非線形光学量子ドットの位置制御・高密度作製による超微細、超高速光・光デバイス開発

• Project/Area Number: 18760035
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: University of Tsukuba
• Principal Investigator: 尾崎 信彦 University of Tsukuba, 大学院・数理物質科学研究科, 講師 (30344873)
• Project Period (FY): 2006 – 2007
• Project Status: Completed (Fiscal Year 2007)
• Budget Amount: ¥2,600,000 (Direct Cost: ¥2,600,000); Fiscal Year 2007: ¥600,000 (Direct Cost: ¥600,000); Fiscal Year 2006: ¥2,000,000 (Direct Cost: ¥2,000,000)
• Keywords: 量子ドット / フォトニック結晶 / 選択成長 / MBE / 光非線形効果 / 全光素子 / 光・光デバイス

Research Abstract

フォトニック結晶(PC)導波路中に量子ドット(QD)を光学非線形媒体として埋め込んだ、超微細、超高速の全光デバイス(全光フリップフロップ素子)の作製を目指し、QDの選択領域成長技術の開発を行った。
平成19年度では・まず我々が平成18年度に達成したInAs-QDの選択領域成長技術(メタルマスク法)をさらに発展させ、異なる吸収波長を持ったQDを近接する選択領域にモノリシックに作製する技術を開発した。具体的には、回転非対称のウィンドウパターンを有するメタルマスクを用いて、近接する複数の選択領域にのみQDを作製し、さらにQD上に歪緩和層(InGaAs)を挿入し、その膜厚を変えることにより、QDの発光波長を精度良く制御することに成功した。これにより、全光フリップフロップ素子に要求される、離調度20nmの異なる吸収波長を持ったInAs-QDを近接する選択領域にモノリシックに成長させることに成功した。また、作製したQD埋め込み基板に、電子線リソグラフィーとドライエッチングによりフォトニック結晶導波路を形成し、我々が提案する全光フリップフロップ素子を実際に作製することに成功した。
一方、AFMプローブを用いたQDの位置制御成長技術(ナノジェットプローブ法)についても、H19年度では、QD作製のスループットの向上と積層化、さらにQDからの発光の観察に成功し、技術の向上を達成した。この技術は、我々が提案する超微細光素子作製への応用のみならず、QD単体の高精度な位置制御が求められる量子情報デバイスなどへの応用が期待され、今後さらに発展が見込める。
以上の成果から、本研究の目的である「QDの成長位置制御および高密度形成技術の確立」および「PC導波路内に最密配置、積層された超高密度QDを配した超小型全光素子の開発」は、当初の計画通り達成されたと言える。

Research Products

• [Journal Article] Selective-area-growth of InAs-QDs with Different absorption wavelengths via developed metal mask/MBE method for integrated optical devices (2008)
  • Author(s): N.OzakiY.Takata, S.Ohkouchi, Y.Sugimoto, N.Ikeda, K.Asakawa.
  • Journal Title: Appl.Surf.Sci (In press)
  • Peer Reviewed
• [Journal Article] Selective growth of stacked InAs quantum dots by using the templates formed by the Nano-Jet Probe (2008)
  • Author(s): S.Ohkouchi, Y.Sugimoto, N.Ozaki, H.Ishikawa, K.Asakawa
  • Journal Title: Appl.Surf.Sci (In press)
  • Peer Reviewed
• [Journal Article] Optical-Nonlinearity-Induced Phase Shift via Selective Area Grown InAs Quantum Dots in a Photonic Crystal Waveguide (2008)
  • Author(s): Yoshinori Kitagawa, Nobuhiko Ozaki, Yoshiaki Takata, Naoki Ikeda, Shunsuke Ohkouchi, Yoshinori Watanabe, Yoshimasa Sugimoto and Kiyoshi Asakawa
  • Journal Title: Jpn.J.Appl.Phys. 47 Pages: 2893-2896
  • Peer Reviewed
• [Journal Article] In situ Metal Mask for Selective Area Growth of Thin Epitaxial Layers (2008)
  • Author(s): Shunsuke Ohkouchi, Nobuhiko Ozaki, Yoshiaki Takata, Yoshinori Kitagawa, Yusui Nakamura, Naoki Ikeda, Yoshimasa Sugimoto and Kiyoshi Asakawa
  • Journal Title: Jpn.J.Appl.Phys. 47 Pages: 2987-2990
  • NAID: 10022548345
  • Peer Reviewed
• [Journal Article] Low-dimensional Systems and Nanostructures (2008)
  • Author(s): S.Ohkouchi, Y.Sugimoto, N.Ozaki, H.Ishikawa and K.Asakawa
  • Journal Title: Physica E 40 Pages: 1794-1796
  • Peer Reviewed
• [Journal Article] Chapter 13 Area-selective and Site-controlled InAs Quantum-dot Growth Techniques for Photonic Crystal-based Ultra-small Integrated Circuit p.405-420 (2008)
  • Author(s): Nobuhiko Ozaki, Shunsuke Ohkouchi, Yoshimasa Sugimoto, Naoki Ikeda, Kiyoshi Asakawa
  • Journal Title: self-Assembled Quantum Dots, Lecture Notes in Nanoscale Sc
• [Journal Article] High transmission recovery of slow light in a photonic crystal waveguide using a hetero group-velocity waveguide (2007)
  • Author(s): Nobuhiko Ozaki>, Yoshinori Kitagawa, Yoshiaki Takata, Naoki Ikeda, Yoshinori Watanabe, Akio Mizutani, Yoshimasa Sugimoto, and Kiyoshi Asakawa
  • Journal Title: Optics Express 15 Pages: 7974-7983
  • Peer Reviewed
• [Journal Article] Topology optimization of waveguide bends with wide,flat bandwidth in air-bridge-type photonic crystal slabs (2007)
  • Author(s): Yoshinori Watanabe, Naoki Ikeda, Yoshimasa Sugimoto, Yosihaki Takata, Yoshinori Kitagawa, Akio Mizutani, Nobuhiko Ozaki, and Kiyoshi Asakawa
  • Journal Title: J.Appl.Phys. 101 Pages: 1131081-6
  • Peer Reviewed
• [Journal Article] Precise control of dry etching for nanometer scale air-hole arrays in two-dimensional GaAs/AlGaAs photonic crystal slabs (2007)
  • Author(s): Naoki Ikeda, Yoshimasa Sugimoto, Yoshinori Watanabe, Nobuhiko Ozaki, Yoshiaki Takata, Kuon Inoue, Kiyoshi Asakawa
  • Journal Title: Optics Communications 275 Pages: 257-267
  • Peer Reviewed
• [Journal Article] Selective area growth of InAs quantum dots with a Metal Mask towards optical integrated circuit devices (2007)
  • Author(s): N.Ozaki, Y.Takata, S.Ohkouchi, Y.Sugimoto, Y.Nakamura, N.Ikeda, K.Asakawa
  • Journal Title: J.Crystal Growth 301-302 Pages: 771-775
• [Journal Article] Selective growth of InAs quantum dots using In nano-dot arrays formed by nano jet probe method (2007)
  • Author(s): S.Ohkouchi, Y.Sugimoto, N.Ozaki, H.Ishikawa, K.Asakawa
  • Journal Title: J.Crystal Growth 301-302 Pages: 726-730
• [Journal Article] Selective-Area Growth of Self-Assembled InAs-QDs by Metal Mask Method for Optical Integrated Circuit Applications (2007)
  • Author(s): Nobuhiko Ozaki, Yoshiaki Takata, Shunsuke Ohkouchi, Yoshimasa Sugimoto, Naoki Ikeda, Yoshinori Watanabe, Yoshinori Kitagawa, Akio Mizutani, Kiyoshi Asakawa
  • Journal Title: Mater. Res. Soc. Symp. Proc. 959
• [Journal Article] Broadband waveguide intersection with low-crosstalk in two-dimensional photonic crystal circuits by using topology optimization (2006)
  • Author(s): Y.Watanabe, Y.Sugimoto, N.Ikeda, N.Ozaki, A.Mizutani, Y.Takata, Y.Kitagawa, K.Asakawa
  • Journal Title: Optics Express 14(20) Pages: 9502-9507
• [Journal Article] Photonic crystal and quantum dot technologies for all-optical switch and logic device (2006)
  • Author(s): Kiyoshi Asakawa, Yoshimasa Sugimoto, Yoshinori Watanabe, Nobuhiko Ozaki, Akio Mizutani, Yoshiaki Takata, Yoshinori Kitagawa, Hiroshi Ishikawa, Naoki Ikeda, Koichi Awazu, Xiaomin Wang, Akira Watanabe, Shigeru Nakamura, Shunsuke Ohkouchi, Kuon Inoue, Martin Kristensen, Ole Sigmund, Peter Ingo Borel, Roel Baets
  • Journal Title: New J.Phys. 8(9) Pages: 208-208
• [Journal Article] Topology optimized photonic crystal waveguide intersections with high-transmittance and low crosstalk (2006)
  • Author(s): N.Ikeda, Y.Sugimoto, Y.Watanabe, N.Ozaki, A.Mizutani, Y.Takata, J.S.Jensen, O.Sigmund, P.I.Borel, M.Kristensen, K.Asakawa
  • Journal Title: Electronics Letters 42 Pages: 1031-1033
• [Journal Article] Advaced growth techniques of InAs-system quantum dots for integrated nanophotonic circuits n press
  • Author(s): Kiyoshi Asakawa, Nobuhiko Ozaki, Shunsuke Ohkouchi, Yoshimasa Sugimoto, Naoki Ikeda
  • Journal Title: Handbook for Self-Assembled Semiconductor Nanostructures for Novel Devices in Photonic and Electronics, Elsevier
• [Presentation] Repetitive phase shifts of signal pulses induced by optical non-linearity in a photonic crystal waveguide with quantum dots (2008)
  • Author(s): Nobuhiko, Ozaki, Yoshinori, Kitagawa, Yoshiaki, Takata, Naoki, Ikeda, Shunsuke, Ohkouchi, Yoshinori, Watanabe, Akio, Mizutani, Yoshimasa, Sugimoto and Kiyoshi, Asakawa
  • Organizer: SPIE Photonic West OPTO 2008
  • Place of Presentation: San Jose, CA U.S.A
  • Year and Date: 2008-01-21
• [Presentation] Slective growth of stacked InAs quantum dots by using the templates formed by the Nano-Jet Probe (2007)
  • Author(s): S, Ohkouchi, Y, Sugimoto, N, Ozaki, H, Ishikawa and K, Asakawa
  • Organizer: The 9th Int. Conf. Atomically Controlled Surfaces, Inter faces and Nanostructures(ACSIN-9)
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2007-11-13
• [Presentation] Selective-area-growth of InAs-QDs with different absorption wavelengths via developed metal mask/MBE method for integrated optical devices (2007)
  • Author(s): Y, Takata, N, Ozaki, S, Ohkouchi, Y, Sugimoto, N, Ikeda, Y, Watanabe, Y, Kitagawa, A, Mizutani and K, Asakawa
  • Organizer: The 9th Int. Conf. Atomically Controlled Surfaces, Inter faces and Nanostructures(ACSIN-9)
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2007-11-12
• [Presentation] Optical Flip-Flop Device Composed of Photonic Crystal Waveguide and Quantum Dots (2007)
  • Author(s): Yoshimasa, Sugimoto, Yoshinori, Watanabe, Nobuhiko, Ozaki, Akio, Mizutani, Yoshiaki, Takata, Yoshinori, Kitagawa, Naoki, Ikeda, Shunsuke, Ohkouchi, Shigeru, Nakamura, Akira, Watanabe, Kiyoshi, Asakawa
  • Organizer: 13th Microoptics Conf.(MOC07)
  • Place of Presentation: Tsukuba, Japan
  • Year and Date: 2007-10-31
• [Presentation] Measurements of Optical Non-linearity Induced Phase Shifts of a Signal Pulse with Repetitive Control Pulses in Photonic Crystal/Quantum Dot Waveguide (2007)
  • Author(s): Yoshinori, Kitagawa, Nobuhiko, Ozaki, Yoshiaki, Takata, Naoki, Ikeda, Yoshinori, Watanabe, Akio, Mizutani, Yoshimasa, Sugimoto and Kiyoshi, Asakawa
  • Organizer: The 20th Annual Lasers and Electro Optics Society Meeting(LEOS2007)
  • Place of Presentation: Lake Buena Vista, FL U.S.A
  • Year and Date: 2007-10-24
• [Presentation] Monolithic Growth of InAs-QDs with Different Emission Wavelengths in Different Areas for Integrated Optical Devices (2007)
  • Author(s): Y, Takata, N, Ozaki, S, Ohkouchi, Y, Sugimoto, N, Ikeda, Y, Watanabe, Y, Kitagawa, A, Mizutani and K, Asakawa
  • Organizer: The 20th Annual Lasers and Electro Optics Society Meeting(LEOS2007)
  • Place of Presentation: Lake Buena Vista, FL U.S.A
  • Year and Date: 2007-10-21
• [Presentation] Optical-Nonlinearity-Induced Phase Shift via Selective Area Grown InAs-QDs in a Photonic Crystal Waveguide (2007)
  • Author(s): Yoshinori, Kitagawa, Nobuhiko, Ozaki, Yoshiaki, Takata, Naoki, Ikeda, Shunsuke, Ohkouchi, Yoshimasa, Sugimoto and Kiyoshi, Asakawa
  • Organizer: Int. Conf. on Solid State Devices and Materials(SSDM2007)
  • Place of Presentation: Tsukuba, Japan
  • Year and Date: 2007-09-19
• [Presentation] In situ Metal Mask for Selective Area Growth of Thin Epitaxial Layers (2007)
  • Author(s): Shunsuke, Ohkouchi, Nobuhiko, Ozaki, Yoshiaki, Takata, Yoshinori, Kitagawa, Yusui, Nakamura, Naoki, Ikeda, Yoshimasa, Sugimoto and Kiyoshi, Asakawa
  • Organizer: Int. Conf. on Solid State Devices and Materials(SSDM2007)
  • Place of Presentation: Tsukuba, Japan
  • Year and Date: 2007-09-19
• [Presentation] 選択領域に量子ドットを埋め込んだフオトニック結晶導波路での光非線形効果による位相変調 (2007)
  • Author(s): 尾崎信彦・北川嘉則・高田賀章・池田直樹・渡辺慶規・水谷彰夫・大河内俊介・杉本喜正・浅川潔
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-08
• [Presentation] プオトニック結晶導波路内量子ドットにおける繰返し制御光による信号光の位相変調 (2007)
  • Author(s): 北川嘉則・尾崎信彦・高田賀章・池田直樹・渡辺慶規・水谷彰夫・杉本喜正・浅川潔
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-08
• [Presentation] ナノジェットプローブ法により形成したInAs位置制御積層量子ドットからのPL発光 (2007)
  • Author(s): 大河内俊介・杉本喜正・石川浩・浅川潔
  • Organizer: 応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-06
• [Presentation] メタルマスク(MM)法によるInAs量子ドットの選択領域成長(m) 〜異なる場所に異なる吸収波長をもつQDの作製〜 (2007)
  • Author(s): 高田賀章・尾崎信彦・大河内俊介・杉本喜正・池田直樹・北川嘉則・渡辺慶規・水谷彰夫・浅川潔
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-06
• [Presentation] InAs quantum dots grown on selective areas with a metal mask for photonic-crystal-based ultra-small and ultra-fast all optical devices (2007)
  • Author(s): N, Ozaki, Y, Takata, S, Ohkouchi, Y, Sugimoto, N, Ikeda, Y, Watanabe, Y, Kitagawa, A, Mizutani and K, Asakawa
  • Organizer: 19th Int. Conf. Indium Phosphide and Related Materials(IPRM07)
  • Place of Presentation: Matsue, Japan
  • Year and Date: 2007-05-17
• [Presentation] Selective formation of high density InAs quantum dot arrays using templates fabricated by the nano-jet probe (2007)
  • Author(s): S, Ohkouchi, Y, Sugimoto, N, Ozaki, H, Ishikawa and K, Asakawa
  • Organizer: 19th Int. Conf. Indium Phosphide and Related Materials(IPRM07)
  • Place of Presentation: Matsue, Japan
  • Year and Date: 2007-05-17
• [Presentation] Optical nonlinearity-induced phase shift in quantum dots-embedded photonic crystal waveguide measured by pump/probe analysis (2007)
  • Author(s): N, Ozaki, Y, Kitagawa, Y, Takata, N, Ikeda, Y, Watanabe, A, Mizutani, Y, Sugimoto and K, Asakawa
  • Organizer: Int. Symp. on Photonic and Electromagnetic Crystal Structures(PECSVII)
  • Place of Presentation: Monterey, CA U.S.A
  • Year and Date: 2007-04-10
• [Presentation] Selective-area-growth of InAs-QDs for PC-based all optical devices (2007)
  • Author(s): Y, Takata, N, Ozaki, S, Ohkouchi, Y, Sugimoto, N, Ikeda, Y, Watanabe, Y, Kitagawa, A, Mizutani and K, Asakawa
  • Organizer: Int. Symp. on Photonic and Electromagnetic Crystal Structures(PECSVII)
  • Place of Presentation: Monterey, CA U.S.A
  • Year and Date: 2007-04-10
• [Presentation] GaAs photonic crystal/InAs quantum dot-based all-optical flip-flop:PC-FF (2007)
  • Author(s): K, Asakawa, Y, Sugimoto, Y, Watanabe, N, Ozaki, A, Mizutani, Y, Takata, Y, Kitagawa, N, Ikeda, X, Wang, A, Watanabe, S, Nakamura and S, Ohkouchi
  • Organizer: Int. Symp. on Photonic and Electromagnetic Crystal Structures(PECSVII)
  • Place of Presentation: Monterey, CA U.S.A
  • Year and Date: 2007-04-09
• [Presentation] High-transmission recovery in slow-light-range in photonic crystal waveguide using hetero group-velocity waveguide (2007)
  • Author(s): Y, Kitagawa, N, Ozaki, Y, Takata, N, Ikeda, Y, Watanabe, A, Mizutani, Y, Sugimoto, and K, Asakawa
  • Organizer: Int. Symp. on Photonic and Electromagnetic Crystal Structures(PECSVII)
  • Place of Presentation: Monterey, CA U.S.A
  • Year and Date: 2007-04-09
• [Patent(Industrial Property Rights)] 特許「微細構造素子製造装置及び微細構造素子生産方法」 (2008)
  • Inventor(s): 尾崎, 信彦・浅川, 潔・高田, 賀章・大河内, 俊介
  • Industrial Property Rights Holder: 筑波大学、日本電気株式会社
  • Filing Date: 2008-03-17
• [Patent(Industrial Property Rights)] 特許「光制御素子及びその生産方法」 (2007)
  • Inventor(s): 尾崎, 信彦・高田, 賀章・北川, 嘉則・浅川, 潔・Ferran, salleras・上野, 芳康
  • Industrial Property Rights Holder: 筑波大学、電気通信大学
  • Filing Date: 2007-11-30
• [Patent(Industrial Property Rights)] 特許「微細構造素子製造装置及び微細構造素子生産方法」 (2007)
  • Inventor(s): 浅川, 潔・大河内, 俊介・尾崎, 信彦
  • Industrial Property Rights Holder: 筑波大学、電気通信大学
  • Filing Date: 2007-09-03