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Fabrication of novel excitonic devices using flux-controlled sputter epitaxy and study of exciton transport in the devices

Research Project

Project/Area Number 18H01206
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 14030:Applied plasma science-related
Research InstitutionKyushu University

Principal Investigator

Naho Itagaki  九州大学, システム情報科学研究院, 教授 (60579100)

Co-Investigator(Kenkyū-buntansha) 白谷 正治  九州大学, システム情報科学研究院, 教授 (90206293)
Project Period (FY) 2018-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2020: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2019: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2018: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Keywordsエキシトントランジスタ / 酸化物半導体 / ZION / 量子井戸 / プラズマ / スパッタリング / エピタキシャル成長 / 結晶成長 / プラズマプロセス / プラズマエレクトロニクスエ / エキシトント / トランジスタ / 歪み量子井戸 / ピエゾ電界 / プラズマエレクトロニクス / エキシトン
Outline of Final Research Achievements

The objective of this research is to fabricate novel excitonic devices using novel materials ZION, which have been developed by the principal investigator (PI), by means of flux-controlled sputter epitaxy. In this project, we succeeded in (1) epitaxial growth of single crystalline ZION films, (2) formation of atomically sharp hetero-interfaces between ZION and ZnO, and (3) demonstration of switching operation of exciton transistors by photo-irradiation to the gate electrodes. We also discussed the mechanism of exciton transport by an external electric field. Based on the hypothesis that the main transport mechanisms are bipolar diffusion and translational motion of dipoles in a non-uniform electric field, we solved the diffusion equation with the electric field parallel to the exciton transport direction as the external force and succeeded in qualitatively describing exciton transport in the devices.

Academic Significance and Societal Importance of the Research Achievements

本研究は,代表者オリジナル材料であるZIONが有する潜在的な高いエキシトン束縛エネルギーとピエゾ効果を,高精度フラックス制御スパッタにより発現させ,エキシトントランジスタ実用の鍵となる「室温・長寿エキシトン」を実現することを目的としたものである.本研究は,プラズマ物理の視点から準粒子の物性探究を図るという学術的新規性に加え,情報通信ネットワークの高度化への寄与等,実用的観点からも意義を有する.

Report

(4 results)
  • 2021 Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (73 results)

All 2021 2020 2019 2018 Other

All Journal Article (19 results) (of which Int'l Joint Research: 7 results,  Peer Reviewed: 19 results,  Open Access: 2 results) Presentation (49 results) (of which Int'l Joint Research: 23 results,  Invited: 15 results) Remarks (5 results)

  • [Journal Article] Sputtering Growth of Metal Oxynitride Semiconductors for Excitonic Devices2021

    • Author(s)
      R. Narishige, N. Itagaki, M. Shiratani
    • Journal Title

      Proc. 5th IEEE Electron Devices Technology & Manufacturing Conference

      Volume: -

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells2021

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Kamataki Kunihiro、Shiratani Masaharu、Koga Kazunari、Itagaki Naho、Nakamura Daisuke
    • Journal Title

      Journal of Molecular Structure

      Volume: 1228 Pages: 129479-129479

    • DOI

      10.1016/j.molstruc.2020.129479

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Activated Carbon Counter Electrode on Bifacial Dye Sensitized Solar Cells (DSSCs)2021

    • Author(s)
      Putri Tika Erna、Hao Yuan、Chawarambwa Fadzai Lesley、Seo Hyunwoong、Son Min Kyu、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Materials Science Forum

      Volume: 1016 Pages: 863-868

    • DOI

      10.4028/www.scientific.net/msf.1016.863

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Impact of surface morphologies of substrates on the epitaxial growth of magnetron-sputtered (ZnO) x (InN)1-x films2020

    • Author(s)
      Narishige Ryota、Kaneshima Kentaro、Yamashita Daisuke、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Itagaki Naho
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SA Pages: SAAB02-SAAB02

    • DOI

      10.35848/1347-4065/abba0c

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells2020

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Son Min-Kyu、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Chemical Physics Letters

      Volume: 758 Pages: 137920-137920

    • DOI

      10.1016/j.cplett.2020.137920

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition2020

    • Author(s)
      Hwang Sung-Hwa、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Diamond and Related Materials

      Volume: 109 Pages: 108050-108050

    • DOI

      10.1016/j.diamond.2020.108050

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method2020

    • Author(s)
      Hwang Sung Hwa、Koga Kazunori、Hao Yuan、Attri Pankaj、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Shiratani Masaharu、Oh Jun-Seok、Takabayashi Susumu、Nakatani Tatsuyuki
    • Journal Title

      Processes

      Volume: 9 Issue: 1 Pages: 2-2

    • DOI

      10.3390/pr9010002

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Low-stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition2020

    • Author(s)
      Hwang Sung-Hwa、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakatani Tatsuyuki、Shiratani Masaharu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: 10 Pages: 100906-100906

    • DOI

      10.35848/1347-4065/abbb20

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical's Intensity: An EPR study2020

    • Author(s)
      Attri Pankaj、Teruki Anan、Arita Ryo、Okumura Takamasa、Tanaka Hayate、Yamashita Daisuke、Matsuo Kayo、Itagaki Naho、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Kuchitsu Kazuyuki、Ishibashi Yushi
    • Journal Title

      Plasma Medicine

      Volume: - Issue: 3 Pages: 159-168

    • DOI

      10.1615/plasmamed.2020036353

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition2020

    • Author(s)
      Itagaki Naho、Nakamura Yuta、Narishige Ryota、Takeda Keigo、Kamataki Kunihiro、Koga Kazunori、Hori Masaru、Shiratani Masaharu
    • Journal Title

      Scientific Reports

      Volume: 10 Issue: 1 Pages: 4669-4669

    • DOI

      10.1038/s41598-020-61596-w

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Improved Nanoscale Al-Doped ZnO with a ZnO Buffer Layer Fabricated by Nitrogen-Mediated Crystallization for Flexible Optoelectronic Devices2020

    • Author(s)
      Suhariadi Iping、Itagaki Naho、Shiratani Masaharu
    • Journal Title

      ACS Applied Nano Materials

      Volume: 3 Issue: 3 Pages: 2480-2490

    • DOI

      10.1021/acsanm.9b02571

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Room-temperature fabrication of amorphous In2O3:Sn films with high electron mobility via nitrogen mediated amorphization2020

    • Author(s)
      K. Imoto, H. Wang, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki
    • Journal Title

      J. Phys. Conf. Ser.

      Volume: 未定

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Gas Pressure on Crystal Quality of (ZnO)0.9(InN)0.1 Films Fabricated by Radiofrequency Magnetron Sputtering2020

    • Author(s)
      L. Shi, N. Miyahara, D. Yamashita, H. Seo, J. Lyu, K. Koga, M. Shiratani, N. Itagaki
    • Journal Title

      J. Phys. Conf. Ser.

      Volume: 未定

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of nitrogen impurity on zno crystal growth on Si substrates2019

    • Author(s)
      Muraoka Soichiro、Jiahao Lyu、Yamashita Daisuke、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Itagaki Naho
    • Journal Title

      MRS Advances

      Volume: in press Issue: 27 Pages: 1-7

    • DOI

      10.1557/adv.2019.28

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sputter Epitaxy of (ZnO)x(InN)1-x films on Lattice-mismatched Sapphire Substrate2019

    • Author(s)
      Miyahara Nanoka、Urakawa Seichi、Yamashita Daisuke、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Itagaki Naho
    • Journal Title

      MRS Advances

      Volume: in press Issue: 27 Pages: 1-6

    • DOI

      10.1557/adv.2019.17

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Room-temperature fabrication of amorphous In2O3:Sn films with high electron mobility via nitrogen mediated amorphization2019

    • Author(s)
      K. Imoto, H. Wang, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki
    • Journal Title

      J. Phys.: Conf. Ser.

      Volume: in press

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Sputtering Pressure on (ZnO)<sub>x</sub>(InN)<sub>1-x</sub> Crystal Film Growth at 450°C2018

    • Author(s)
      Itagaki Naho、Takeuchi Kazuto、Miyahara Nanoka、Imoto Kouki、Seo Hyun Woong、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Materials Science Forum

      Volume: 941 Pages: 2093-2098

    • DOI

      10.4028/www.scientific.net/msf.941.2093

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Photoluminescence of (ZnO)<sub>0.82</sub>(InN)<sub>0.18</sub> Films: Incident Light Angle Dependence2018

    • Author(s)
      Miyahara Nanoka、Iwasaki Kazuya、Yamashita Daisuke、Nakamura Daisuke、Seo Hyun Woong、Koga Kazunori、Shiratani Masaharu、Itagaki Naho
    • Journal Title

      Materials Science Forum

      Volume: 941 Pages: 2099-2103

    • DOI

      10.4028/www.scientific.net/msf.941.2099

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen-mediated amorphization method: Effects of target-substrate distance2018

    • Author(s)
      K. Imoto, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani and N, Itagaki
    • Journal Title

      Proceedings of 40th International Symposium on Dry Process, P-62

      Volume: 0

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Presentation] (仮)Sputter epitaxy through “inverse” SK mode for a new class of excitonic devices2021

    • Author(s)
      Naho Itagaki
    • Organizer
      MRS Fall 2021 Meeting
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 非晶質(仮)ZnON膜からの固相結晶化ZnO膜の形成とシード層としての効果2021

    • Author(s)
      板垣奈穂
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] スパッタエピタキシー法を駆使したZnO系新材料の開発2021

    • Author(s)
      板垣奈穂
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] スパッタエピタキシーによる新規酸窒化物半導体材料の作製とエキシトンデバイスへの応用2021

    • Author(s)
      板垣奈穂
    • Organizer
      東工大フロンティア材料研究所講演会「複合アニオン酸化物の新電子機能とデバイス研究の最前線」
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Structural and Optical Properties of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy2021

    • Author(s)
      D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen mediate amorphization method: Effects of nitrogen flow rate2021

    • Author(s)
      Y. Mido, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of surface polarity of ZnO substrates on epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films2021

    • Author(s)
      R. Narishige, K. Kaneshima, S. Urakawa, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of ZnAlO films with tunable bandgaps from 3.4 to 6.1 eV2021

    • Author(s)
      S. Urakawa, K. Kaneshima, R. Narishige, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth of high-quality (ZnO)x(InN)1-x films by RF magnetron sputtering using a two-step growth process2021

    • Author(s)
      K. Kaneshima, S. Urakawa, R. Narishige, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impact of surface morphologies of 3D island layers on the single crystal growth of magnetron sputtered ZnO films2021

    • Author(s)
      Y. Nakamura, M. Kikuchi, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter epitaxy through “inverse” SK mode for a new class of excitonic devices2020

    • Author(s)
      Naho Itagaki
    • Organizer
      4th Asia Pacific Conference on Plasma Physics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] A novel semiconductor ZION for excitonic devices2020

    • Author(s)
      Naho Itagaki
    • Organizer
      Satellite meeting of AAPPS-DPP2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Sputter deposition of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature2020

    • Author(s)
      Y. Midou, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 5th Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Bandgap Tuning of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy2020

    • Author(s)
      D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita,T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 5th Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of substrate surface polarity on epitaxial growth of magnetron sputtered (ZnO)x(InN)1-xfilms2020

    • Author(s)
      R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki,T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 5th Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ar/N2スパッタリングによるサファイア基板上へのZnO単結晶成長:O-poorバッファー層の効果2020

    • Author(s)
      松本翔剛, 髙橋大智, 中村優太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] スパッタエピタキシー法による(ZnO)X(InN)1-X膜の作製: 高温バッファー層の効果2020

    • Author(s)
      寺澤寛, 金島健太郎, 成重椋太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Effects of substrates on the epitaxial growth of (ZnO)x(InN)1-x films2020

    • Author(s)
      Ryota Narishige, Kentaro Kaneshima, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki
    • Organizer
      12th International Symposium on Advanced Plasma Science and Its Application for Nitrides and Nanomaterials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ZnO Based Semiconductors for Excitonic Devices2019

    • Author(s)
      N. Itagaki, K. Kamataki, K. Koga, M. Shiratani
    • Organizer
      Materials Research Meeting 2019 (MRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Sputtering Deposition with Impurities: Another Key Parameter to Control Film Structures2019

    • Author(s)
      N. Itagaki, K. Kamataki, K. Koga, M. Shiratani
    • Organizer
      Materials Research Meeting 2019 (MRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Inverse Stranski-Krastanov growth: a method for growth of single crystalline films beyond lattice-matching condition (Invited)2019

    • Author(s)
      N. Itagaki
    • Organizer
      Satellite Workshop of XXXIV ICPIG & ICRP-10 "New trends of plasma processes for thin films and related materials for the deep discussion on new trends of plasma processes"
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] M. Shiratani, K. Kamataki, K. Koga, N. Itagaki2019

    • Author(s)
      Advanced Methods of Thin Film Fabrication using Plasmas (Invited)
    • Organizer
      28th International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS28)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Sputter Epitaxy of (ZnO)x(InN)1-x films for Excitonic Transistors2019

    • Author(s)
      R. Narishige, N. Miyahara, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of Substrate temperature on Crystal Quality of (ZnO)x(InN)1-x Films Fabricated by Sputter Epitaxy2019

    • Author(s)
      K. Kaneshima, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface morphology of single-crystal ZnO films on sapphire substrates fabricated by sputter epitaxy2019

    • Author(s)
      Y. Nakamura, S. Muraoka, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of amorphous ZnAlON films with tunable bandgap2019

    • Author(s)
      S. Urakawa, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of wide bandgap (ZnO)x(AlN)1-x alloys: a new material system with tunable bandgap2019

    • Author(s)
      S. Urakawa, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter Epitaxy of (ZnO)x(InN)1-x Films on Sapphire Substrates2019

    • Author(s)
      N. Miyahara, S. Urakawa, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] (ZnO)x(InN)1-x膜のスパッタエピタキシーにおける基板温度の影響2019

    • Author(s)
      金島健太郎, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Annual Research Report
  • [Presentation] スパッタエピタキシーによるサファイア基板上への単結晶ZnO膜の成長2019

    • Author(s)
      中村優太, 村岡宗一郎, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Annual Research Report
  • [Presentation] "Sputter deposition of wide-gap amorphous ZnAlON films with tunable bandgaps from 3.4 to 4.2 eV"2019

    • Author(s)
      S. Urakawa, K. Kaneshima, D. Yamashita, K. Kamataki, D. Nakamura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Annual Research Report
  • [Presentation] RFマグネトロンスパッタリングによる可変バンドギャップ半導体(ZnO)x(AlN)1-xの創成2019

    • Author(s)
      浦川聖市, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和元年度日本表面真空学会 九州支部学術講演会(九州表面・真空研究会2019)
    • Related Report
      2019 Annual Research Report
  • [Presentation] スパッタエピタキシーによるサファイア基板上(ZnO)x(InN)1-x薄膜の2段階成長2019

    • Author(s)
      宮原奈乃華,浦川聖市,山下大輔, 鎌滝晋礼,古閑 一憲,白谷 正治,板垣 奈穂
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] スパッタエピタキシーによるサファイア基板直上へのIn-rich (ZnO)x(InN)1-x膜の作製2018

    • Author(s)
      宮原 奈乃華,山下 大輔,鎌滝 晋礼,中村大輔,古閑 一憲,白谷 正治,板垣 奈穂
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Fabrication of high-mobility amorphous In2O3:Sn films via nitrogen-mediated amorphization: effects of target-substrate distance2018

    • Author(s)
      K. Imoto, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani and N. Itagaki
    • Organizer
      28th Annual Meeting of Material Research Society Japan
    • Related Report
      2018 Annual Research Report
  • [Presentation] Sputter Epitaxy of ZnO Based Compounds for Excitonic Deviceser Epitaxy of Compound Semiconductors via Inverse Stranski-Krastanov Mode: A Method of Single-Crystalline Film Growth2018

    • Author(s)
      N. Itagaki, K. Imoto, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga and M. Shiratani
    • Organizer
      28th Annual Meeting of Material Research Society Japan
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Sputter Epitaxy of Compound Semiconductors via Inverse Stranski-Krastanov Mode: A Method of Single-Crystalline Film Growth beyond Lattice Matching Condition2018

    • Author(s)
      N. Itagaki, K. Imoto, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga and M. Shiratani
    • Organizer
      28th Annual Meeting of Material Research Society Japan
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Sputter epitaxy of high quality (ZnO)x(InN)1-x: a new semiconducting material for excitonic devices2018

    • Author(s)
      N. Itagaki
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Sputter epitaxy of single crystalline ZnO on 18%-lattice-mismatched sapphire using multi buffer layers fabricated via nitrogen mediated crystallization2018

    • Author(s)
      Jiahao Lyu, Daisuke Yamashita, Kazunori Koga, Masaharu Shiratani, Naho Itagaki
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics
    • Related Report
      2018 Annual Research Report
  • [Presentation] マグネトロンスパッタによる擬2元系混晶(ZnO)x (InN,AlN)1-xのヘテロエピタキシー2018

    • Author(s)
      浦川 聖市,宮原 奈乃華,山下 大輔,鎌滝 晋礼,古閑 一憲,白谷正治,板垣奈穂
    • Organizer
      プラズマ・核融合学会 九州・沖縄・山口支部 支部大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Catalyst-free growth of (ZnO)0.79(InN)0.21 nanorods by RF magnetron sputtering2018

    • Author(s)
      Nanoka Miyahara, Daisuke Yamashita, Daisuke Nakamura, Kazunori Koga, Masaharu Shiratani, Naho Itagaki
    • Organizer
      Materials Research Society 2018 Meeting & Exhibit
    • Related Report
      2018 Annual Research Report
  • [Presentation] Effects of nitrogen impurity on sputtering growth of ZnO films on Si(111) substrates2018

    • Author(s)
      Soichiro Muraoka, Jiahao Lyu, Daisuke Yamashita, Kunihiro Kamataki1, Kazunori Koga, Masaharu Shiratani, Naho Itagaki
    • Organizer
      Materials Research Society 2018 Meeting & Exhibit
    • Related Report
      2018 Annual Research Report
  • [Presentation] Ar/N2スパッタリングによる低抵抗アモルファスITO膜の作製:ターゲット-基板間距離の影響2018

    • Author(s)
      井本幸希, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第35回 プラズマ・核融合学会 年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] フラックス制御スパッタによるIn-rich (ZnO)x(InN)1-x膜のヘテロエピタキシー2018

    • Author(s)
      宮原 奈乃華, 浦川 聖市, 山下 大輔, 鎌滝 晋礼,中村大輔, 古閑 一憲,白谷 正治,板垣 奈穂
    • Organizer
      第35回 プラズマ・核融合学会 年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] RFマグネトロンスパッタ法を用いたSi(111)基板上でのZnO結晶成長における窒素不純物の効果2018

    • Author(s)
      村岡宗一郎、呂佳豪、山下大輔、鎌滝晋礼、古閑一憲、白谷正治、板垣奈穂
    • Organizer
      第35回 プラズマ・核融合学会 年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 窒素添加結晶化法による格子不整合基板上へZnOエピタキシャル成長―窒素酸素共添加多段バッファー層の効果―2018

    • Author(s)
      呂 佳豪, 鎌滝 晋礼, 山下 大輔, 古閑 一憲, 白谷 正治, 板垣 奈穂
    • Organizer
      第35回 プラズマ・核融合学会 年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen-mediated amorphization method: Effects of target-substrate distance2018

    • Author(s)
      K. Imoto, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani and N, Itagaki
    • Organizer
      40th International Symposium on Dry Process
    • Related Report
      2018 Annual Research Report
  • [Presentation] Inverse Stranski-Krastanov Growth of Single Crystalline Films: A New Mode of Heteroepitaxy for Large Lattice Mismatched System2018

    • Author(s)
      Naho Itagaki, M. Shiratani
    • Organizer
      Int'l Conf. Processing Manufacturing Adv. Matter. (THERMEC2018)
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Room Temperature Photoluminescence from (ZnO)0.79(InN)0.21 films fabricated by RF magnetron sputtering2018

    • Author(s)
      Nanoka Miyahara, Liu Shi, Kazuya Iwasaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani, and Naho Itagaki
    • Organizer
      Int'l Conf. Processing Manufacturing Adv. Matter. (THERMEC2018)
    • Related Report
      2018 Annual Research Report
  • [Remarks] 九州大学研究者情報

    • URL

      https://hyoka.ofc.kyushu-u.ac.jp/search/details/K003622/

    • Related Report
      2020 Annual Research Report
  • [Remarks] 九州大学大学院システム情報科学研究院 情報エレクトロニクス部門 板垣研究室

    • URL

      http://plasma.ed.kyushu-u.ac.jp/~inorganic/

    • Related Report
      2020 Annual Research Report
  • [Remarks] 九州大学研究者情報

    • URL

      http://hyoka.ofc.kyushu-u.ac.jp/search/details/K003622/

    • Related Report
      2019 Annual Research Report 2018 Annual Research Report
  • [Remarks] 電子材料工学研究室

    • URL

      http://plasma.ed.kyushu-u.ac.jp/~inorganic/

    • Related Report
      2019 Annual Research Report 2018 Annual Research Report
  • [Remarks] researchmap

    • URL

      https://researchmap.jp/itagakinaho

    • Related Report
      2018 Annual Research Report

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Published: 2018-04-23   Modified: 2023-01-30  

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