Generation of nano-scale structure controlled composite cluster beam

• Project/Area Number: 18681014
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Nanostructural science
• Research Institution: Kyoto University
• Principal Investigator: SEKI Toshio Kyoto University, 工学研究科, 講師 (00402975)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥29,250,000 (Direct Cost: ¥22,500,000、Indirect Cost: ¥6,750,000); Fiscal Year 2008: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2007: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000); Fiscal Year 2006: ¥15,860,000 (Direct Cost: ¥12,200,000、Indirect Cost: ¥3,660,000)
• Keywords: クラスター / 微粒子 / 量子ビーム科学 / ナノ構造材料 / アルゴン / ノズル / 金属材料被覆 / 金属材料被服

Research Abstract

ナノ構造を持つ多元素複合クラスターの生成方法を開発し、それを用いたナノ構造材料創成技術を開発することを目的として、ガスクラスターを出発点として金属や有機物など異種の材料を周囲に被覆し、イオン化・加速するナノ構造多元素複合クラスター蒸着装置の開発を行った。Arガスクラスターに金属Inを被覆する試験を行った結果、ArとInの複合クラスターが生成され、このガス-金属複合クラスターをSi基板上に蒸着することで、ナノサイズの金属ドット形成が可能であることを示した。

Research Products

• [Journal Article] High-Speed Nano-Processing with Cluster Ion Beams (2008)
  • Author(s): T. Seki, T. Aoki and J. Matsuo
  • Journal Title: Transactions of the MRS-J 33 [4] Pages: 1019-1022
  • NAID: 130007809533
  • Peer Reviewed
• [Journal Article] Investigation of Damage with Cluster Ion Beam Irradiation Using HR-RBS (2008)
  • Author(s): Toshio Seki
  • Journal Title: AIP Conf. Proc 1066 Pages: 423-426
  • Peer Reviewed
• [Journal Article] High-Speed Nano-Processing with Cluster Ion Beams (2008)
  • Author(s): Toshio,Seki
  • Journal Title: Transactions,of the MRS-J 33[4] Pages: 1019-1022
  • NAID: 130007809533
  • Peer Reviewed
• [Journal Article] MD simulation study of the sputtering process by high-energy gas cluster impact (2008)
  • Author(s): Takaaki Aoki
  • Journal Title: Applied Surface Science 255 Pages: 944-947
  • Peer Reviewed
• [Journal Article] Secondary ion emission from Si bombarded with large Arcluster ions under UHV conditions (2008)
  • Author(s): Satoshi Ninomiya
  • Journal Title: Applied Surface Science 255 Pages: 880-882
  • Peer Reviewed
• [Journal Article] Energy distribution of high-energy cluster ion beams (2007)
  • Author(s): T. Seki, J. Matsuo
  • Journal Title: Nuclear Instruments and Methods in Physics Research B 261 Pages: 647-650
  • Peer Reviewed
• [Journal Article] Surface processing with high-energy gas cluster ion beams (2007)
  • Author(s): T. Seki, J. Matsuo
  • Journal Title: Surface and Coatings Technology 201(19-20 SPEC.ISS.) Pages: 8646-8649
  • Peer Reviewed
• [Journal Article] High-speed processing with high-energy SF_6 cluster ion beam (2007)
  • Author(s): T. Seki, J. Matsuo
  • Journal Title: Nuclear Instruments and Methods in Physics Research B 257 Pages: 666-669
  • Peer Reviewed
• [Journal Article] High-speed processing with high-energy SF6 cluster ion beam (2007)
  • Author(s): Toshio Seki
  • Journal Title: Nuclear Instruments and Methods in Physics Research B 257 Pages: 666-669
  • Peer Reviewed
• [Journal Article] Surface processing with high-energy gas cluster ion beams (2007)
  • Author(s): Toshio Seki
  • Journal Title: Surface and Coatings Technology 201 Pages: 8646-8649
  • Peer Reviewed
• [Journal Article] Energy distribution of high-energy cluster ion beams (2007)
  • Author(s): Toshio Seki
  • Journal Title: Nuclear Instruments and Methods in Physics Research B 261 Pages: 647-650
  • Peer Reviewed
• [Journal Article] Size effect in cluster collision on solid surfaces (2007)
  • Author(s): Jiro Matsuo
  • Journal Title: Nuclear Instruments and Methods in Physics Research B 257 Pages: 627-631
  • Peer Reviewed
• [Journal Article] Molecular dynamics study of monomer and dimer emission processes with high energy gas cluster ion impact (2007)
  • Author(s): Takaaki Aoki
  • Journal Title: Surface and Coatings Technology 201 Pages: 8427-8430
  • Peer Reviewed
• [Journal Article] The Effect of Incident Cluster Ion Size on Secondary Ion Yields Produced from Si (2007)
  • Author(s): Satoshi Ninomiya
  • Journal Title: Transactions of the MRS-J 32[4] Pages: 895-898
  • Peer Reviewed
• [Journal Article] Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere (2007)
  • Author(s): Kazuya Ichiki
  • Journal Title: Nuclear Instruments and Methods in Physics Research B 256 Pages: 350-350
• [Journal Article] The effect of incident cluster ion energy and size on secondary ion yields emitted from Si (2007)
  • Author(s): Satoshi Ninomiya
  • Journal Title: Nuclear Instruments and Methods in Physics Research B 256 Pages: 528-528
• [Journal Article] High-Speed Nano-Processing with Cluster Ion Beams (2006)
  • Author(s): T. Seki and J. Matsuo,
  • Journal Title: AIP Conf. Proc. 866 Pages: 214-217
  • NAID: 130007809533
  • Peer Reviewed
• [Journal Article] High-Speed Nano-Processing with Cluster Ion Beams (2006)
  • Author(s): Toshio Seki
  • Journal Title: AIP Conf.Proc. 866 Pages: 214-214
  • NAID: 130007809533
• [Journal Article] High-intensity Si cluster ion emission from a silicon target bombarded with large Ar cluster ions (2006)
  • Author(s): Satoshi Ninomiya
  • Journal Title: Appl.Surf.Sci. 252 Pages: 6550-6550
• [Presentation] 塩素ガスクラスターイオンビームによるスパッタ率のクラスターサイズ依存性 (2009)
  • Author(s): 瀬木利夫、青木学聡、松尾二郎
  • Organizer: 2008年春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-03-30
• [Presentation] Etching Characteristics with Ar-Cl_2 Gas Mixed Cluster Ion Beam (2008)
  • Author(s): T. Seki, T. Aoki and J. Matsuo
  • Organizer: The IUMRS International Conference in Asia
  • Place of Presentation: Nagoya Congress Center, Japan
  • Year and Date: 2008-12-11
• [Presentation] Etching Characteristics with Ar-Cl_2 Gas Mixed Cluster Ion Beam? (2008)
  • Author(s): Toshio Seki
  • Organizer: The IUMRS International Conference in Asia
  • Place of Presentation: Nagoya Congress Center, Japan
  • Year and Date: 2008-12-11
• [Presentation] 塩素ガスクラスターイオンビームによる高速加工 (2008)
  • Author(s): 瀬木利夫、青木学聡、松尾二郎
  • Organizer: 第9回京都大学大学院工学研究科附属量子理工学研究実験センター公開シンポジウム
  • Place of Presentation: 京都大学
  • Year and Date: 2008-10-17
• [Presentation] 塩素ガズクラスターイオンビームによる高速加工 (2008)
  • Author(s): 瀬木利夫
  • Organizer: 第9回京都学大学院工学研究科附属量子理工学研九実験センター公開シンポジウム
  • Place of Presentation: 京都大学
  • Year and Date: 2008-10-17
• [Presentation] High-speed processing with Cl_2 cluster ion beam (2008)
  • Author(s): T. Seki, T. Aoki and J. Matsuo
  • Organizer: 16th International Conference on Ion Beam Modification of Materials
  • Place of Presentation: Dresden, Germany
  • Year and Date: 2008-09-03
• [Presentation] Investigation of Damage with Cluster Ion Beam Irradiation (2008)
  • Author(s): T. Seki, T. Aoki and J. Matsuo
  • Organizer: 17th International Conference on Ion Implantation Technology
  • Place of Presentation: California, USA
  • Year and Date: 2008-06-12
• [Presentation] Investigation of Damage with Cluster Ion Beam Irradiation (2008)
  • Author(s): Toshio Seki
  • Organizer: 17th international Conference on Ion Implantation Technology
  • Place of Presentation: California, USA
  • Year and Date: 2008-06-12
• [Presentation] 塩素ガスクラスターイオンビームによる金属材料エッチング特性 (2008)
  • Author(s): 瀬木利夫、青木学聡、松尾二郎
  • Organizer: 2008年春季第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学 船橋キャンパス
  • Year and Date: 2008-03-29
• [Presentation] High-Speed Nano-Processing with Cluster Ion Beams (2007)
  • Author(s): T. Seki, T. Aoki, J. Matsuo
  • Organizer: MRS-J 2007 Symposium
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2007-12-09
• [Presentation] High-Speed Nano-Processing with Reactive Cluster Ion Beam (2007)
  • Author(s): T. Seki, T. Aoki and J. Matsuo
  • Organizer: 8th Workshop on Cluster Ion Beam Technology
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2007-11-09
• [Presentation] Nano-processing with gas cluster ion beams (2007)
  • Author(s): T. Seki
  • Organizer: 15^<th> International Conference on Surface Modification of Materials by Ion Beams
  • Place of Presentation: Mumbai, India
• [Presentation] 塩素ガスクラスターイオンビームの生成 (2007)
  • Author(s): 瀬木利夫, 青木学聡, 松尾二郎
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
• [Presentation] Nano-processing with gas cluster ion beams (2007)
  • Author(s): Toshio Seki
  • Organizer: 15th International Conference on Surface Modification of Materials by Ion Beams
  • Place of Presentation: Mumbai, India
• [Book] クラスターイオンビーム基礎と応用 (2006)
  • Author(s): 山田公
  • Publisher: 日刊工業新聞社
• [Remarks]
  • URL: http://sakura.nucleng.kyoto-u.ac.jp/
• [Remarks]
  • URL: http://sakura.nucleng.kyoto-u.ac.jp/