| Project/Area Number |
18K04895
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 28030:Nanomaterials-related
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| Research Institution | Konan University |
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Principal Investigator |
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| Project Period (FY) |
2018-04-01 – 2021-03-31
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| Project Status |
Completed (Fiscal Year 2020)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2019: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2018: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | ナノホール / 金属ナノ粒子 / 透過電子顕微鏡 / ナノポア / ディウェッティング / 透過電子顕微鏡法 |
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| Outline of Final Research Achievements |
In the present study, we investigated the formation process of nanoholes in the thermally-oxidized Si substrate using atomic force microscopy in combination with cross-sectional transmission electron microscopy. The nanoholes were obtained by thermal annealing-induced depression of metal nanoparticles which are formed by the solid-state dewetting of metal thin films. The length and diameter of nanoholes increase with increasing annealing time and sizes of nanoparticles, respectively. In addition, it was confirmed that the crystal structure of nanoparticles affects the diameter size. These results indicate that the length and diameter of nanoholes can be controlled by the annealing conditions and appropriate choice of metal nanoparticles.
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| Academic Significance and Societal Importance of the Research Achievements |
固体材料に形成されたナノホールは、ナノ空間における化学反応場やナノツール作製のモールド材などとしての利用が期待されている。ナノホール形成に金属ナノ粒子を用いる本手法は、従来のナノホール作製法と比較してプロセスの簡素化・低コスト化が期待できるが、形成されるナノホールのサイズ制御が課題とされる。本研究で得られたナノホール径およびナノホール長制御に関する知見は、ナノホールの高次構造制御に寄与すると考えらえる。
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