Charge Accumulation Measurement on Dielectric Insulators by Micro/Nano Electro Mechanical Sensors

• Project/Area Number: 18686024
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電力工学・電気機器工学
• Research Institution: The University of Tokyo
• Principal Investigator: KUMADA Akiko The University of Tokyo, 大学院・工学系研究科, 准教授 (20313009)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥30,030,000 (Direct Cost: ¥23,100,000、Indirect Cost: ¥6,930,000); Fiscal Year 2008: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000); Fiscal Year 2007: ¥11,700,000 (Direct Cost: ¥9,000,000、Indirect Cost: ¥2,700,000); Fiscal Year 2006: ¥12,480,000 (Direct Cost: ¥9,600,000、Indirect Cost: ¥2,880,000)
• Keywords: 電気機器 / 誘電体界面現象 / MEMS / 帯電 / 沿面放電 / 表面電位計 / CMOS / 高分解能 / マイクロギャップ

Research Abstract

本研究においては、ナノ・マイクロ技術を駆使することにより、空間分解能が10μmに達する高分解電荷密度分布測定システムを構築し、従来の手法では測定不可能であった帯電・放電現象の高分解計測を行い、絶縁物の帯電機構および沿面放電進展機構を解明することを目的とした。具体的な測定ターゲットは、(A)GISモデルコーンスペーサの直流帯電現象と(B)厚さ数μmの誘電体上を進展する沿面放電現象とした。(A)については、既存の表面電位計をべースに、分解能としては現状の最高値であるmmオーダの測定システムを開発し、大気圧SF6ガス中におけるGISモデルスペーサ帯電現象を把握した。(B)半導体プロセス技術を活用し、3種類のMEMSセンサを作成した。いずれも分解能はサブミクロンオーダに達する。これらのセンサの特性を測定し、沿面放電測定への適用可能性を検討した。

Research Products

• [Journal Article] Residual charge distribution of positive surface streamer (2009)
  • Author(s): A. Kumada, S. Okabe, K. Hidaka
  • Journal Title: Journal of Physics D: Applied Physics Vol.42
  • Peer Reviewed
• [Journal Article] Two-dimensional potential and charge distributions of positive surface streamer (2009)
  • Author(s): D.Tanaka, S.Matsuoka, A.Kumada, K.Hidaka
  • Journal Title: Journal of Physics D: Applied Physics Vol.42
  • NAID: 10026078326
  • Peer Reviewed
• [Journal Article] Dielectric loss of PCBs leading to microwave heating (2008)
  • Author(s): A. Kumada, K. Hidaka, K. Amano, K. Itoh
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Vol.4 Pages: 297-299
  • NAID: 10025774331
  • Peer Reviewed
• [Journal Article] Surface Temperature of Pd/C Catalyst under Microwave Irradiation in Dechlorination Process of PCBs (2008)
  • Author(s): A. Kumada, K. Hidaka, K. Amano, K. Itoh
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Vol.4 Pages: 133-135
  • NAID: 10025773978
  • Peer Reviewed
• [Journal Article] Dielectric loss of PCBs leading to microwave heating (2008)
  • Author(s): A. Kumada, K. Hidaka, K. Amano, and K. Itoh
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering 4 Pages: 297-299
  • NAID: 10025774331
  • Peer Reviewed
• [Journal Article] Surface Temperature of Pd/C Catalyst sunder Microwave Irradiation in Dechlorination Process of PCBs (2008)
  • Author(s): A. Kumada, K. Hidaka, K. Amano, and K. Itoh
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering 4 Pages: 133-135
  • Peer Reviewed
• [Journal Article] Measurement Methods of Accumulated Electric Charges on Spacer in Gas Insulated Switchgear (2007)
  • Author(s): S. Okabe, A. Kumada
  • Journal Title: IEEE Transactions on Power Delivery Vol.22 Pages: 1547-1556
  • Peer Reviewed
• [Journal Article] テラヘルツ波を用いたポリエチレン内部応力・空隙界面の計測技術への応用 (2007)
  • Author(s): 高橋紹大, 栗原隆史, 武田敏信, 熊田亜紀子, 松岡成居, 日高邦彦
  • Journal Title: 電気学会論文誌A Vol.127 Pages: 593-598
  • NAID: 10019959202
  • Peer Reviewed
• [Journal Article] テラヘルツ波を用いたポリエチレン内部応力・空隙界面の計測技術への応用 (2007)
  • Author(s): 高橋紹大、栗原隆史、武田敏信、熊田亜紀子、松岡成居、日高邦彦
  • Journal Title: 電気学会論文誌A 127 Pages: 593-598
  • NAID: 10019959202
  • Peer Reviewed
• [Journal Article] New Trend in High Voltage Measurement (2007)
  • Author(s): Akiko Kumada and Kunihiko Hidaka
  • Journal Title: Proceedings of 2007 COE Symposium on Advanced Electronics for Future Generations Pages: 397-402
• [Journal Article] SOIウェハ上における沿面放電現象 (2007)
  • Author(s): 林純也、安井遼、熊田亜紀子 日高邦彦、三田吉朗
  • Journal Title: 平成19年電気学会全国大会論文集 Vol.1 Pages: 79-79
• [Journal Article] GISモデルスペーサの直流電界下での帯電特性 (2007)
  • Author(s): 田中大樹、林純也、松岡成居 熊田亜紀子、日高邦彦
  • Journal Title: 平成19年電気学会全国大会論文集 Vol.2 Pages: 91-92
• [Journal Article] Propagation Characteristics of a Positive Surface Streamer (2006)
  • Author(s): Akiko Kumada, Yoshinori Fukuda, Yoshibumi Kamada and Kunihiko Hidaka
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Vol.1 No.1 Pages: 95-103
  • NAID: 10025770879
• [Journal Article] Charge Measuring System of Surface Discharge With High Spatial Resolution (2006)
  • Author(s): Akiko Kumada and Kunihiko Hidaka
  • Journal Title: Proceedings of the XVI International Conference on Gas Discharge and their Applications Vo.2 Pages: 673-676
• [Journal Article] 大気中正極性ストリーマの電荷・電位分布モデルの検討 (2006)
  • Author(s): 高橋功、福田吉紀、熊田亜紀子 日高邦彦
  • Journal Title: 2006年放電学会年次大会講演論文集 Vol.1 Pages: 19-20
• [Journal Article] Two-dimensional potential and charge distributions of positive surface streamer
  • Author(s): D. Tanaka, S. Matsuoka, A. Kumad
  • Journal Title: Journal of Physics D : Applied Physics 42
  • Peer Reviewed
• [Presentation] 沿面リーダ残留電荷密度分布の高分解測定 (2009)
  • Author(s): 米澤寛、松岡成居、熊田亜紀子、日高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.1, No.48
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-19
• [Presentation] パイプ誘電体表面における沿面リーダー残留電荷分布の測定 (2009)
  • Author(s): Deng Junbo、Li Zi、松岡成居、熊田亜紀子、日高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.1, No.50
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-19
• [Presentation] 沿面放電測定用マイクロセンサの開発(III) (2009)
  • Author(s): 山口祐樹、松岡成居、熊田亜紀子、吉田三郎、日高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.1, No.53
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-19
• [Presentation] 乾燥空気中におけるバリア放電進展現象 (2009)
  • Author(s): 老田友紀、松岡成居、熊田亜紀子、日高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol-1, No.82
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-19
• [Presentation] CF31-GO2混合ガスのV-t特製 (2009)
  • Author(s): 宇尾寛志、武田俊信、松岡成居、熊田亜紀子、日高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.6, 237
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-19
• [Presentation] CF31の分解生成物の沿面放電に与える影響 (2009)
  • Author(s): 武田敏信、宇尾寛志、松岡成居、熊田亜紀子、目高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.6, 238
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-19
• [Presentation] 高温超電導ケーブルモデルの部分放電Q-V特性 (2009)
  • Author(s): Eatemeh Rezaeifar、鈴木雄斗、熊田亜紀子、日高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.7, 207
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-19
• [Presentation] イオン存在下における空気のKerr効果 (2009)
  • Author(s): 松本洋和、安井遼、松岡成居、熊田亜紀子、日高邦彦
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.1, No.70
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-18
• [Presentation] マイクロ波照射によるPCB分解反応促進機構 (2009)
  • Author(s): 岡崎洋平、熊田亜紀子、日高邦彦、天野耕治、伊藤鉱一
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.2, 72
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-17
• [Presentation] 湿度管理環境下における絶縁スペーサの直流帯電機構 (2009)
  • Author(s): 道念大樹、松岡成居、熊田亜紀子、日高邦彦、保科好一、武井雅文
  • Organizer: 平成21年電気学会全国大会講演論文集、Vol.6, 244
  • Place of Presentation: 札幌
  • Year and Date: 2009-03-17
• [Presentation] Advanced Measurement Technologies for Better Understanding of Electrical Discharge Phenomena (2009)
  • Author(s): Kunihiko Hidaka, Akiko Kumada, Hirokazu Matsumoto, Daisuke Tanaka, Sigeyasu Matsuoka
  • Organizer: Proceedings of Global COE Symposium on Secure-Life Electronics, pp.257-262
  • Place of Presentation: Tokyo
  • Year and Date: 2009-01-20
• [Presentation] Dielectric Heating of PCB s by Microwave Irradiation Leading to Dechlorination (2009)
  • Author(s): Akiko Kumada and Kunihiko Hidaka
  • Organizer: Proceedings of Global COE Symposium on Secure-Life Electronics, pp.263-269
  • Place of Presentation: Tokyo
  • Year and Date: 2009-01-20
• [Presentation] Breakdown Characteristics of CF3I and its by-products by spark-over discharge (2009)
  • Author(s): Toshinobu Takeda, Shigeyasu Matsuoka, Akiko Kumada and Kunihiko Hidaka
  • Organizer: Proceedings of the 9th Seoul National University-University of Tokyo Joint Seminar on Electrical Engineering, pp.31-36
  • Place of Presentation: Tokyo
  • Year and Date: 2009-01-06
• [Presentation] Piezoelectric Vibration of Pockets Crystal (2009)
  • Author(s): Hirokazu Matsumoto, Shigeyasu Matsuoka, Akiko Kumada and Kunihiko Hidaka
  • Organizer: Proceedings of the 9th Seoul National University-University of Tokyo Joint Seminar on Electrical Engineering, pp.41-44
  • Place of Presentation: Tokyo
  • Year and Date: 2009-01-06
• [Presentation] Measurement of Surface Leader on PMMA Pipe (2009)
  • Author(s): Junbo Deng, Shigeyasu Matsuoka, Akiko Kumada and Kunihiko Hidaka
  • Organizer: Proceedings of the 9th Seoul National University-University of Tokyo Joint Seminar on Electrical Engineering, pp.54-58
  • Place of Presentation: Tokyo
  • Year and Date: 2009-01-06
• [Presentation] PCB分解反芯におけるPd/C触媒の電子放出測定 (2008)
  • Author(s): 岡崎洋平、松岡成居、熊田亜紀子、日高邦彦、天野耕治、伊藤鉱
  • Organizer: 2008年放電学会年次大会講演論文集, A-2-5
  • Place of Presentation: 東京
  • Year and Date: 2008-11-15
• [Presentation] 負極性沿面リーダ残留電荷密度分布測定 (2008)
  • Author(s): 米澤寛、熊田亜紀子、日高邦彦
  • Organizer: 2008年放電学会年次大会講演論文集、p-2-6
  • Place of Presentation: 東京
  • Year and Date: 2008-11-15
• [Presentation] 乾燥空気中の放電バリア進展現象 (2008)
  • Author(s): 老田友紀、松岡成居、熊田亜紀子、日高邦彦、吉田忠広、竹内敏恵
  • Organizer: 2008年放電学会年次大会講演論文集、p-3-4
  • Place of Presentation: 東京
  • Year and Date: 2008-11-15
• [Presentation] 直流電界下のGIS帯電現象における表面抵抗値分布の影響 (2008)
  • Author(s): 道念大樹、松岡成居、熊田亜紀子、日高邦彦、保科好一
  • Organizer: 2008年放電学会年次大会講演論文集、p-3-8
  • Place of Presentation: 東京
  • Year and Date: 2008-11-15
• [Presentation] CF31-CO2混合ガスのV-t特性 (2008)
  • Author(s): 宇尾寛志、武田俊信、松岡成居、熊田亜紀子、日高邦彦
  • Organizer: 2008年放電学会年次大会講演論文集、p-3-9
  • Place of Presentation: 東京
  • Year and Date: 2008-11-15
• [Presentation] Surface discharge phenomena in micro gap under impulse/DC voltage application (2008)
  • Author(s): H. Yamaguchi, H. Yonezawa, S. Matsuoka, A. Kumada, K. Hidaka
  • Organizer: International Workshop on High Voltage Engineering
  • Place of Presentation: Kyoto
  • Year and Date: 2008-10-24
• [Presentation] Potential and Charge Distributions of Positive Surface Streamer (2008)
  • Author(s): Akiko Kumada, Kunihiko Hidaka
  • Organizer: Proceedings of the 17th International Conference on Gas Discharges and their Applications
  • Place of Presentation: Cardiff
  • Year and Date: 2008-09-08
• [Presentation] Potential and Charge Distributions of Positive Surface Streamer (2008)
  • Author(s): Akiko Kumada and Kunihiko Hidaka
  • Organizer: Proceedings of the 17th International Conference on Gas Discharges and their Applications, pp/261-264
  • Place of Presentation: Cardiff
  • Year and Date: 2008-09-08
• [Presentation] Insulating Performance of CF31 and its by-Products by Spark-over Discharge (2008)
  • Author(s): Toshinobu Takeda, Shigeyasu Matsuoka, Akiko Kumada, Kunihiko Hidaka
  • Organizer: Proceedings of the International Conference on Electrical Engineering 2008, O-142
  • Place of Presentation: Okinawa
• [Presentation] Piezoelectric Vibration of Pockets Crystal (2008)
  • Author(s): Hirokazu Matsumoto, Shigeyasu Matsuoka, Akiko Kumada and Kunihiko Hidaka
  • Organizer: Proceedings of the International Conference on Electrical Engineering 2008, p^180
  • Place of Presentation: Okinawa
• [Presentation] Propagation of Surface Leader on PMMA (2008)
  • Author(s): Junbo Deng, Shigeyasu Matsuoka, Akiko Kumada and Kunihiko Hidaka
  • Organizer: Proceerings of Regional Inter-university Graduate Conference on Electrical Engineering, B-74
  • Place of Presentation: Xi'an, Chaina
• [Presentation] Two-dimensional potential and charge distributions on insulator with propagating positive surface streamer (2008)
  • Author(s): Daiki Tanaka, Shigeyasu Matsuoka, Akiko Kumada , Kunihiko Hidaka
  • Organizer: Proceedings of 14th Asian Conference on Electrical Discharge, pp.106-109
  • Place of Presentation: Bandung, Indonesia
• [Presentation] 沿面放電測定用マイクロセンサの開発 (2007)
  • Author(s): 林純也, 山口祐樹, 松岡成居, 熊田亜紀子, 日高邦彦, 三田吉郎
  • Organizer: 電気学会放電・開閉保護・高電圧合同研究会資料
  • Place of Presentation: 広島
  • Year and Date: 2007-11-26
• [Presentation] Micro sensor for measuring surface discharge phenomena with high spatial resolution (2007)
  • Author(s): Junya Hayashi, Hiroki Yamaguchi, Shigeyasu Matsuoka, Akiko Kumada, Kunihiko Hidaka
  • Organizer: Proceedings of 2007 Japan-Korea Joint Symposium on Electrical Discharge and High Voltage Engineering
  • Place of Presentation: Tokyo
  • Year and Date: 2007-11-17
• [Presentation] 電力機器モデルスペーサの直流高電界下での帯電特性 (2007)
  • Author(s): 田中大樹, 林純也, 松岡成居, 熊田亜紀子, 日高邦彦, 保科好一
  • Organizer: 電気学会 プラズマ・放電合同研究会
  • Place of Presentation: 札幌
  • Year and Date: 2007-09-14
• [Presentation] Charge Distribution Measurement on a GIS Cone Spacer under DC Voltage (2007)
  • Author(s): Junya Hayashi, Daiki Tanaka, Shigeyasu Matsuoka, Akiko Kumada, Kunihiko Hidaka, Y. Hoshina
  • Organizer: Proceedings of 15th International Symposium on High Voltage Engineering
  • Place of Presentation: Ljubljana, Slovenia
  • Year and Date: 2007-08-31