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Appearance of conductance quantization in binary transition metal based resistive switching

Research Project

Project/Area Number 18K04234
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionMaizuru National College of Technology (2020)
Kyoto University (2018-2019)

Principal Investigator

Nishi Yusuke  舞鶴工業高等専門学校, その他部局等, 准教授 (10512759)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2018: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywords抵抗変化 / 金属酸化物 / 量子化コンダクタンス / コンダクタンス変動 / 酸素空孔 / 熱処理 / 酸化物薄膜
Outline of Final Research Achievements

This is a basic study on the appearance of quantization conductance in resistance-change memory using binary metal oxides. In memory cells composed of platinum and nickel oxide, which is deposited under a specific condition, conductance quantization can be observed in the process of applying a voltage to the cell. It has been found that this origin is a conductive filament with a quantum point contact and that its shape changes by heat and electric field. Furthermore, when these cells are heat-treated in a reducing gas atmosphere at a relatively low temperature of 150C or lower, the variation of oxygen vacancies segregated at the grain boundaries, which are typical defects in columnar nickel oxide layers, is turn out to be suppressed, and the distribution of cell conductance can be reduced.

Academic Significance and Societal Importance of the Research Achievements

次世代の不揮発性メモリとして期待されている抵抗変化型メモリの動作原理は、完全には解明されていない。代表者は白金と酸化ニッケルからなるメモリ素子で見られる、量子化コンダクタンスとよばれる特異な量子現象に着目して、抵抗変化の起源に迫ることを試みた。さまざまな実験やシミュレーションを経て、抵抗変化現象が熱や電界に起因して起こることを半定量的に確認することができた。また、抵抗変化特性のばらつきが、酸化ニッケル中に存在する欠陥列の分布に起因し、特定の条件で熱処理をすることによりこの分布を制御し、ばらつき低減につながる結果を得た。抵抗変化型メモリの特性ばらつき抑制手法の提示につながる成果である。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (30 results)

All 2021 2020 2019 2018

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (24 results) (of which Int'l Joint Research: 11 results)

  • [Journal Article] Grain-boundary structures and their impact on the electrical properties of NiO films deposited by reactive sputtering2020

    • Author(s)
      Iwata Tatsuya、Nishi Yusuke、Kimoto Tsunenobu
    • Journal Title

      Thin Solid Films

      Volume: 709 Pages: 138203-138203

    • DOI

      10.1016/j.tsf.2020.138203

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Unique resistive switching phenomena exhibiting both filament-type and interface-type switching in Ti/Pr_0.7Ca_0.3MnO_3-δ/Pt ReRAM cells2020

    • Author(s)
      Naoki Kanegami, Yusuke Nishi, Tsunenobu Kimoto
    • Journal Title

      Applied Physics Letters

      Volume: 116 Issue: 1 Pages: 013501-013501

    • DOI

      10.1063/1.5131090

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Dominant conduction mechanism in TaOx-based resistive switching devices2019

    • Author(s)
      Toshiki Miyatani, Yusuke Nishi, Tsunenobu Kimoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: 9 Pages: 090914-090914

    • DOI

      10.7567/1347-4065/ab3b68

    • NAID

      210000156961

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Two modes of bipolar resistive switching characteristics in asymmetric TaOx-based ReRAM cells2019

    • Author(s)
      Toshiki Miyatani, Yusuke Nishi, Tsunenobu Kimoto
    • Journal Title

      MRS Advances

      Volume: 4 Issue: 48 Pages: 2601-2607

    • DOI

      10.1557/adv.2019.316

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Conductance fluctuation in NiO-based resistive switching memory2018

    • Author(s)
      Yusuke Nishi, Hiroki Sasakura, Tsunenobu Kimoto
    • Journal Title

      Journal of Applied Physics

      Volume: 124 Issue: 15 Pages: 152134-152134

    • DOI

      10.1063/1.5037486

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effects of TiO_2 crystallinity and oxygen composition on forming characteristics in Pt/TiO_2/Pt resistive switching cells2018

    • Author(s)
      Masaya Arahata,Yusuke Nishi, Tsunenobu Kimoto
    • Journal Title

      AIP Advances

      Volume: 8 Issue: 12 Pages: 125010-125010

    • DOI

      10.1063/1.5060639

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Presentation] Depth profile of chemical compositions in Ta2O5-based resistive switching cells2021

    • Author(s)
      Toshiki Miyatani, Yusuke Nishi, Tsunenobu Kimoto
    • Organizer
      Int. Symp. on Creation of Adv. Photonic and Electronic Devices 2021
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ni/Ta2O5/TiN素子におけるデジタルおよびアナログ抵抗変化2021

    • Author(s)
      宮谷俊輝, 山田和尚, 木本恒暢, 西佑介
    • Organizer
      応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Dissolution of conductive filaments by heat in NiO-based resistive switching cells2020

    • Author(s)
      Yusuke Nishi, Tsunenobu Kimoto
    • Organizer
      Materials Research Society, Spring/Fall Meeting
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of analog resistive switching characteristics in TaOx-based synaptic devices through complementary resistive switching2020

    • Author(s)
      Toshiki Miyatani, Yusuke Nishi, Tsunenobu Kimoto
    • Organizer
      Materials Research Society, Spring/Fall Meeting
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Correlation between depth distribution of chemical compositions and resistive switching characteristics in Metal/Ta2O5/Pt cells2020

    • Author(s)
      Toshiki Miyatani, Yusuke Nishi, Tsunenobu Kimoto
    • Organizer
      Materials Research Society, Spring/Fall Meeting
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ta酸化物中の化学組成分布と抵抗変化のアナログ制御性の相関2020

    • Author(s)
      宮谷俊輝, 西佑介, 木本恒暢
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Ti/Pr0.7Ca0.3MnOx/Pt素子における酸素熱処理が抵抗変化特性に与える効果2020

    • Author(s)
      井室充登, 金上尚毅, 西佑介, 木本恒暢
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Mode Control of Resistive Switching Operations in Pt/TaOx/Ta2O5/Pt Cells2020

    • Author(s)
      宮谷俊輝, 西佑介, 木本恒暢
    • Organizer
      薄膜材料デバイス研究会第17回研究集会
    • Related Report
      2020 Annual Research Report
  • [Presentation] TiN電極を用いたTa2O5-ReRAM素子におけるデジタルおよびアナログ抵抗変化の共存2020

    • Author(s)
      山田和尚, 木本恒暢, 西佑介
    • Organizer
      シリコン材料・デバイス研究会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Impacts of an Asymmetric Stack Structure in TaOx-Based ReRAM Cells on Resistive Switching Characteristics2019

    • Author(s)
      Toshiki Miyatani, Yusuke Nishi, Tsunenobu Kimoto
    • Organizer
      Materials Research Society Symposium Spring Meeting
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effects of Crystallinity and Oxygen Composition on Forming Characteristics in TMO-Based Resistive Switching Cells2019

    • Author(s)
      Yusuke Nishi, Masaya Arahata, Tsunenobu Kimoto
    • Organizer
      Materials Research Society Symposium Spring Meeting
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Coexistence of Interface-Type and Filament-Type Resistive Switching Phenomena in Ti/Pr_0.7Ca_0.3MnO_3/Pt Cells2019

    • Author(s)
      Naoki Kanegami, Yusuke Nishi, Tsunenobu Kimoto
    • Organizer
      Materials Research Society Symposium Spring Meeting
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Pt/TaOx/Ta_2O_5/Pt素子における2種類のバイポーラ型抵抗変化の遷移過程で見られるアナログ抵抗変化2019

    • Author(s)
      宮谷 俊輝、西 佑介、木本 恒暢
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] PtまたはTiN下部電極上の遷移金属酸化物の結晶性および抵抗変化特性2019

    • Author(s)
      山田 和尚、西 佑介、木本 恒暢
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Ti/Pr_0.7Ca_0.3MnOx/Pt素子における界面型抵抗変化現象の解析2019

    • Author(s)
      金上 尚毅、西 佑介、木本 恒暢
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Ta酸化物を用いた抵抗変化素子の電気伝導機構2019

    • Author(s)
      宮谷 俊輝、西 佑介、木本 恒暢
    • Organizer
      第39回電子材料シンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] Ti/Pr_0.7Ca_0.3MnOx/Pt素子におけるフォーミングおよびその後の連続的な抵抗変化現象2019

    • Author(s)
      金上 尚毅、西 佑介、木本 恒暢
    • Organizer
      応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Pt/TaOx/Ta_2O_5/Pt素子における“準高抵抗状態”の発現2019

    • Author(s)
      宮谷 俊輝、西 佑介、木本 恒暢
    • Organizer
      応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Pt/TaOx/Ta_2O_5/Pt素子の直流および交流コンダクタスの温度依存性の解析2019

    • Author(s)
      宮谷 俊輝、西 佑介、木本 恒暢
    • Organizer
      応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Distribution of forming characteristics in NiO-based resistive switching cells with two kinds of NiO crystallinity2018

    • Author(s)
      Yusuke Nishi, Tsunenbu Kimoto
    • Organizer
      Materials Research Society Spring Meeting
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Resistance increase by overcurrent suppression in forming process in Pt/TiO_2/Pt cells2018

    • Author(s)
      R.yosuke Matsui, Yutaka Kuriyama, Yusuke Nishi, Tsunenbu Kimoto
    • Organizer
      Materials Research Society Spring Meeting
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Driving force behind reset process in Pt/NiO/Pt stack cells2018

    • Author(s)
      Yusuke Nishi, Hiroki Sasakura, Tsunenbu Kimoto
    • Organizer
      Int. Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] DC and AC electrical characteristics of Ta_2O_5-based ReRAM cells2018

    • Author(s)
      Toshiki Miyatani, Yusuke Nishi, Tsunenbu Kimoto
    • Organizer
      Int. Microprocesses and Nanotechnology Conference
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Pt/TaOx/Ta_2O_5/Pt抵抗変化素子の直流および交流電気的特性の解析2018

    • Author(s)
      宮谷 俊輝、西 佑介、木本 恒暢
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report

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Published: 2018-04-23   Modified: 2022-01-27  

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