Improving thermoelectric properties of amorphous and nanocrystal oxide semiconductor thin films

• Project/Area Number: 18K04939
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 29020:Thin film/surface and interfacial physical properties-related
• Research Institution: Nara Institute of Science and Technology
• Principal Investigator: Uenuma Mutsunori 奈良先端科学技術大学院大学, 先端科学技術研究科, 准教授 (20549092)
• Project Period (FY): 2018-04-01 – 2021-03-31
• Project Status: Completed (Fiscal Year 2020)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2020: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2019: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2018: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
• Keywords: 熱電材料 / 酸化物 / 薄膜 / 熱電発電 / アモルファス酸化物半導体 / 熱電変換 / アモルファス

Outline of Final Research Achievements

The thermoelectric characteristics of amorphous oxide semiconductor thin films the effects of lamination with different materials and the effects of crystallinity were evaluated. It was found that the pressure conditions at the sputtering are derived from the difference in the relationship between the energy potential barrier and the Fermi level in the material. There was no significant difference in thermoelectric performance between the amorphous and nanocrystalline states. On the other hand, it was also clarified that the use of the TFT structure shows thermoelectric performance exceeding that of a single film.

Academic Significance and Societal Importance of the Research Achievements

本研究は、情報化社会において重要となるIoTセンサー機器の自立型電源として応用可能な発電技術である。さらに熱電発電技術は、身近なエネルギー利用に対する意識をグリーンエネルギーへ変革させるものであり、本研究がさらに進展すれば、Society 5.0の実現やSDGs達成に貢献する。

Research Products

• [Int'l Joint Research] Aalto University(フィンランド)
• [Int'l Joint Research] Aalto University(フィンランド)
• [Journal Article] Optimizing the thermoelectric performance of InGaZnO thin films depending on crystallinity via hydrogen incorporation (2020)
  • Author(s): Felizco Jenichi Clairvaux、Uenuma Mutsunori、Ishikawa Yasuaki、Uraoka Yukiharu
  • Journal Title: Applied Surface Science Volume: 527 Pages: 146791-146791
  • DOI: 10.1016/j.apsusc.2020.146791
  • NAID: 120007146511
  • Peer Reviewed
• [Journal Article] Enhanced Thermoelectric Transport and Stability in Atomic Layer Deposited-HfO2/ZnO and TiO2/ZnO-Sandwiched Multilayer Thin Films (2020)
  • Author(s): Felizco Jenichi、Juntunen Taneli、Uenuma Mutsunori、Etula Jarkko、Tossi Camilla、Ishikawa Yasuaki、Tittonen Ilkka、Uraoka Yukiharu
  • Journal Title: ACS Applied Materials & Interfaces Volume: 12 Issue: 43 Pages: 49210-49218
  • DOI: 10.1021/acsami.0c11439
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Transparent Thin Film for Energy Harvesting (2018)
  • Author(s): Uenuma M.、Felizco J. C.、Senaha D.、Uraoka Y.
  • Journal Title: Journal of Physics: Conference Series Volume: 1052 Pages: 012011-012011
  • DOI: 10.1088/1742-6596/1052/1/012011
  • Peer Reviewed / Open Access
• [Journal Article] Amorphous Thin Film for Thermoelectric Application (2018)
  • Author(s): Umeda K.、Uenuma M.、Senaha D.、Felizco J. C.、Uraoka Y.、Adachi H.
  • Journal Title: Journal of Physics: Conference Series Volume: 1052 Pages: 012016-012016
  • DOI: 10.1088/1742-6596/1052/1/012016
  • Peer Reviewed / Open Access
• [Journal Article] Flexible TEG Using Amorphous InGaZnO Thin Film (2018)
  • Author(s): Uenuma Mutsunori、Umeda Kenta、Felizco Jenichi、Senaha Daiki、Uraoka Yukiharu
  • Journal Title: Journal of Electronic Materials Volume: 48 Issue: 4 Pages: 1971-1975
  • DOI: 10.1007/s11664-018-06854-4
  • Peer Reviewed
• [Presentation] Effect of Gate Voltage on the Thermoelectric Properties of an InGaZnO/SiO2 Standard Thin Film Transistor (2021)
  • Author(s): Jenichi Clairvaux Felizco, Mutsunori Uenuma, Mami Fujii, Yukiharu Uraoka
  • Organizer: 第68回応用物理学会春季学術講演会
• [Presentation] Excimer laser irradiation of amorphous IGZO thin films for thermoelectric device applications (2020)
  • Author(s): Jenichi Clairvaux Felizco, Mutsunori Uenuma, Juan Paolo Bermundo, Dianne Corsino, Hiroshi Ikenoue, Yukiharu Uraoka
  • Organizer: Virtual Thermoelectric Conference
  • Int'l Joint Research
• [Presentation] Structure optimization of thin film thermoelectric generator (2020)
  • Author(s): Yoku Ikeguchi , Mutsunori Uenuma, Jenichi Felizco, Yukiharu Uraoka
  • Organizer: Virtual Thermoelectric Conference
  • Int'l Joint Research
• [Presentation] 薄膜型熱電変換素子の発電特性における構造材料およびサイズの影響 (2020)
  • Author(s): 池口 翼，上沼 睦典，Jenichi Felizco, 浦岡 行治
  • Organizer: 第17回 日本熱電学会学術講演会
• [Presentation] 薄膜熱電材料のpn接合界面が熱電特性に及ぼす影響 (2020)
  • Author(s): 村川 星斗, 上沼 睦典, 石河 泰明, 浦岡 行治
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] 薄膜材料を用いた熱電変換素子 (2019)
  • Author(s): 上沼睦典
  • Organizer: シリコン材料・デバイス研究会
  • Invited
• [Presentation] 薄膜を用いた熱電素子による環境発電 (2019)
  • Author(s): 上沼睦典
  • Organizer: 電気関係学会関西連合大会
  • Invited
• [Presentation] Film TEG with Controlled Heat Flow (2019)
  • Author(s): Mutsunori Uenuma and Yukiharu Uraoka
  • Organizer: 17th European Conference on Thermoelectrics (ECT2019)
  • Int'l Joint Research
• [Presentation] Thermoelectric Properties in Thin Film with pn Junction (2019)
  • Author(s): Hoshito Murakawa, Mutsunori Uenuma, Jenichi Felizco and Yukiharu Uraoka
  • Organizer: 17th European Conference on Thermoelectrics (ECT2019)
  • Int'l Joint Research
• [Presentation] Inducing Thermoelectricity in C-axis Aligned Crystalline InGaZnO Thin Film via Hydrogen Annealing (2019)
  • Author(s): Jenichi Clairvaux Felizco, Mutsunori Uenuma, Hoshito Murakawa, Yasuaki Ishikawa and Yukiharu Uraoka
  • Organizer: International Conference on Solid State Devices and Materials
  • Int'l Joint Research
• [Presentation] Thermoelectric Transport in Atomic Layer Deposited Hf and Ti-doped ZnO Thin Films (2019)
  • Author(s): Jenichi Clairvaux Felizco, Mutsunori Uenuma, Jarkko Etula, Camilla Tossi, Yasuaki Ishikawa and Yukiharu Uraoka
  • Organizer: 第80回応用物理学会秋季学術講演会
• [Presentation] p型薄膜熱電材料の評価と応用 (2019)
  • Author(s): 村川星斗, 上沼 睦典, Jenichi Felizco, 石河 泰明, 浦岡 行治
  • Organizer: 第80回応用物理学会秋季学術講演会
• [Presentation] pn接合を有する熱電薄膜の熱起電力評価 (2019)
  • Author(s): 村川星斗, 上沼睦典, 梅田鉄馬, Jenichi Felizco, 石河泰明, 浦岡行治
  • Organizer: 第66回応用物理学会春季学術講演会
• [Presentation] Single Crystalline InGaZnO Nanowires for Potential Thermoelectric Applications (2018)
  • Author(s): Jenichi Felizco, Mutsunori Uenuma, Daisuke Senaha, Kenta Umeda, Yasuaki Ishikawa, Yukiharu Uraoka
  • Organizer: 37th/16th International and European Conference on Thermoelectrics
  • Int'l Joint Research
• [Presentation] 透明半導体を用いた薄膜熱電変換素子 (2018)
  • Author(s): 梅田鉄馬, 上沼睦典, 藤本裕太, 石河泰明, 木村睦, 浦岡行治, 足立秀明
  • Organizer: 第15回日本熱電学会学術講演会
• [Presentation] Thermoelectric Properties of Bimetal-catalyzed InGaO3(ZnO)4 Nanowire (2018)
  • Author(s): Jenichi Felizco, Mutsunori Uenuma, Daisuke Senaha, Kenta Umeda, Yasuaki Ishikawa, Yukiharu Uraoka
  • Organizer: 第79回応用物理学会秋季学術講演会
• [Presentation] アモルファスInGaZnOを用いた透明フレキシブル薄膜熱電変換素子 (2018)
  • Author(s): 梅田鉄馬, 上沼睦典, Jenichi Felizco, 石河泰明, 浦岡行治, 足立秀明
  • Organizer: 薄膜材料デバイス研究会 第15回研究集会 TFMD2018
• [Remarks]
  • URL: http://mswebs.naist.jp/LABs/uraoka/PUBLIC/top/top.html