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Development of Novel Electron Emitter for Photon Enhanced Thermionic Emission Using Thin Film Semiconductor Material

Research Project

Project/Area Number 18K04934
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 29020:Thin film/surface and interfacial physical properties-related
Research InstitutionShizuoka University

Principal Investigator

Akihisa Ogino  静岡大学, 工学部, 准教授 (90377721)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2018: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords熱電子放出 / 二硫化モリブデン / 窒化アルミニウムガリウム / 光支援熱電子発電 / 薄膜 / プラズマ / 熱電子 / 半導体
Outline of Final Research Achievements

For the purpose of development of novel electron emitter for photon enhanced thermionic emission using thin film semiconductor material, molybdenum disulfide (MoS2) thin film was synthesized by CVD method and enhanced by plasma treatment. MoS2 was n-typed by forming sulfur defects by argon or hydrogen plasma treatment, and p-typed by injecting nitrogen into the sulfur defects by nitrogen plasma treatment.
The thermionic emission of Si-doped aluminum gallium nitride (AlGaN) films with Cs adoption was investigated. Threshold temperatures of thermionic emission was around 300 ℃ and it is considerably lower than the temperatures of conventional thermionic energy converter. The work function decreases as the AlN mole fraction x in the AlGaN samples is increased. According to the output characteristics of thermionic converter with AlGaN emitter, the output voltage was 0.14 V at the emitter temperature 600 ℃.

Academic Significance and Societal Importance of the Research Achievements

低温で高効率な熱電子発電の実現に向けて、二硫化モリブデンおよび窒化アルミニウムガリウム半導体による低温熱電子放出源を開発し、従来の金属熱電子源よりも圧倒的に低い300℃での熱電子放出を観測した。二硫化モリブデンの硫黄欠陥形成とドーピングにおいて、低温プラズマ処理は有効である。プラズマ処理技術を用いて二硫化モリブデンのバンド構造ならびに表面特性を向上させることで、可視光を効率的に電子放出に利用できる電子減が期待できる。本研究の成果は、半導体エミッタの低抵抗化、低電子親和力化について有用であり、狭真空ギャップの熱電発電器モジュールの作製において有用な知見といえる。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (28 results)

All 2021 2020 2019 2018

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (25 results) (of which Int'l Joint Research: 11 results)

  • [Journal Article] Surface polarity dependence of thermionic emission and conversion characteristics of n-type GaN cathodes2021

    • Author(s)
      Shigeya Kimura, Hisashi Yoshida, Hisao Miyazaki, Takuya Fujimoto, Akihisa Ogino
    • Journal Title

      J. Vac. Sci. Technol.

      Volume: B39 Issue: 1

    • DOI

      10.1116/6.0000710

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Thermionic emission and conversion properties of n-type AlGaN thin film cathodes grown on 6H-SiC substrates2020

    • Author(s)
      Kimura Shigeya、Yoshida Hisashi、Uchida Shota、Ogino Akihisa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SG Pages: SGGF01-SGGF01

    • DOI

      10.7567/1347-4065/ab5be4

    • NAID

      210000157672

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Surface Electronic Properties of Si‐Doped AlGaN and Thermionic Emission Characteristics with Adsorption of Alkali Metal Atoms2019

    • Author(s)
      Kimura Shigeya、Yoshida Hisashi、Uchida Shota、Ogino Akihisa
    • Journal Title

      physica status solidi (a)

      Volume: 217 Issue: 7 Pages: 1900719-1900719

    • DOI

      10.1002/pssa.201900719

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] CVD法によるMoS2の形態制御とプラズマ処理による硫黄欠陥密度の最適化2021

    • Author(s)
      浅田 柊哉、荻野 明久
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 高Al組成AlGaN薄膜からの熱電子放出特性における酸素の影響2021

    • Author(s)
      藤本 拓矢、木村 重哉、吉田 学史、宮崎 久生、荻野 明久
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Effect of Si Doping Concentration of N-Type AlGaN on Thermionic Emission2021

    • Author(s)
      Takuya Fujimoto, Akihisa Ogino, Shigeya Kimura, Hisashi Yoshida, Hisao Miyazaki
    • Organizer
      ISPlasma2021 / IC-PLANTS2021
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Basal Plane Modification of CVD-Grown Monolayer MoS2 by Hydrogen Plasma Treatment2021

    • Author(s)
      Shuya Asada, Akihisa Ogino
    • Organizer
      ISPlasma2021 / IC-PLANTS2021
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] プラズマ処理を用いたMoS2薄膜の硫黄欠陥形成と酸素結合の影響2020

    • Author(s)
      浅田 柊哉, 荻野 明久
    • Organizer
      第37回プラズマ・核融合学会年会
    • Related Report
      2020 Annual Research Report
  • [Presentation] マイクロ波プラズマを用いたMoS2の硫黄欠陥形成と窒素ドーピング2020

    • Author(s)
      都築 聖親, 荻野 明久
    • Organizer
      第37回プラズマ・核融合学会年会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Polarity-dependent emission and conversion characteristics of GaN-based thermionic cathodes2020

    • Author(s)
      Shigeya Kimura, Hisashi Yoshida, Hisao Miyazaki, Takeshi Ito, Akihisa Ogino
    • Organizer
      33rd International Vacuum Nanoelectronics Conference (IVNC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Output Characteristics of Thermionic Energy Converter with AlGaN Emitter2020

    • Author(s)
      Akihisa Ogino, Syota Uchida, Shigeya Kimura, Hisashi Yoshida
    • Organizer
      ISPlasma2020 / IC-PLANTS2020
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] AlxGa1-xN/6H-SiCの光支援熱電子放出における照射光スペクトルの影響2020

    • Author(s)
      伊藤 健, 内田 翔太, 木村 重哉, 吉田 学史, 荻野 明久
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] マイクロ波励起プラズマを用いたMoS2薄膜の硫黄欠陥形成におけるイオン遮蔽の影響2020

    • Author(s)
      都築 聖親, 荻野 明久
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Surface Modification of Molybdenum Disulfide Synthesized from Molybdenum Thin Film2019

    • Author(s)
      Akihisa Ogino, Tsuzuki Masachika
    • Organizer
      Materials Research Meeting 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] マイクロ波励起水素プラズマにより改質されたCVD成長MoS2基底面の構造変化2019

    • Author(s)
      都築 聖親, 荻野 明久
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Research-status Report
  • [Presentation] セシウム被覆AlxGa1-xNエミッタの熱電子放出特性2019

    • Author(s)
      内田 翔太, 木村 重哉, 吉田 学史, 荻野 明久
    • Organizer
      第80回応用物理学会秋期学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] アルカリ金属吸着SiドープAlGaNの熱電子放出特性2019

    • Author(s)
      吉田 学史,木村 重哉,内田 翔太,荻野 明久
    • Organizer
      第80回応用物理学会秋期学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Thermionic Emission Properties of n-type AlGaN Cathodes2019

    • Author(s)
      Shigeya Kimura, Hisashi Yoshida, Shota Uchida and Akihisa Ogino
    • Organizer
      2019 International Conference on Solid State Devices and Materials (SSDM2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of Plasma Treatment on Activating Basal Plane of Monolayer MoS2 Synthesized by CVD2019

    • Author(s)
      Akihisa Ogino, Masahiro Sugiyama
    • Organizer
      The Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Surface Electronic Properties of Si-Doped AlGaN and the Thermionic Emission Characteristics with Adsorption of Alkali Metal Atom2019

    • Author(s)
      Shigeya Kimura, Hisashi Yoshida, Shota Uchida and Akihisa Ogino
    • Organizer
      13th International Conference on Nitride Semiconductors 2019 (ICNS-13)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Microwave Plasma Treatment of CVD-Synthesized Single- and Few-Layer MoS22019

    • Author(s)
      Akihisa Ogino, Masahiro Sugiyama
    • Organizer
      ISPlasma2019 / IC-PLANTS2019
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] 窒化物半導体の熱電子放出特性におけるアルカリ金属吸着の影響2019

    • Author(s)
      内田 翔太, 安原 弘一郎, 木村 重哉, 吉田 学史, 荻野 明久
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Thermionic Emission Characteristics of Nanocrystalline Diamond Thin Film Irradiated with Microwave Excited Hydrogen Plasma2019

    • Author(s)
      Koichiro Yasuhara, Yosiki Nakano, Akihisa Ogino
    • Organizer
      第36回プラズマプロセシング研究会/第31回プラズマ材料科学シンポジウム(SPP-36/SPSM-31)
    • Related Report
      2018 Research-status Report
  • [Presentation] Growth Control of Monolayer MoS 2 by CVD and Desulfurization of MoS 2 by MW Hydrogen Plasma2019

    • Author(s)
      Masahiro Sugiyama, Akihisa Ogino
    • Organizer
      第36回プラズマプロセシング研究会/第31回プラズマ材料科学シンポジウム(SPP-36/SPSM-31)
    • Related Report
      2018 Research-status Report
  • [Presentation] Rapid Desulfurization by MW Hydrogen Plasma of CVD-grown MoS2 Thin Film2018

    • Author(s)
      Masahiro Sugiyama, Akihisa Ogino
    • Organizer
      第28回日本MRS年次大会
    • Related Report
      2018 Research-status Report
  • [Presentation] Surface Investigation of Oxidized Carbon Films Prepared by Atmospheric Pressure Plasma and Low Pressure Microwave Plasma2018

    • Author(s)
      A. Ogino, K. Yasuhara and Y. Hasegawa
    • Organizer
      40th International Symposium on Dry Process (DPS2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Surface Modification of Two-Dimensional Layered Molybdenum Disulfide Thin Film Using MW Hydrogen Plasma2018

    • Author(s)
      Masahiro Sugiyama, Akihisa Ogino
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] MoS2膜の層数制御成長と水素プラズマ処理によるS/Moの依存性2018

    • Author(s)
      杉山雅浩, 荻野 明久
    • Organizer
      第79回応用物理学会秋期学術講演会
    • Related Report
      2018 Research-status Report

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Published: 2018-04-23   Modified: 2022-01-27  

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