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Development of Dielectric Constant Nano-Imaging Method Using SNDM and its Application to Materials and Device Characterization

Research Project

Project/Area Number 18K04932
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 29020:Thin film/surface and interfacial physical properties-related
Research InstitutionTohoku University

Principal Investigator

Hiranaga Yoshiomi  東北大学, 電気通信研究所, 准教授 (70436161)

Project Period (FY) 2018-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2018: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywordsプローブ顕微鏡 / 走査型非線形誘電率顕微鏡 / 誘電率分布計測 / 半導体計測 / 誘電体 / 誘電率イメージング / 半導体 / キャリア分布イメージング / 走査型プローブ顕微鏡 / 誘電率
Outline of Final Research Achievements

Dielectric constant imaging in the nanoscale region is expected to become one of the most important evaluation techniques in the future, in conjunction with the development of electronic devices that are becoming increasingly miniaturized and have higher performance. In this study, we developed a method for linear dielectric constant imaging (∂C/∂z-SNDM method) using a scanning nonlinear dielectric constant microscope (SNDM) with extremely high capacitance detection sensitivity in the order of 10^-22 F.

Academic Significance and Societal Importance of the Research Achievements

本研究を通じて∂C/∂z-SNDM法がナノスケール領域における誘電率分布を可視化する手法として有効であることが示された.本手法は今後様々な様々な測定対象に展開されてゆくと考えられる.具体的には,微細化するFETデバイス等における酸化膜のナノスケール評価への展開が期待される. また,近年開発が盛んなナノコンポジット材料やナノ結晶材料,ナノシート材料などの新奇ナノ材料も,本手法が有用となる測定対象の例として挙げることができる.

Report

(6 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (20 results)

All 2022 2021 2020 2019 2018

All Journal Article (6 results) (of which Peer Reviewed: 4 results) Presentation (14 results) (of which Int'l Joint Research: 11 results,  Invited: 4 results)

  • [Journal Article] Nanoscale mapping to assess the asymmetry of local C?V curves obtained from ferroelectric materials2022

    • Author(s)
      Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SN Pages: SN1014-SN1014

    • DOI

      10.35848/1347-4065/ac7f7a

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Material Design Strategy for Enhancement of Readback Signal Intensity in Ferroelectric Probe Data Storage2021

    • Author(s)
      Hiranaga Yoshiomi、Cho Yasuo
    • Journal Title

      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

      Volume: 68 Issue: 3 Pages: 859-864

    • DOI

      10.1109/tuffc.2020.3006909

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] High-precision local C?V mapping for ferroelectrics using principal component analysis2021

    • Author(s)
      Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SF Pages: SFFB09-SFFB09

    • DOI

      10.35848/1347-4065/ac13d9

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Simulation of nanoscale domain growth for ferroelectric recording2021

    • Author(s)
      Fukuzawa Kenji、Hiranaga Yoshiomi、Cho Yasuo
    • Journal Title

      AIP Advances

      Volume: 11 Issue: 11 Pages: 115117-115117

    • DOI

      10.1063/5.0074004

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effects of deposition conditions on the ferroelectric properties of (Al1-xScx)N thin films2020

    • Author(s)
      Yasuoka Shinnosuke、Shimizu Takao、Tateyama Akinori、Uehara Masato、Yamada Hiroshi、Akiyama Morito、Hiranaga Yoshiomi、Cho Yasuo、Funakubo Hiroshi
    • Journal Title

      Journal of Applied Physics

      Volume: 128 Issue: 11 Pages: 114103-114103

    • DOI

      10.1063/5.0015281

    • Related Report
      2020 Research-status Report
  • [Journal Article] Local C-V mapping for ferroelectrics using scanning nonlinear dielectric microscopy2020

    • Author(s)
      Hiranaga Yoshiomi、Mimura Takanori、Shimizu Takao、Funakubo Hiroshi、Cho Yasuo
    • Journal Title

      Journal of Applied Physics

      Volume: 128 Issue: 24 Pages: 244105-244105

    • DOI

      10.1063/5.0029630

    • Related Report
      2020 Research-status Report
  • [Presentation] Characterization of Dielectric and Ferroelectric Materials Using Scanning Nonlinear Dielectric Microscopy2022

    • Author(s)
      Yoshiomi Hiranaga
    • Organizer
      15th International Symposium on Ferroic Domains & Micro- to Nano-scopic Structures
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Statistical Analysis of Local C-V Map Data for Ferroelectric Thin Films2022

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      the Seventh International Symposium on Dielectric Materials and Applications
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Local C-V Characterization for Ferroelectric Films2021

    • Author(s)
      Yoshiomi Hiranaga, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Yasuo Cho
    • Organizer
      IEEE ISAF-ISIF-PFM 2021 Virtual Conference
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Downscaling and Low Temperature Deposition of Ferroelectric (Al1-xScx)N Thin Films Deposited by Dual Sputtering2021

    • Author(s)
      Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo
    • Organizer
      IEEE ISAF-ISIF-PFM 2021 Virtual Conference
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoscale Domain Dynamics Characterization Using Local C-V Mapping2021

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      The Sixth International Symposium on Dielectric Materials and Applications
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Recording Medium Design Aiming at Realizing Ferroelectric Probe Data Storage2021

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      The Sixth International Symposium on Dielectric Materials and Applications
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] 高調波∂C/∂z-SNDM信号を用いた半導体キャリア分布観察2019

    • Author(s)
      平永 良臣,長 康雄
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] ∂C/∂z-SNDM法による半導体ドーパント濃度測定に関する数値シミュレーション2018

    • Author(s)
      平永 良臣,長 康雄
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] ∂C/∂z-SNDMによる半導体評価に関する数値シミュレーション2018

    • Author(s)
      平永 良臣,長 康雄
    • Organizer
      ナノテスティングシンポジウム
    • Related Report
      2018 Research-status Report
  • [Presentation] Nanoscale Permittivity Imaging Using ∂C/∂z-mode Scanning Nonlinear Dielectric Microscopy2018

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      ACSIN-14 & ICSPM26
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Local Permittivity Measurement Using ∂C/∂z-Mode Scanning Nonlinear Dielectric Microscopy2018

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      European Conference on Applications of Polar Dielectrics
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Local Permittivity Measurement Using ∂C/∂z-Mode Scanning Nonlinear Dielectric Microscopy2018

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanoscale Linear Permittivity Measurement Using Scanning Nonlinear Dielectric Microscopy2018

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      Third International Symposium on Dielectric Materials and Applications
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Nanoscale Linear Dielectric Constant Imaging Using ∂C/∂z-Mode Scanning Nonlinear Dielectric Microscopy2018

    • Author(s)
      Yoshiomi Hiranaga and Yasuo Cho
    • Organizer
      Material Research Soceety
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research

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Published: 2018-04-23   Modified: 2024-01-30  

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