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Development of nano-pillar type multiferroic composite materials using microfabrication technique

Research Project

Project/Area Number 18H01724
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 26030:Composite materials and interfaces-related
Research InstitutionUniversity of Hyogo

Principal Investigator

KOBUNE MASAFUMI  兵庫県立大学, 工学研究科, 教授 (90240960)

Co-Investigator(Kenkyū-buntansha) 神田 健介  兵庫県立大学, 工学研究科, 准教授 (20446735)
菊池 丈幸  兵庫県立大学, 工学研究科, 准教授 (50316048)
Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥16,640,000 (Direct Cost: ¥12,800,000、Indirect Cost: ¥3,840,000)
Fiscal Year 2020: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2019: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2018: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
Keywordsマルチフェロイック材料 / 高温スパッタ法 / 反応性イオンエッチング / 有機金属化学気相堆積法 / ピラー型複合体薄膜 / 電気磁気電圧係数 / 電気磁気結合現象 / マルチフェロイクス / MOCVD法 / マイクロピラー型構造 / 強誘電性 / 強磁性 / 交差相関 / 複合体 / マイクロピラー型 / マルチフェロイック複合体 / 電気磁気効果 / 界面構造
Outline of Final Research Achievements

a-axis- and c-axis-oriented epitaxial (Bi3.25Nd0.65Eu0.10)Ti3O12 (BNEuT) thin films were deposited on the two substrates by high-temperature sputtering. By microfabricating the obtained films for the microrod shape via reactive ion etching, ferroelectric pillar films were fabricated. The fabrication of CFO/BNEuT composite films was examined by depositing a ferrimagnetic cobalt ferrite (CFO) layer in the plate and rod gaps in BNEuT films by metal organic chemical vapor deposition (MOCVD) using the above pillar films as a template. In the present study, the effects of the MOCVD time, substrate temperature, and postannealing temperature on the structural, magnetic, ferroelectric, and magnetoelectric (ME) characteristics were investigated in details. It was thus found that the CFO/BNEuT composite films using a ferroelectric pillar with a microrod morphology and an a-axis orientation exhibited the maximal ME voltage coefficient .

Academic Significance and Societal Importance of the Research Achievements

本研究は,磁場-電気分極制御型応用に関しマイクロピラー型CFO/BNEuT複合体薄膜を通して明瞭な電気磁気結合現象を観測できることを明らかにした.強誘電体薄膜を反応性イオンエッチングによりマイクロピラー化し,その上にMOCVD法を用いて強磁性体を堆積させる手法により,高再現性を実現できた点において学術的及び社会的(産業分野)にも大いに意義がある.また,ピラーのアスペクト比を高めることにより,基板によるクランプ効果の低減がはかられ,その結果,電気磁気電圧係数が著しく向上することを実証した.この成果は本研究分野の材料性能向上のための指針となる.

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (39 results)

All 2020 2019 2018

All Journal Article (10 results) (of which Peer Reviewed: 10 results,  Open Access: 1 results) Presentation (29 results) (of which Int'l Joint Research: 7 results)

  • [Journal Article] Fabrication and Physical Properties of Microrod-Type Multiferroic Composite Thin Films by Metal Organic Decomposition2020

    • Author(s)
      M. Kobune, M. Yoshii, H. Takasaki, R. Ito, T. Migita, K. Kanda, K. Maenaka, and Y. Hayashi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 59 Issue: SP Pages: SPPB06-SPPB06

    • DOI

      10.35848/1347-4065/aba553

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Substrate Temperature on Physical Properties of Microrod-Type Multiferroic Composite Thin Films Fabricated by Metal Organic Chemical Vapor Deposition2020

    • Author(s)
      T. Migita, M. Kobune, R. Ito, T. Obayashi, H. Takasaki, R. Ito, T. Kikuchi, H. Fujisawa, K. Kanda, K. Maenaka, and Y. Hayashi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 59 Issue: SP Pages: SPPB08-SPPB08

    • DOI

      10.35848/1347-4065/aba9b4

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and Characterization of Micropillar-type Multiferroic Composite Thin Films by Non-aqueous Sol-gel Method Using Ferroelectric Pillars2020

    • Author(s)
      R. Ito, M. Kobune, M. Yoshii, R. Ito, Y. Haruna, T. Obayashi, T. Migita, T. Kikuchi, K. Kanda, and K. Maenaka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 59 Issue: SC Pages: SCCB08-SCCB08

    • DOI

      10.7567/1347-4065/ab4aa1

    • NAID

      210000157269

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Structural Factors on Piezoelectric Performance of Lead-Free Perovskite Compounds2020

    • Author(s)
      R. Ito, M. Kobune, K. Takuwa, T. Kikuchi, and Y. Yoneda
    • Journal Title

      Trans. Mat. Res. Soc. Japan

      Volume: 45 Pages: 77-80

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Pt Sacrificial Layer on Microfabrication in Layered Bismuth-Based Ferroelectric Thin Films2020

    • Author(s)
      T. Obayashi, M. Kobune, T. Matsunaga, R. Ito, T. Migita, T. Kikuchi, K. Kanda, and K. Maenaka
    • Journal Title

      Trans. Mat. Res. Soc. Japan

      Volume: 45 Pages: 31-34

    • NAID

      130007826043

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Pt Sacrificial Layer on Microfabrication in Layered Bismuth-based Ferroelectric Thin Films2020

    • Author(s)
      T. Obayashi, M. Kobune, T. Matsunaga, R. Ito, T. Migita, T. Kikuchi, K. Kanda, and K. Maenaka
    • Journal Title

      Trans. Mat. Res. Soc. Japan

      Volume: 45

    • NAID

      130007826043

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Structural Factors on Piezoelectric Performance of Lead-free Perovskite Compounds2020

    • Author(s)
      R. Ito, M. Kobune, K. Takuwa, T. Kikuchi, and Y. Yoneda
    • Journal Title

      Trans. Mat. Res. Soc. Japan

      Volume: 45

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and characterization of micropillar-type multiferroic composite thin films by metal organic chemical vapor deposition using a ferroelectric microplate structure2019

    • Author(s)
      T. Migita, M. Kobune, R. Ito, T. Obayashi, T. Kikuchi, H. Fujisawa, K. Kanda, K. Maenaka, H. Nishioka, N. Fukumuro, and Shinji Yae
    • Journal Title

      J. Appl. Phys.

      Volume: 59 Issue: SC Pages: 1-5

    • DOI

      10.7567/1347-4065/ab4a98

    • NAID

      210000157266

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication and Physical Properties of Bismuth Layer-Structured Ferroelectric Thin Films with c-Axis Orientation Epitaxially Grown by High-temperature Sputtering2019

    • Author(s)
      T. Migita, M. Kobune, R. Ito, T. Obayashi, T. Kikuchi, H. Fujisawa, and S. Nakashima
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 58 Issue: SL Pages: SLLB09-SLLB09

    • DOI

      10.7567/1347-4065/ab388f

    • NAID

      210000156891

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural, Magnetic and Electric Characteristics of Multiferroic CoFe2O4/BNEuT Composite Thin Films Produced by Non-aqueous Sol-gel Process2018

    • Author(s)
      K. Kikuchi, M. Kobune, T. Kikuchi, T. Migita, Y. Haruna, S. Yae, and N. Fukumuro
    • Journal Title

      Trans. Mat. Res. Soc. Japan

      Volume: 43 Pages: 105-108

    • NAID

      130006602996

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Presentation] Effects of Pt Sacrificial Layer on Microfabrication in Layered Bismuth-Based Ferroelectric Thin Films2020

    • Author(s)
      右田翼、小舟正文、高﨑英幸、伊藤稜、菊池丈幸、藤沢浩訓、神田健介、前中一介
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 有機金属分解法によるマイクロロッド型マルチフェロイック複合体薄膜の作製とその諸特性2020

    • Author(s)
      小舟正文、高﨑英幸、吉井正光、伊藤稜、右田翼、菊池丈幸、神田健介、前中一介
    • Organizer
      第37回強誘電体応用会議(FMA-37)
    • Related Report
      2020 Annual Research Report
  • [Presentation] 有機金属化学気相堆積法を用いて作製したマイクロロッド型マルチフェロイック複合体薄膜の諸特性に及ぼす基板温度の影響2020

    • Author(s)
      右田翼、小舟正文、伊藤涼雅、大林泰貴、高﨑英幸、伊藤稜、菊池丈幸、藤沢浩訓、神田健介、前中一介
    • Organizer
      第37回強誘電体応用会議(FMA-37)
    • Related Report
      2020 Annual Research Report
  • [Presentation] a軸配向強誘電体マイクロロッド薄膜を用いるMOCVD-マルチフェロイック複合体薄膜の作製と特性評価2020

    • Author(s)
      小湊大輝, 小舟正文, 伊藤涼雅, 高﨑英幸, 伊藤稜, 右田翼, 菊池丈幸, 藤沢浩訓, 神田健介, 前中一介
    • Organizer
      2020年日本セラミックス協会年会
    • Related Report
      2019 Annual Research Report
  • [Presentation] c軸配向強誘電体マイクロロッド薄膜を用いるMOCVD-マルチフェロイック複合体薄膜の作製と特性評価2020

    • Author(s)
      久保田耕平, 小舟正文, 大林泰貴, 高﨑英幸, 伊藤稜, 右田翼, 菊池丈幸, 藤沢浩訓, 神田健介, 前中一介
    • Organizer
      2020年日本セラミックス協会年会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Sr2Co2Fe28O46X型ヘキサフェライトの高周波応答特性2020

    • Author(s)
      菊池丈幸, 市野元太, 小舟正文, 中西真, 藤井達生
    • Organizer
      2020年日本セラミックス協会年会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Fabrication and Characterization of Micropillar-type Multiferroic Composite Thin Films Produced by Non-aqueous Sol-gel Method Using a Ferroelectric Microrod Structure2019

    • Author(s)
      R. Ito, M. Kobune, M. Yoshii, R. Ito, Y. Haruna, T. Migita, T. Obayashi, T. Kikuchi, K. Kanda, and K. Maenaka
    • Organizer
      The 7th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and Characterization of Micropillar-type Multiferroic Composite Thin Films Produced by Metal Organic Chemical Vapor Deposition Using a Ferroelectric Microplate Structure2019

    • Author(s)
      T. Migita, M. Kobune, R. Ito, T. Obayashi, T. Kikuchi, H. Fujisawa, K. Kanda, and K. Maenaka
    • Organizer
      The 7th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and Physical Properties of Micropillar Type Multiferroic Composite Thin Films Produced Using a Non-Aqueous Sol-Gel Process2019

    • Author(s)
      M. Kobune, Y. Haruna, T. Migita, and T. Kikuchi
    • Organizer
      2019 ISAF-ICE-EMF-IWPM-PFM Joint Conference (F2CPi2 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Chemical State Analysis of Sr3Co2-xZnxFe24O41 by Auger Electron Spectroscopy2019

    • Author(s)
      T. Kikuchi, M. Kobune, M. Nakanishi, and T. Fujii
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高温スパッタ法によるエピタキシャルc軸配向ビスマス層状構造強誘電体薄膜の作製とその諸特性2019

    • Author(s)
      右田翼, 小舟正文, 伊藤涼雅, 大林泰貴, 菊池丈幸, 藤沢浩訓, 中嶋誠二
    • Organizer
      第36回強誘電体応用会議(FMA-36)
    • Related Report
      2019 Annual Research Report
  • [Presentation] 磁気記録向けM型Srフェライトの低温合成2019

    • Author(s)
      赤松剛史, 赤井涼人, 菊池丈幸, 小舟正文, 中西真, 藤井達生
    • Organizer
      第14回日本セラミックス協会関西支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 泥漿鋳込み法を用いた六方晶系フェライト焼結体の作製2019

    • Author(s)
      小林優一, 市野元太, 菊池丈幸, 小舟正文, 中西真, 藤井達生
    • Organizer
      第14回日本セラミックス協会関西支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高密度磁気記録向けM型ヘキサフェライトの低温合成の試み2019

    • Author(s)
      菊池丈幸,赤松剛史,小島啓輔,小舟正文,中西真,藤井達生
    • Organizer
      第57回粉体に関する討論会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 反応性イオンエッチング法によるビスマス層状構造強誘電体薄膜の微細加工及び特性評価2019

    • Author(s)
      大林泰貴, 小舟正文, 松永拓也, 伊藤稜, 右田翼, 菊池丈幸, 神田健介, 前中一介
    • Organizer
      第29回日本MRS年次大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ビスマス層状構造強誘電体薄膜の微細加工に及ぼすPt犠牲層の影響2019

    • Author(s)
      高﨑英幸, 小舟正文, 宅和知隼, 大林泰貴, 松永拓也, 伊藤稜, 右田翼, 菊池丈幸, 神田健介, 前中一介
    • Organizer
      化学工学会姫路大会2019
    • Related Report
      2019 Annual Research Report
  • [Presentation] c軸配向へテロエピタキシャルビスマス層状構造強誘電体薄膜の作製と物性評価2019

    • Author(s)
      髙﨑英幸, 小舟正文, 伊藤涼雅, 大林泰貴, 右田翼, 菊池丈幸
    • Organizer
      2019年日本セラミックス協会年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 非水系ゾル-ゲル法を用いたマルチフェロイック複合体の作製2019

    • Author(s)
      吉井正光, 小舟正文, 伊藤涼雅, 大林泰貴, 右田翼, 菊池丈幸
    • Organizer
      2019年日本セラミックス協会年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 反応性イオンエッチング法によるビスマス層状構造強誘電体薄膜の微細加工2019

    • Author(s)
      伊藤稜, 小舟正文, 松永拓也, 右田翼, 菊池丈幸, 神田健介, 前中一介
    • Organizer
      2019年日本セラミックス協会年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高温スパッタ法によるヘテロエピタキシャルBNEuT薄膜の創製及びその構造特性2018

    • Author(s)
      伊藤涼雅, 小舟正文, 菊池丈幸, 右田翼, 大林泰貴
    • Organizer
      第13回日本セラミックス協会関西支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] c軸方向にヘテロエピタキシャル成長したBNEuT薄膜の誘電・強誘電及び圧電特性2018

    • Author(s)
      大林泰貴, 小舟正文, 菊池丈幸, 右田翼, 伊藤涼雅, 藤澤浩訓
    • Organizer
      第13回日本セラミックス協会関西支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高温スパッタ法によるヘテロエピタキシャルBNEuT薄膜の創製とその諸特性2018

    • Author(s)
      右田翼, 小舟正文, 菊池丈幸, 伊藤涼雅, 大林泰貴, 藤澤浩訓
    • Organizer
      第13回日本セラミックス協会関西支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 反応性イオンエッチング法による非鉛強誘電体薄膜の微細加工技術の開発2018

    • Author(s)
      松永拓也, 小舟正文, 菊池丈幸, 神田健介, 前中一介
    • Organizer
      第13回日本セラミックス協会関西支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Fabrication and Structural, Ferro- and Piezoelectric Properties of heteroepitaxially c-Axis-Oriented BNEuT Thin Films2018

    • Author(s)
      T. Migita, M. Kobune, T. Kikuchi, R. Ito, T. Obayashi, and H. Fujisawa
    • Organizer
      The 12th Japan-Korea Conference on Ferroelectrics (JKC-FE12)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrical Characteristics of BNEuT Thin Films Heteroepitaxially Grown in the c-Axis Direction2018

    • Author(s)
      T. Obayashi, M. Kobune, T. Kikuchi, T. Migita, R. Ito, and H. Fujisawa
    • Organizer
      The 12th Japan-Korea Conference on Ferroelectrics (JKC-FE12)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and Structural Characteristics of BNEuT Thin Films Heteroepitaxially Grown by Sputtering2018

    • Author(s)
      R. Ito, M. Kobune, T. Kikuchi, T. Migita, and T. Obayashi
    • Organizer
      The 12th Japan-Korea Conference on Ferroelectrics (JKC-FE12)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] c軸方向にヘテロエピタキシャル成長したBNEuT薄膜の誘電・;強誘電及び圧電特性2018

    • Author(s)
      大林泰貴, 小舟正文, 菊池丈幸, 右田翼, 伊藤涼雅, 藤澤浩訓
    • Organizer
      日本セラミックス協会第31回秋季シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高温スパッタ法によるヘテロエピタキシャルBNEuT薄膜の創製及びその構造特性2018

    • Author(s)
      伊藤涼雅, 小舟正文, 菊池丈幸, 右田翼, 大林泰貴
    • Organizer
      日本セラミックス協会第31回秋季シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高温スパッタ法によるヘテロエピタキシャルBNEuT薄膜の創製とその諸特性2018

    • Author(s)
      右田翼, 小舟正文, 菊池丈幸, 伊藤涼雅, 大林泰貴, 藤澤浩訓
    • Organizer
      日本セラミックス協会第31回秋季シンポジウム
    • Related Report
      2018 Annual Research Report

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Published: 2018-04-23   Modified: 2022-01-27  

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