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Miniaturization of c-Se heterojunction for highly sensitive light photodiode

Research Project

Project/Area Number 18K04914
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 28050:Nano/micro-systems-related
Research InstitutionRitsumeikan University

Principal Investigator

Kobayashi Taizo  立命館大学, 理工学部, 准教授 (20557433)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2019: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2018: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywords結晶セレン薄膜 / マイクロ光電変換 / 微細加工技術 / アバランシェ効果 / スケール効果 / 光電変換 / 可視光 / 結晶セレン / ヘテロ接合 / 結晶セレン薄膜フォトダイオード / マイクロPD / 半導体微細加工プロセス / 高効率光電変換 / ステンシルマスク / マイクロPDアレイ / フレキシブル可視光センサ / 微細加工 / 光センサ
Outline of Final Research Achievements

The c-Se based micro-photodiodes were fabricated using MEMS fabrication technology and were characterized. Width and length of photodiode was miniaturized to 35 um in order to decrease series resistance and loss of photogenerated current, when photogenerated current was dynamically amplificated by light concentration and/or avalanche effect. Consequently, 3.14 times and 5.03 times higher photogenerated current were obtained without and with light concentration conditions by miniaturizing c-Se micro-photodiode from 1 mm to 35 um squares.

Academic Significance and Societal Importance of the Research Achievements

最近、新たな高効率光電変換のアプローチとして超小型太陽電池の有効性が示された。しかしながら結晶セレンPDの光電子材料物性と加工技術の両面に着目した半導体マイクロマシーニングについての報告例は無い。本研究においては結晶セレンPDの構成材料(セレン、酸化チタン、ITO透明導電膜)へエッチングを駆使して結晶セレンPDの超小型化を進めスケール効果の高効率光電変換への有効性を実験的に示した。本手法は、結晶セレンPDと材料構成が比較的近いCu(In,Ga)Se2薄膜やペロブスカイト太陽電池へも将来的に展開できる可能性がある。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (17 results)

All 2021 2020 2019 2018 Other

All Journal Article (4 results) (of which Peer Reviewed: 3 results) Presentation (9 results) (of which Int'l Joint Research: 3 results,  Invited: 1 results) Remarks (3 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] 分極制御によるTiO2薄膜の光応答型濡れ性変化の促進2021

    • Author(s)
      瀬川悠太,小林大造
    • Journal Title

      電気学会論文誌E

      Volume: 141(7) Pages: 222-227

    • NAID

      130008060173

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Se/Ga<sub>2</sub>O<sub>3</sub> Micro Photodiodes on Flexible Film for Visible Light Sensing2020

    • Author(s)
      足立悠輔,小林大造
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 140 Issue: 12 Pages: 363-368

    • DOI

      10.1541/ieejsmas.140.363

    • NAID

      130007948610

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2020-12-01
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Micro Fabrication Technology for the Patterned Se/TiO<sub>2</sub> Photodiodes2019

    • Author(s)
      Adachi Yusuke、Kobayashi Taizo
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 139 Issue: 4 Pages: 75-80

    • DOI

      10.1541/ieejsmas.139.75

    • NAID

      130007621907

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2019-04-01
    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Journal Article] Acceleration of wettability switching on TiO2 thin films under ultraviolet irradiation and direct current bias voltage2019

    • Author(s)
      Kobayashi Taizo、Konishi Satoshi
    • Journal Title

      Surface and Coatings Technology

      Volume: 363 Pages: 80-86

    • DOI

      10.1016/j.surfcoat.2019.02.043

    • Related Report
      2018 Research-status Report
  • [Presentation] TiO2窓層の結晶構造制御による結晶Se薄膜光電変換素子の高効率化2021

    • Author(s)
      川岸稜也、足立悠輔、小林大造
    • Organizer
      電気学会全国大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 毛細管効果により形成したカラーフィルタをフォトダイオードに一体化したカラーセンサ2021

    • Author(s)
      道垣内公介、足立悠輔、小林大造
    • Organizer
      電気学会全国大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] TiO2 薄膜の分極制御による光応答型濡れ性変化の促進2020

    • Author(s)
      瀬川 悠太 , 小林 大造
    • Organizer
      第37回「センサ・マイクロマシンと応用システム」シンポジウムプログラム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Se/Ga2O3 Thin Film Micro-photodiodes for Flexible Color Sensor2020

    • Author(s)
      Taizo Kobayashi
    • Organizer
      Virtual IEEE-NEMS2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Tiny, Light-weight and Flexible Color Sensor by Combination of Se/Ga2O3 Photodiode Array and Fluidic-Printed RGB Filters2019

    • Author(s)
      Y. Adachi and T. Kobayashi
    • Organizer
      Transducers 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 結晶Se薄膜マイクロフォトダイオードを用いたフィルム型フレキシブル光センサの作製とその応用2019

    • Author(s)
      足立悠輔,小林大造
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] Se/TiO2光電池を用いた電圧印加による光触媒表面の光誘起親水化反応の促進2019

    • Author(s)
      瀬川悠太,小林大造
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] Tiny, Light-weight and Flexible Color Sensor by Combination of Se/Ga2O3 Photodiode Array and Fluidic-Printed RGB Filters2019

    • Author(s)
      Yusuke Adachi and Taizo Kobayashi
    • Organizer
      The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] 結晶セレン薄膜を用いたマイクロ可視光センサのための微細加工技術の開発2018

    • Author(s)
      足立悠輔,小林大造
    • Organizer
      第35回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2018 Research-status Report
  • [Remarks] 研究室ホームぺージ

    • URL

      http://www.ritsumei.ac.jp/~tkt07004/research_photodiode.html

    • Related Report
      2020 Annual Research Report
  • [Remarks] 立命館大学小林研ホームページ

    • URL

      http://www.ritsumei.ac.jp/~tkt07004/research_photodiode.html

    • Related Report
      2019 Research-status Report
  • [Remarks]

    • URL

      http://www.ritsumei.ac.jp/~tkt07004/Koba_Lab+R3.html

    • Related Report
      2018 Research-status Report
  • [Patent(Industrial Property Rights)] 光センサ2019

    • Inventor(s)
      小林大造
    • Industrial Property Rights Holder
      学校法人立命館
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2019-115109
    • Filing Date
      2019
    • Related Report
      2019 Research-status Report

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Published: 2018-04-23   Modified: 2022-12-28  

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