| Budget Amount *help |
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2020: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2019: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2018: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
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| Outline of Final Research Achievements |
The principal investigator has realized a laser scanning interferometer with a field of view about 400 times that of existing equipment. We have also developed a new single-shot measurement method that can determine the shape of a sample with nano-accuracy from a single interferogram by forming a metal thin film on the reference plate.
Interference measurements are generally vulnerable to vibration and are performed in an environment that eliminates vibration as much as possible. Therefore, despite the high measurement accuracy, the interferometry could not be applied on the machine tool table. In this study, we showed that the new single-shot measurement method has excellent vibration resistance.
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