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Investigation of high energy X-ray detectors to detect a trace of pollutant capable of operating at room temperature

Research Project

Project/Area Number 18560356
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionOsaka Electro-Communication University

Principal Investigator

MATSUURA Hideharu  Osaka Electro-Communication University, Faculty of Engineering, Professor (60278588)

Co-Investigator(Kenkyū-buntansha) TANIGUCHI Kazuo  Osaka Electro-Communication University, Faculty of Engineering, Professor (50076832)
SUSAKI Wataru  Osaka Electro-Communication University, Faculty of Engineering, Professor (00268294)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥4,010,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥510,000)
Fiscal Year 2007: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2006: ¥1,800,000 (Direct Cost: ¥1,800,000)
KeywordsX-ray detector / X-ray fluorescence / silicon drift detector / semi-insulating semiconductor / 4H-SiC / radiation-resistance
Research Abstract

1. Research and development of highly-sensitive silicon drift detector (SDD) for high-energy X-ray fluorescence
In order for SDD to detect high-energy X-ray fluorescence from a trace of pollutants such as Cd, the thickness of Si substrate for SDD required to be thicker than 1 mm. The Si substrate with resistivity higher than 5 kΩcm is necessary to deplete the whole Si substrate by an appropriate reverse bias voltage, but SDD with the Si substrate with resistivity higher than 5 kΩcm has not been materialized to date.
We have discussed the problem of how to materialize the SDD with the Si substrate with resistivity higher than 5 kΩcm, and have proposed a new structure of SDD using Si substrate with resistivity higher than 5 kΩcm.
2. Research of room-temperature-operating X-ray detector made of semi-insulating semiconductor
Deep levels in semiconductors degrade the performance of X-ray detector. Because the typical method (DLTS: deep level transient spectroscopy) for characterization of deep levels in low-resistivity semiconductors is not suitable for high-resistivity semiconductors and insulators, we have determined the densities and emission rates of deep levels in high-purity semi-insulating semiconductors such as 4H-SiC by discharge current transient spectroscopy (DCTS) that we have proposed. From the temperature dependence of each emission rate, moreover, the activation energy (i.e., energy level of each deep level) has been determined.
3. Study of radiation resistance of semiconductor for X-ray detector
Since these X-ray detectors are expected to be used in radiation environments, we have investigated the radiation resistance of semiconductors such as Si and SiC using Hall-effect measurements. The density of acceptors in p-type Si or p-type SiC is found to be decreased by irradiation of high-energy electrons. On the other hand, Si is found to be radiation-resistant more than SiC.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (42 results)

All 2008 2007 2006 Other

All Journal Article (12 results) (of which Peer Reviewed: 6 results) Presentation (25 results) Remarks (2 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Characterization of deep centers in semi-insulating SiC and HgI_2:Application of discharge current transient spectroscopy2008

    • Author(s)
      H.Matsuura, M.Takahashi, S.Nagata, and K.Taniguchi
    • Journal Title

      Journal of Materials Science:Materials in Electronics (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Mechanisms of Reduction in Hole Concentration in Al-Implanted p-type 6H-SiC by 1 MeV Electron Irradiation2008

    • Author(s)
      H.Matsuura, K.Izawa, N.Minohara, and T.Ohshima
    • Journal Title

      Japanese Journal of Applied Physice (in press)

    • NAID

      40016161753

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Characterization of Intrinsic Defects in High-Purity High-Resistivity p-Type 6H-SiC2008

    • Author(s)
      H.Matsuura, H.Yanase, and M.Takahashi
    • Journal Title

      Japanese Journal of Applied Physice (in press)

    • NAID

      40016294912

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Mechanisms of unexpected reduction in hole concentration in Al-doped 4H-SiC by 200 keV electron irradiation2008

    • Author(s)
      H.Matsuura, N.Minohara, and T.Ohshima
    • Journal Title

      Japanese Journal of Applied Physice (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Characterization of Traps in Semi-Insulating 4H-SiC by Discharge Current Transient Spectroscopy2008

    • Author(s)
      M.Takahashi and H.Matsuura
    • Journal Title

      Materials Science Forum (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Mechanisms of Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV Electrons2007

    • Author(s)
      H.Matsuura, N.Minohara, Y.Inagawa, M.Takahashi, T.Ohshima, and H.Itoh
    • Journal Title

      Materials Science Forum 556-557

      Pages: 379-382

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Mechanisms of Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV Electrons2007

    • Author(s)
      H. Matsuura
    • Journal Title

      Materials Science Forum. 556-557

      Pages: 379-382

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Characterization of deep centers in semi-insulating SiC and HigI_2 : Application of discharge current transientr spectroscopy

    • Author(s)
      H. Matsuura
    • Journal Title

      Journal of Materials Science : Materials in Electronics (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Mechanisms of Reduction in Hole Concentration in Al-Implanted p-type 6H-SiC by 1 MeV Electron irradiation

    • Author(s)
      H. Matsuura
    • Journal Title

      Japanese Journal of Applied Physics (in press)

    • NAID

      40016161753

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Characterization of Intrinsic Defects in High-Purity High-Resistivity p-Type 6H-SiC

    • Author(s)
      H. Matsuura
    • Journal Title

      Japanese Journal of Applied Physics (in press)

    • NAID

      40016294912

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Mechanisms of unexpected reduction in hole concentration in Al-doped 4H-SiC by 200 keV electron irradiation

    • Author(s)
      H. Matsuura
    • Journal Title

      Journal of Applied Physics (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Characterization of Traps in Semi-Insulating 4H-SiC by Discharge Current Transient Spectroscopy

    • Author(s)
      M. Takahashi and H. Matsuura
    • Journal Title

      Materials Science Forum (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 放電電流過渡分光法による高純度半絶縁性4H-SiC中の欠陥評価2007

    • Author(s)
      高橋 美雪、松浦 秀治
    • Organizer
      SiC及び関連ワイドギャップ半導体研究会第16回講演会
    • Place of Presentation
      愛知県女性総合センター
    • Year and Date
      2007-11-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 200keV電子線照射におけるAl-doped 4H-SiCエビ膜の耐放射線性2007

    • Author(s)
      蓑原 伸正、稲川 祐介、高橋 美雪、松浦 秀治、大島 武、伊藤 久義
    • Organizer
      SiC及び関連ワイドギャップ半導体研究会第16回講演会
    • Place of Presentation
      愛知県女性総合センター
    • Year and Date
      2007-11-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Characterization of Traps in Semi-Insulating 4H-SiC by Discharge Current Transient Spectroscopy2007

    • Author(s)
      M.Takahashi, H.Matsuura
    • Organizer
      International Conference on SiC and Related Materials 2007
    • Place of Presentation
      Otsu,Shiga,Japan
    • Year and Date
      2007-10-18
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Possibility of High-Purity Semi-Insulating 4H-SiC Being Used as Portable X-Ray Detector Operating at Room Temperature2007

    • Author(s)
      H.Matsuura and M.Takahashi
    • Organizer
      International Conference on SiC and Related Materials 2007
    • Place of Presentation
      Otsu,Shiga,Japan
    • Year and Date
      2007-10-18
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Characterization of Traps in Semi-Insulating 4H-SiC by Discharge Current Transient Spectroscopy2007

    • Author(s)
      M. Takahashi, H. Matsuura
    • Organizer
      International Conference on SiC and Related Materials 2007
    • Place of Presentation
      Otsu, Shiga, Japan
    • Year and Date
      2007-10-18
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Possibility of High-Purity Semi-Insulating 4H-SiC Being Used as Portable X-Ray Detector Operating at Room Temperature2007

    • Author(s)
      H. Matsuura
    • Organizer
      International Conference on SiC and Related Materials 2007
    • Place of Presentation
      Otsu, Shiga, Japan
    • Year and Date
      2007-10-18
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Hall測定によるワイドギャップ半導体中の不純物の評価2007

    • Author(s)
      松浦 秀治
    • Organizer
      第12回結晶工学セミナー(結晶工学スクール応用編)「電気・光学素子技術の基礎と応用」-ワイドバンドギャップ半導体編-
    • Place of Presentation
      学習院創立百周年記念会館
    • Year and Date
      2007-10-04
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 高純度半絶縁性4H-SiCを用いた室温動作可能なx線検出素子の可能性2007

    • Author(s)
      高橋 美雪、前田 健寿、山本 和代、松浦 秀治
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 200keV電子線照射実験からのAl-doped 4H-SiCエビ膜中の深いアクセプタの起源の考察2007

    • Author(s)
      蓑原 伸正, 稲川 祐介, 高橋 美雪, 松浦 秀治, 大島 武, 伊藤 久義
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 1MeV電子線照射によるAl-doped 6H-SiCの正孔密度とアクセプタ密度の変化2007

    • Author(s)
      井澤 圭亮, 蓑原 伸正, 外館 憲、松浦 秀治, 大島 武, 伊藤 久義
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 200keV電子線照射実験からのAl-doped 4H-SiCエピ膜中の深いアクセプタの起源の考察2007

    • Author(s)
      蓑原 伸正, 稲川 祐介, 高橋 美雪、松浦 秀治, 大島 武, 伊藤 久義
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] Characterization of deep centers in semi-insulating SiC and HgI_2:application of discharge current transient spectroscopy2007

    • Author(s)
      H.Matsuura, M.Takahashi, S.Nagata, and K.Taniguchi
    • Organizer
      14th Semiconducting and Insulating Materials Conference(SIMC XIV 2007)
    • Place of Presentation
      Feyatteville,Arkansas,USA
    • Year and Date
      2007-05-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Characterization of deep centers in semi-insulating SiC and HgI_2 : application of discharge current transient spectroscopy2007

    • Author(s)
      H. Matsuura
    • Organizer
      14th Semiconducting and Insulating Materials Conference
    • Place of Presentation
      Feyatteville, Arkansas, USA
    • Year and Date
      2007-05-19
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Characterization of deep centers in semi-insulating SiC and HgI_2:application of discharge current transient spectroscopy2007

    • Author(s)
      H.Matsuura, M.Takahashi, S.Nagata, and K.Taniguchi
    • Organizer
      14th Semiconducting and Insulating Materials Conference (SIMC XIV 2007)
    • Place of Presentation
      Feyatteville, Arkansas, USA
    • Year and Date
      2007-05-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] 簡易型SDD素子の開発に向けて2007

    • Author(s)
      松浦 秀治
    • Organizer
      大阪電気通信大学エレクトロ基礎研究所ワークショップ
    • Place of Presentation
      大阪電気通信大学
    • Year and Date
      2007-03-23
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] p型4H-SiCの耐放射線性2006

    • Author(s)
      松浦 秀治、蓑原 伸正、高橋 美雪、大島 武、伊藤 久義
    • Organizer
      SiC及び関連ワイドギャップ半導体研究会第15回講演会
    • Place of Presentation
      高崎シティーギャラリー
    • Year and Date
      2006-11-09
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Si Substrate Suitable for Radiation-Resistant Space Solar Cells2006

    • Author(s)
      H.Matsuura, S.Kawasaki, T.Ohshima, and H.Itoh
    • Organizer
      7th International Workshop on Radiation Effects on Semi conductor Devices for Space Application
    • Place of Presentation
      Takasaki City Gallery,Takasaki,Japan
    • Year and Date
      2006-10-17
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV electrons2006

    • Author(s)
      H.Matsuura, N.Minohara, M.Takahashi, T.Ohshima, and H.Itoh
    • Organizer
      7th International Workshop on Radiation Effects on Semi conductor Devices for Space Application
    • Place of Presentation
      Takasaki City Gallery,Takasaki,Japan
    • Year and Date
      2006-10-17
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Si Substrate Suitable for Radiation-Resistant Space Solar Cells2006

    • Author(s)
      H. Matsuura
    • Organizer
      7th International Workshop on Radiation Effects on Semiconductor Devices for Space Application
    • Place of Presentation
      Takasaki City Gallery, Takasaki, Japan
    • Year and Date
      2006-10-17
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV electrons2006

    • Author(s)
      H. Matsuura
    • Organizer
      7th International Workshop on Radiation Effects on Semiconductor Devices for Space Application
    • Place of Presentation
      Takasaki City Gallery, Takasaki, Japan
    • Year and Date
      2006-10-17
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV Electrons2006

    • Author(s)
      N.Minohara, Y.Inagawa, M.Takahashi, H.Matsuura, T.Ohshima, and H.Itoh
    • Organizer
      2nd International Student Conference at Ibaraki University
    • Place of Presentation
      Ibaraki University,Ibaraki,Japan
    • Year and Date
      2006-10-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV Electrons2006

    • Author(s)
      N. Minohara, H. Matsuura
    • Organizer
      2nd International Student Conference at Ibaraki University
    • Place of Presentation
      Ibaraki University, Ibaraki
    • Year and Date
      2006-10-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Mechanisms of Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV Electrons2006

    • Author(s)
      H.Matsuura, N.Minohara, Y.Inagawa, M.Takahashi, T.Ohshima, and H.Itoh
    • Organizer
      6th European Conference on Silicon Carbide and Related Materials
    • Place of Presentation
      Newcastle upon Tyne,UK
    • Year and Date
      2006-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Mechanisms of Decrease in Hole Concentration in Al-doped 4H-SiC by Irradiation of 200 keV Electrons2006

    • Author(s)
      H. Matsuura
    • Organizer
      6th European Conference on Silicon Carbide and Related Materials
    • Place of Presentation
      Newcastle upon Tyne, UK
    • Year and Date
      2006-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Al-doped 4H-SiCエビ膜中の正孔密度の200keV電子線照射量依存性2006

    • Author(s)
      蓑原 伸正, 稲川 祐介, 高橋 美雪, 松浦 秀治, 大島 武, 伊藤 久義
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学草津キャンパス
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www.osakac.ac.jp/labs/matsuura/

    • Related Report
      2007 Final Research Report Summary
  • [Remarks]

    • URL

      http://www.osakac.ac.jp/labs/matsuura/

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] 放射線検出器2007

    • Inventor(s)
      松浦 秀治, 谷口 一雄, 宇高 忠
    • Industrial Property Rights Holder
      松浦 秀治, 谷口 一雄, 宇高 忠
    • Industrial Property Number
      2007-098037
    • Filing Date
      2007-04-04
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 放射線検出器2006

    • Inventor(s)
      松浦 秀治, 谷口 一雄, 宇高 忠
    • Industrial Property Rights Holder
      松浦 秀治, 谷口 一雄, 宇高 忠
    • Industrial Property Number
      2006-336727
    • Filing Date
      2006-12-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 放射線検出器2006

    • Inventor(s)
      松浦秀治, 谷ロ一雄, 宇高 忠
    • Industrial Property Rights Holder
      松浦秀治, 谷ロ一雄, 宇高 忠
    • Industrial Property Number
      2006-336727
    • Filing Date
      2006-12-14
    • Related Report
      2006 Annual Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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