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Is wafer-scale graphene on the semi-insulating SiC the most appropriate for electronics applications?

Research Project

Project/Area Number 18H01889
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 30010:Crystal engineering-related
Research InstitutionNagoya University

Principal Investigator

Norimatsu Wataru  名古屋大学, 工学研究科, 准教授 (30409669)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2020: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2019: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2018: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
Keywordsグラフェン / 表面 / 界面構造 / 成長技術 / 界面 / 移動度 / 電子状態 / 移動度向上 / 高周波トランジスタ
Outline of Final Research Achievements

In this study, we performed experiments in order to understand the factors and their contributions which affect the carrier mobility in graphene grown by thermal decomposition of SiC. From the experimental results, we found that the quality of graphene on SiC have no significant difference with the other graphene growth techniques, while the defects of the SiC surface seemed to degrade the mobility. On the effect of the graphene/SiC interface, we performed the hydrogen intercalation experiments under high-pressure H_2 condition, and revealed the microscopic mechanism in the initial stage of the intercation. Based on the large-area graphene transfer technique, we also succeeded in the fabrication of the millimeter-scale twisted bilayer graphene and the observation of their electronic structure.

Academic Significance and Societal Importance of the Research Achievements

学術的意義:基板や界面構造の原子レベルの構造が、グラフェンの移動度に影響を与える関係が明確になった。インターカレーションメカニズムについては、グラフェンと同じ六員環構造を持つバッファー層を水素が透過し、その後界面を拡散することが明らかになった。
社会的意義:グラフェンのエレクトロニクス応用のために、そのキャリア移動度をさらに向上する指針となる結果が得られた。これまでマイクロメートルスケールでしか得られていないツイスト2層グラフェンについて、ミリメートルサイズでの試料作製技術を確立し、そのバンド変調も明らかになったことで、ツイストロニクスの展開が広がると期待される。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (41 results)

All 2021 2020 2019 2018

All Journal Article (7 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 6 results,  Open Access: 2 results) Presentation (32 results) (of which Int'l Joint Research: 10 results,  Invited: 11 results) Book (2 results)

  • [Journal Article] Structure of quasi-free-standing graphene on the SiC (0001) surface prepared by the rapid cooling method2020

    • Author(s)
      Sumi Tatsuya、Nagai Kazuki、Bao Jianfeng、Terasawa Tomo-o、Norimatsu Wataru、Kusunoki Michiko、Wakabayashi Yusuke
    • Journal Title

      Applied Physics Letters

      Volume: 117 Issue: 14 Pages: 143102-143102

    • DOI

      10.1063/5.0021071

    • Related Report
      2020 Annual Research Report
  • [Journal Article] Controlled growth of boron-doped epitaxial graphene by thermal decomposition of a B4C thin film2020

    • Author(s)
      Norimatsu Wataru、Matsuda Keita、Terasawa Tomo-o、Takata Nao、Masumori Atsushi、Ito Keita、Oda Koji、Ito Takahiro、Endo Akira、Funahashi Ryoji、Kusunoki Michiko
    • Journal Title

      Nanotechnology

      Volume: 31 Issue: 14 Pages: 145711-145711

    • DOI

      10.1088/1361-6528/ab62cf

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Structural and Physical Properties of Epitaxial Graphene2019

    • Author(s)
      乗松 航
    • Journal Title

      Nihon Kessho Gakkaishi

      Volume: 61 Issue: 1 Pages: 35-42

    • DOI

      10.5940/jcrsj.61.35

    • NAID

      130007606166

    • ISSN
      0369-4585, 1884-5576
    • Year and Date
      2019-02-28
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A study on formation mechanisms of relief structure formed in situ on the surface of ceramics2019

    • Author(s)
      Zhang Wei、Yamashita Seiji、Kumazawa Takeshi、Ozeki Fumihito、Hyuga Hideki、Norimatsu Wataru、Kita Hideki
    • Journal Title

      Ceramics International

      Volume: 45 Issue: 17 Pages: 23143-23148

    • DOI

      10.1016/j.ceramint.2019.08.008

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Longitudinal strain of epitaxial graphene monolayers on SiC substrates evaluated by z-polarization Raman microscopy,2019

    • Author(s)
      Saito Y, Tokiwa K, Kondo T, Bao J, Terasawa T, Norimatsu W, Kusunoki M
    • Journal Title

      AIP Advances

      Volume: 9 Issue: 6 Pages: 065314-065314

    • DOI

      10.1063/1.5099430

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Acceleration of Photocarrier Relaxation in Graphene Achieved by Epitaxial Growth: Ultrafast Photoluminescence Decay of Monolayer Graphene on SiC2018

    • Author(s)
      Imaeda Hirotaka、Koyama Takeshi、Kishida Hideo、Kawahara Kenji、Ago Hiroki、Sakakibara Ryotaro、Norimatsu Wataru、Terasawa Tomo-o、Bao Jianfeng、Kusunoki Michiko
    • Journal Title

      The Journal of Physical Chemistry C

      Volume: 122 Issue: 33 Pages: 19273-19279

    • DOI

      10.1021/acs.jpcc.8b06845

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] エピタキシャルグラフェンと電子顕微鏡2018

    • Author(s)
      楠 美智子, 増田 由穂, 山本 悠太, 乗松 航
    • Journal Title

      顕微鏡

      Volume: 53 Pages: 62-62

    • NAID

      130007686906

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Presentation] SiC上グラフェン研究の進展と展望2021

    • Author(s)
      乗松航
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 水素インターカレーションによる SiC上グラフェン形成のメカニズム2021

    • Author(s)
      榊原涼太郎、乗松航
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Hex-Au(001)基板上のグラフェンのエネルギーギャップの起源2021

    • Author(s)
      寺澤知潮、保田諭、松永和也、林直輝、田中慎一郎、乗松航、伊藤孝寛、町田真一、朝岡秀人
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] グラフェン/SiC 界面を利用した新機能開拓2021

    • Author(s)
      乗松航
    • Organizer
      第13回九大2D物質研究会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] エピタキシャルグラフェン被覆による超伝導体TaC 薄膜の転移温度向上2021

    • Author(s)
      近藤大斗、林直樹、伊藤孝寛、遠藤彰、乗松航
    • Organizer
      第19回日本表面真空学会中部支部学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 水素インターカレーションによるSiC上グラフェン形成の初期過程2021

    • Author(s)
      榊原涼太郎、乗松航
    • Organizer
      第19回日本表面真空学会中部支部学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] エピタキシャルグラフェンによる超伝導体薄膜の転移温度向上2021

    • Author(s)
      乗松航、近藤大斗、伊藤孝寛
    • Organizer
      学際・国際的高度人材育成ライフイノベーションマテリアル創製共同研究プロジェクト第5回公開討論会
    • Related Report
      2020 Annual Research Report
  • [Presentation] SiC(000-1)面上多層グラフェンの回転角制御2021

    • Author(s)
      乗松航、包建峰、林直樹、伊藤孝寛、眞砂紀之、前川拓滋、森本満、日比野浩樹
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 超伝導体TaC薄膜のグラフェン被覆による転移温度向上2021

    • Author(s)
      近藤大斗、林直樹、伊藤孝寛、遠藤彰、乗松航
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ミリメートルスケールツイスト2層グラフェンにおけるフラットバンド2021

    • Author(s)
      佐藤京樹、林直樹、伊藤孝寛、眞砂紀之、森本満、前川拓滋、Kuan Qiao、Jeehwan Kim、若林克法、日比野浩樹、乗松航
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] グラフェン/SiC系における構造制御と電子状態2020

    • Author(s)
      乗松航
    • Organizer
      第12回九大2D物質研究会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] エピタキシャルグラフェンの電子状態に与える界面の影響2020

    • Author(s)
      佐藤京樹、榊原涼太郎、河原憲治、吾郷浩樹、林直樹、伊藤孝寛、乗松航
    • Organizer
      第18回日本表面真空学会中部支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] SiC上グラフェンにおける高圧水素インターカレーションとそのメカニズム2020

    • Author(s)
      榊原涼太郎、乗松航
    • Organizer
      第18回日本表面真空学会中部支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] SiC上エピタキシャルグラフェンの成長と構造・物性制御2019

    • Author(s)
      乗松航
    • Organizer
      グラフェン・酸化グラフェン合同シンポジウム
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Growth of functional epitaxial graphene2019

    • Author(s)
      Wataru Norimatsu
    • Organizer
      Joint 5th International Symposium on Frontiers in Materials Science and 3rd International Symposium on Nano-materials, Technology and Applications
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Growth of epitaxial graphene by thermal decomposition of carbides2019

    • Author(s)
      Wataru Norimatsu
    • Organizer
      International Conference on Materials and Systems for Sustainability
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Functional epitaxial graphene grown by thermal decomposition of carbide materials2019

    • Author(s)
      Wataru Norimatsu
    • Organizer
      International Conference on Materials and Systems for Sustainability
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Functional epitaxial graphene grown by thermal decomposition of carbides2019

    • Author(s)
      Wataru Norimatsu
    • Organizer
      International Symposium on Epi-Graphene 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electronic states of graphene transferred onto the buffer layer on SiC2019

    • Author(s)
      Keiju Sato, Ryotaro Sakakibara, Kenji Kawahara, Hiroki Ago, Naoki Hayashi, Takahiro Ito, and Wataru Norimatsu
    • Organizer
      International Symposium on Epi-Graphene 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quasi-free-standing graphene formed under high-pressure hydrogen2019

    • Author(s)
      Ryotaro Sakakibara and Wataru Norimatsu
    • Organizer
      International Symposium on Epi-Graphene 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electronic states of epitaxial graphene and CVD graphene transferred onto the buffer layer2019

    • Author(s)
      Keiju Sato, Ryotaro Sakakibara, Kenji Kawahara, Hiroki Ago, Naoki Hayashi, Takahiro Ito, and Wataru Norimatsu
    • Organizer
      第1回低次元物質科学セミナー
    • Related Report
      2019 Annual Research Report
  • [Presentation] Quasi-freestanding epitaxial graphene obtained under high-pressure hydrogen2019

    • Author(s)
      Ryotaro Sakakibara and Wataru Norimatsu
    • Organizer
      第1回低次元物質科学セミナー
    • Related Report
      2019 Annual Research Report
  • [Presentation] エピタキシャルグラフェン研究の10年2019

    • Author(s)
      乗松航
    • Organizer
      第3回早稲田大学凝縮系物質科学研究所シンポジウム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] SiC上エピタキシャル炭化物からのグラフェン成長2019

    • Author(s)
      乗松航
    • Organizer
      第11回九大2D物質研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Hex-Au(100)再構成表面上でのグラフェンの電子バンド構造の変調2019

    • Author(s)
      寺澤知潮、保田諭、林直輝、乗松航、伊藤孝寛、町田真一、矢野雅大、斉木幸一郎、朝岡秀人
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] SiC上グラフェンの電子物性に対する界面の影響2019

    • Author(s)
      佐藤京樹、榊原涼太郎、河原憲治、吾郷浩樹、林直輝、伊藤孝寛、乗松航
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 4H-SiC(000-1)上TaC薄膜のグラフェン化2019

    • Author(s)
      清水一矢、林直輝、伊藤孝寛、乗松航
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Interface engineering of epitaxial graphene2018

    • Author(s)
      Wataru Norimatsu
    • Organizer
      1st Tianjin International Symposium on Epitaxial Graphene (TISEG-1)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Interface engineering of epitaxial graphene on SiC2018

    • Author(s)
      Wataru Norimatsu
    • Organizer
      6th International Symposium on Graphene Devices (ISGD-6)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ni intercalation between graphene and silicon carbide2018

    • Author(s)
      Wataru Norimatsu, Tomo-o Terasawa, Yutaro Ouchi, Takahiro Ito, and Michiko Kusunoki
    • Organizer
      Graphene Week 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SiC上グラフェンの移動度に及ぼす界面の影響2018

    • Author(s)
      榊原涼太郎、河原憲治、吾郷浩樹、乗松航
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Electronic properties of epitaxial graphene and its application2018

    • Author(s)
      Wataru Norimatsu, Michiko Kusunoki
    • Organizer
      The 3rd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Book] Physics and Chemistry of Graphene -Graphene to Nanographene-2019

    • Author(s)
      Michiko Kusunoki, and Wataru Norimatsu
    • Total Pages
      33
    • Publisher
      Jenny Stanford Publishing
    • ISBN
      9814800384
    • Related Report
      2019 Annual Research Report
  • [Book] Handbook of Graphene, vol. 1: Growth, Synthesis, and Functionalization2019

    • Author(s)
      Wataru Norimatsu, Tomo-o Terasawa, Keita Matsuda, Jianfeng Bao, and Michiko Kusunoki
    • Total Pages
      47
    • Publisher
      Wiley Scrivener Publishing
    • ISBN
      1119468558
    • Related Report
      2019 Annual Research Report

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Published: 2018-04-23   Modified: 2022-01-27  

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