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Understanding of SEM secondary electron voltage contrast and development of quantification method

Research Project

Project/Area Number 18K04246
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionChubu University

Principal Investigator

Tanaka Shigeyasu  中部大学, 生命健康科学部, 教授 (70217032)

Project Period (FY) 2018-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2020: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2018: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywords走査型電子顕微鏡 / p-n接合 / シリコン / SEM / 電位コントラスト / コントラスト
Outline of Final Research Achievements

To investigate the mechanism of the difference of secondary electron signal intensity between p- and n-type semiconductors in the SEM image, Monte Carlo simulations were performed under various conditions using silicon as a sample. It was found that electron scattering at the potential barrier is a key to determine the contrast. But, it takes a long time to get the results. So, with an aim of having a quick comparison between the calculated and the experimental results, the analytical formula was used for the energy distribution of the secondary electrons. This formula treats the scattering of electron wave at potential barrier quantum mechanically. The calculation was based on the patch-field model, and the contrasts calculated from the analytical formula were found to be consistent with the experiments of Si and GaN p-n junctions.

Academic Significance and Societal Importance of the Research Achievements

半導体デバイス開発の分野では微細化の速度が非常に速く進んでいるが、加工技術のカウンターパートとなる評価技術は進展速度がやや遅れている。その一つにポテンシャル分布の解析がある。SEMは表面ポテンシャルを反映した像が得られるとされるが、その根拠は明確にされていなかった。本研究ではシミュレーションを駆使して半導体p-n接合のSEM電位コントラストの原理を解明し、コントラストとポテンシャルの間の関係を定量的に示した。

Report

(6 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (8 results)

All 2023 2022 2020 2019 2018

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (6 results) (of which Int'l Joint Research: 2 results)

  • [Journal Article] Sectioning of Cultured Cells by Ar Ion Beam Milling for SEM Observations2020

    • Author(s)
      S. Tanaka and Y. Ohmi
    • Journal Title

      Microsc. Microanal.

      Volume: 26 Issue: S2 Pages: 2692-2693

    • DOI

      10.1017/s1431927620022448

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Application of Ar Ion Beam Milling on Sectioning of Cells for SEM Observations2019

    • Author(s)
      Shigeyasu Tanaka, Yusuke Ohmi
    • Journal Title

      Microsc. Microanal.

      Volume: 25 (Suppl 2) Issue: S2 Pages: 902-903

    • DOI

      10.1017/s1431927619005245

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] 半導体p-n接合のSEMドーパントコントラストの検討2023

    • Author(s)
      田中成泰
    • Organizer
      日本顕微鏡学会第79回学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] SEM観察のための液中生物試料の簡便な調整法2022

    • Author(s)
      田中成泰、丹羽麻琴、湯川絹叶
    • Organizer
      日本顕微鏡学会第78回学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Ar イオンビームによるSEM観察のための培養細胞断面試料の作製2020

    • Author(s)
      田中成泰, 大海雄介
    • Organizer
      日本顕微鏡学会第76回学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] Application of Ar Ion Beam Milling on Sectioning of Cells for SEM Observations2019

    • Author(s)
      S. Tanaka, Y. Ohmi
    • Organizer
      Microscopy & Microanalysis 2019
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] 培養細胞断面SEM観察のためのArイオンビームによる試料作製2018

    • Author(s)
      田中成泰、長岡祥平、大海雄介
    • Organizer
      日本顕微鏡学会第74回学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Preparation of Biological Samples for SEM Observations using Ionic Liquid2018

    • Author(s)
      S. Tanaka, S. Nakayama. K. Niimi, H. Miyake
    • Organizer
      19th International Microscopy Congress
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research

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Published: 2018-04-23   Modified: 2024-01-30  

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