Development of Dielectric Constant Nano-Imaging Method Using SNDM and its Application to Materials and Device Characterization

• Project/Area Number: 18K04932
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 29020:Thin film/surface and interfacial physical properties-related
• Research Institution: Tohoku University
• Principal Investigator: Hiranaga Yoshiomi 東北大学, 電気通信研究所, 准教授 (70436161)
• Project Period (FY): 2018-04-01 – 2023-03-31
• Project Status: Completed (Fiscal Year 2022)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2020: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2018: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: プローブ顕微鏡 / 走査型非線形誘電率顕微鏡 / 誘電率分布計測 / 半導体計測 / 誘電体 / 誘電率イメージング / 半導体 / キャリア分布イメージング / 走査型プローブ顕微鏡 / 誘電率

Outline of Final Research Achievements

Dielectric constant imaging in the nanoscale region is expected to become one of the most important evaluation techniques in the future, in conjunction with the development of electronic devices that are becoming increasingly miniaturized and have higher performance. In this study, we developed a method for linear dielectric constant imaging (∂C/∂z-SNDM method) using a scanning nonlinear dielectric constant microscope (SNDM) with extremely high capacitance detection sensitivity in the order of 10^-22 F.

Academic Significance and Societal Importance of the Research Achievements

本研究を通じて∂C/∂z-SNDM法がナノスケール領域における誘電率分布を可視化する手法として有効であることが示された．本手法は今後様々な様々な測定対象に展開されてゆくと考えられる．具体的には，微細化するFETデバイス等における酸化膜のナノスケール評価への展開が期待される． また，近年開発が盛んなナノコンポジット材料やナノ結晶材料，ナノシート材料などの新奇ナノ材料も，本手法が有用となる測定対象の例として挙げることができる．

Research Products

• [Journal Article] Nanoscale mapping to assess the asymmetry of local C?V curves obtained from ferroelectric materials (2022)
  • Author(s): Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
  • Journal Title: Japanese Journal of Applied Physics Volume: 61 Issue: SN Pages: SN1014-SN1014
  • DOI: 10.35848/1347-4065/ac7f7a
  • Peer Reviewed
• [Journal Article] Material Design Strategy for Enhancement of Readback Signal Intensity in Ferroelectric Probe Data Storage (2021)
  • Author(s): Hiranaga Yoshiomi、Cho Yasuo
  • Journal Title: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Volume: 68 Issue: 3 Pages: 859-864
  • DOI: 10.1109/tuffc.2020.3006909
  • Peer Reviewed
• [Journal Article] High-precision local C?V mapping for ferroelectrics using principal component analysis (2021)
  • Author(s): Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
  • Journal Title: Japanese Journal of Applied Physics Volume: 60 Issue: SF Pages: SFFB09-SFFB09
  • DOI: 10.35848/1347-4065/ac13d9
  • Peer Reviewed
• [Journal Article] Simulation of nanoscale domain growth for ferroelectric recording (2021)
  • Author(s): Fukuzawa Kenji、Hiranaga Yoshiomi、Cho Yasuo
  • Journal Title: AIP Advances Volume: 11 Issue: 11 Pages: 115117-115117
  • DOI: 10.1063/5.0074004
  • Peer Reviewed
• [Journal Article] Effects of deposition conditions on the ferroelectric properties of (Al1-xScx)N thin films (2020)
  • Author(s): Yasuoka Shinnosuke、Shimizu Takao、Tateyama Akinori、Uehara Masato、Yamada Hiroshi、Akiyama Morito、Hiranaga Yoshiomi、Cho Yasuo、Funakubo Hiroshi
  • Journal Title: Journal of Applied Physics Volume: 128 Issue: 11 Pages: 114103-114103
  • DOI: 10.1063/5.0015281
• [Journal Article] Local C-V mapping for ferroelectrics using scanning nonlinear dielectric microscopy (2020)
  • Author(s): Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
  • Journal Title: Journal of Applied Physics Volume: 128 Issue: 24 Pages: 244105-244105
  • DOI: 10.1063/5.0029630
• [Presentation] Characterization of Dielectric and Ferroelectric Materials Using Scanning Nonlinear Dielectric Microscopy (2022)
  • Author(s): Yoshiomi Hiranaga
  • Organizer: 15th International Symposium on Ferroic Domains & Micro- to Nano-scopic Structures
  • Int'l Joint Research / Invited
• [Presentation] Statistical Analysis of Local C-V Map Data for Ferroelectric Thin Films (2022)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: the Seventh International Symposium on Dielectric Materials and Applications
  • Int'l Joint Research / Invited
• [Presentation] Local C-V Characterization for Ferroelectric Films (2021)
  • Author(s): Yoshiomi Hiranaga, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Yasuo Cho
  • Organizer: IEEE ISAF-ISIF-PFM 2021 Virtual Conference
  • Int'l Joint Research
• [Presentation] Downscaling and Low Temperature Deposition of Ferroelectric (Al1-xScx)N Thin Films Deposited by Dual Sputtering (2021)
  • Author(s): Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo
  • Organizer: IEEE ISAF-ISIF-PFM 2021 Virtual Conference
  • Int'l Joint Research
• [Presentation] Nanoscale Domain Dynamics Characterization Using Local C-V Mapping (2021)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: The Sixth International Symposium on Dielectric Materials and Applications
  • Int'l Joint Research / Invited
• [Presentation] Recording Medium Design Aiming at Realizing Ferroelectric Probe Data Storage (2021)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: The Sixth International Symposium on Dielectric Materials and Applications
  • Int'l Joint Research
• [Presentation] 高調波∂C/∂z-SNDM信号を用いた半導体キャリア分布観察 (2019)
  • Author(s): 平永 良臣，長 康雄
  • Organizer: 第66回応用物理学会春季学術講演会
• [Presentation] ∂C/∂z-SNDM法による半導体ドーパント濃度測定に関する数値シミュレーション (2018)
  • Author(s): 平永 良臣，長 康雄
  • Organizer: 第79回応用物理学会秋季学術講演会
• [Presentation] ∂C/∂z-SNDMによる半導体評価に関する数値シミュレーション (2018)
  • Author(s): 平永 良臣，長 康雄
  • Organizer: ナノテスティングシンポジウム
• [Presentation] Nanoscale Permittivity Imaging Using ∂C/∂z-mode Scanning Nonlinear Dielectric Microscopy (2018)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: ACSIN-14 & ICSPM26
  • Int'l Joint Research
• [Presentation] Local Permittivity Measurement Using ∂C/∂z-Mode Scanning Nonlinear Dielectric Microscopy (2018)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: European Conference on Applications of Polar Dielectrics
  • Int'l Joint Research
• [Presentation] Local Permittivity Measurement Using ∂C/∂z-Mode Scanning Nonlinear Dielectric Microscopy (2018)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: 2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference
  • Int'l Joint Research
• [Presentation] Nanoscale Linear Permittivity Measurement Using Scanning Nonlinear Dielectric Microscopy (2018)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: Third International Symposium on Dielectric Materials and Applications
  • Int'l Joint Research / Invited
• [Presentation] Nanoscale Linear Dielectric Constant Imaging Using ∂C/∂z-Mode Scanning Nonlinear Dielectric Microscopy (2018)
  • Author(s): Yoshiomi Hiranaga and Yasuo Cho
  • Organizer: Material Research Soceety
  • Int'l Joint Research