performance electrophoretic analysis on cycloolefin polymer microchips (2006)
  • Author(s): F.Kitagawa, T.Suzuki, J.Mizuno, S.Shoji, K.Otsuka
  • Journal Title: 6th Asia-Pacific International Symposium on Microscale Separations and Analysis (APCE 2006), Kyoto, Japan, 12-14 November 2006 Pages: 80-80
• [Journal Article] High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips (2006)
  • Author(s): F.Kitagawa*, T.Suzuki, J.Mizuno, S.Shoji, K.Otsuka
  • Journal Title: In Micro Total Analysis Systems 2006, Society for Chemistry and Micro-Nano Systems : Tokyo, (2006) Vol. 1 Pages: 362-364
• [Journal Article] Metallization on Three Dimensions Microstructures Using Photoresist Spray Coating for Microdirect Methanol Fuel Cel (2006)
  • Author(s): M.Ishizuka, H.Houjou, S.Motokawa, J.Mizuno, T.Momma, T.Osaka, S.Shoji
  • Journal Title: Japanese Journal of Applied Physics (2006) vol. 45 No. 10A Pages: 7944-7948
• [Journal Article] MICROCHIP BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING (2006)
  • Author(s): H.Shinohara, J.Mizuno, F.Kitagawa, K.Otsuka, S.Shoji
  • Journal Title: The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS2006), TOKY0, 5-9, November, 2006 Pages: 158-160
• [Journal Article] HIGH PERFORMANCE ELECTROPHORETIC ANALYSIS ON CYCLOOLEFIN POLYMER MICROCHIPS (2006)
  • Author(s): F.Kitagawa, T.Suzuki, J.Mizuno, S.Shoji, K.Otsuka
  • Journal Title: The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS2006), TOKY0, 5-9, November, 2006 Pages: 385-393
• [Journal Article] Fabrication of High Light-Extraction Efficiency LED Using Nanostructures by UV Nanoimpr int Lithography and ElectrodeRosition (2006)
  • Author(s): H.Ono, Y.Ono, K.Kasahara, J.Mizuno, S.Shoji
  • Journal Title: SSDM2006, Yokohama, 14-16, September Pages: 256-257
• [Journal Article] Equipments and Technologies for Packaging of Nano / Micro-structured Polymer Applications (2006)
  • Author(s): H.Kurotaki, H.Shinohara, V.Dragoi, T.Glinsner, J.Mizuno, S.Shoji
  • Journal Title: COMS2006, Florida, Tools of the Trade : Equipment and Infrastructure Pages: 33-34
• [Journal Article] FABRICATION OF METALLIC NANOPATTERNS USING THE VACUUM TYPE UV-NIL EQUIPMENT (2006)
  • Author(s): T.HOMMA, J.MIZUNO, S.SHOJI, M.OHTAGUCHI, G.SUZUKI
  • Journal Title: Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, 25-28, June, 2006
  • NAID: 10025771951
• [Journal Article] LOW TEMPERATURE DIRECT BONDING OF PMMA FOR POLYMER MICROCHIPS (2006)
  • Author(s): H.SHINOHARA, M.ISHIZUKA, J.MIZUNO, S.SHOJI
  • Journal Title: Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, 25-28, June, 2006
• [Journal Article] Effect of seed layers on the internal stress of electrodeposited Sn-Cu films (2006)
  • Author(s): H.Sasaki, K.Katou, T.Toba, M.Saito, T.Homma
  • Journal Title: 209th ECS Meeting, (2006). (Denver, America, 2006).
• [Journal Article] A1合金膜のジンケート処理プロセスにおける表面電位と膜成長との関係 (2006)
  • Author(s): 齋藤 美紀子, 前川武之^*, 本間敬之
  • Journal Title: 第114回表面技術講演大会(2006.10 : 北海道大学)
• [Journal Article] Sn系合金めっきにおけるウイスカ発生に与える結晶粒径及び結晶構造の影響 (2006)
  • Author(s): 佐々木, 加藤, 鳥羽, 齋藤, 本間
  • Journal Title: 第114回表面技術講演大会(2006.10 : 北海道大学)
• [Journal Article] UVインプリントを用いた高アスペクト比Siナノ構造体の作製 (2006)
  • Author(s): 大野, 福原, 石束, 水野, 庄子, 太田口, 平澤, 坂井
  • Journal Title: マイクロマシン・センサシステム研究会,東京大学生産技術研究所,2006年5月15-16日 MSS-06-21 Pages: 97-100
• [Presentation] Preparation of Electrodeposited Pt Nano Patterned Electrode using UV-Nano Imprinting Lithography (2008)
  • Author(s): M. Saito, J. Mizuno, H. Nishikubo, H. Fujiwara, T. Homma
  • Organizer: 214th Meeting of the Electrochemical Society
  • Place of Presentation: CANADA
  • Year and Date: 2008-10-15
• [Presentation] めっきPtナノ電極による金属ナノ粒子の生成 (2008)
  • Author(s): 西久保 英郎, 藤原 英道, 斎藤 美紀子, 水野 潤, 本間 敬之
  • Organizer: 第117回表面技術講演大会
  • Place of Presentation: 日本大学
  • Year and Date: 2008-03-13
• [Presentation] UV-ナノインプリント(UV-NIL)を用いためっきPtナノ電極の形成 (2008)
  • Author(s): 斎藤 美紀子, 水野 潤, 西久保 英郎, 藤原 英道, 本間 敬之
  • Organizer: 第117回表面技術講演大会
  • Place of Presentation: 日本大学
  • Year and Date: 2008-03-13
• [Presentation] The long pillar array column with the low-dispersion curve for liquid chromatography (2008)
  • Author(s): Akira Saeki, Chiaki Aoyama, Yoshitaka Shirasaki, Makoto Tsunoda, Jun Mizuno, Takashi Funatsu, Shuichi Shoji
  • Organizer: 8th International Symposium on Microchemistry and Microsystems(ISMM 2008)
  • Place of Presentation: Kyoto, Japan
• [Presentation] Electrophoretic analyses of biogenic compounds using surface modified polymer microchips (2008)
  • Author(s): Fumihiko Kitagawa, Kei Kubota, Hidetoshi Shinohara, Yoshikazu Takahashi, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: 8th International Symposium on Microchemistry and Microsystems(ISMM 2008)
  • Place of Presentation: Kyoto, Japan
• [Presentation] Electrophoretic analyses of biogenic compounds using surface modified polymer microchips (2008)
  • Author(s): Fumihiko Kitagawa, Kei Kubota, Hidetoshi Shinohara, Yoshikazu Takahashi, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: The 33rd International Symposium on High Performance Liquid Phase Separations and Related Techniques(HPLC2008 Kyoto)
  • Place of Presentation: Kyoto Univ., Kyoto, Japan
• [Presentation] Preparation of Electrodeposited Pt Nano Patterned Electrode using UV-Nano Imprinting Lithography (2008)
  • Author(s): Mikiko Saito, Jun Mizuno, Hideo Nishikubo, Hidemichi Fujiwara, and Takayuki Homma
  • Organizer: 214th Meeting of the Electrochemical Society(ECS2008)A2
• [Presentation] Electrochemical Synthesis of Metal Nano Particles Using Electrodeposited Pt Electrode with Nano Patterned Surface (2008)
  • Author(s): Hideo Nishikubo, Hidemichi Fujiwara, Mikiko Saito, Jun Mizuno and Takayuki Homma
  • Organizer: 214th Meeting of the Electrochemical Society(ECS2008)A2
• [Presentation] Electrochemical Fabrication of CoPt Nanodot Arrays on Glass Disks by UV Nanoimprint Lithography (2008)
  • Author(s): Takanari Ouchi, Yuki Arikawa, Jun Mizuno, Shuichi Shoji, Takayuki Homma
  • Organizer: 214th Meeting of the Electrochemical Society(ECS2008), F4
• [Presentation] HIGH-THORGHPUT NANO-METAL PATTERNING PROCESS USING UV NANOIMPRINT LITHOGRAPHY AND ELECTRODEPOSITION (2008)
  • Author(s): Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji
  • Organizer: The 7th International Conference on Nanoimprint and Nanoprint Technology(NNT2008), Kyoto Internationa Conference Center
  • Place of Presentation: Kyoto, Japan
• [Presentation] HIGHLY STABLE AND REPRODUCIBLE CYCLO-OLEFIN POLYMER NANO-ELECTROSPRAY TIPFOR ELECTROPHORESIS-MASS SPECTROMETRY (2008)
  • Author(s): Hidetoshi Shinohara, Fumihiko Kitagawa, Jun Mizuno, Koji Otsuka and Shuichi Shoji
  • Organizer: Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008(APCOT2008), TAYIH Landis Hotel, Tainan
  • Place of Presentation: Taiwan National Cheng Kung University
• [Presentation] A NEW FINE-PITCH VERTICAL INTERCONNECTION PROCESS FOR THROUGH SILICON VIAS AND MICROBUMPS (2008)
  • Author(s): Katsuyuki Sakuma, Hiroshi Ono, Noriyasu Nagai, Mikiko Saito, Jun Mizuno, Shuichi Shoji
  • Organizer: Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008(APCOT2008), TAYIH Landis Hotel, Tainan
  • Place of Presentation: Taiwan National Cheng Kung University
• [Presentation] Study of Low-temperature Wafer Bonding with Au-Au Bonding Technique (2008)
  • Author(s): Hirokazu Kurotaki, Hidetoshi Shinohara, Hiroshi Kobayashi, Jun Mizuno, Shuichi Shoji
  • Organizer: proceeding of MicroNano 2008
  • Place of Presentation: Clear Water Bay, Kowloon, Hong Kong
• [Presentation] POST-HYDROPHILIC TREATMENT FREE PLASTIC BIOCHIP FABRICATION METHOD USING POLYUREA FILM (2008)
  • Author(s): H. Shinohara, Y. Takahashi, J. Mizuno, S. Shoji
  • Organizer: MEMS2008,
  • Place of Presentation: Tucson, AZ., USA
• [Presentation] 表面修飾ポリマーマイクロチップを用いる生体試料の電気泳動分析2 (2008)
  • Author(s): 北川文彦, 久保田圭, 篠原秀敏, 高橋善和, 水野潤, 庄子習一, 大塚浩二
  • Organizer: 第19回クロマトグラフィー科学会議PM-03
  • Place of Presentation: 京都大学(桂キャンパス), 京都
• [Presentation] 表面修飾ポリマーマイクロチップを用いる生体試料の電気泳動分析 (2008)
  • Author(s): 北川文彦, 久保田圭, 篠原秀敏, 高橋善和, 水野潤, 庄子習一, 大塚浩二
  • Organizer: 第28回キャピラリー電気泳動シンポジウム(SCE2008)
  • Place of Presentation: 首都大学東京, 八王子
• [Presentation] UV-ナノインプリント(UV-NIL)を用いためっきPtナノ電極の形成 (2008)
  • Author(s): 齋藤美紀子, 水野潤, 西久保英郎, 藤原英道,本間敬之
  • Organizer: 第117回表面技術講演大会, 13C-8
• [Presentation] Compound Nanoimprint Processes and Their AppIications for Functional Nanodevices (2008)
  • Author(s): Jun Mizuno, Hidetoshi Shinohara, Sh uichi Shoji
  • Organizer: 2008 International Conference on Solid state Devices and Materials
  • Place of Presentation: Tsukuba
• [Presentation] The long pillar array column with the low-dispersion curve for liquid chromatography (2008)
  • Author(s): A. Saeki, C. Aoyama, Y. Shirasaki, M. Tsunoda, J. Mizuno, T. Funatsu, S. Shoji
  • Organizer: 8th International Symposium on Microchemistry and Microsystems(ISMM 2008)
  • Place of Presentation: Kyoto
• [Presentation] Electrophoretic analyses of biogenic compounds using surface modified polymer microchips (2008)
  • Author(s): F. Kitagawa, K. Kubota, H. Shinohara, Y. Taka hashi, J. Mizuno, S. Shoji, K. Otsuka
  • Organizer: 8th International Symposium on Microohemistry and Microsystems(ISMM 2008)
  • Place of Presentation: Kyoto
• [Presentation] Seamless Pattern Fabrication for Large Area Nano structures Using UV-NIL (2008)
  • Author(s): S. Kataza. K. Ishibashi, M. Kokubo, H. Goto, J. Mizuno, S. Shoji
  • Organizer: 2008 International Microprocesses and Nanotechnology Conference(MNC2008)
  • Place of Presentation: Fukuoka
• [Presentation] HIGHLY STABLE AND REPRODUCIBLE CYCLO-OLEFIN POLYMER NANO-ELECTROSPRAY TIP FOR ELECTROPHORESIS-MASS SPECTROMETRY (2008)
  • Author(s): H. Shinohara, F. Kitagawa, J. Mizuno, K. Otsuka, S. Shoji
  • Organizer: Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008(APC OT2008)
  • Place of Presentation: Tainan
• [Presentation] Seamless Pattern stitched UV Nanoimprint Process For Large Area Nano Mold Fabrication (2008)
  • Author(s): S. Kataza, K. Ishibashi, M. Kokubo, S. Sho ji, H. Goto, J. Mizuno
  • Organizer: The 1st Asian Symposium on Nano Imprint Lithography(ASNIL2008)
  • Place of Presentation: Seoul
• [Presentation] 表面修飾ポリマーマイクロチップを用いる生体試料の電気泳動分析2 (2008)
  • Author(s): 北川文彦, 久保田圭, 篠原秀敏, 高橋善和, 水野潤, 庄子習一, 大塚浩二
  • Organizer: 第19回クロマトグラフィー科学会議
  • Place of Presentation: 京都大学
• [Presentation] UV硬化性フッ素樹脂を用いたUVインプリントによるナノパターン作製技術 (2008)
  • Author(s): 片座慎吾, 水野潤, 庄子習一, 角崎健太郎, 川口泰秀
  • Organizer: 第16回プラスチック成形加工学会秋季大会
  • Place of Presentation: 福井大学
• [Presentation] Application of cycloolefin polymer chip directly integrated with an electronanospray tip to electrophoretic separation and mass spectrometric detection (2007)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences(u-TAS 2007)
  • Place of Presentation: Paris, France
• [Presentation] Electrophoretic separation and mass spectrometric detection on polymer chip directly integrated with an electronanospray tip (2007)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: 1st Shenyang International Colloquium on Microfluidics(SICOM I)
  • Place of Presentation: Shenyang, China
• [Presentation] Electrophoretic separation and mass spectrometric detection on polymer chip directly integrated with a nano ESI tip (2007)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: 7th International Symposium on Microchemistry and Microsystems(ISMM 2007)
  • Place of Presentation: Tsukuba, Ibaraki, Japan
• [Presentation] Microchip electrophoresis-mass spectrometry on polymer microfluidic device directly integrated with a nano ESI tip (2007)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: 7th Asia-Pacific International Symposium on Microscale Separations and Analysis(APCE 2007), Singapore International Convention & Exhibition Centre
  • Place of Presentation: Singapore
• [Presentation] Application of Cycloolefin Polymer Chip Directly Integrated with an Electronanospray Tip to Electrophoretic Separation and Mass Spectrometric Detection (2007)
  • Author(s): Kitagawa, F. ; Suzuki, T. ; Shinohara, H. ; Mizuno, J. ; Shoji, S. ; Otsuka, K.
  • Organizer: Chemical and Biological Microsystems Society, Vol.2(Micro Total Analysis Systems 2007, Viovy, J.-L. ; Tabeling, P. ; Descroix, S. ; Malaquin, L. Eds.)
  • Place of Presentation: San Diego,
• [Presentation] POLYMER MICROCHIP FOR ELECTROPHORESIS-MASS SPECTROMETRY FABRICATED BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING (2007)
  • Author(s): T. Suzuki, F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, and S. Shoji
  • Organizer: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: Lyon, France
• [Presentation] SURFACE HYDROPHILIC POLYUREA FILM FOR PMMA BLOOD ANALYSIS CHIP REALIZED BY VACUUM ULTRAVIOLET LIGHT IRRADIATION (2007)
  • Author(s): H. Shinohara, Y. Takahashi, T. Nishi, K. Uemura, C.Takahashi, J. Mizuno and S. Shoji
  • Organizer: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: Lyon, France
• [Presentation] Fabrication of Multilayer Interconnection Using Ultraviolet Nanoimprint Lithography (2007)
  • Author(s): Hiroshi Ono, Shuichi Shoji, Mikiko Saito, Jun Mizuno
  • Organizer: 4th International Conference on Networked Sensing Systems, INSS 2007
  • Place of Presentation: Braunschweig, Germany
• [Presentation] Fabrication of integrated nano ESI tip for microchip electrophoresis-mass spectrometry (2007)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: 21st International Symposium on Microscale Bioseparations(MSB 2007)
  • Place of Presentation: Vancouver, Canada
• [Presentation] "High Performance Liquid Chromatography(HPLC)用カラムのチップ化に関する研究 (2007)
  • Author(s): 佐伯亮, 鈴木崇章, 青山千顕, 白崎善隆, 水野潤, 船津高志, 庄子習一
  • Organizer: 第15回化学とマイクロ・ナノシステム研究会(,FP08)
• [Presentation] シクロオレフィンポリマーチップによる電気泳動分離-質量分析検出 (2007)
  • Author(s): 北川文彦, 鈴木崇章, 篠原秀敏, 水野潤, 庄子習一, 大塚浩二
  • Organizer: 第15回化学とマイクロ・ナノシステム研究会(SP16)
• [Presentation] 真空紫外線を用いたポリ尿素膜親水化処理とその血液チップへの応用 (2007)
  • Author(s): 篠原秀敏, 高橋善和, 西泰治, 植村邦彦, 高橋千栄子, 水野潤, 庄子習一
  • Organizer: 第15回化学とマイクロ・ナノシステム研究会(SP36)
• [Presentation] ナノESI-体型ポリマ-製マイクロチップによる電気泳動分離-質量分析検出 (2007)
  • Author(s): 北川 文彦, 鈴木 崇章, 篠原 秀敏, 水野 潤, 庄子 習一, 大塚 浩二
  • Organizer: 第27回キャピラリー電気泳動シンポジウム(SCE 2007)
  • Place of Presentation: クリエート浜松
• [Presentation] マイクロチップ電気泳動分離-質量分析検出用ポリマー製デバイスの開発 (2007)
  • Author(s): 北川 文彦, 鈴木 崇章, 篠原 秀敏, 水野 潤, 庄子 習一, 大塚 浩二
  • Organizer: 日本分析化学会第56年会
  • Place of Presentation: 徳島大学
• [Presentation] Electrophoretic separation and mass spectrometric detection on polymer chip directly integrated with an electronanospray tip (2007)
  • Author(s): Fumihiko Kitagawa, Hidetoshi Shinohara, Jun Mizuno, Koji Otsuka
  • Organizer: 1st Shenyang international Colloquium on Microfluidics(SICOM I)
  • Place of Presentation: China
• [Presentation] Microchip electrophoresis-mass spectrometry on polymer microfluidic device directly integrated with a nano ESI tip (2007)
  • Author(s): Fumihiko Kitagawa, Hidetoshi Shinohara, Jun Mizuno, Koji Otsuka
  • Organizer: 7th Asia-Pacific International Symposium on Microscale Separations and Analysis (APCE 2007)
  • Place of Presentation: Singapore
• [Presentation] POLYMER MICROCHIP FOR ELECTROPHORESIS-MASS SPECTROMETRY FABRICATED BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING (2007)
  • Author(s): T.Suzuki, F.Kitagawa, H.Shinohara, J.Mizuno, K.Otsuka, and SShoji
  • Organizer: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: Lyon
• [Presentation] SURFACE HYDROPHILIC POLYUREA FILM FOR PMMA BLOOD ANALYSIS CHIP REAL IZED BY VACUUM ULTRAVIOLET LIGHT IRRADIATION (2007)
  • Author(s): H.Shinohara, Y.Takahashi, T.Nishi, J.Mizuno and S.Shoji
  • Organizer: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: Lyon
• [Presentation] FABRICATION OF MULTILAYER INTERCONNECTION USING ULTRAVIOLET NANOIMPRINTLIT LITHOGRAPHY (2007)
  • Author(s): Hiroshi Ono, Mikiko Saito, Jun Mizunoand Shuichi Shoji
  • Organizer: INSS2006
  • Place of Presentation: Braunschweig
• [Presentation] High Performance Liquid Chromatograohv (HPLC)用カラムのチップ化に関する研究 (2007)
  • Author(s): 佐伯 亮, 鈴木 崇章, 青山 千顕, 白崎 善隆, 水野 潤, 船津 高志, 庄子 習一
  • Organizer: 第15回化学とマイクロナノシステム研究会
  • Place of Presentation: 仙台
• [Presentation] シクロオレフィンポリマーチップによる電気泳動分離-質量分析検出 (2007)
  • Author(s): 北川 文彦, 鈴木 崇章, 篠原 秀敏, 水野 潤, 庄子 習一, 大塚 浩二
  • Organizer: 第15回化学とマイクロナノシステム研究会
  • Place of Presentation: 仙台
• [Presentation] 真空紫外線を用いたポリ尿素膜親水化処理とその血液チップへの応用 (2007)
  • Author(s): 篠原 秀敏, 高橋 善和, 西 泰治, 植村 邦彦, 高橋 千栄子, 水野 潤, 庄子 習一
  • Organizer: 第15回化学とマイクロナノシステム研究会
  • Place of Presentation: 仙台
• [Presentation] 電気泳動分離-質量分析検出用ポリマー製マイクロチップの作製 (2007)
  • Author(s): 北川 文彦, 鈴木 崇章, 篠原 秀敏, 水野 潤, 庄子 習一, 大塚 浩二
  • Organizer: 日本材料学会第56期学術講演会
  • Place of Presentation: 名古屋大学
• [Presentation] 電気泳動分離-質量分析検出用シクロオレフィンポリマーマイクロチップの作製(2) (2007)
  • Author(s): 北川 文彦, 鈴木 崇章, 篠原 秀敏, 水野 潤, 庄子 習一, 大塚 浩二
  • Organizer: 第55回質量分析総合討論会
  • Place of Presentation: 広島国際会議場
• [Presentation] 電気泳動分離-質量分析検出用シクロオレフィンポリマーマイクロチップの作製 (2007)
  • Author(s): 北川 文彦, 鈴木 崇章, 篠原 秀敏, 水野 潤, 庄子 習一, 大塚 浩二
  • Organizer: 第14回クロマトグラフィーシンポジウム
  • Place of Presentation: 富山
• [Presentation] High performance electrophoretic analysis on cycloolefin polymer microchips (2006)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka
  • Organizer: 6th Asia-Pacific International Symposium on Microscale Separations and Analysis(APCE 2006)
  • Place of Presentation: Kyoto, Japan
• [Presentation] FABRICATION OF HIGHLY DIMENSION CONTROLLED PMMA MICROCHIP BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING (2006)
  • Author(s): Hidetoshi Shinohara, Jun Mizuno, Fumihiko Kitagawa, Koji Otsuka and Shuichi Shoji
  • Organizer: The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences(uTAS2006)
  • Place of Presentation: TOKYO
• [Presentation] HIGH PERFORMANCE ELECTROPHORETIC ANALYSIS ON CYCLOOLEFIN POLYMER MICROCHIPS (2006)
  • Author(s): Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji and Koji Otsuka
  • Organizer: The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences(uTAS2006)
  • Place of Presentation: TOKYO
• [Presentation] Fabrication of High Light-Extraction Efficiency LED Using Nanostructures by UV Nanoimpr int Lithography and Electrodeposition (2006)
  • Author(s): Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno and Shuichi Shoji
  • Organizer: SSDM2006
  • Place of Presentation: Yokohama
• [Presentation] LOW TEMPERATURE DIRECT BONDING OF PMMA FOR POLYMER MICROCHIPS (2006)
  • Author(s): H. SHINOHARA, M. ISHIZUKA, J. MIZUNO AND S. SHOJI
  • Organizer: Asia-Pacific Conference of Transducers and Micro-Nano Technology(95-FT-A0062)
  • Place of Presentation: Singapore
• [Presentation] FABRICATION OF METALLIC NANOPATTERNS USING THE VACUUM TYPE UV-NIL EQUIPMENT (2006)
  • Author(s): MAKOTO FUKUHARA, MIKIKO SAITO, TAKAYUKI HOMMA, JUN MIZUNO, SHUICHI SHOJI, MAKOTO OHTAGUCHI, TAMANO HIRASAWA, GAKU SUZUKI, NORIHITO FUKUGAMI
  • Organizer: Asia-Pacific Conference of Transducers and Micro-Nano Technology(95-FT-A0144)
  • Place of Presentation: Singapore
• [Presentation] Equipments and Technologies for Packaging of Nano/Micro-structured Polymer Applications
  • Author(s): H.Kurotaki, H.Shinohara, H.Ishida, V.Dragoi, T.Glinsner, O.Lindner, J.Mizuno, S.Shoji
  • Organizer: COMS2006
  • Place of Presentation: Florida
• [Presentation] UVナノインプリント技術を用いたCu立体配線の作製
  • Author(s): 大野浩志、永井議靖、斎藤美紀子、水野潤、庄子習一
  • Organizer: 2008年春季 第55回応用物理学関係連合講演会(28a-ZK-/II)
  • Place of Presentation: 船橋、日本大学
• [Book] デュアルダマシン銅配線へのナノインプリント技術の応用 (2009)
  • Author(s): 水野潤
  • Publisher: 株式会社アドコム・メディア発行所(vol.31 No.2)
• [Book] O puls E「デュアルダマシン銅配線へのナノインプリント技術の応用」(vol. 31 No. 2) (2009)
  • Author(s): 水野 潤
  • Publisher: 株式会社 アドコム・メディア
• [Book] 微細転写・加工技術全集「ナノインプリントを用いたマイクロ流路デバイスの作製」 (2008)
  • Author(s): 水野潤
  • Publisher: 株式会社技術情報協会・発行所
• [Book] "ナノインプリントの最新技術と装置・材料・応用"-ナノインプリント技術の最先端と拡がる用途-「マイクロTAS,バイオ応用」・「NEMS分野への応用」 (2008)
  • Author(s): 水野潤
  • Publisher: 株式会社フロンティア出版編集・発行
• [Book] 微細転写・加工技術全集「ナノインプリントを用いたマイクロ流路デバイスの作製」 (2008)
  • Author(s): 水野 潤
  • Publisher: 株式会社 技術情報協会
• [Book] ナノインプリント応用事例集~原理/材料/装置/モールド/離型/評価/量産動向/特許等を踏まえて~「UVインプリントと応用技術」 (2007)
  • Author(s): 水野潤
  • Publisher: 株式会社情報機構発行(第1刷)
• [Book] ナノインプリント技術大全「磁気記録媒体への応用」 (2007)
  • Author(s): 水野潤, 福原誠
  • Publisher: 電子ジャーナル
• [Book] ナノインプリント技術大全「分析デバイスへの応用」 (2007)
  • Author(s): 水野潤, 篠原秀敏、庄子習一
  • Publisher: 電子ジャーナル
• [Book] ナノインプリント技術大全「ナノインプリント技術のLEDへの応用」 (2007)
  • Author(s): 水野潤, 大野浩志
  • Publisher: 電子ジャーナル
• [Book] コンバーティング・テクノロジー便覧「インプリント技術」 (2007)
  • Author(s): 水野潤
  • Publisher: 株式会社加工技術研究会
• [Book] 2007 ナノインプリント技術大全「磁気記録媒体への応用」 (2007)
  • Author(s): 福原誠, 水野 潤
  • Publisher: 電子ジャーナル
• [Book] 2007 ナノインプリント技術大全「分析デバイスへの応用」 (2007)
  • Author(s): 篠原秀敏, 庄子習一, 水野潤
  • Publisher: 電子ジャーナル
• [Book] 2007 ナノインプリント技術大全「ナノインプリント技術のEDへの応用」 (2007)
  • Author(s): 大野浩志, 水野潤
  • Publisher: 電子ジャーナル
• [Book] 株式会社加工技術研究会 (2006)
  • Author(s): 水野潤
  • Publisher: コンバーティングテクノロジー便覧「インプリント技術」
• [Remarks] (1) 日経産業新聞記事掲載2008年4月16日号pp1「LSI立体配線効率化」
• [Remarks] (2) 日経産業新聞記事掲載2008年4月8日号pp11「室温で親水性プラに」
• [Patent(Industrial Property Rights)] モールド支持構造及びモールド支持方法 (2007)
  • Inventor(s): 水野 潤, 大野 浩志, 福原 誠
  • Filing Date: 2007-11-22
• [Patent(Industrial Property Rights)] 転写装置及び転写方法 (2007)
  • Inventor(s): 水野 潤, 大野 浩志, 福原 誠
  • Filing Date: 2007-11-22
• [Patent(Industrial Property Rights)] 転写装置及び転写方法 (2006)
  • Inventor(s): 庄子, 水野, 大野, 福原, 太田口
  • Industrial Property Rights Holder: 早大, 東洋合成工業
  • Industrial Property Number: 2006-135778
  • Filing Date: 2006-05-15
• [Patent(Industrial Property Rights)] モールド支持構造及びモールド支持方法 (2006)
  • Inventor(s): 庄子, 水野, 大野, 福原, 太田口
  • Industrial Property Rights Holder: 早大, 東洋合成工業
  • Industrial Property Number: 2006-135779
  • Filing Date: 2006-05-15