Quantum sensing of wide bandgap power devices

• Project/Area Number: 18H01472
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 21050:Electric and electronic materials-related
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Iwasaki Takayuki 東京工業大学, 工学院, 准教授 (80454031)
• Co-Investigator(Kenkyū-buntansha): 波多野 睦子 東京工業大学, 工学院, 教授 (00417007)
• Project Period (FY): 2018-04-01 – 2022-03-31
• Project Status: Completed (Fiscal Year 2021)
• Budget Amount: ¥17,680,000 (Direct Cost: ¥13,600,000、Indirect Cost: ¥4,080,000); Fiscal Year 2021: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2020: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2019: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2018: ¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000)
• Keywords: 量子センサ / NVセンター / パワーデバイス / 量子センシング / デバイス / ダイヤモンド / 量子発光構造

Outline of Final Research Achievements

In this study, we developed basic technologies of quantum sensing for realization of next-generation low loss power devices. In a diamond device, we proposed a novel method to measure electric field vectors using NV centers in diamond, and then, we demonstrated the measurements under the reverse voltage operation. Furthermore, we developed sensing technologies of temperature measurements and electrical detection.

Academic Significance and Societal Importance of the Research Achievements

パワーデバイスは社会の様々なシステムにおいて使用される半導体素子である。ダイヤモンドはその優れた物性から次世代の低損失パワーデバイスを形成する材料として期待されており、その動作の信頼性などをモニタリングする手法は重要となる。本研究で開発したダイヤモンドデバイスの量子センシング技術は、デバイス動作理解の新たな知見を与えることが期待でき、今後のダイヤモンドパワーデバイス技術の発展に寄与するものである。

Research Products

• [Int'l Joint Research] Harvard University(米国)
• [Int'l Joint Research] 南フロリダ大学(米国)
• [Journal Article] Photoelectrical detection of nitrogen-vacancy centers by utilizing diamond lateral p-i-n diodes (2021)
  • Author(s): T. Murooka, M. Shiigai, Y. Hironaka, T. Tsuji, B. Yang, T. M. Hoang, K. Suda, K. Mizuno, H. Kato, T. Makino, M. Ogura, S. Yamasaki, M. Hatano, T. Iwasaki
  • Journal Title: Applied Physics Letters Volume: 118 Issue: 25
  • DOI: 10.1063/5.0055852
  • Peer Reviewed
• [Journal Article] Electron spin contrast of high-density and perfectly aligned nitrogen-vacancy centers synthesized by chemical vapor deposition (2021)
  • Author(s): Kosuke Mizuno , Makoto Nakajima, Hitoshi Ishiwata , Mutsuko Hatano, and Takayuki Iwasaki
  • Journal Title: Applied Physics Express Volume: 14 Issue: 3 Pages: 032001-032001
  • DOI: 10.35848/1882-0786/abd868
  • Peer Reviewed
• [Journal Article] Vector Electrometry in a Wide-Gap-Semiconductor Device Using a Spin-Ensemble Quantum Sensor (2020)
  • Author(s): Bang Yang , Takuya Murooka , Kosuke Mizuno, Kwangsoo Kim, Hiromitsu Kato, Toshiharu Makino, Masahiko Ogura, Satoshi Yamasaki, Marek E. Schmidt, Hiroshi Mizuta, Amir Yacoby, Mutsuko Hatano, and Takayuki Iwasaki
  • Journal Title: PHYSICAL REVIEW APPLIED Volume: 14 Issue: 4
  • DOI: 10.1103/physrevapplied.14.044049
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Characterization of Schottky Barrier Diodes on Heteroepitaxial Diamond on 3C-SiC/Si Substrates (2019)
  • Author(s): Takuya Murooka , Junya Yaita, Toshiharu Makino, Masahiko Ogura, Hiromitsu Kato, Satoshi Yamasaki, Meralys Natal, Stephen E. Saddow, Takayuki Iwasaki, Mutsuko Hatano
  • Journal Title: IEEE TRANSACTIONS ON ELECTRON DEVICES Volume: 67 Issue: 1 Pages: 212-216
  • DOI: 10.1109/ted.2019.2952910
  • Peer Reviewed / Int'l Joint Research
• [Presentation] ダイヤモンド量子技術 (2022)
  • Author(s): 岩﨑 孝之
  • Organizer: nano tech 2022
  • Invited
• [Presentation] ダイヤモンドNV量子センサの基礎と応用 (2022)
  • Author(s): 岩﨑 孝之
  • Organizer: 第69回応用物理学会春季学術講演会 チュートリアル
• [Presentation] 格子欠陥を用いたダイヤモンド量子技術 (2021)
  • Author(s): 岩崎 孝之
  • Organizer: 応用物理学会 先進パワー半導体分科会 第21回研究会
  • Invited
• [Presentation] pinダイオードを用いたNVセンターの電気的読み出し (2020)
  • Author(s): 室岡 拓也、椎貝 雅文、Hoang Minh Tuan、水野 皓介、加藤 宙光、牧野 俊晴、小倉 雅彦、山崎 聡、波多野 睦子、岩崎 孝之
  • Organizer: 第81回応用物理学会秋季学術講演会
• [Presentation] Photoelectrical Detection of NV Centers Utilizing Lateral p-i-n Diode (2020)
  • Author(s): Takuya Murooka, Masafumi Shiigai, Yuma Hironaka, Tuan Minh Hoang, Hiromitsu Kato, Toshiharu Makino, Masahiko Ogura, Satoshi Yamasaki, Mutsuko Hatano, and Takayuki Iwasaki
  • Organizer: The 3rd International Forum on Quantum Metrology and Sensing
  • Int'l Joint Research
• [Presentation] Evaluation of magnetic sensitivity of photoelectrical detection of NV centers in a lateral diamond p-i-n diode (2020)
  • Author(s): M. Shiigai, T. Murooka, Y. Hironaka, T. M. Hoang, T. Makino, H. Kato, M. Ogura, S. Yamasaki, M. Hatano, and T. Iwasaki
  • Organizer: The 3rd International Forum on Quantum Metrology and Sensing
  • Int'l Joint Research
• [Presentation] Efficient electrical readout of NV Centers using a diamond p-i-n diode (2020)
  • Author(s): Takuya Murooka, Masafumi Shiigai, Bang Yang, Toshiharu Makino, Hiromitsu Kato, Masahiko Ogura, Satoshi Yamasaki, Mutsuko Hatano, and Takayuki Iwasaki
  • Organizer: Hasselt Diamond Workshop 2020
  • Int'l Joint Research
• [Presentation] Nanoscale vector electrometry using nv centers in a diamond device (2020)
  • Author(s): B. Yang, M. Nakamura, T. Murooka, K. Mizuno, T. Makino, H. Kato, M. Ogura, S. Yamasaki, M. Hatano, T. Iwasaki
  • Organizer: Hasselt Diamond Workshop 2020
  • Int'l Joint Research
• [Presentation] ダイヤモンド横型pn接合ダイオードを用いたGeVセンターの電気励起 (2020)
  • Author(s): 須田 弘平，室岡 拓也，楊 棒，汪 鵬, 加藤 宙光，牧野 俊晴，小倉 政彦，山崎 聡,谷口 尚, 波多野 睦子，岩崎 孝之
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] デバイス構造を用いたダイヤモンド中NVセンタの光電流検出 (2020)
  • Author(s): 椎貝 雅文，室岡 拓也，楊 棒, 牧野 俊晴，加藤 宙光，小倉 政彦，山崎 聡，波多野 睦子, 岩崎 孝之
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] NV Quantum Sensors in Diamond Electronic Devices (2019)
  • Author(s): Takayuki Iwasaki, Takuya Murooka, Bang Yang, Masafumi Shiigai, Motoki Nakamura, Hiromitsu Kato, Toshiharu Makino, Masahiko Ogura, Satoshi Yamasaki, Mutsuko Hatano
  • Organizer: The 2nd International Forum on Quantum Metrology and Sensing
  • Int'l Joint Research
• [Presentation] Nanoscale Sensing of Vector Electric Field in Diamond pin Diode (2019)
  • Author(s): Bang Yang, Motoki Nakamura, Takuya Murooka, Toshiharu Makino, Hiromitsu Kato, Masahiko Ogura, Satoshi Yamasaki, Mutsuko Hatano, and Takayuki Iwasaki
  • Organizer: The 2nd International Forum on Quantum Metrology and Sensing
  • Int'l Joint Research
• [Presentation] Photoelectrical Detection of NV Centers Utilizing a pin Diode (2019)
  • Author(s): Takuya Murooka, Masafumi Shiigai, Yang Bang, Toshiharu Makino, Hiromitsu Kato, Masahiko Ogura, Satoshi Yamasaki, Mutsuko Hatano, and Takayuki Iwasaki
  • Organizer: The 2nd International Forum on Quantum Metrology and Sensing
  • Int'l Joint Research
• [Presentation] ダイヤモンドNVセンターの電気的読み出しに向けたpin構造による光電流の検出 (2019)
  • Author(s): 室岡拓也、楊棒、椎貝雅文、牧野俊晴，加藤宙光，小倉政彦，山崎聡，波多野睦子，岩崎孝之
  • Organizer: 第33回ダイヤモンドシンポジウム
• [Presentation] ダイヤモンドの可能性を追求したセンサデバイス開発 (2018)
  • Author(s): 岩崎孝之
  • Organizer: 公益財団法人大田区産業振興協会 第96回東京工業大学技術交流セミナー
  • Invited
• [Presentation] Quantum Electric-Field Imaging of Diamond Devices Using Nitrogen-Vacancy Centers (2018)
  • Author(s): K. Kim, K. Mizuno, T. Makino, H. Kato, M. Ogura, D. Takeuchi, S. Yamasaki, M. Hatano, T. Iwasaki
  • Organizer: 2018 MRS Fall Meeting & Exhibit
  • Int'l Joint Research
• [Presentation] ダイヤモンドJFETの高電界強度計測へ向けた量子センサアレイの形成 (2018)
  • Author(s): 楊棒、金光秀、マレク・シュミット、牧野俊晴、加藤宙光、小倉政彦、竹内大輔、山崎聡、水田博、波多野睦子、岩崎孝之
  • Organizer: 第32回ダイヤモンドシンポジウム
• [Presentation] NVセンタによるパワーデバイスの内部電界イメージング (2018)
  • Author(s): 金光秀、水野皓介、牧野俊晴、加藤宙光、小倉政彦、竹内大輔、山崎聡、波多野睦子、岩崎孝之
  • Organizer: 第79回応用物理学会春季学術講演会