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Micromachining using extreme ultraviolet radiation from laser-produced plasma

Research Project

Project/Area Number 18K04770
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 26050:Material processing and microstructure control-related
Research InstitutionUniversity of Tsukuba

Principal Investigator

Makimura Tetsuya  筑波大学, 数理物質系, 准教授 (80261783)

Project Period (FY) 2018-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2020: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2019: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2018: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Keywords極端紫外光 / マイクロ加工 / シリカガラス / ポリジメチルシロキサン / 高アスペクト比 / レーザー生成プラズマ / シリコーンエラストマ / 精密加工 / アブレーション加工 / マイクロ・ナノ加工 / アブレーション過程 / 波動光学 / レーザープラズマ / 生体適合性材料
Outline of Final Research Achievements

We have established a practical processing method that irradiates light with a wavelength of 10 nanometers onto a material and removes the surface region. In the 10-nanometer wavelength range, there are no transparent materials available to make lenses. Therefore, we developed an optical system based on reflection to process structures with a high aspect ratio. In addition, at the micrometer scale, the wave nature of light becomes pronounced. Therefore, we controlled the propagation of light by comparing the simulated one with the actual processed geometry. Using these results, we have shown that through holes with a diameter of 1 micrometer can be fabricated in a polymer sheet with a thickness of 10 micrometers.

Academic Significance and Societal Importance of the Research Achievements

可視光や紫外光が物質に入射すると,吸収されてすぐに熱エネルギーに変換されてしまう。加工を行う場合作製した構造が崩れことになる。従って,従来10マイクロメートルより微細な加工は困難であった。本研究では,波長が10ナノメートルの光を用いることでこの困難を打破し,マイクロメートルのスケールでの加工を可能にした。この成果は,マイクロ化学分析器や細胞の操作のための構造を作製するの応用できる。

Report

(6 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (7 results)

All 2023 2022 2021 2019

All Presentation (7 results) (of which Int'l Joint Research: 7 results)

  • [Presentation] EUV ablation of polydimethylsiloxane elastomer2023

    • Author(s)
      Kotaro Oguchi, Yuhao Wang, Tetsuya Makimura
    • Organizer
      SPIE Photonics West 2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ablation of polydimethylsiloxane elastomer using laser-plasma EUV radiation2022

    • Author(s)
      Kotaro Oguchi, Erika Kira, Hikari Urai, Tetsuya Makimura
    • Organizer
      16th International Conference on Laser Ablation
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ablation of polydimethylsiloxane elastmer using laser-plasma EUV radiation2022

    • Author(s)
      Kotaro Oguchi, Erika Kira, Hikari Urai, Tetsuya Makimura
    • Organizer
      16th International Conference on Laser Ablation
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] High-aspect micromachining of PDMS sheets using laser plasma EUV radiation2021

    • Author(s)
      Jiang Yuan, Kotaro Oguchi, Tetsuya Makimura
    • Organizer
      The 22nd International Symposium on Laser Precision Microfabrication
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma2019

    • Author(s)
      Makimura Tetsuya; Urai Hikari; Kira Eriko; Niino Hiroyuki
    • Organizer
      The 8th International Congress on Laser Advanced Materials Processing/
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Silica ablation process induced by nanosecond EUV irradiation2019

    • Author(s)
      Makimura Tetsuya; Torii Shuichi; Niino Hiroyuki
    • Organizer
      SPIE Optics + Optoelectronics 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Silica nano-ablation mechanism under irradiation with nanosecond EUV radiation2019

    • Author(s)
      Tetsuya Makimura, Shuichi Torii, Hiroyuki Niino
    • Organizer
      SPIE Photonics West
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research

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Published: 2018-04-23   Modified: 2024-01-30  

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