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Ta/Cu/Ta薄膜で発現する特異なTaキャップ効果

Research Project

Project/Area Number 18656202
Research Category

Grant-in-Aid for Exploratory Research

Allocation TypeSingle-year Grants
Research Field Structural/Functional materials
Research InstitutionUniversity of Tsukuba

Principal Investigator

水林 博  University of Tsukuba, 大学院・数理物質科学研究科, 教授 (40114136)

Co-Investigator(Kenkyū-buntansha) 谷本 久典  筑波大学, 大学院・数理物質科学研究科, 准教授 (70222122)
Project Period (FY) 2006 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2008: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2007: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2006: ¥1,400,000 (Direct Cost: ¥1,400,000)
Keywords金属配線 / 銅薄膜 / Taキャップ効果 / Cuキャップ効果 / 弾性特性 / X線回折 / バッファー層 / X線開設
Research Abstract

Si基板上にスパッタ法によりTaバリア層(35nm)、Cuを順次成膜したTa/Cu、更にTaキャップ(5nm)を付加したTa/Cu/Taについて、弾性率測定、X線回折実験および走査電子顕微鏡観察を行った。Cu膜は<IH>配向性が高く、Cu(III)からのX線回折強度Icu(III)の膜厚依存性を調べた。膜厚500nm以下ではIcu(III)の理論値は膜厚に比例して減少する.Ta/CuからのIcu(III)は、膜厚200nm-30nmの間は膜厚に比例して減少するが、30nm以下では階段状に数分の1に低下する.オメガスキャンの結果から、30nm以下でIcu(III)が低下するのは<III>配向性分布が大きくなったためであることが分かった.試料積層時には膜厚は連続的に増えるから、30nmを越すとCuキャップ効果により既存の30nm部分の結晶粒の<III>配向性が高くなることを意味する.TalCu1Taでは、Icu(III)の30nm以下での低下はなだらかになっており、Taキャップ効果により既存の30nm部分の結晶粒の<III>配向性が高くなることを意味する.一方、Cu弾性率が、tCu<100nmでは理論値から外れて低い値を示し、その程度はTa1Cu1Taで著しいが、この弾性率低下はナノ構造における結晶粒界層の擬弾性に起因している。金ナノ結晶ではクリープ変形は結晶粒の回転により進行することから、CuキャップおよびTaキャップによる応力発生に起因して<IH>配向性を高めるような粒回転が起きたと推測される.30nm前後でCuキャップ効果が異なることは、配線幅が30nm以下になると組織変化が起きる可能性を示唆する.

Report

(3 results)
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (13 results)

All 2009 2008 2007 2006

All Journal Article (11 results) (of which Peer Reviewed: 5 results) Presentation (2 results)

  • [Journal Article] Anomalous Large Internal friction observed for nm-Thick Ag Film below Room Temperature2009

    • Author(s)
      H. Tanimoto, A. Fujiwara, K. Yamaura, and H. Mizubayashi
    • Journal Title

      Materials Science and Engineering A (in press)

      Pages: 4-4

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Anelasticity Study on Interfaces of Nanocrystalline Au and Nanoporus Au2009

    • Author(s)
      H. Tanimoto, K. Mutou, Y. Hosonuma, K. Yamamoto and H. MizubayashiAnelasticity Study on Interfaces of Nanocrystalline Au and Nanoporous Au
    • Journal Title

      Materials Science and Engineering A (in press)

      Pages: 4-4

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Uniformly dimerised C60 film prepared by deposition under in-situphoto irradiation2008

    • Author(s)
      H. Tanimoto, K. Yamada, H. Mizubayashi, Y. Matsumoto, H. Naramoto,and S. Sakai
    • Journal Title

      Applied Physics Letters 93

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Zr-Cu base metallic glasses by means of hydrogen internal friction peak2007

    • Author(s)
      H. Mizubayashi, I. Nakamura, K. Yamagishi and H. Tanimoto
    • Journal Title

      Materials Transactions 48

      Pages: 1822-1827

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanocrystalline transformation and inverse transformation in metallic glasses induced by electropulsing2007

    • Author(s)
      H. Mizubayashi, T. Takahashi, K. Nakamoto and H. Tanimoto
    • Journal Title

      Materials Transactions 48

      Pages: 1665-1670

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Anelasticity study on electromigration effect in Cu thin films2006

    • Author(s)
      H.Mizubayashi, K.Goto, T.Ebisawa, H.Tanimoto
    • Journal Title

      Materials Science and Engineering A 422

      Pages: 342-346

    • NAID

      120007138491

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Elasticity study of very thin Cu films2006

    • Author(s)
      K.Fujiwara, H.Tanimoto, H.Mizubayashi
    • Journal Title

      Materials Science and Engineering A 422

      Pages: 336-341

    • NAID

      120007138490

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Deformation by grain rotations in nanocrystalline fcc-metals2006

    • Author(s)
      N.Yagi, A.Rikukawa, H.Mizubayashi, H.Tanimoto
    • Journal Title

      Materials Science and Engineering A 422

      Pages: 323-327

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Elementary mechanism responsible for creep deformation in nanocrystalline gold2006

    • Author(s)
      N.Yagi, A.Rikukawa, H.Mizubayashi, H.Tanimoto
    • Journal Title

      Physical Review B 74

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Hydrogen induced structural relaxation in bulk metallic glasses2006

    • Author(s)
      K.Yamagishi, H.Tanimoto, H.Mizubayashi
    • Journal Title

      Materials Science and Engineering A 442

      Pages: 292-296

    • NAID

      120007138489

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Elasticity study on collective motion in metallic glasses2006

    • Author(s)
      T.Takahashi, H.Tanimoto, H.Mizubayashi
    • Journal Title

      Materials Science and Engineering A 442

      Pages: 297-301

    • NAID

      120007138493

    • Related Report
      2006 Annual Research Report
  • [Presentation] Ta/Cu薄膜におけるX線散乱強度異常2009

    • Author(s)
      杉森貴之、谷本久典、水林博
    • Organizer
      日本金属学会2009年春期大会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2009-03-28
    • Related Report
      2008 Annual Research Report
  • [Presentation] Morphology Control of Nanoporous Au by Post-Compression2007

    • Author(s)
      H. Tanimoto, K. Yamamoto and H. Mizubayashi
    • Organizer
      5th Int. Conf. Porous Metals and Metal Foaming Technology(MetFoam 2007)
    • Place of Presentation
      Montreal, Canada
    • Related Report
      2007 Annual Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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