• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of novel amorphous oxide semiconductor with high electron mobility through anion substitution

Research Project

Project/Area Number 18H02054
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 36010:Inorganic compounds and inorganic materials chemistry-related
Research InstitutionThe University of Tokyo

Principal Investigator

HIROSE Yasushi  東京大学, 大学院理学系研究科(理学部), 准教授 (50399557)

Co-Investigator(Kenkyū-buntansha) 関場 大一郎  筑波大学, 数理物質系, 講師 (20396807)
Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000)
Fiscal Year 2020: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2019: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2018: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
Keywords非晶質半導体 / 複合アニオン / 薄膜トランジスタ / 熱電変換 / 複合アニオン化合物 / ZnO / 酸化物エレクトロニクス / 薄膜 / 複合アニオン酸化物
Outline of Final Research Achievements

In order to develop a novel amorphous semiconductor with high mobility, amorphous mixed-anion compound semiconductors were systematically synthesized. Electrical transport properties of ZnO-based system indicated that introduction of anions with high electronegativity, such as N or F, is a promising way to develop a novel high-mobility amorphous semiconductor. As for device application of the amorphous mixed-anion semiconductors, an amorphous ZnOS based thin film transistors with high electric filed mobility and stability under air were demonstrated. We also found that amorphous ZnON exhibits higher thermoelectric performance than amorphous oxide semiconductors, suggesting application for a flexible thermoelectric generator.

Academic Significance and Societal Importance of the Research Achievements

高移動度の非晶質半導体は、フラットパネルディスプレイやフレキシブルデバイス材料として急速に応用が進んでいるが、希少金属であるInを主成分として含むという課題がある。本研究で得られた非晶質複合アニオン酸化物半導体の設計指針は、希少金属や有毒金属を含まない高移動度非晶質半導体の開発につながると期待される。また、本研究で提案した非晶質半導体を用いた熱電変換素子の特性を向上することができれば、IoT機器用センサーなどのフレキシブルデバイスの電源に応用できる可能性がある。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (15 results)

All 2021 2020 2019 2018

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (11 results) (of which Int'l Joint Research: 3 results,  Invited: 4 results) Book (1 results)

  • [Journal Article] Exploring Metastable Oxynitrides by Thin Film Growth Approach2021

    • Author(s)
      Hirose Yasushi、Hasegawa Tetsuya
    • Journal Title

      Bulletin of the Chemical Society of Japan

      Volume: 94 Issue: 4 Pages: 1355-1363

    • DOI

      10.1246/bcsj.20210033

    • NAID

      130008037350

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High‐Mobility and Air‐Stable Amorphous Semiconductor Composed of Earth‐Abundant Elements: Amorphous Zinc Oxysulfide2019

    • Author(s)
      Yuting Zhu, Takanori Yamazaki, Zhen Chen, Yasushi Hirose, Shoichiro Nakao, Isao Harayama, Daiichiro Sekiba, Tetsuya Hasegawa
    • Journal Title

      Advanced Electronic Materials

      Volume: 6 Issue: 1 Pages: 1900602-1900602

    • DOI

      10.1002/aelm.201900602

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermoelectric Properties of Amorphous ZnOxNy Thin Films at Room TemperaturexDy epitaxial thin films2019

    • Author(s)
      Yasushi Hirose, Masato Tsuchii, Kei Shigematsu, Yohei Kakefuda, Takao Mori, and Tetsuya Hasegawa
    • Journal Title

      Appl. Phys. Lett.

      Volume: 114 Issue: 19 Pages: 193903-193903

    • DOI

      10.1063/1.5089679

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Presentation] 準安定な複合アニオン酸化物の薄膜合成と電子機能の探索2021

    • Author(s)
      廣瀬靖
    • Organizer
      第134回 フロンティア材料研究所学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Thermoelectric Properties of Amorphous ZnOxNy Thin Films Fabricated at Room Temperature2021

    • Author(s)
      Yasushi Hirose
    • Organizer
      45th International Conference and Expo on Advanced Ceramics and Composites (ICACC 2021)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ルチル型酸化スズ-酸化ゲルマニウム混晶Sn1-xGexO2薄膜の光学特性2021

    • Author(s)
      長島 陽、廣瀬 靖、土井 雅人、福本 通孝、長谷川 哲也
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] スズ酸窒化物(SnOxNy)薄膜の電子輸送特性2021

    • Author(s)
      土井 雅人、廣瀬 靖、長谷川 哲也
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] W:SnO2薄膜における高移動度の起源2021

    • Author(s)
      福本 通孝、廣瀬 靖、中尾 祥一郎、木村 耕治、林 好一、杉澤 悠紀、関場 大一郎、長谷川 哲也
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] パイロクロア型Sn2Ta2O7エピタキシャル薄膜のトポタクティック窒化2021

    • Author(s)
      福本 通孝、廣瀬 靖、土井 雅人、杉澤 悠紀、関場 大一郎、長谷川 哲也
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Amorphous Zinc Oxysulfide Thin Films: Synthesis, Physical Properties, and TFT Application2020

    • Author(s)
      Yasushi Hirose, Zhen Chen, Masato Tsuchii, and Tetsuya Hasegawa
    • Organizer
      5th Thin Film Transistor Technologies (TFT 15)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of thin film transistor using an amorphous mixed-anion semiconductor a-ZnOS2020

    • Author(s)
      Zhen Chen, Yasushi Hirose, Tetsuya Hasegawa
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Functionalization of oxide-based mixed anion compound thin films2019

    • Author(s)
      Yasushi Hirose
    • Organizer
      Materials Research Meeting 2019 (MRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 非晶質酸窒化亜鉛(a-ZnON)薄膜の熱電特性2019

    • Author(s)
      廣瀬 靖、土井 雅人、重松 圭、掛札 洋平、森 孝雄、長谷川 哲也
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 窒化物厚膜をターゲットに用いたパルスレーザー堆積法によるZn3N2エピタキシャル薄膜の作製2018

    • Author(s)
      土井 雅人、朱 雨庭、中尾 祥一郎、廣瀬 靖、杉澤 悠紀、菊田 純一、関場 大一郎、長谷川 哲也
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Book] 複合アニオン化合物の科学2021

    • Author(s)
      陰山 洋、荻野 拓、長谷川 哲也
    • Total Pages
      264
    • Publisher
      丸善出版
    • ISBN
      9784621306109
    • Related Report
      2020 Annual Research Report

URL: 

Published: 2018-04-23   Modified: 2022-01-27  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi