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Clarification of ionization process on high power impulse magnetron sputtering

Research Project

Project/Area Number 18K03602
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 14030:Applied plasma science-related
Research InstitutionMeijo University

Principal Investigator

Ohta Takayuki  名城大学, 理工学部, 教授 (10379612)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2019: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2018: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywordsスパッタリング / アモルファスカーボン / イオンエネルギー / 質量分析 / イオンフラックス / 大電力パルススパッタリング / ダイヤモンドライクカーボン / イオン化 / イオン化率 / ダイヤモンドライクカーボン膜 / 薄膜コーティング
Outline of Final Research Achievements

In this study, in order to investigate the mechanism of high hardness of DLC film using HiPIMS, the behavior of carbon ions and argon ions in plasma was analyzed, and the production process of ions was discussed. An film hardness of 20 GPa was obtained by using HiPIMS without a substrate bias. From the results, the production of high-energy ions and the ionization rate were improved. Time-resolved measurements of the ion energy distribution using a mass spectrometer with an energy analyzer were performed to clarify the production processes of high-energy and low-energy components of carbon and argon ions, respectively.

Academic Significance and Societal Importance of the Research Achievements

本研究では、HiPIMSを用いることで、基板バイアス電圧を印加することなく、膜硬度20GPaのDLC膜を成膜することができた。この技術は、高硬質DLC膜が必要とされる産業応用に貢献できる。また、スパッタリングプラズマ中の炭素及びアルゴンイオンの生成過程を明らかにした。この知見は、PVDによる薄膜形成に関する科学技術基盤を構築するための一助となり、新規機能性薄膜の創生や新規薄膜形成プロセス制御技術の創出に寄与できる。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (42 results)

All 2021 2020 2019 2018

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (41 results) (of which Int'l Joint Research: 20 results,  Invited: 6 results)

  • [Journal Article] Formation of diamond-like carbon film using high-power impulse magnetron sputtering2019

    • Author(s)
      Iga Kazunori、Oda Akinori、Kousaka Hiroyuki、Ohta Takayuki
    • Journal Title

      Thin Solid Films

      Volume: 672 Pages: 104-108

    • DOI

      10.1016/j.tsf.2019.01.005

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Presentation] 大電力パルススパッタを用いた硬質アモルファスカーボン成膜2021

    • Author(s)
      太田 貴之,小田 昭紀,上坂 裕之
    • Organizer
      第38回 プラズマプロセシング研究会 /第33回 プラズマ材料科学シンポジウム(SPP-38 / SPSM33)
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Plasma diagnostics on high power impulse magnetron sputtering for deposition of diamond-like carbon thin films2021

    • Author(s)
      J. Matsushima, A. Oda and H. Kousaka, and T. Ohta
    • Organizer
      ISPlasma2021/IC-PLANTS2021
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of nitrogen atom density using vacuum ultraviolet absorption spectroscopy in TiN-HiPIMS2021

    • Author(s)
      Takayuki Ohta, Masayuki Nakamura, Keigo Takeda
    • Organizer
      HiPIMS Today
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] DLC成膜用カーボンHiPIMSのプラズマ診断(2)~パルス幅の効果2021

    • Author(s)
      太田 貴之,松島 丈, 小田 昭紀,上坂 裕之
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] RF低圧テトラメチルシランプラズマにおける基板への入射ラジカルおよびイオンのガス流量依存性の計測2021

    • Author(s)
      石井 晃一、鈴木 駿、小田 昭紀、渡邉 泰章、太田 貴之、上坂 裕之
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Si 含有 DLC 成膜用テトラメチルシランプラズマ特性へ及ぼす投入電力の影響の計測2021

    • Author(s)
      渡邉 泰章、鈴木 駿、石井 晃一、小田 昭紀、太田 貴之、上坂 裕之
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 低圧テトラメチルシランプラズマにおける基板への入射ラジカルおよびイオンの質量分析2020

    • Author(s)
      鈴木 駿, 石井 晃一, 小田 昭紀, 太田 貴之, 上坂 裕之, 渡邉 泰章
    • Organizer
      令和2年 電気学会 基礎・材料・共通部門大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 非平衡大気圧He/CH4パルスプラズマ特性に及ぼす印加電圧波形の影響の解析2020

    • Author(s)
      木村 勇太, 藤田 諒, 小嶋 正宏, 小田 昭紀, 太田 貴之, 上坂 裕之
    • Organizer
      令和2年 電気学会 基礎・材料・共通部門大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] DLC成膜用HiPIMSプラズマにおけるターゲット電圧パルスの影響2020

    • Author(s)
      松島 丈, 村上 祐一, 小田 昭紀, 上坂 裕之, 太田 貴之
    • Organizer
      表面技術協会 第142回講演大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] RF 低圧 TMS プラズマにおける基板への入射ラジカルおよびイオンの圧力依存性2020

    • Author(s)
      鈴木 駿、石井 晃一、小田 昭紀、渡邉 泰章、太田 貴之、上坂 裕之
    • Organizer
      表面技術協会 第142回講演大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] diamond-like carbon film for protective coating2020

    • Author(s)
      Takayuki Ohta
    • Organizer
      Taiwan - Japan Joint Workshop of 10th WEEEA , 10th IWNC, 12th IWPBST
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Plasma Characteristics of Carbon-Hipims for DLC-Film Deposition2020

    • Author(s)
      Jo Matsushima, Kazunori Iga, Akinori Oda, Hiroyuki Kousaka, and Takayuki Ohta
    • Organizer
      Taiwan - Japan Joint Workshop of 10th WEEEA , 10th IWNC, 12th IWPBST
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Plasma Diagnostics on TiN-HiPIMS Process2020

    • Author(s)
      Masayuki Nakamura, Keigo Takeda, Akinori Oda, Hiroyuki Kousaka, Takayuki Ohta
    • Organizer
      Taiwan - Japan Joint Workshop of 10th WEEEA , 10th IWNC, 12th IWPBST
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of Pulse Width on High Power Impulse Magnetron Sputtering for Deposition of Diamond-Like Carbon Thin Films2020

    • Author(s)
      Jo Matsushima, Yuichi Murakami, Akinori Oda, Hiroyuki Kousaka and Takayuki Ohta
    • Organizer
      ISPlasma2020/IC-PLANTS2020
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] HiPIMS を用いたDLC 成膜プロセスにおけるイオンの挙動2020

    • Author(s)
      太田 貴之,村上祐一,松島 丈,小田昭紀,上坂裕之
    • Organizer
      表面技術協会第141回講演大会
    • Related Report
      2019 Research-status Report
  • [Presentation] DLC成膜用カーボンHiPIMSのプラズマ診断2020

    • Author(s)
      太田 貴之、松島 丈、村上 祐一、小田 昭紀、上坂 裕之
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] HiPIMSを用いたDLC成膜プロセスにおけるプラズマ診断と膜質評価~低摩擦化を目指して~2019

    • Author(s)
      太田 貴之
    • Organizer
      表面技術協会 高機能トライボ表面プロセス部会第14回例会
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] Formation of diamond-like carbon film for tribology using high power impulse magnetron sputtering2019

    • Author(s)
      Takayuki Ohta, Akinori Oda, Hiroyuki Kousaka
    • Organizer
      2019 International Conference on Metals and Alloys (CMA 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Plasma Processing with Feedback Control of Wafer Temperature By Non-Contact Temperature Measurement System2019

    • Author(s)
      Takayoshi Tsutsumi, Hiroki Kondo, Kenji Ishikawa, Keigo Takeda, Takayuki Ohta, Makoto Sekine, Masafumi Ito, Masaru Hori
    • Organizer
      236th ECS Meeting
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Gas phase diagnostics of a carbon HiPIMS for a deposition of diamond-like carbon film2019

    • Author(s)
      Takayuki Ohta, Kazunori Iga, Akinori Oda, Hiroyuki Kousaka
    • Organizer
      XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Gas phase diagnostics on TiN film deposition using high power impulse magnetron sputtering2019

    • Author(s)
      Masayuki Nakamura, Keigo Takeda, Takayuki Ohta
    • Organizer
      XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Computational Study on Fundamental Properties of Pulsed Discharge at Atmospheric-Pressure for Hard Coatings Technology by Plasma Assisted Chemical Vapor Deposition2019

    • Author(s)
      Akinori Oda, Masahiro Kojima, Yuta Kimura, Takayuki Ohta, Hiroyuki Kousaka
    • Organizer
      XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Gas phase diagnostics on high power impulse magnetron sputtering for TiN film formation2019

    • Author(s)
      Masayuki Nakamura, Keigo Takeda, and Takayuki Ohta
    • Organizer
      12th Asian European International Conference on Plasma Surface Engineering (AEPSE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Deposition of Si-doped DLC film by dual magnetron sputtering2019

    • Author(s)
      Takayuki Ohta, Yuki Miwa, Akinori Oda, and Hiroyuki Kousaka
    • Organizer
      12th Asian European International Conference on Plasma Surface Engineering (AEPSE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Plasma diagnostics on formation of diamond-like carbon film using high power impulse magnetron sputtering2019

    • Author(s)
      Sena Iwata, Kaunori Iga, Akinori Oda, Hiroyuki Kousaka, and Takayuki Ohta
    • Organizer
      12th Asian European International Conference on Plasma Surface Engineering (AEPSE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Film property of diamond-like carbon deposited by magnetron sputtering2019

    • Author(s)
      Jo Matsushima, Kazunori Iga, Akinori Oda, Hiroyuki Kousaka, and Takayuki Ohta
    • Organizer
      12th Asian European International Conference on Plasma Surface Engineering (AEPSE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Energy distribution function on high power impulse magnetron sputtering2019

    • Author(s)
      Masayuki Nakamura, Keigo Takeda, Akinori Oda, Hiroyuki Kousaka, Takayuki Ohta
    • Organizer
      The 72nd Annual Gaseous Electronics Conference
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Deposition of diamond-like carbon film using high power impulse magnetron sputtering2019

    • Author(s)
      T. Ohta, K. Iga, A. Oda, and K. Kousaka
    • Organizer
      The 41st International Symposium on Dry Process (DPS2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] スパッタリングを用いたSi 含有DLC 膜の摩擦特性2019

    • Author(s)
      岩田 聖奈, 小田 昭紀, 上坂 裕之, 太田 貴之
    • Organizer
      表面技術協会第140回講演大会
    • Related Report
      2019 Research-status Report
  • [Presentation] HiPIMSを用いたDLC 成膜とそのプラズマ診断2019

    • Author(s)
      松島 丈,小田 昭紀,上坂 裕之,太田 貴之
    • Organizer
      表面技術協会第140回講演大会
    • Related Report
      2019 Research-status Report
  • [Presentation] HiPIMSを用いたTiNスパッタリングプラズマ中のイオンの挙動2019

    • Author(s)
      中村 将之、竹田 圭吾、太田 貴之
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] HiPIMSを用いたDLC成膜とそのプラズマ診断2019

    • Author(s)
      松島 丈,小田 昭紀,上坂 裕之,太田 貴之
    • Organizer
      表面技術若手研究者・技術者研究交流発表会
    • Related Report
      2019 Research-status Report
  • [Presentation] スパッタリングを用いたSi含有DLC膜の摩擦特性2019

    • Author(s)
      岩田 聖奈, 小田 昭紀, 上坂 裕之, 太田 貴之
    • Organizer
      表面技術若手研究者・技術者研究交流発表会
    • Related Report
      2019 Research-status Report
  • [Presentation] ion energy distribution function on high power impulse magnetron sputtering for hard coating2019

    • Author(s)
      Takayuki Ohta
    • Organizer
      International Workshop on Plasma-Tailored Nanostructures and Applications (WOPTAN 2019)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Ion Energy Distribution in High Power Impulse Magnetron Sputtering Discharge Using Carbon Target2018

    • Author(s)
      Kazunori Iga, Akinori Oda, Hiroyuki Kousaka, and Takayuki Ohta
    • Organizer
      Joint International conference on ICMAP 2018, APCPST 2018, and ISPB 2018
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Deposition mechanism of diamond-like carbon using high power impulse magnetron sputtering2018

    • Author(s)
      K. Iga, A. Oda, K. Kousaka and T. Ohta
    • Organizer
      The 40th International Symposium on Dry Process (DPS2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] ハイパワーインパルスマグネトロンスパッタリングを用いたダイヤモンドライクカーボン成膜におけるプラズマ診断2018

    • Author(s)
      伊賀 一憲,小田 昭紀, 上坂 裕之,太田 貴之
    • Organizer
      平成30年度 電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2018 Research-status Report
  • [Presentation] ハイパワーインパルスマグネトロンスパッタリング中における生成イオンの挙動解析2018

    • Author(s)
      伊賀一憲,小田昭紀,上坂裕之,太田貴之
    • Organizer
      表面技術協会第138 回講演大会
    • Related Report
      2018 Research-status Report
  • [Presentation] チタンターゲットを用いた高電力パルススパッタリング放電におけるイオンの生成過程2018

    • Author(s)
      伊賀 一憲、太田 貴之
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] HiPIMSを用いたDLC成膜とその気相診断2018

    • Author(s)
      太田貴之、伊賀一憲、三輪 侑生、小田昭紀、上坂裕之
    • Organizer
      電気学会 放電/プラズマ・パルスパワー合同研究会
    • Related Report
      2018 Research-status Report
  • [Presentation] ハイパワーインパルスマグネトロンスパッタリングのイオンエネルギー分布関数の測定2018

    • Author(s)
      伊賀一憲,小田昭紀,上坂裕之,太田貴之
    • Organizer
      プラズマ・核融合学会 第35回年会
    • Related Report
      2018 Research-status Report

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Published: 2018-04-23   Modified: 2022-01-27  

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