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Development of wearable fine tactile display with shape memory thick film for tele-existence

Research Project

Project/Area Number 18H01402
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 20020:Robotics and intelligent system-related
Research InstitutionYamagata University

Principal Investigator

Mineta Takashi  山形大学, 大学院理工学研究科, 教授 (50374814)

Co-Investigator(Kenkyū-buntansha) 野々村 美宗  山形大学, 大学院理工学研究科, 教授 (50451662)
Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2020: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2019: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2018: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Keywords触覚ディスプレイ / 形状記憶合金 / 厚膜 / MEMS / 高出力 / 高精細 / 実装 / 装着型 / 厚膜形成
Outline of Final Research Achievements

Thin MEMS tactile display device with high output shape memory alloy (SMA) actuator array was developed for realistic tactile presentation in wearable applications. The design of meandering SMA thick film actuator was thermally and mechanically optimized. Fabrication process of arrayed micro-pins was also established using lithography technology. By the fabricated tactile display device, the generated force and amplitude more than twice the detection thresholds of human skin were successfully obtained. Moreover, the substrate bonding of the SMA layer to a Si substrate with arrayed diode elements and through substrate via (TSV) electrodes was developed for high density assembling on a flexible printed circuit. As the results of tactile sensory evaluation, basic tactile presentation performances, for example, effect of vibrational frequency on stimulation, and effect of movement of vibration points were successfully demonstrated.

Academic Significance and Societal Importance of the Research Achievements

視覚によらず皮膚下の触覚受容器へ振動ピンによる刺激で記号等の配列や面内での動き等の情報提示手法が提案されてきた。本研究により、SMA厚膜マイクロアクチュエータを用いて高精細で大出力を得る超薄型MEMS構造の触覚ディスプレイ素子の実現見通しを得たことは、視覚障害者のみならず健常者へ皮膚を介して臨場感ある情報提示する皮膚装着型VRツールの実用化へ向け大きな意義を持つ。量産性に優れる基板単位で素子を一括形成法する実用性の高い技術である。また、今後の触覚受容器マイスナー小体を対象とした高精細な触覚情報提示に関する体系的な評価研究への学術面での大きな寄与も期待される。

Report

(4 results)
  • 2021 Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (51 results)

All 2022 2021 2020 2019 2018 Other

All Journal Article (9 results) (of which Peer Reviewed: 9 results,  Open Access: 4 results) Presentation (37 results) (of which Int'l Joint Research: 12 results) Book (1 results) Remarks (4 results)

  • [Journal Article] Fabrication of Tactile Display Mechanism Using Arrayed SMA Thick Film Actuator and Si TSV Layer with Individually Connecting Diode2021

    • Author(s)
      R. Saito, Y. Kimura, J. Xu, T. Mineta
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 141 Issue: 7 Pages: 260-264

    • DOI

      10.1541/ieejsmas.141.260

    • NAID

      130008060182

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2021-07-01
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Recognition Mechanism of the “<i>Sara-sara</i> Feel” of Cosmetic Powders2021

    • Author(s)
      Yuta Kato, Rieko Kuhara, Maki Sakamoto, Reiichiro Tsuchiya, Noboru Nagatani, Yoshimune Nonomura
    • Journal Title

      Journal of Oleo Science

      Volume: 70 Issue: 2 Pages: 195-202

    • DOI

      10.5650/jos.ess20252

    • NAID

      130007979445

    • ISSN
      1345-8957, 1347-3352
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication and characterization of SMA film actuator array with bias spring for high-power MEMS tactile display,2020

    • Author(s)
      J. Xu, Y. Kimura, K. Tsuji, K. Abe, T. Shimizu, H. Hasegawa, T. Mineta
    • Journal Title

      Microelectronic Engineering

      Volume: 227 Pages: 111307-111307

    • DOI

      10.1016/j.mee.2020.111307

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Friction Dynamics on Human Skin Surfaces2020

    • Author(s)
      Yoshimune Nonomura, Haruka Ouchi
    • Journal Title

      Journal of Oleo Science

      Volume: 69 Issue: 5 Pages: 461-465

    • DOI

      10.5650/jos.ess20012

    • NAID

      130007839815

    • ISSN
      1345-8957, 1347-3352
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Nonlinear friction dynamics in the cognitive process of food textures: Thickness of polysaccharide solution2020

    • Author(s)
      Okawara Hina、Shinomiya Koki、Fujita Minoru、Koda Tomonori、Nishioka Akihiro、Nonomura Yoshimune
    • Journal Title

      Journal of Texture Studies

      Volume: 51 Issue: 5 Pages: 779-788

    • DOI

      10.1111/jtxs.12538

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication and characterization of SMA film actuator array with bias spring for high-power MEMS tactile display2020

    • Author(s)
      J. Xu, Y. Kimura, K. Tsuji, K. Abe, T. Shimizu, H. Hasegawa, T. Mineta
    • Journal Title

      Microelectronic Eng.

      Volume: in press

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Tactile Sensation using Periodic Si Micro-bump Arrayed Surface with Various Bump Sizes2019

    • Author(s)
      徐 嘉楽, 野々村美宗, 峯田 貴
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 139 Issue: 12 Pages: 393-399

    • DOI

      10.1541/ieejsmas.139.393

    • NAID

      130007754466

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2019-12-01
    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Tactile Display Device with Individually-driven-type Shape Memory Alloy Thick Film Actuator Array2019

    • Author(s)
      木村 友翼, 辻 一樹, 梁取 大, 峯田 貴, 阿部 喜, 岩崎 健二
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 139 Issue: 9 Pages: 329-334

    • DOI

      10.1541/ieejsmas.139.329

    • NAID

      130007699893

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2019-09-01
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Physical origin of a complicated tactile sensation: ‘ shittori feel'2019

    • Author(s)
      Kikegawa Kana、Kuhara Rieko、Kwon Jinhwan、Sakamoto Maki、Tsuchiya Reiichiro、Nagatani Noboru、Nonomura Yoshimune
    • Journal Title

      Royal Society Open Science

      Volume: 6 Issue: 7 Pages: 190039-190039

    • DOI

      10.1098/rsos.190039

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] MEMS触覚ディスプレイのためのSMA厚膜アクチュエータアレイと個別駆動用有機ダイオード素子の形成2022

    • Author(s)
      天野晏年, 斎藤涼, 山田将也, 松井弘之, 峯田貴
    • Organizer
      日本機械学会東北学生会 第51回学生員卒業研究発表講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] アレイ状のSMA厚膜アクチュエータとコイルばねを配置したせん断駆動型触覚ディスプレイ機構部の形成2021

    • Author(s)
      佐藤勇人, 丸山顕, 齋藤涼, 峯田貴
    • Organizer
      第38回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 触覚ディスプレイ素子のための熱応答を向上したSMAアクチュエータとDRIEとめっきによるTSV基板の形成2021

    • Author(s)
      齋藤涼, 天野晏年, 峯田貴
    • Organizer
      第38回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Optimal design and fabrication of high output SMA film actuator array for MEMS tactile display2021

    • Author(s)
      Ryo Saito, Haruto Amano, Takashi Mineta
    • Organizer
      9th Int. Conf. on Smart Sys. Eng.
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of the cooling-fluid-filled SMA thick actuator array for high power tactile display2021

    • Author(s)
      Jiale Xu, Yusuke Kimura, Kazuki Tsuji, Akira Maruyama, Ryo Saito, Takashi Mineta,
    • Organizer
      9th Int. Conf. on Smart Sys. Eng.
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of shearing motion mechanism with SMA-thick-film actuator and coil spring array for tactile display device2021

    • Author(s)
      Hayato Sato, Akira Maruyama, Ryo Saito, Takashi Mineta
    • Organizer
      9th Int. Conf. on Smart Sys. Eng.
    • Related Report
      2020 Annual Research Report
  • [Presentation] アレイ状のSMA 厚膜アクチュエータとコイルばねを配置したせん断駆動型触覚ディスプレイの形成2021

    • Author(s)
      佐藤勇人, 丸山顕, 齋藤涼, 峯田貴
    • Organizer
      電気学会センサ・シクロマシン部門総合研究会,
    • Related Report
      2020 Annual Research Report
  • [Presentation] 厚膜SMA アクチュエータとコイルばねによるせん断駆動型触覚ディスプレイの形成2021

    • Author(s)
      佐藤勇人, 丸山顕, 齋藤涼, 峯田貴
    • Organizer
      日本機械学会東北学生会 第50回学生員卒業研究発表講演会,
    • Related Report
      2020 Annual Research Report
  • [Presentation] 高品質なTiNiCu 形状記憶合金の成膜手法の開発2021

    • Author(s)
      栗城美咲,佐藤翼,峯田貴,
    • Organizer
      日本機械学会東北学生会 第50回学生員卒業研究発表講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Fabrication of Tactile Display Using Arrayed SMA Film Actuator on Silicon TSV Substrate with Individually Conducting Diode2021

    • Author(s)
      Ryo Saito, Yusuke Kimura, Jiale Xu, Takashi Mineta
    • Organizer
      34th IEEE Int. Conf. on Micro Electro Mechanical Systems (IEEE-MEMS 2021)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of tactile display using arrayed SMA actuator on Si TSV substrate with individually conducting diode2020

    • Author(s)
      Ryo Saito, Yusuke Kimura, Jiale Xu, Takashi Mineta,
    • Organizer
      The 8th Int. Conf. on Smart Systems Eng.
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 個別通電用Siダイオードを搭載したTSV基板とSMA厚膜アクチュエータを接合したアレイ型触覚ディスプレイの形成2020

    • Author(s)
      斎藤涼,木村 友翼,徐嘉楽,峯田貴
    • Organizer
      第37回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 個別通電用Siダイオードを搭載したTSV電極Si層とSMA厚膜アクチュエータアレイをもつ触覚ディスプレイの形成”2020

    • Author(s)
      斎藤涼,木村 友翼,徐嘉楽,峯田貴
    • Organizer
      日本機械学会年次大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] SU-8基板接合を用いたSMA厚膜アクチュエータアレイ/個別通電用TSV電極構造の触覚ディスプレイ素子の形成2020

    • Author(s)
      斎藤涼,木村 友翼,徐嘉楽,峯田貴
    • Organizer
      電気学会センサ・シクロマシン部門総合研究会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 個別通電用Siダイオードアレイを搭載したSMA厚膜型触覚ディスプレイの形成2020

    • Author(s)
      斎藤涼,木村 友翼,徐嘉楽,峯田 貴
    • Organizer
      (1)斎藤涼,木村 友翼,徐嘉楽,峯田 貴, “形状記憶合金厚膜アレイによる個別動作型触覚ディスプレイ素子の開発”, 日本機械学会東北学生会 第49回学生員卒業研究発表講演会, (2020)
    • Related Report
      2019 Annual Research Report
  • [Presentation] 金属薄膜の熱処理による塑性変形を用いたMEMSカンチレバーのたわみ調整法2019

    • Author(s)
      飯島陽太, 増田雄介, 田中勝, 峯田貴
    • Organizer
      電気学会センサ・シクロマシン部門総合研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 触覚ディスプレイ用のNi薄膜バイアスばねおよびSU-8マイクロ機構の一括形成と剛性評価2019

    • Author(s)
      辻一樹, 徐嘉楽, 阿部喜, 清水智巨, 長谷川博康, 峯田貴
    • Organizer
      電気学会センサ・シクロマシン部門総合研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高出力触覚ディスプレイのための形状記憶合厚膜アクチュエータアレイの形成2019

    • Author(s)
      徐嘉楽, 木村友翼, 辻一樹, 阿部喜, 清水智巨, 長谷川博康, 峯田貴
    • Organizer
      電気学会センサ・シクロマシン部門総合研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 個別動作型の形状記憶合金厚膜アレイ触覚ディスプレイ素子の形成2019

    • Author(s)
      木村 友翼, 辻 一樹, 梁取 大, 峯田 貴, 阿部 喜, 岩崎 健二
    • Organizer
      電気学会センサ・シクロマシン部門総合研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Fabrication and characterization of SMA thick film actuator array for high power tactile display2019

    • Author(s)
      J. Xu, Y. Kimura, K. Tsuji, K. Abe, T. Shimizu, H. Hasegawa, T. Mineta
    • Organizer
      45th Int. Conf. on Micro Nano Eng. (MNE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Adjustment method of MEMS dual-cantilever deflection using plastic deformation of metal thin film by thermal annealing2019

    • Author(s)
      M. Tanaka, Y. Iijima, Y. Masuda, T. Sato, T. Mineta
    • Organizer
      45th Int. Conf. on Micro Nano Eng. (MNE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and characterization of arrayed micro-structure with Ni film springs and photolithographed SU-8 micro-pins for Tactile Display Device2019

    • Author(s)
      K. Tsuji, J. Xu, K. Abe, T. Shimizu, H. Hasegawa, T. Mineta,
    • Organizer
      45th Int. Conf. on Micro Nano Eng. (MNE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Flash-Evaporation of High Cu Content TiNiCu and TiNiCo Shape Memory Alloy Films2019

    • Author(s)
      Masayuki Murakami, Takashi Mineta
    • Organizer
      SmaSys 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SU-8マイクロピン搭載型Ni膜バイアスばねアレイとSMA厚膜アクチュエータ接合による触覚ディスプレイ素子の形成2019

    • Author(s)
      丸山 顕, 辻 一樹, 徐 嘉楽, 木村 友翼, 阿部 喜, 清水 智巨, 長谷川 博康, 峯田 貴,
    • Organizer
      精密工学会会東北支部講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 貫通電極Si基板型とSMA厚膜アクチュエータによる触覚ディスプレイの形成2019

    • Author(s)
      木村 友翼, 丸山 顕, 徐 嘉楽, 峯田 貴
    • Organizer
      第36回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] AlおよびNi薄膜の熱処理による塑性変形を用いた MEMSカンチレバーのたわみ調整法2019

    • Author(s)
      飯島 陽太, 増田 雄介, 田中 勝, 峯田 貴
    • Organizer
      第36回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 触覚ディスプレイ用のNi厚膜バイアスばね/SU-8マイクロ機構の一括形成および剛性評価2019

    • Author(s)
      辻 一樹, 徐 嘉楽, 丸山 顕, 阿部 喜, 清水 智巨, 長谷川 博康, 峯田 貴
    • Organizer
      第36回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高出力触覚ディスプレイのための形状記憶合金厚膜アクチュエータアレイの形成および特性評価2019

    • Author(s)
      徐 嘉楽, 木村 友翼, 辻 一樹, 阿部 喜, 清水 智巨, 長谷川 博康, 峯田 貴
    • Organizer
      第36回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Si 基板貫通配線へ SMA 厚膜アクチュエータを接合した触覚ディスプレイ2019

    • Author(s)
      丸山顕, 木村友翼, 徐嘉楽, 峯田貴
    • Organizer
      日本機械学会東北学生会 第49回学生員卒業研究発表講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 形状記憶合金フラッシュ蒸着膜の膜厚方向の組成均一性の向上2019

    • Author(s)
      村上誠幸, 峯田貴
    • Organizer
      日本機械学会東北学生会 第49回学生員卒業研究発表講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 種々サイズの凸構造をもつ周期的なSiマイクロ凹凸表面による触感の評価2018

    • Author(s)
      徐嘉楽、野々村美宗、峯田貴
    • Organizer
      電気学会センサ・シクロマシン部門総合研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Characterization of tactile sensation of deformable surface with micro-bump structure2018

    • Author(s)
      J. Xu, J. Gong, H. Furukawa, Y. Nonomura, T. Mineta
    • Organizer
      44th Int. Conf. on Micro Nano Eng
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of tactile display with individual-driving shape memory alloy thick film actuator array2018

    • Author(s)
      Y. Kimura, K. Tsuji, K. Abe, Y. Ono, T. Mineta
    • Organizer
      44th Int. Conf. on Micro Nano Eng.
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and Characterization of Arrayed Ni Thin Film Bias Springs with SU-8 Micro-Pin structure for Tactile Display Device2018

    • Author(s)
      (10)Kazuki Tsuji, Konomu Abe, Tomomi Shimizu, Hiroyasu Hasegawa and Takashi Mineta
    • Organizer
      SmaSys 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and Characteristics of Shape Memory Alloy Arrayed Thick Film Actuators with Individual-Actuation-Type Tactile Display Device2018

    • Author(s)
      Y. Kimura, K. Tsuji, K. Abe, Y. Ono, T. Mineta
    • Organizer
      SmaSys 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 個別動作型の形状記憶合金厚膜アレイ触覚ディスプレイ素子の形成2018

    • Author(s)
      木村 友翼, 辻 一樹, 梁取 大, 峯田 貴, 阿部 喜, 岩崎 健二
    • Organizer
      第35回センサ・マイクロマシンと応用システムシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] マイクロピンとフレーム構造を一括形成した触覚ディスプレイ用Ni薄膜平型ばねの作製と剛性評価2018

    • Author(s)
      辻 一樹, 阿部 喜, 清水 智巨, 長谷川 博康, 峯田 貴
    • Organizer
      日本機械学会 第26回機械材料・材料加工技術講演会
    • Related Report
      2018 Annual Research Report
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    • Author(s)
      峯田貴
    • Total Pages
      7
    • Publisher
      技術情報協会
    • ISBN
      9784861048500
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  • [Remarks] 峯田研究室HP

    • URL

      http://mineta-lab.yz.yamagata-u.ac.jp/

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  • [Remarks] 山形大学 理工学研究科(工学系)マイクロ・ナノ・テクノロジー 峯田研究室

    • URL

      http://mineta-lab.yz.yamagata-u.ac.jp/

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  • [Remarks] 山形大学 理工学研究科バイオ科学光学専攻 野々村研究室

    • URL

      http://nonomura.yz.yamagata-u.ac.jp/

    • Related Report
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  • [Remarks] 峯田研究室(山形大学)Research/研究紹介

    • URL

      http://mineta-lab.yz.yamagata-u.ac.jp/

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Published: 2018-04-23   Modified: 2023-01-30  

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