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Highly-accurate and self-powered environmental sensor based on integrated graphene NEMS-nano particles with signal amplification

Research Project

Project/Area Number 18K04260
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionJapan Advanced Institute of Science and Technology

Principal Investigator

Muruganathan Manoharan  北陸先端科学技術大学院大学, 先端科学技術研究科, 講師 (20639322)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2018: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
KeywordsGraphene / Gas sensor / Ammonia / Acetone / Mass sensing / Gas sensing / vdW bonding memory / Doping / Scattering / Charge neutrality point / グラフェンNEMS / センシングデバイス
Outline of Final Research Achievements

We reported the mass sensing of Hydrogen and Argon mixture gas using a top-gated graphene resonator. 1 μm length and 500 nm width GNEM resonator was fabricated and its resonant frequency was measured as 95.5 MHz with a Q factor of 45 in the vacuum condition of the chamber. The change in adsorbed molecule mass of ~886 zeptograms was measured with the pressure level change from 5.6x10-3 Pa to 6.2x10-3 Pa. Also, we showed that doping does not always dominate the graphene-molecule vdW complex interaction. Moreover, room temperature ammonia sensitivity of 100 parts-per-billion (ppb) in real air was successfully demonstrated in the activated carbon functionalized graphene field-effect transistor gas sensor.

Academic Significance and Societal Importance of the Research Achievements

研究代表者らのグラフェン質量センサーは、軽量分子質量分析への応用の可能性を示している。さらに、グラフェンガスセンサーにおける最も弱い分子間メモリーは、ガス分子の同定のための方法を開発する際に特に有用である。また、研究代表者らの活性炭官能化グラフェンセンサーは、グラフェンの大気ドーピング制限を克服し、選択的大気アンモニアガス検出および同定を可能にする。したがって、これらのグラフェンセンサーは、環境および臨床用アンモニアガスセンサーに使用することができる。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (21 results)

All 2021 2020 2019 2018

All Journal Article (6 results) (of which Int'l Joint Research: 6 results,  Peer Reviewed: 6 results) Presentation (13 results) (of which Int'l Joint Research: 7 results,  Invited: 3 results) Book (2 results)

  • [Journal Article] Adsorbed Molecules as Interchangeable Dopants and Scatterers with a van der Waals Bonding Memory in Graphene Sensors2020

    • Author(s)
      Osazuwa G. Agbonlahor, Manoharan Muruganathan, Tomonori Imamura and Hiroshi Mizuta
    • Journal Title

      ACS Sensors

      Volume: 5 Issue: 7 Pages: 2003-2009

    • DOI

      10.1021/acssensors.0c00403

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Manipulating Berry curvature in hBN/bilayer graphene commensurate heterostructures2020

    • Author(s)
      Kareekunnan Afsal、Muruganathan Manoharan、Mizuta Hiroshi
    • Journal Title

      Physical Review B

      Volume: 101 Issue: 19 Pages: 195406-195406

    • DOI

      10.1103/physrevb.101.195406

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Dielectric-Screening Reduction Induced Large Transport Gap in Suspended Sub-10-nm Graphene Nanoribbon Functional Devices2019

    • Author(s)
      Marek E. Schmidt, Manoharan Muruganathan, Teruhisa Kanzaki, Takuya Iwasaki, Ahmed M. M. Hammam, Shunei Suzuki, Shinichi Ogawa, Hiroshi Mizuta
    • Journal Title

      Small

      Volume: 15 Issue: 46 Pages: 1903025-1903025

    • DOI

      10.1002/smll.201903025

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Modulation of twisted bilayer CVD graphene interlayer resistivity by order of magnitude based on in-situ annealing2019

    • Author(s)
      Jothiramalingam Kulothungan, Manoharan Muruganathan, Hiroshi Mizuta
    • Journal Title

      Carbon

      Volume: 153 Pages: 355-363

    • DOI

      10.1016/j.carbon.2019.07.036

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Electrically controlled valley states in bilayer graphene2019

    • Author(s)
      Afsal Kareekunnan, Manoharan Muruganathan, Hiroshi Mizuta
    • Journal Title

      Nanoscale

      Volume: 11 Issue: 31 Pages: 14707-14711

    • DOI

      10.1039/c9nr03621k

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Formation of quantum dot in graphene single nanoconstriction2019

    • Author(s)
      Iwasaki Takuya、Wang Zhongwang、Muruganathan Manoharan、Mizuta Hiroshi
    • Journal Title

      Applied Physics Express

      Volume: 12 Issue: 2 Pages: 025004-025004

    • DOI

      10.7567/1882-0786/aaf993

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] High-Performance Graphene Devices and the Detection of Silent Voices from Thunder Clouds2021

    • Author(s)
      Manoharan Muruganathan, Afsal Kareekunnan, Tatsufumi Agari, Huynh Van Ngoc, Takeshi Kudo, Takeshi Maruyama, and Hiroshi Mizuta
    • Organizer
      6th International Conference on Advances in Functional Materials
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Engineering of graphene nanoribbon surface for low concentration ethanol gas sensing2021

    • Author(s)
      R.Sankar Ganesh,M. Manoharan, Gabriel Agbonlahor, H. Maki, M. Hattori, K. Shimomai, H. Mizuta
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Passivated-CVD-Graphene Based Gas Sensors Against Atmospheric Doping2021

    • Author(s)
      Osazuwa Gabriel Agbonlahor, Manoharan Muruganathan, Sankar Ganesh Ramaraj, Hisashi Maki, Masashi Hattori, Kenichi Shimomai, Hiroshi Mizuta
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] High-Performance Graphene Sensors to Detect Silent Voices from Human Skins and Thunder Clouds2020

    • Author(s)
      Manoharan Muruganathan, Osazuwa Gabriel Agbonlahor, Afsal Kareekunnan, Tatsufumi Agari, Sankar Ganesh Ramaraj, Hisashi Maki, Masashi Hattori, Kenichi Shimomai, Takeshi Kudo, Takeshi Maruyama, and Hiroshi Mizuta
    • Organizer
      International Symposium on Silent Voice Sensing
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Adsorption Distance Effects on Gas Adsorption Induced Scattering in Graphene Gas Sensors2020

    • Author(s)
      Osazuwa Gabriel Agbonlahor, Manoharan Muruganathan, Tomonori Imamura, Hisashi Maki, Masashi Hattori, Hiroshi Mizuta
    • Organizer
      2020 International Conference on Solid State Devices and Materials (SSDM2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High sensitive detection of Acetone gas using Graphene nanoribbon sensor2020

    • Author(s)
      R. Sankar Ganesh, Gabriel Agbonlahor, H. Maki, M. Manoharan, H. Mizuta
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Atmosphere-Specific Response in Graphene Field-Effect Transistors2020

    • Author(s)
      Osazuwa Gabriel Agbonlahor, Manoharan Muruganathan, Hiroshi Mizuta
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Graphene Nano-Electro-Mechanical (NEM) Devices and Extension to Sensor Applications2019

    • Author(s)
      H. Mizuta, G. Agbonlahor, H. Miyashita, K. Taketomi, J. Lee, N. Huynh and M. Muruganathan
    • Organizer
      The Semiconductor Process Integration 11 Symposium in 236th ECS Meeting
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Valley Hall Effect in Ungated Bilayer Graphene2019

    • Author(s)
      Kareekunnan Afsal, Manoharan Muruganathan, Hiroshi Mizuta
    • Organizer
      Recent Progress in Graphene & 2D Materials Research
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Zeptogram Level Mass Sensing of Light Weight Gas Molecules Using Graphene Nanomechanical (GNEM) Resonator2018

    • Author(s)
      M. Muruganathan, H. Miyashita, J. Kulothungan, M. Schmidt, H. Mizuta
    • Organizer
      IEEE Sensors 2018
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Low-Voltage Multifunctional Graphene Nanoelectromechanical Devices2018

    • Author(s)
      M. Muruganathan, H. V. Ngoc, J. Kulothungan, M. Schmidt, H. Mizuta
    • Organizer
      International Conference on Global Research and Education, Inter-Academia
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Detection of ammonia via charge transfer-induced shift of graphene charge neutrality point2018

    • Author(s)
      Osazuwa Gabriel Agbonlahor, Jothiramalingam Kulothungan, Manoharan Muruganathan , and Hiroshi Mizuta
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Sensing of N2/Acetone mixed gas using graphene nanoribbon2018

    • Author(s)
      K. Taketomi, S. Taniuchi, H. Sakai, S. Saito, M. Mahoharan, H. Mizuta
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Book] Graphene Nanoelectromechanical Switch: Ultimate Downscaled NEM Actuators to Single-Molecule and Zeptogram Mass Sensors2021

    • Author(s)
      M. Muruganathan, and H. Mizuta
    • Total Pages
      42
    • Publisher
      Jenny Stanford Publishing
    • ISBN
      9789814877121
    • Related Report
      2020 Annual Research Report
  • [Book] Nanotechnology Characterization Tools for Environment, Health, and Safety2019

    • Author(s)
      Muruganathan Manoharan, Mizuta Hiroshi
    • Total Pages
      19
    • Publisher
      Springer
    • ISBN
      9783662596005
    • Related Report
      2019 Research-status Report

URL: 

Published: 2018-04-23   Modified: 2023-01-30  

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