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Development of non-thermal formation method for high-quality zinc oxide thin films using atmospheric pressure low temperature plasma

Research Project

Project/Area Number 18K04094
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21010:Power engineering-related
Research InstitutionKobe City College of Technology

Principal Investigator

Akamatsu Hiroshi  神戸市立工業高等専門学校, その他部局等, 教授 (10370008)

Project Period (FY) 2018-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2019: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2018: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords大気開放型低温プラズマ / 酸化亜鉛薄膜 / 塗布プラズマ分解法 / 酸素ラジカル / 酢酸亜鉛 / 誘電体バリア放電 / 三電極誘電体バリア放電 / ヘリウム / プラズマアクチュエータ / 小型高電圧電極 / 沿面放電 / ナノ秒パルス高電圧電源 / アルゴン / 硝酸亜鉛 / 酢酸亜鉛溶液 / 酸化亜鉛
Outline of Final Research Achievements

In this study, a method for synthesis of zinc oxide thin film without vacuum device and thermal process has been developed. The method called by metal organic plasma decomposition (MOPD) utilizes an energy of plasma chemical reaction instead of thermal energy for formation of oxide film. An atmospheric pressure plasma source with dielectric barrier discharge electrode system has been prepared for the MOPD. In addition, a tri-electrodes DBD plasma source has been experimentally developed in order to form 2 dimensionally uniform plasma. In the case of helium gas with oxygen gas, atmospheric pressure plasma had atomic oxygen as a chemically reactive species. A precursor liquid has been spin-coated on a PET film and dried. The precursor specimen has been processed by the MOPD method. XRD analysis indicated that zinc oxide film is synthesized on the PET film by the MOPD process.

Academic Significance and Societal Importance of the Research Achievements

本申請課題では、非真空かつ非加熱で酸化亜鉛薄膜を形成できる革新的技術として湿式プロセスを併用した塗布プラズマ分解(MOPD)法を提案した。助成期間において、DBD電極系を応用した大気開放型プラズマ源を開発し、PET上にコートした酸化亜鉛液体前駆体にMOPD処理したところ、酸化亜鉛に起因する回折ピークが認められた。このことから、MOPD法は従来の塗布熱分解法では困難であったフレキシブル基板上への非加熱での酸化物薄膜形成技術となりうる可能性を秘めており、また真空機器を必要としないため、機能性薄膜の低コスト大量生産が期待できる。

Report

(6 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (12 results)

All 2023 2022 2020 2019 2018

All Presentation (12 results) (of which Int'l Joint Research: 10 results)

  • [Presentation] Observation of planar type atmospheric pressure plasma formed by tri-electrode dielectric barrier discharge2023

    • Author(s)
      Hiroshi Akamatsu
    • Organizer
      ISPlasma2023 / IC-PLANT2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Application of Sliding Discharge with Tri-electrode Dielectric Barrier Discharge for Formation of Planar Atmospheric Pressure Plasma2022

    • Author(s)
      Hiroshi Akamatsu
    • Organizer
      ICRP-11 / GEC 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Planar Plasma Source for Metal Organic Plasma Decomposition2022

    • Author(s)
      Hiroshi Akamatsu and Kazunori Ichikawa
    • Organizer
      ISPlasma2022/IC-PLANTS2022
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Optical diagnostics of direct-type atmospheric pressure plasma device for metal organic plasma decomposition2020

    • Author(s)
      Hiroshi Akamatsu
    • Organizer
      ISPlasma2020/IC-PLANTS2020
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Surface Charging of Zinc Oxide Nanoparticles in Distilled Water with Irradiation of Atmospheric Pressure Plasma Jet2019

    • Author(s)
      Hiroshi Akamatsu and Kazunori Ichikawa
    • Organizer
      The 11th Asia-Pacific International Symposium on the Basics and applications of Plasma Technology
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Distribution of zinc oxide nanoparticles in water with atmospheric pressure plasma jet irradiation2019

    • Author(s)
      H. Akamatsu and K. Ichikawa
    • Organizer
      The 41st International Symposium on Dry Process (DPS2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Direct-type Atmospheric Pressure Plasma Source for Metal Organic Plasma Decomposition2019

    • Author(s)
      Hiroshi Akamatsu, Shin-ichi Yamamoto,Kazunori Ichikawa
    • Organizer
      ADVANCES IN APPLIED PLASMA SCIENCE
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Zinc Oxide Thin Film Preparation on Film Substrate by Metal Organic Plasma Decomposition Method2019

    • Author(s)
      Hiroshi Akamatsu,Shin-ichi Yamamoto,and Kazunori Ichikawa
    • Organizer
      The 12th Asian-European International Conference on Plasma Surface Engineering
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Metal organic plasma decomposition method for formation of zinc oxide thin film with low temperature and under atmospheric pressure2019

    • Author(s)
      H. Akamatsu, S. Yamamoto, K. Ichikawa
    • Organizer
      The 10th International Conference on Reactive Plasmas
    • Related Report
      2019 Research-status Report
  • [Presentation] 幅広型大気圧プラズマジェットで生成する活性種の評価2019

    • Author(s)
      赤松 浩, 山本 伸一, 市川 和典
    • Organizer
      第36回 プラズマプロセシング研究会/第31回 プラズマ材料科学シンポジウム
    • Related Report
      2018 Research-status Report
  • [Presentation] Plasma-assisted synthesis of zinc oxide thin film using two different precursor materials2018

    • Author(s)
      Ko-ya Kuriyama, Hiroshi Akamatsu, Shin-ichi Yamamoto, Kazunori Ichikawa
    • Organizer
      40th International Symposium on Dry Process
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Plasma-assisted formation of oxide thin film at atmospheric pressure and unheated process2018

    • Author(s)
      Hiroshi Akamatsu, Ko-ya Kuriyama, Shin-ichi Yamamoto, Kazunori Ichikawa
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research

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Published: 2018-04-23   Modified: 2024-01-30  

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