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Fabrication of Metal-Doped-AlN Piezoelectric Nanorod and Investigation on the Properties

Research Project

Project/Area Number 18K04918
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 28050:Nano/micro-systems-related
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Uehara Masato  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (10304742)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2019: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2018: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords窒化アルミニウム / ナノロッド / スパッタリング / 圧電材料 / 圧電体 / 相分離
Outline of Final Research Achievements

Aluminum nitride is a piezoelectric material that can convert electrical energy and mechanical energy. It is used in communication equipment. We have succeeded in fabricating the nanorod array, which is expected to improve the piezoelectric properties. Although the diameter and height of nanorods is extremely fine at the nanometer-level, the array can be fabricated on a silicon wafer with a large area of 8 inches in size using our developed technique in this study. This technique can be expected as a mass production process. It was also found that the piezoelectric properties can be improved by adding different kinds of metal element with aluminum nitride.。

Academic Significance and Societal Importance of the Research Achievements

窒化アルミニウムは電気的エネルギーと力的エネルギーを変換できる物質(圧電材料)である。通信機器などに利用されている。5G以降の通信システムで利用するには、圧電性能を一層高める必要がある。性能の向上の手段としてナノロッド化が提案されている。今回、ナノメーターレベルで整然と並ぶ構造列をシリコンウエハ上に作製できる技術を開発した。用いた方法はスパッタリング法であり、低コストである。さらに、本技術では8インチサイズの広い面積の半導体ウエハ上でも作製可能であることを実証できたので、今後、量産化も期待できる。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (9 results)

All 2021 2020 2019 2018

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (8 results) (of which Int'l Joint Research: 5 results,  Invited: 4 results)

  • [Journal Article] Preparation of YbAlN piezoelectric thin film by sputtering and influence of Yb concentration on properties and crystal structure2021

    • Author(s)
      Uehara Masato、Amano Yuki、Anggraini Sri Ayu、Hirata Kenji、Yamada Hiroshi、Akiyama Morito
    • Journal Title

      Ceramics International

      Volume: 47 Issue: 11 Pages: 16029-16036

    • DOI

      10.1016/j.ceramint.2021.02.177

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Presentation] IoT社会に向けた複合窒化物圧電薄膜の開発2020

    • Author(s)
      上原雅人、山田浩志、秋山守人
    • Organizer
      第11回セラミックス研究交流セミナー
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] ウルツ鉱型窒化物への元素添加による圧電材料の開発2020

    • Author(s)
      上原雅人
    • Organizer
      セラミックコーティング研究体研究会
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] Ternary and Quaternary Nitride Piezoelectric Thin Film2019

    • Author(s)
      Masato Uehara et al.
    • Organizer
      2019 ISAF-ICE-EMF-IWPM-PFM Joint Conference
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of Aluminum Nitride Piezoelectric Thin Film by Doping2019

    • Author(s)
      Masato Uehara et al.
    • Organizer
      4th Pacific Rim Engineering Ceramics Summit
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Preparation of Yb-doped AlN Piezoelectric Thin Film2019

    • Author(s)
      Masato Uehara et al.
    • Organizer
      PACRIM13
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of Yb doping on piezoelectric properties and crystal structure of AlN piezo thin film2019

    • Author(s)
      Masato Uehara et al.
    • Organizer
      2019 MRS Fall Meeting
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 元素添加によるAlN系圧電薄膜の開発2018

    • Author(s)
      上原雅人
    • Organizer
      日本学術振興会 第166 委員会第81回研究会
    • Related Report
      2018 Research-status Report
  • [Presentation] Influence of Metal Element Addition on Crystal Structure of AlN Piezoelectric Thin Film2018

    • Author(s)
      Masato Uehara, Sri Ayu Angg raini, Horoshi Yamada, Morito Akiyama
    • Organizer
      2018 Materials Research Society Fall Meeting
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research

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Published: 2018-04-23   Modified: 2022-01-27  

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