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シリコン系半導体スピントロニクス・デバイス材料のエピタキシャル成長に関する研究

Research Project

Project/Area Number 18686003
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Applied materials science/Crystal engineering
Research InstitutionKanagawa Industrial Technology Center

Principal Investigator

秋山 賢輔  Kanagawa Industrial Technology Center, 電子技術部, 主任研究員 (70426360)

Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥24,830,000 (Direct Cost: ¥19,100,000、Indirect Cost: ¥5,730,000)
Fiscal Year 2007: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2006: ¥22,100,000 (Direct Cost: ¥17,000,000、Indirect Cost: ¥5,100,000)
Keywordsエピタキシャル / 結晶成長 / 磁性 / スピンエレクトロニクス / シリサイド
Research Abstract

半導体スピンエレクトロニクスは,"スピン"というこれまで半導体エレクトロニクスの世界には関わってこなかった物理量を積極的に利用するより上位概念のデバイスである.とれまでIII-V族やII-VI族化合物半導体をベースとした希薄磁性半導体,強磁性体/半導体ヘテロ構造及びグラニュラー構造での新たなデバイス機能の提案がされている.しかし半導体の主役であるシリコン系材料では未だほとんど検討されていない.本研究ではシリコン(Si)上へのスピンエレクトロニクス・デバイスを実現させるための結晶成長技術の確立および,基礎物性を明らかとすることを目的とする.
本年度は,昨年度の結果をもとにSi上にエピタキシャル成長させたバッファ層を導入して強磁性Fe3s董薄膜のエピタキシャル成長を検討した.その結果,マグネシア(MgO),イットリア安定化ジルコニア(Ysz)の酸化物および立方晶構造を有する炭化シリコン(3c-SiC)半導体をバッファ層として導入したSi基板上でFe3Siのエピタキシャル薄膜が,スパッタ法あるいは有機金属気相成長法(MOCVD法)にて結晶成長し,これらバッファ層がFe3Si堆積膜と基板Siとの反応を抑制しつつ配向制御に有効なことが明らかとなった.
さらにX線回折による構造解析、電気伝導特性および低温での磁気特性からMgO上のエピタキシャルFe3Si薄膜の規則化度を評価した結果,スピンエレクトロニクス・デバイスへの応用に有益なハーフメタルとなる規則構造相(DO3相)の形成が明らかとなり,この強磁性薄膜のスピンFET等への適用の可能性が示唆された。

Report

(2 results)
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (40 results)

All 2008 2007 2006

All Journal Article (16 results) (of which Peer Reviewed: 12 results) Presentation (22 results) Book (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Expitaxial Growth of Ferromagnetic Iron Suicide Thin Films on Silicon with Yttria-Stabilized Zirconia Buffer Layer2008

    • Author(s)
      K. Akiyama, S. Kaneko, T. Kadowaki, Y. Hirabayashi and H. Funakubo
    • Journal Title

      Jpn. J. Appl. Phys 47

      Pages: 577-579

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Growth of (100) Fe_3Si Thin Films on Insulating Substrates2008

    • Author(s)
      K. Akiyama, T. Kadowaki and S. Kaneko, A. Kyoduka and Y. Sawada and H. Funakubo
    • Journal Title

      J. Cryst. Growth 310

      Pages: 1703-1707

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Single Domain Epitaxial Growth of Yttria-stabilized Zirconia on Si(111) Substrate2008

    • Author(s)
      S. Kaneko, K. Akiyama, T. Ito, Y. Hirabayashi, S. Ohya, T. Oguni, Y. Sawada, H. Funakubo and M. Yoshimoto
    • Journal Title

      Ceramics International 34

      Pages: 1047-1050

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Cubic on Cubic Growth of MgO(001) Thin Film Prepared on Si(001) Substrate in Low Ambient Pressure by Sputtering Method2008

    • Author(s)
      S. Kaneko, H. Funakubo, T. Kadowaki, Y. Hirabayashi and K. Akiyama
    • Journal Title

      Euro Phys. Lett 81

      Pages: 46001-46003

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Growth of Fe_3Si Thin Films on (100) Magnesia Substrates2008

    • Author(s)
      K. Akiyama, S. Kaneko, T. Kadowaki, Y. Hirabayashi, A. Kyoduka, Y. Sawada, Y. Kobayashi, K. Asai and H. Funakubo
    • Journal Title

      Materials Research Society Symposium Procee dings 1032

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] β-FeSi_2 growth on Cu mediated Si substrate and enhancement of photoluminescence2007

    • Author(s)
      K. Akiyama, M. Itakura, S. Kaneko, H. Funakubo and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8144-8148

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural characterization by electronic transport properties on Fe_3Si films2007

    • Author(s)
      Y. Kobayashi, T. Kaneko, M. Kamogawa, K. Asai, K. Akiyama and H. Funakubo
    • Journal Title

      J. Phys. D: Appl. Phys. 47

      Pages: 6873-6878

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Photoluminescence enhancement by isolating β-FeSi_2 layer from defective layer2007

    • Author(s)
      Y. Ando, A. Imai, K. Akiyama, Y. Terai and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8133-8135

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals2007

    • Author(s)
      A. Imai, S. Kunimats K. Akiyama, Y. Terai and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8162-8165

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Satellite peaks amplified by modulation in bismuth cuprate thin film2007

    • Author(s)
      S. Kaneko, K. Akiyama, T. Ito, Y. Hirabayashi, K. Seo, H. Funakubo and M. Yoshimoto
    • Journal Title

      Physica C 463-465

      Pages: 935-938

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] RF Magnetron Sputtering Growth of Epitaxial SrRuO_3 Films with High Conductivity2007

    • Author(s)
      T. Kamo K. Nishida, K. Akiyama, J. Sakai, T. Katoda and H. Funakubo
    • Journal Title

      Jpn. J. Appl. Phys 46

      Pages: 6987-6990

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 1.54 μm photoluminescence from β-FeSi_2 as-deposited film2007

    • Author(s)
      K. Akiyama, S. Kaneko, H. Funakubo and M. Itakura
    • Journal Title

      Appl. Phys. Letter 91

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystal Growth of β-FeSi_2 Thin Film on (100), (110) and (111) Plane of Si and Yittria-Stabilized Zirconia Substrates2007

    • Author(s)
      Kensuke Akiyama, Satoru Kaneko, Takanori Kiguchi, Takashi Suemasu, Takeshi Kimura, Hiroshi Funakubo
    • Journal Title

      Materials Research Society Symposium Proceedings 980

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effect of Template Layer on Formation of Flat-surface β-FeSi_2 Epitaxial Films on (111) Si by Metal-organic Chemical Vapor Deposition2006

    • Author(s)
      Kensuke Akiyama, Yasuo Hirabayashi, Satoru Kaneko, Takeshi Kimura, Shintaro Yokoyama, Hiroshi. Funakubo
    • Journal Title

      Journal of Crystal Growth 289

      Pages: 37-43

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Horizontal Growth of Epitaxial (100) β-FeSi_2 Templates by Metal-organic Chemical Vapor Deposition2006

    • Author(s)
      Kensuke Akiyama, Satoru Kaneko, Yasuo Hirabayashi, Takashi Suemasu, Hiroshi Funakubo
    • Journal Title

      Journal of Crystal Growth 287

      Pages: 694-697

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Twin-Free Epitaxial Films Lateral Relation between YSZ(111) and Si(111)2006

    • Author(s)
      Satoru Kaneko, Kensuke Akiyama, Taku Oguni, Takeshi Ito, Yasuo Hirabayashi, Seisiro Ohya, K. Seo, Yutaka Sawada, Hiroshi Funakubo, Mamoru Yoshimoto
    • Journal Title

      Japan Journal of Applied Physics 45(50)

    • NAID

      10018461315

    • Related Report
      2006 Annual Research Report
  • [Presentation] Au蒸着したSi(001)基板上に成長させたβ-FeSi_2微結晶の微細構造2008

    • Author(s)
      板倉賢、横溝和哉、高原省吾、秋山賢輔
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-30
    • Related Report
      2007 Annual Research Report
  • [Presentation] MgOバッファ層導入による(100)Si基板上へのFe_3Si薄膜作製2008

    • Author(s)
      秋山賢輔、門脇貞子、金子智、舟窪浩、平林康男
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] 酸化物ターゲットを用いたMgO薄膜の高酸素供給製膜2008

    • Author(s)
      金子智、秋山賢輔、門脇貞子、伊藤健、平林康男、舟窪浩、吉本護
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] スプレーCVD法による無添加酸化スズ薄膜のライン形状基板への堆積2008

    • Author(s)
      近藤剛史、舟窪浩、秋山賢輔、遠田浩之、関良之、王美函、内田孝幸、澤田豊
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Tin oxide thin films deposited by spray CVD using clhanol solution of tin (II) chloride2007

    • Author(s)
      T. Kondo. H. Funakubo, K. Akiyama, H. Enta, M. H. Wang, T. Uchida, Y. Sawada
    • Organizer
      The 18th Symposium of The Materials Research Society of Japan
    • Place of Presentation
      日本大学
    • Year and Date
      2007-12-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] Epitaxial Growth of Ordering Fe_3Si Thin Films on Si with MgO buffer layer2007

    • Author(s)
      K. Akiyama, S. Kaneko, T. Kadowaki, Y. Hirabayashi
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      ボストン(米)
    • Year and Date
      2007-11-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] In-Plane Rotated Crystal Structure in Continuous Growth of Bismuth Cuprate Superconducting Film2007

    • Author(s)
      S. Kaneko, K. Akiyama, T. Ito, H. Funakubo and M. Yoshimoto
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      ボストン(米)
    • Year and Date
      2007-11-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] 金属ターゲットを用いたシリコン基板上へのエピタキシャルMgO薄膜の作製2007

    • Author(s)
      金子智、秋山賢輔、門脇貞子、熊谷正夫
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] Bi系超伝導薄膜における膜厚依存による結晶構造への影響2007

    • Author(s)
      金子智、秋山賢輔、平林康男、熊谷正夫、舟窪浩、吉本護
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] SiC半導体へのβ-FeSi_2エピタキシャル成長2007

    • Author(s)
      秋山賢輔、金子智、門脇貞子、平林康男
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] シリサイド共役反転格子フォトニック結晶での導波解析2007

    • Author(s)
      国松俊祐、寺井慶和、秋山賢輔、前田佳均
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] Structural modulation in bismuth cuprate superconducting film with continuous epitaxial growth2007

    • Author(s)
      S. Kaneko, K. Akiyama, T. Ito, Y. Hirabayashi, H. Funakubo and M. Yoshimoto
    • Organizer
      The 15th International Conference on Crystal Growth
    • Place of Presentation
      ソルトレークシティ(米)
    • Year and Date
      2007-08-16
    • Related Report
      2007 Annual Research Report
  • [Presentation] Epitaxial Growth and Magnetic Properties of Fe_3Si Thin Films2007

    • Author(s)
      K. Akiyama, S. Kaneko, T. Kadowaki, Y. Hirabayashi
    • Organizer
      The 15th International Conference on Crystal Growth
    • Place of Presentation
      ソルトレークシティ(米)
    • Year and Date
      2007-08-13
    • Related Report
      2007 Annual Research Report
  • [Presentation] Surface preparation and homoepitaxial growth of β-FeSi_22007

    • Author(s)
      H. Udono, M. Muroga, S. Oouchi, K. Akiyama, M. Itakura
    • Organizer
      The 15th International Conference on Crystal Growth
    • Place of Presentation
      ソルトレークシティ(米)
    • Year and Date
      2007-08-13
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fabrication and characterization of conductive oxide polycrystalline BaPbO_3 films2007

    • Author(s)
      H. Naganuma, H. Shima, K. Yamada, K. Akiyama, T Iijima, H. Funakubo and S. Okamura
    • Organizer
      International Conference on Electroceramics
    • Place of Presentation
      アウシュラ(タンザニア)
    • Year and Date
      2007-07-31
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effect of Lattice Mismatch on Epitaxial Growth and Magnetic Properties of Fe_3Si Thin Films2007

    • Author(s)
      K. Akiyama, T. Kadowaki, Y. Hirabayashi and S. Kaneko
    • Organizer
      2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Place of Presentation
      メルパルク長野
    • Year and Date
      2007-06-22
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effect of Strain on structural modulation of Bismuth Cuprate Superconducting Film2007

    • Author(s)
      S. Kaneko, K. Akiyama, M. Mitsuhashi, T. Ito, M. Kumagai, H. Funakubo and M. Yoshimoto
    • Organizer
      2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Place of Presentation
      メルパルク長野
    • Year and Date
      2007-06-22
    • Related Report
      2007 Annual Research Report
  • [Presentation] エピタキシャルFe_3Si薄膜の規則構造化の検討2007

    • Author(s)
      経塚梓、澤田豊、舟窪浩、金子智、門脇貞子、秋山賢輔
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] β-FeSi_2/Cu/Si薄膜の微細構造に及ぼすCu層の影響2007

    • Author(s)
      高原省吾、板倉賢、桑野範之、秋山賢輔
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] MBE法によるβ-FeSi_2単結晶基板上へのホモエピタキシー2007

    • Author(s)
      鵜殿治彦、秋山賢輔、板倉賢、菊間勲
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] RFマグネトロンスパッタ法によう低抵抗SrRuO_3薄膜の作製2007

    • Author(s)
      加茂嵩史、西田謙、秋山賢輔、加東田隆、舟窪浩
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] スプレーCVD法によるITO薄膜の非平坦基板への堆積:膜堆積温度の影響2007

    • Author(s)
      近藤剛史、澤田豊、秋山賢輔、舟窪浩、関成之、王美函、内田孝幸
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Book] エコマテリアルハンドブック2006

    • Author(s)
      山本良一 監修
    • Total Pages
      823
    • Publisher
      丸善株式会社
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] 積層構造体、磁気又は電子装置およびトランジスタ2008

    • Inventor(s)
      秋山賢輔,金子智,平林康男
    • Industrial Property Rights Holder
      神奈川県
    • Industrial Property Number
      2007-226863
    • Filing Date
      2008-09-02
    • Related Report
      2007 Annual Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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