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Formation of Nano-Porous Structures on Oxide Semiconductor Surface by Photoetching Technique

Research Project

Project/Area Number 18560653
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionGifu University

Principal Investigator

SUGIURA Takashi  Gifu University, Graduate School of Engineering, Associate Professor (40171144)

Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,540,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥240,000)
Fiscal Year 2007: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2006: ¥2,500,000 (Direct Cost: ¥2,500,000)
Keywordsfunctional ceramics / electrochemistry / microfabrication / Photoetching / photocatalvst / titanium oxide / photoinduced hydrophilic conversion
Research Abstract

Photoetching is an unique technique for tailoring the semiconductor surface. The effect of photoetching (photoelectrochemical etching) on photoinduced hydrophilic conversion of titanium dioxide (TiO_2) film electrodes prepared by thermal oxidation of Ti plate has been studied. We have found that photoetching of TiO_2 film results in the formation of nano-porous structure depending upon preparation condition (oxidation temperature), photoetching condition (electrode potential) and crystallographic orientation of the TiO_2 grain. Photoetching of the film oxidized at temperature higher than 900℃ makes nano-porous structure consisting of (100) plane of rutile structure of TiO_2 and improves the photoinduced hydrophilic conversion property. Photoetching under anodic polarization increases the rate of photoinduced hydrophilic conversion, while the film photoetched under weak anodic polarization does not show the photoinduced hydrophilic conversion property. We have also examined the photoelectrochemical properties of photoetched Cr, Sb doped visible light sensitive TiO_2 electrode. It is important to increase visible-light sensitivity of TiO_2 from a viewpoint of solar energy utilization. After UV light photoetching, roughness of the surface increases and convexo-concave structures with several tens of nanometer size were observed. Whereas after photoetching of VS light illumination, the steps are selectively undissolved and convexo-concave structures with about one hundred nanometer size were observed on its terrace surface. After photetching with UV and VS light, the photoresponse for VS light region increases up to 4 % of IPCE (incident photon to current conversion efficiency). On the contrary the photoresponses for UV region decrease in both cases.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (18 results)

All 2008 2007 2006 Other

All Journal Article (10 results) (of which Peer Reviewed: 3 results) Presentation (8 results)

  • [Journal Article] Effect of Photoetching on Photoinduced Hydrophilicity of Titanium Dioxide Film2008

    • Author(s)
      T. Sugiura
    • Journal Title

      Electrochemistry 76(2)

      Pages: 154-157

    • NAID

      130002150797

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Effect of Photoetching on Photoinduced Hydrophilicity of Titanium Dioxide Film2008

    • Author(s)
      T. Sugiura, M. Katou, H. Minora
    • Journal Title

      Electrochemistry 76(2)

      Pages: 154-157

    • NAID

      130002150797

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Wall thickness and charge transport properties of nano-honeycomb TiO_2 structures prepared by photoetching2007

    • Author(s)
      T. Oekermann
    • Journal Title

      Electrochimica Acta 52

      Pages: 4325-4333

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Wall thickness and charge transport properties of nano-honeycomb TiO_2 structures prepared by photoetching2007

    • Author(s)
      T. Oekermann, T. Yoshida, J. Nakazawa, S. Yasuno, T. Sugiura, H. Minoura
    • Journal Title

      Electrochimica Acta 52

      Pages: 4325-4333

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Wall thickness and charge transport properties of nano-honeycomb TiO_2 structures prepared by photoetching2007

    • Author(s)
      T.Oekermann
    • Journal Title

      Electrochimica Acta 52

      Pages: 4325-4333

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 光電気化学エッチングによる酸化チタン光電極の表面処理2006

    • Author(s)
      杉浦 隆
    • Journal Title

      マテリアルインテグレーション 19

      Pages: 15-20

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary 2006 Annual Research Report
  • [Journal Article] 光エッチングによる酸化チタンのナノポーラス加工と高活性化2006

    • Author(s)
      杉浦 隆
    • Journal Title

      表面技術 57

      Pages: 176-180

    • NAID

      10017538297

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary 2006 Annual Research Report
  • [Journal Article] Surface Treatment of Titanium Dioxide Photoelectrode by Photoelectrochemical Etching2006

    • Author(s)
      T. Sugiura, H. Minoura
    • Journal Title

      Materials Integration 19(2)

      Pages: 15-20

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Evolution of Nano-Porous Structure on Titanium Dioxide Photoelectrode and Its Activation for Photoelectrochemical Reaction by Photoetching2006

    • Author(s)
      T. Sugiura, H. Minoura
    • Journal Title

      Hyomengijyutsu 57(3)

      Pages: 176-180

    • NAID

      10017538297

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Crystal Growth of GaN by the Reaction of Ga_2O_3 with Li_3N in Liquid Ga

    • Author(s)
      T. Zhang
    • Journal Title

      Trans. Mater. Res. Soc. Jpn. (印刷中)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] 酸化チタン/シリコン複合電極を用いた二段階励起による水の光分解2008

    • Author(s)
      杉浦 隆
    • Organizer
      電気化学第57回大会
    • Place of Presentation
      山梨大学工学部
    • Year and Date
      2008-03-31
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photodecomposition of Water With TiO_2/Silicon Tandem Electrodes2008

    • Author(s)
      T. Sugiura
    • Organizer
      Spring Meeting of Electrochemical Society Japan
    • Place of Presentation
      Yamanashi University, JAPAN
    • Year and Date
      2008-03-31
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Solar Water Splitting With a Silicon/Metal Oxide Tandem Electrodes2007

    • Author(s)
      T. Sugiura
    • Organizer
      INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND APPLICATIONS(ICAMA-2007)
    • Place of Presentation
      Shivaji University, Kolhapur, INDIA
    • Year and Date
      2007-11-17
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Solar Water Splitting With a Silicon/Metal Oxide Tandem Electrodes2007

    • Author(s)
      T. Sugiura
    • Organizer
      INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND APPLICATIONS (ICAMA-2007)
    • Place of Presentation
      Shivaji University Kolhapur INDIA
    • Year and Date
      2007-11-17
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Solar Water Splitting With WO_3/Si Tandem Electrodes2007

    • Author(s)
      T. Sugiura
    • Organizer
      Spring Meeting of Electrochemical Society Japan
    • Place of Presentation
      Tokyo University of Science, JAPAN
    • Year and Date
      2007-03-31
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] WO_3/Si複合電極を用いた二段階励起による水の光分解2007

    • Author(s)
      松浦 隆
    • Organizer
      電気化学会第74回大会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2007-03-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Si/TiO_2複合電極の光電気化学特性(3I28)2006

    • Author(s)
      松浦 隆
    • Organizer
      電気化学会第73回大会
    • Place of Presentation
      首都大学東京
    • Year and Date
      2006-04-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photoelectrochemical Characterization of Si/TiO_2 Tandem Electrodes2006

    • Author(s)
      T. Sugiura
    • Organizer
      Spring Meeting of Electrochemical Society Japan
    • Place of Presentation
      Tokyo Metropolitan University, JAPAN
    • Year and Date
      2006-04-01
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2006-04-01   Modified: 2016-04-21  

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