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Fabrication of intermetallic nanodots using an electron beam induced deposition technique

Research Project

Project/Area Number 18560701
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionSaitama Institute of Technology

Principal Investigator

SHIMOJO Masayuki  Saitama Institute of Technology, 先端科学研究所, 准教授 (00242313)

Co-Investigator(Kenkyū-buntansha) 竹口 雅樹  物質材料研究機構, ナノ計測センター, 主幹研究員 (30354327)
Co-Investigator(Renkei-kenkyūsha) TAKEGUCHI Masaki  物質材料研究機構, ナノ計測センター, 主幹研究員 (30354327)
Project Period (FY) 2006 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥4,070,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥570,000)
Fiscal Year 2008: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2007: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2006: ¥1,600,000 (Direct Cost: ¥1,600,000)
Keywords金属材料 / ナノ材料 / 電子顕微鏡 / 金属間化合物 / 磁性
Research Abstract

目的の場所ヘサイズや形状を制御して、ナノ構造を作製できる方法として電子線誘起蒸着法(EBID)がある。本研究では、FeとPtを含む原料を用いてEBIDを行い、FePt金属間化合物ナノ構造を作製することに成功した。また、このとき作製されたナノ構造物の純度が問題だったため、原料に水蒸気を混合する方法や無機系原料を用いたEBID法を開発し、比較的純度の高いナノ構造を作製できた。

Report

(4 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (56 results)

All 2008 2007 2006

All Journal Article (26 results) (of which Peer Reviewed: 6 results) Presentation (26 results) Book (2 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Post-deposition proces ses for nanostructures formed by electron beam induced deposition with Pt(PFs)4 precursor2008

    • Author(s)
      M. Takeguchi, M. Shimoio and K. Furuya
    • Journal Title

      Appl. Phys. A 93

      Pages: 439-442

    • Related Report
      2008 Final Research Report
  • [Journal Article] Formation of nanoscale platinum and iron oxide structures using electron beam induced deposition techniques2008

    • Author(s)
      M. Shimoio, M. Takeguchi, K. Mitsuishi, M. Tanaka and K. Furuya
    • Journal Title

      J. Phys. Conf. Ser. 100

      Pages: 52016-52016

    • Related Report
      2008 Final Research Report
  • [Journal Article] Effect of dynamic precursor gas pressure on growth behavior of amorphous Si-C-O nanorods by electron beam-induced deposition2008

    • Author(s)
      W. Zhang, M. Shimoio and K. Furuya
    • Journal Title

      J. Mater. Sci. 43, 6

      Pages: 2069-2071

    • Related Report
      2008 Final Research Report
  • [Journal Article] 電子線誘起蒸着法研究2008

    • Author(s)
      下条雅幸、竹口雅樹、三石和貴、田中美代子、古屋一夫
    • Journal Title

      機械の研究 60, 9

      Pages: 937-942

    • NAID

      40016212044

    • Related Report
      2008 Final Research Report
  • [Journal Article] Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor2008

    • Author(s)
      M. Takeguchi, M. Shimojo, K. Furuya
    • Journal Title

      Appl. Phys. A 93

      Pages: 439-442

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of nanoscale platinum and iron oxide structures using electron beam induced deposition techniques2008

    • Author(s)
      M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya
    • Journal Title

      J. Phys. Conf. Ser. 100

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of dynamic precursor gas pressure on growth behavior of amorphous Si-C-0 nanorods by electron beam induced deposition2008

    • Author(s)
      W. Zhang, M. Shimojo, K. Furuya
    • Journal Title

      J. Mater. Sci. 43

      Pages: 2069-2071

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 電子線誘起蒸着法研究2008

    • Author(s)
      下条雅幸, 竹口雅樹, 三石和貴, 田中美代子, 古屋一夫
    • Journal Title

      機械の研究 60

      Pages: 937-942

    • NAID

      40016212044

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Mechanisms of crystalline iron oxide formation in electron beam induced deposition2007

    • Author(s)
      M. Shimoio, M. Takeguchi, K. Mitsuishi, M. Tanaka and K. Furuya
    • Journal Title

      Jpn. J. Appl. Phys. 46, 9B

      Pages: 6247-6249

    • Related Report
      2008 Final Research Report
  • [Journal Article] Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor2007

    • Author(s)
      M. Takeguchi, M. Shimoio and K. Furuya
    • Journal Title

      Jpn. J. Appl. Phys. 46, 9B

      Pages: 6183-6186

    • Related Report
      2008 Final Research Report
  • [Journal Article] Electron beam induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates2007

    • Author(s)
      M. Tanaka, K. Mitsuishi, M. Takeguchi. M. Shimoio. K. Furuya and N. Koguchi
    • Journal Title

      Jpn. J. Appl. Phys. 46, 9B

      Pages: 6243-6246

    • Related Report
      2008 Final Research Report
  • [Journal Article] Fabrication of iron oxide nanostructures by electron beam induced deposition2007

    • Author(s)
      M. Shimoio. M. Takeguchi. K. Mitsuishi, M. Tanaka and K. Furuya
    • Journal Title

      Mater. Sci. Forum 561-565

      Pages: 1101-1104

    • Related Report
      2008 Final Research Report
  • [Journal Article] Field electron emission from single carbon nanorod fabricated by electron beam induced deposition2007

    • Author(s)
      R. Che, M. Takeguchi. M. Shimoio and K. Furuya
    • Journal Title

      J. Phys. Conf. Ser. 61

      Pages: 200-204

    • Related Report
      2008 Final Research Report
  • [Journal Article] Mechanisms of crystalline iron oxide formation in electron beaminduced deposition2007

    • Author(s)
      M. Shimoio, M. Takeguchi, K. Mitsuishi, M. Tanaka, and K. Furuya
    • Journal Title

      Jpn. J. Appl. Phys. 46

      Pages: 6247-6249

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor2007

    • Author(s)
      M. Takeguchi, M. Shimojo, and K. Furuya
    • Journal Title

      Jpn.J.Appl.Phys. 46

      Pages: 6183-6186

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron beam induced deposition of Fe nanoparticles and thin films on SrTiO_3 substrates2007

    • Author(s)
      M. Tanaka, K. Mitsuishi, M. Takeguchi, M. Shimojo, K. Furuya, and N. Koguchi
    • Journal Title

      Jpn.J.Appl.Phys. 46

      Pages: 6243-6246

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Fe-Pt intermetallic phase in nanostructures by electron beam induced deposition and postdeposition alloying processes2006

    • Author(s)
      W. Zhang, R. Che, M. Takeguchi. M, Shimoio and K. Furuya
    • Journal Title

      Surf. Interface Anal. 38

      Pages: 1527-1529

    • Related Report
      2008 Final Research Report
  • [Journal Article] Effects of heat treatment on electric properties of nanorods formed by electron beam-induced deposition2006

    • Author(s)
      M. Shimoio. M. Takeguchi. R. C. Che, W. Zhang, M. Tanaka, K. Mitsuishi and K. Furuya
    • Journal Title

      Jpn. J. Appl. Phys. 45, 6B

      Pages: 5509-5512

    • NAID

      10017998874

    • Related Report
      2008 Final Research Report
  • [Journal Article] Formation of crystalline iron oxide nanostructures by electron beam induced deposition at room temperature2006

    • Author(s)
      M. Shimoio. M. Takeguchi and K. Furuya
    • Journal Title

      Nanotechnology 17

      Pages: 3637-3640

    • Related Report
      2008 Final Research Report
  • [Journal Article] Fabrication ofnano-magnet on a piezo-driven tip in a TEM sample holder2006

    • Author(s)
      M. Takeguchi. M. Shimoio. R. Che and K. Furuya
    • Journal Title

      J. Mater. Sci. 41

      Pages: 2627-2630

    • Related Report
      2008 Final Research Report
  • [Journal Article] 電子線誘起蒸着(EBID)による磁性ナノ構造創製2006

    • Author(s)
      竹口雅樹、下条雅幸、古屋一夫
    • Journal Title

      顕微鏡 41, 2

      Pages: 127-130

    • NAID

      10018183243

    • Related Report
      2008 Final Research Report
  • [Journal Article] Formation of Fe-Pt intermetallic phase in nanostructures by electron beam induced deposition and postdeposition alloying processes2006

    • Author(s)
      W.Zhang, R.Che, M.Takeguchi, M.Shimojo, K.Furuya
    • Journal Title

      Surface and Interface Analysis 38

      Pages: 1527-1529

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 電子線誘起蒸着(EBID)による磁性ナノ構造創製2006

    • Author(s)
      竹口雅樹, 下条雅幸, 古屋一夫
    • Journal Title

      顕微鏡 41・2

      Pages: 127-130

    • NAID

      10018183243

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effects of heat treatment on electric properties of nanorods formed by electron beam induced deposition2006

    • Author(s)
      M.Shimoji, M.Takeguchi, 他
    • Journal Title

      Japanese Journal of Applied Physics 45・6B

      Pages: 5509-5512

    • NAID

      10017998874

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Formation crystalline iron oxide nanostructures by electron beam induced deposition at romm temperature2006

    • Author(s)
      M.Shimoji, M.Takeguchi, K.Furuya
    • Journal Title

      Nanotechnology 17

      Pages: 3637-3640

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Favrication of a nano-magnet on a piezo-driven tip in a TEM sample holder2006

    • Author(s)
      M.Takeguchi, M.Shimoji, R.Che, K.Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 2627-2630

    • Related Report
      2006 Annual Research Report
  • [Presentation] Electrical characterization of amorphous MoOx nanowires grown by electron beam induced deposition2008

    • Author(s)
      牧瀬圭正, 三石和貴, 下条雅幸, 竹口雅樹, 古屋一夫, 篠崎文重
    • Organizer
      イノベーションつくば2008
    • Place of Presentation
      筑波
    • Year and Date
      2008-12-02
    • Related Report
      2008 Annual Research Report
  • [Presentation] In-situ electron beam induced deposition for the fabrication of noble nanostructures2008

    • Author(s)
      K. Furuya, M. Shimoio, M. Takeguchi, K. Mitsuishi, M. Song
    • Organizer
      Micro Science 2008
    • Place of Presentation
      London, UK
    • Related Report
      2008 Final Research Report
  • [Presentation] Characterization of nanowires produced by electron beam induced deposition2008

    • Author(s)
      M. Shimoio, M. Song, H. Matsumoto, K. Makise, M. Takeguchi, K. Mitsuishi, M. Tanaka and K. Furuya
    • Organizer
      9th Asia-Pacific Microscopy Conference (APMC9)
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2008 Final Research Report
  • [Presentation] Electron beam nanofabrication and characterization of iron compounds2008

    • Author(s)
      K. Furuya, M. Shimoio, M. Takeguchi, M. Song, K. Mitsuishi and M. Tanaka
    • Organizer
      14th European Microscopy Congress (EMC 2008)
    • Place of Presentation
      Aachen, Germany
    • Related Report
      2008 Final Research Report
  • [Presentation] Nanofabrication and characterization of iron compounds with focused electron beam2008

    • Author(s)
      K. Furuya, M. Shimoio, M. Takeguchi, M. Song, K. Mitsuishi and M. Tanaka
    • Organizer
      1st International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC1)
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication of iron oxide nanostructures by electron beam-induced deposition2008

    • Author(s)
      M. Shimoio, M. Takeguchi, K. Mitsuishi, M. Tanaka and K. Furuya
    • Organizer
      The sixth pacific rim international conference on advanced materials and processing (PRICM-6)
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2008 Final Research Report
  • [Presentation] Characterization of nanowires produced by electron beam induced deposition2008

    • Author(s)
      M. Shimojo, M. Song, H. Matsumoto, K. Makise, M. Takeguchi, K. Mitsuishi, 他
    • Organizer
      9th Asia-Pacific Microscopy Conference (APMC9)
    • Place of Presentation
      韓国
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of platinum and iron oxide nanostructures using electron beam induced techniques2008

    • Author(s)
      K. Furuya, M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, M. Song
    • Organizer
      9th Asia-Pacific Microscopy Conference (APMC9)
    • Place of Presentation
      韓国
    • Related Report
      2008 Annual Research Report
  • [Presentation] In-situ electron beam induced deposition for the fabrication of noble nanostructures2008

    • Author(s)
      K. Furuya, M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Song
    • Organizer
      Micro Science 2008
    • Place of Presentation
      英国
    • Related Report
      2008 Annual Research Report
  • [Presentation] Electron beam nanofabrication and characterization of iron compounds2008

    • Author(s)
      K. Furuya, M. Shimojo, M. Takeguchi, M. Song, K. Mitsuishi, M. Tanaka
    • Organizer
      14th European Microscopy Congress (EMC 2008)
    • Place of Presentation
      ドイツ
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nanofabrication and characterization of iron compounds with focused electron beam2008

    • Author(s)
      K. Furuya, M. Shimojo, M. Takeguchi, M. Song, K. Mitsuishi, M. Tanaka
    • Organizer
      1st Internation Symposium on Advanced Micrscopy and Theoretical Calculations (AMTC1)
    • Place of Presentation
      名古屋
    • Related Report
      2008 Annual Research Report
  • [Presentation] 無機化合物を原料とした電子線誘起蒸着によるPtナノ構造物作製2008

    • Author(s)
      下条雅幸, 竹口雅樹, 田中美代子, 三石和貴, 宋明暉, 古屋一夫
    • Organizer
      日本金属学会2008年秋期大会
    • Place of Presentation
      熊本
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超高圧電顕によるナノ粒子分散材料の3次元観察2008

    • Author(s)
      下条雅幸, 長谷川明, 松本創, 古屋一夫
    • Organizer
      日本顕微鏡学会第64回学術講演会
    • Place of Presentation
      京都
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of iron oxide nanostructures by electron beam-induceddeposition2007

    • Author(s)
      M. Shimoio, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya
    • Organizer
      The sixth pacific rim international conferenceon advanced materials and processing
    • Place of Presentation
      韓国
    • Year and Date
      2007-11-08
    • Related Report
      2007 Annual Research Report
  • [Presentation] Formation of nanoscale iron and iron oxide structures using electron beam induced deposition techniques2007

    • Author(s)
      M. Shimoio, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya
    • Organizer
      International Conference on Nano Science and Technology (ICN+T 2007)
    • Place of Presentation
      Stockholm, Sweden
    • Related Report
      2008 Final Research Report
  • [Presentation] Effects of water addition to iron carbonyl on the formation of iron oxide nanostructures in electron beam-induced deposition2006

    • Author(s)
      M. Shimoio, R. C. Che, M. Takeguchi, M. Tanaka, K. Mitsuishi and K. Furuya
    • Organizer
      19th International Microprocesses and Nanotechnology Conference (MNC2006), Digest of Papers, p. 184-185.
    • Place of Presentation
      Kamakura, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Nanostructures fabrication by electron beam induced deposition with Fe(CO)5 and H2O followed by thermal treatment2006

    • Author(s)
      M. Takeguchi. R. Che, M. Shimoio and K. Furuya
    • Organizer
      19th International Microprocesses and Nanotechnology Conference (MNC2006)
    • Place of Presentation
      Kamakura, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Electron beam induced deposition of Fe on STO2006

    • Author(s)
      M. Tanaka, K. Mitsuishi, M. Takeguchi. M. Shimoio. K. Furuya and N. Koguch
    • Organizer
      19th International Microprocesses and Nanotechnology Conference (MNC2006)
    • Place of Presentation
      Kamakura, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Field emission from single nanorod fabricated by electron beam-induced deposition2006

    • Author(s)
      R. C. Che, M. Takeguchi. M. Shimoio and K. Furuya
    • Organizer
      International Conference on Nanoscience and Technology 2006 (ICN+T 2006)
    • Place of Presentation
      Basel, Switerland
    • Related Report
      2008 Final Research Report
  • [Presentation] Formation of iron oxide nanorods using electron beam-induced deposition2006

    • Author(s)
      M. Shimoio. M. Takeguchi. W. Lu and K. Furuya
    • Organizer
      Microscopy and Microanalysis 2006 (M&M2006), Vol. 12, Supp. 2, 700-701
    • Place of Presentation
      Chicago, Illinois, USA
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication and characterization of magnetic nanostructures with different iron concentration2006

    • Author(s)
      M. Takeguchi. M. Shimoio. R. Che and K. Furuya
    • Organizer
      Microscopy and Microanalysis 2006 (M&M2006), Vol. 12, Supp. 2, 980-981
    • Place of Presentation
      Chicago, Illinois, USA
    • Related Report
      2008 Final Research Report
  • [Presentation] Direct formation of oxide nanorods using electron beam-induced deposition2006

    • Author(s)
      M. Shimoio. M. Takeguchi. W. Lu and K. Furuya
    • Organizer
      16th International Microscopy Congress (IMC16), p. 1837
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Electron holography characterization of nanostructures with different iron concentration formed by electron beam induced deposition2006

    • Author(s)
      M. Takeguchi. M. Shimoio. R. C. Che and K. Furuya
    • Organizer
      16th International Microscopy Congress (IMC16)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication and observation of metal nancrstructures using an ultra-high vacuum transmission electron microscopy2006

    • Author(s)
      M. Tanaka, M. Shimoio. M. Takeguchi. K. Mitsuishi and K. Furuya
    • Organizer
      16th International Microscopy Congress (IMC16)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Electron holography investigation on FePt alloy nanorod fabricated by electron beam induced deposition2006

    • Author(s)
      R. C. Che, M. Takeguchi, M. Shimoio, W. Zhang and K. Furuya
    • Organizer
      16th International Microscopy Congress (IMC16)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Field electron emission from nanorods formed by electron beam induced deposition2006

    • Author(s)
      R. C. Che, M. Takeguchi, M. Shimoio, W. Zhang and K. Furuya
    • Organizer
      16th International Microscopy Congress (IMC16)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2008 Final Research Report
  • [Book] In-situ ion and electron beam effects on the fabrication and analysis of nanomaterials ; In-situ electron microscopy at high resolution2008

    • Author(s)
      K. Furuya, M. Song, M. Shimoio (分担)
    • Publisher
      World Scienctific Publishing, Singapore
    • Related Report
      2008 Final Research Report
  • [Book] In-situ electron microscopy at high resolution (分担)2008

    • Author(s)
      K. Furuya, M. Song, M. Shimojo
    • Total Pages
      19
    • Publisher
      World Scientific Publishing
    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 触媒作用を有する塩化物と収束電子線を用いる微細構造物の製造方法とその装置2008

    • Inventor(s)
      下条雅幸、古屋一夫
    • Industrial Property Rights Holder
      物質・材料研究機構
    • Acquisition Date
      2008-03-18
    • Related Report
      2008 Final Research Report
  • [Patent(Industrial Property Rights)] 触媒作用を有する塩化物と収束電子線を用いる微細構造物の製造方法とその装置2008

    • Inventor(s)
      下条雅幸, 古屋一夫
    • Industrial Property Rights Holder
      物質材料研究機構
    • Filing Date
      2008-05-02
    • Related Report
      2008 Annual Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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