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Fabrication of terahertz detectors based on InAs/AISb/AlGaSb/GaSb heterostructures

Research Project

Project/Area Number 18560421
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionOsaka Institute of Technology

Principal Investigator

INOUE Masataka  Osaka Institute of Technology, Faculty of Engineering, Professor (20029325)

Co-Investigator(Kenkyū-buntansha) SASA Shigehiko  Osaka Institute of Technology, Faculty of Engineering, Professor (50278561)
MAEMOTO Toshihiko  Osaka Institute of Technology, Faculty of Engineering, Associate Professor (80280072)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,250,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥150,000)
Fiscal Year 2007: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2006: ¥2,600,000 (Direct Cost: ¥2,600,000)
Keywordsterahertz / sub-terahertz / diode / heterostructure / InAs / AlGaSb / negative resistance / curvature / ballistic / AlSb / 量子井戸構造 / lnAs / AlGaSb / 二乗検波
Research Abstract

Fabrication and characterization of Sb-based diodes for the detecting terahertz waves are described. InAs/AISb/AIGaSb/GaSb heterostructures were grown on a semi-insulating GaAs substrate by molecular beam epitaxy. The purpose is to properly design the diode structure in order to improve the sensitivity, the curvature γ in the I-V characteristics at low voltages. We changed the Al composition, x of the Al_xGa_<1-x>Sb and thickness, y of the AlSb barrier. The maximum curvature y of 16.9^<-1> was obtained for the x=0.25 and the y=1.5nm.
Electron transport properties in InAs/AlGaSb three-terminal structures are also reported. This structure exhibited nonlinear electron transport properties from 4.2K to 300K because of ballistic properties of electrons. When dc input voltages are applied to the left and right branches in the push-pull fashion (V_L and V_R), the voltage measured at the central branch V_C showed obvious rectification properties with respect to V_L from 4.2K to 300K. In addition, current rectification effects in the current flow through the central branch were observed with the central branch being grounded and input voltages in push-pull fashion. These clear nonlinear effects indicate that the InAs/AlGaSb three-terminal device is one of the attractive future applications utilizing ballistic electron transport properties.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (37 results)

All 2008 2007 2006 Other

All Journal Article (23 results) (of which Peer Reviewed: 7 results) Presentation (11 results) Book (2 results) Remarks (1 results)

  • [Journal Article] Nonlinear Electron Transport Properties in InAs/AIGaSb Three-Terminal Ballistic Junctions2008

    • Author(s)
      M.Koyama, T.Inoue, N.Amano, T.Maemoto, S.Sasa and M.Inoue
    • Journal Title

      J.of Physics:Conf.Ser. 109

      Pages: 12023-12026

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Nonlinear Electron Transport Properties and Rectification Effects in InAs/AIGaSb Ballistic Devices2008

    • Author(s)
      M.Koyama, T.Inoue, N.Amano, T.Maemoto, S.Sasa and M.Inoue
    • Journal Title

      Phys.Stat.Sol.(c) 5

      Pages: 107-110

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Nonlinear electron transport properties in InAs/AIGaSb three-terminal ballistic junctions2008

    • Author(s)
      M. Koyama, T. Inoue, N. Amano, K. Fujiwara, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      Technical report of IEICE. Vol.107, No.473-474

      Pages: 29-32

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nonlinear Electron Transport Properties and Rectification Effects in lnAsIAlGaSb Ballistic Devices2008

    • Author(s)
      M. Koyama, T. Inoue, N. Amano, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      Phys. Stat. Sol.(c) 5

      Pages: 107-110

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nonlinear Electron Transport Properties in lnAs/AlGaSb Three-Terminal Ballistic Junctions2008

    • Author(s)
      M. Koyama, T. Inoue, N. Amano, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      J. of Physics: Conf. Ser. 109

      Pages: 12023-12026

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nonlinear electron transport in InAs/AlGaSb three-terminal ballistic junctions2008

    • Author(s)
      M Koyama, T Inoue, N Amano, T Maemoto, S Sasa and M.Inoue
    • Journal Title

      Journal of Phys 109

      Pages: 120231-4

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and characterization of Sb-based diode structures for detecting subterahertzwaves2007

    • Author(s)
      H.Takahashi, T.Inoue, T.Maemoto, S.Sasa and M.Inoue
    • Journal Title

      Proc. of the 2007 International Meeting for Future of Electron Devices 5

      Pages: 81-82

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Ballistic transport and rectification effects in lnAs/AlGaSb mesoscopic stricture2007

    • Author(s)
      M. Koyama, H. Takahashi, T. Inoue, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      Technical report of IEICE. Vol.106, No.520-521

      Pages: 67-71

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication and characterization of Sb-based diode structures for detecting subterahertz waves2007

    • Author(s)
      H. Takahashi, T. lnoue, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      Memoirs of the Osaka Inst. of Tech, Ser. A 51

      Pages: 15-19

    • NAID

      110006162463

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ballistic rectification effects in lnAs/AlGaSb nanostructures2007

    • Author(s)
      M. Koyama, H. Takahashi, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      AlP conference proceeding 893

      Pages: 577-578

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Field characteristics of electron mobility and velocity in InAs/AIGaSb HFETs with high-k gate insulators2007

    • Author(s)
      T. Maemoto, M. Koyama, H. Takahashi, S. Sasa, M. Inoue
    • Journal Title

      AlP conference proceeding 893

      Pages: 1391-1392

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Investigation of Sb-Based Diode Structures for Detecting Subterahertz Waves2007

    • Author(s)
      T. lnoue, N. Amano, M. Koyama, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      Memoirs of the Osaka Inst. of Tech, Ser, A 52

      Pages: 25-30

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ballistic rectification effects in InAs/AIGaSb nanostructures2007

    • Author(s)
      M.Koyama, H.Takahashi, T.Maemoto, S.Sasa, and M.Inoue
    • Journal Title

      American Inst.of Phys.Conf.Proc 893

      Pages: 577-578

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Field characteristics of electron mobility and veloclty in InAs/AlGaSb HFETs with high-kgate insulators2007

    • Author(s)
      T.Maemoto, M.Koyama, H.Takahashi, S.Sasa, and M.Inoue
    • Journal Title

      American Inst.of Phys.Conf.Proc 893

      Pages: 1391-1392

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improved Stability of High-Performance ZnO/ZnMgO Hetero.MISFETs2007

    • Author(s)
      S.Sasa, T.Hayafuji, M.Kawasaki, K.Koike, M.Yano, M.Inoue
    • Journal Title

      Electron Device Letters, IEEE 28

      Pages: 543-545

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nonlinear electron transport properties in InAs/AIGaSb ballistic rectifiers2006

    • Author(s)
      M. Koyama, H. Takahashi, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      Proc. of Int. Mtg. on Future Electron Devices Kansai 2006

      Pages: 85-86

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication and characterization of Sb-based diode structures for detecting subterahertz waves2006

    • Author(s)
      H. Takahashi, T. lnoue, T. Maemoto, S. Sasa, M. Inoue
    • Journal Title

      Technical report of IEICE. Vol.106, No.403

      Pages: 19-22

    • NAID

      110006162463

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication and Characterization of InAs Mesoscopic Devices2006

    • Author(s)
      M.Koyama, M.Furukawa, H.Ishii, M.Nakai, T.Maemoto, S.Sasa, M.Inoue
    • Journal Title

      Springer Proceedings in Physics Vol.110

      Pages: 7-10

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Electron transport in InAs/AlGaSb ballistic rectifiers2006

    • Author(s)
      T.Maemoto, M.Koyama, M.Furukawa, H.Takahashi, S.Sasa, M.Inoue
    • Journal Title

      Journal of Physics Conference Series Vol.38

      Pages: 112-115

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nonlinear electron Transport properties in InAs/AlGaSb Ballistic Rectifiers2006

    • Author(s)
      M.Koyama, H.Takahashi, T.Maemoto, S.Sasa, M.Inoue
    • Journal Title

      Proc. of the 2006 International Meeting for Future of Electron Devices,Kansai

      Pages: 85-86

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Electron transport in InAs field effect and mesoscopic devices2006

    • Author(s)
      M.Koyama, M.Furukawa, T.Maemoto, S.Sasa, M.Inoue
    • Journal Title

      Proc.of 12th Int.Conf.on Narrow Gap Semicond.,Inst.Phys.Conf.Ser. Vol.187

      Pages: 445-449

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fabrication and characterization of Sb-based diode structures for detecting subterahertz waves2006

    • Author(s)
      H.Takahashi, T.Inoue, T.Maemoto, S.Sasa, M.Inoue
    • Journal Title

      Memories of the Osaka Institute of Technology,Series A Vol.51

      Pages: 15-19

    • NAID

      110006162463

    • Related Report
      2006 Annual Research Report
  • [Journal Article] High-Performance ZnO/ZnMgO Field-Effect Transistors using a Hetero-Metal-Insulator-Semiconductor Structure2006

    • Author(s)
      S.Sasa, M.Ozaki, K.Koike, M.Yano, M.Inoue
    • Journal Title

      Appl.Phys.Lett. vol.89

      Pages: 53502-53504

    • Related Report
      2006 Annual Research Report
  • [Presentation] Fabrication and characterization of InAs/AlGaSb HEMTs with high-k gate insulators2008

    • Author(s)
      T. Maemoto, K. Fujiwara, T. Inoue, N. Amano, M. Koyama, S. Sasa, M. Inoue
    • Organizer
      APS March Meeting 2008
    • Place of Presentation
      New Orleans, USA
    • Year and Date
      2008-03-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nonlinear Electron Transport Properties in InAs/AlGaSb Three-Terminal Ballistic Junctions2007

    • Author(s)
      M. Koyama, T. lnoue, N. Amano, T. Maemoto, S. Sasa, M. Inoue
    • Organizer
      International Symposium on Advanced Nanodevices and Nanotechnology
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2007-12-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nonlinear Electron Transport Properties and Rectification Effects in InAs/AlGaSb Ballistic Devices2007

    • Author(s)
      M. Koyama, T. lnoue, N. Amano, T. Maemoto, S. Sasa, M. Inoue
    • Organizer
      15th Int. Conf. on Nonequilibrium Carrier Dynamics in Semiconductors
    • Place of Presentation
      Tokyo Univ., Japan
    • Year and Date
      2007-07-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication and Characterization of Sb-Based Diode structures for Detecting Subterahertz Waves2007

    • Author(s)
      T.Inoue, H.Takahashi, T.Maemoto, S.Sasa and M.Inoue
    • Organizer
      2007 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Osaka,Japan
    • Year and Date
      2007-04-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Fabrication and characterization of Sb-based diode structures for detecting subterahertz waves2007

    • Author(s)
      H. Takahashi, T. Inoue, T. Maemoto, S. Sasa, M. Inoue
    • Organizer
      Int. Mtg. on Future Electron Devices Kansai 2007
    • Place of Presentation
      Osaka Univ., Japan
    • Year and Date
      2007-04-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication and characterization of Sb-based diode structures for detecting subterahertz waves(2)2007

    • Author(s)
      T. Inoue, H. Takahashi, T. Maemoto, S. Sasa, M. lnoue
    • Organizer
      JSAP Annual meeting
    • Place of Presentation
      Kanagawa, Japan
    • Year and Date
      2007-03-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ballistic rectification in four-terminal InAs/AlGaSb nanostructures2007

    • Author(s)
      M. Koyama, H. Takahashi, T. Inoue, T. Maemoto, S. Sasa, M. Inoue
    • Organizer
      APS March Meeting 2007
    • Place of Presentation
      Denver, USA
    • Year and Date
      2007-03-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabricatior and characterization of Sb-based diode structures for detectinc, subterahertz waves2006

    • Author(s)
      H. Takahashi, T. Inoue, T. Maemoto, S. Sasa, M. Inoue
    • Organizer
      IEICE Technical meetings
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2006-12-08
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ballistic Rectification effects in InAs/AlGaSb Nano-structures2006

    • Author(s)
      M. Koyama, H. Takahashi, T. Maemoto, S. Sasa, M. Inoue
    • Organizer
      Int. Conf. on Phys. of Semicond.
    • Place of Presentation
      Wien, Austria
    • Year and Date
      2006-07-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Field characteristics of electron mobility and velocity in InAs/AlGaSb HFETs with high-k gate insulators2006

    • Author(s)
      T. Maemoto, M. Koyama, H. Takahashi, S. Sasa, M. Inoue
    • Organizer
      Int. Conf. on Phys. of Semicond.
    • Place of Presentation
      Wien, Austria
    • Year and Date
      2006-07-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nonlinear electron transport properties in InAs/AlGaSb ballistic rectifiers2006

    • Author(s)
      M. Koyama, H. Takahashi, T. Maemoto, S. Sasa, M. Inoue
    • Organizer
      Int. Mtg. on Future Electron Devices Kansai 2006
    • Place of Presentation
      Kyoto Univ., Japan
    • Year and Date
      2006-04-21
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 高周波半導体材料・デバイスの新展開(第11編, 第1章 2.InAs系ヘテロ接合デバイスとMBE成長技術)2006

    • Author(s)
      佐々 誠彦, 井上 正崇
    • Total Pages
      12
    • Publisher
      シーエムシー出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 高周波半導体材料・デバイスの新展開2006

    • Author(s)
      佐々誠彦, 井上正崇
    • Total Pages
      12
    • Publisher
      シーエムシー出版
    • Related Report
      2006 Annual Research Report
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www.oit.ac.jp/www-ee/server/semicon/index.shtml

    • Related Report
      2007 Final Research Report Summary

URL: 

Published: 2006-04-01   Modified: 2016-04-21  

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