Power-autonomous microelectronics with in-chip energy harvester
| Project/Area Number |
18H01490
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Review Section |
Basic Section 21060:Electron device and electronic equipment-related
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Project Period (FY) |
2018-04-01 – 2021-03-31
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| Project Status |
Completed (Fiscal Year 2020)
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| Budget Amount *help |
¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000)
Fiscal Year 2020: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2019: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2018: ¥11,440,000 (Direct Cost: ¥8,800,000、Indirect Cost: ¥2,640,000)
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| Keywords | MEMS / エナジーハーベスタ / 振動発電 / エレクトレット / 半導体 / マイクロマシン / マイクロマシニング / シリコン |
|---|
| Outline of Final Research Achievements |
New technologies on power-autonomous microelectronics have been studied using MEMS vibrational energy harvester to as an energy source to retrieve electrical power from the environmental vibrations. Intermittent operation of electronics including chip-microcomputer, FRAM memory and timer-IC is confirmed using the developed energy harvester. Wireless monitoring system for environmental temperature and humidity is developed as an application of power-autonomous electronics.
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| Academic Significance and Societal Importance of the Research Achievements |
半導体微細加工技術の進展に伴ってエレクトロニクス素子のチップ小型化は急速な勢いで進んでいるが、それに電力を供給する側は依然として電源アダプタ・電池を使い続けている。そこで本研究ではＭＥＭＳ技術によって超小型エナジーハーベスタを構成し、環境振動から得たエネルギーで電力を自給自足するエレクトロニクス技術を構築し、ＩｏＴの発展に貢献する。
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Report
(4 results)
Research Products
(61 results)
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[Journal Article] A MEMS Accelerometer for Sub-mG Sensing2019
Author(s)
Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu
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Journal Title
Sensors and Materials
Volume: 31
Issue: 9
Pages: 2883
DOI
ISSN
0914-4935, 2435-0869
Year and Date
2019-09-20
Related Report
Peer Reviewed / Open Access
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[Book] 東大塾ＩｏＴ講義2020
Author(s)
年吉 洋
Total Pages
216
Publisher
東京大学出版会
ISBN
4130638173
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[Patent(Industrial Property Rights)] 環境発電装置2019
Inventor(s)
矢嶋赳彬、年吉 洋、本間浩章、遠山幸也、三屋裕幸
Industrial Property Rights Holder
矢嶋赳彬、年吉 洋、本間浩章、遠山幸也、三屋裕幸
Industrial Property Rights Type
特許
Industrial Property Number
2019-116310
Filing Date
2019
Related Report
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