• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

GaAs epitaxial growth and lift-off from Si using a novel layered compound buffer

Research Project

Project/Area Number 18K04963
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 30010:Crystal engineering-related
Research InstitutionToyota Technological Institute

Principal Investigator

KOJIMA NOBUAKI  豊田工業大学, 工学(系)研究科(研究院), 講師 (70281491)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2020: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2019: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2018: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords化合物半導体 / 層状化合物 / エピタキシャル成長 / 結晶成長 / 分子線エピタキシー / エピタキシャルリフトオフ / X線回折 / 結晶欠陥 / 薄層剥離
Outline of Final Research Achievements

The objective of this research is GaAs epitaxial growth and lift-off from Si using a novel layered compound buffer in order to significantly reduce the cost of III-V compound semiconductor devices. The challenge is to improve the quality of the GaAs layer. In this research theme, we aimed to clarify the effect of the atomic step of the vicinal substrate on the crystal growth process. As a result, it was found that the off direction of the substrate is important to align the crystal growth orientation of the layered compound in a single direction. Furthermore, we found that the epitaxial GaAs layer can be lift-off from the Si substrate.

Academic Significance and Societal Importance of the Research Achievements

層状化合物中間層を介して、Si基板上にGaAsをエピタキシャル成長するという本アイディアは、過去にも研究例があるが、本手法で高品質なGaAsを実現した報告はない。本研究では、微傾斜基板の原子ステップが結晶成長過程に与える影響を明らかにすることにより、結晶方位を一方向に揃えた高品質な層状化合物の成膜に初めて成功しており、高品質なGaAsを実現するための重要な要素技術として、学術的意義は高い。本研究のさらなる進展により、III-V族化合物半導体デバイスの大幅な低コスト化が可能となれば、社会的にも意義の高いものと言える。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (19 results)

All 2020 2019 2018

All Journal Article (4 results) (of which Peer Reviewed: 3 results) Presentation (15 results) (of which Int'l Joint Research: 8 results)

  • [Journal Article] Epitaxial GaAs Lift-off from Si(111) Wafer via 2D-GaSe Buffer Layer2020

    • Author(s)
      Nobuaki Kojima, Yu-Cian Wang, Yoshio Ohshita, Masafumi Yamaguchi
    • Journal Title

      Proceedings of the 37th European Photovoltaic Solar Energy Conference

      Volume: - Pages: 615-617

    • Related Report
      2020 Annual Research Report
  • [Journal Article] Epitaxial GaAs Lift Off via III-VI Layered Compounds2019

    • Author(s)
      Nobuaki Kojima, Yu-Cian Wang, Kei Kawakatsu, Akio Yamamoto, Yoshio ohshita, Masafumi Yamaguchi
    • Journal Title

      Proceedings of the 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC)

      Volume: - Pages: 1015-1017

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] GaAs grown on Si (111) by inserting metal selenides films2019

    • Author(s)
      Yu-Cian Wang, Nobuaki Kojima, Kei Kawakatsu, Akio Yamamoto, Yoshio ohshita, Masafumi Yamaguchi
    • Journal Title

      Proceedings of the 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC)

      Volume: - Pages: 1068-1070

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] XRD Pole Figure Analysis of In2Se3Zinc-Blende Like (ZBL) Van der Waals Template for Epitaxial GaAs Lift Off2018

    • Author(s)
      Nobuaki Kojima, Yu-Cian Wang, Kei Kawakatsu, Yoshio Ohshita, Masafumi Yamaguchi
    • Journal Title

      Proceedings of 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC7)

      Volume: - Pages: 214-215

    • DOI

      10.1109/pvsc.2018.8547396

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Presentation] Epitaxial GaAs Lift-off from Si(111) Wafer via 2D-GaSe Buffer Layer2020

    • Author(s)
      Nobuaki Kojima, Yu-Cian Wang, Yoshio Ohshita, Masafumi Yamaguchi
    • Organizer
      37th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC 2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Epitaxial GaAs Lift Off via III-VI Layered Compounds2019

    • Author(s)
      Nobuaki Kojima, Yu-Cian Wang, Kei Kawakatsu, Akio Yamamoto, Yoshio ohshita, Masafumi Yamaguchi
    • Organizer
      2019 IEEE 46th Photovoltaic Specialists Conference (PVSC)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] GaAs grown on Si (111) by inserting metal selenides films2019

    • Author(s)
      Yu-Cian Wang, Nobuaki Kojima, Kei Kawakatsu, Akio Yamamoto, Yoshio ohshita, Masafumi Yamaguchi
    • Organizer
      2019 IEEE 46th Photovoltaic Specialists Conference (PVSC)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Si(111)微傾斜基板上2D-In2Se3成膜に基板オフ方向が与える影響2019

    • Author(s)
      川勝 桂、Yu-Cian Wang、小島 信晃、大下 祥雄、山口 真史
    • Organizer
      第16回次世代の太陽光発電システムシンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] Improved GaAs quality on 4°vicinal Si(111) with metallic selenides buffers by annealing GaAs at the initial growth2019

    • Author(s)
      Yu-Cian Wang, Nobuaki Kojima, Akio Yamamoto, Yoshio Ohshita, Masafumi Yamaguchi
    • Organizer
      第16回次世代の太陽光発電システムシンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] 2D-In2Se3を利用したSi(111)上GaAsエピ層の薄層剥離2019

    • Author(s)
      小島 信晃、Wang Yu-Cian、川勝 桂、山本 暠勇、大下 祥雄、山口 真史
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Metallic selenides as the buffers for GaAs grown on Si (111)2019

    • Author(s)
      Yu-Cian Wang, Nobuaki Kojima, Kei Kawakatsu, Akio Yamamoto, Yoshio ohshita, Masafumi Yamaguchi
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Si(111)微傾斜基板のオフ方向が2D-In2Se3薄膜の結晶方位に与える影響2019

    • Author(s)
      川勝 桂、Yu-Cian Wang、小島 信晃、大下 祥雄、山口 真史
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Heat-resistant 2D-metal Selenides as a Mechanical Cleavage Layer for the GaAs Lift-off2019

    • Author(s)
      Nobuaki Kojima, Yu-Cian Wang, Kei Kawakatsu, Akio Yamamoto, Yoshio ohshita, Masafumi Yamaguchi
    • Organizer
      29th International Photovoltaic Science and Engineering Conference (PVSEC-29)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of the off-cut Direction of Si(111) Substrate on 2D-In2Se3 Twin Formation as a Mechanical Cleavage Layer for the GaAs Lift-off2019

    • Author(s)
      Kei Kawakatsu, Yu-Cian Wang, Nobuaki Kojima, Yoshio ohshita, Masafumi Yamaguchi
    • Organizer
      29th International Photovoltaic Science and Engineering Conference (PVSEC-29)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Multi-step Growth of GaAs on 4o Vicinal Si (111) with Metallic Selenide Buffers2019

    • Author(s)
      Yu-Cian Wang, Nobuaki Kojima, Kei Kawakatsu, Akio Yamamoto, Yoshio ohshita, Masafumi Yamaguchi
    • Organizer
      29th International Photovoltaic Science and Engineering Conference (PVSEC-29)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] GaAs Epitaxial Layers Grown on Ga2Se3/In2Se3 for Epitaxial Lift-off by Using Cleavage of α-In2Se3 Layered Structures2018

    • Author(s)
      Yu-Cian Wang, Nobuaki Kojima, Kei Kawakatsu, Akio Yamamoto, Yoshio Ohshita, Masafumi Yamaguchi
    • Organizer
      The 7th Korea-Japan Joint Seminar on PV
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] 層状化合物In2Se3エピタキシャル膜の双晶ドメイン評価2018

    • Author(s)
      川勝 桂、 ワン ユ チェン、 小島信晃、 大下祥雄、 山口真史
    • Organizer
      第15回次世代の太陽光発電システムシンポジウム
    • Related Report
      2018 Research-status Report
  • [Presentation] Mechanical epitaxial lift off of GaAs epitaxial layers by using cleavage of In2Se3 layered structures2018

    • Author(s)
      Yu-Cian Wang, Nobuaki Kojima, Kei Kawakatsu, Akio Yamamoto, Yoshio Ohshita, Masafumi Yamaguchi
    • Organizer
      第15回次世代の太陽光発電システムシンポジウム
    • Related Report
      2018 Research-status Report
  • [Presentation] XRD Pole Figure Analysis of In2Se3 Zinc-Blende Like (ZBL) Van der Waals Template for Epitaxial GaAs Lift Off2018

    • Author(s)
      Nobuaki Kojima, Yu-Cian Wang, Kei Kawakatsu, Yoshio Ohshita, Masafumi Yamaguchi
    • Organizer
      World Conference on Photovoltaic Energy Conversion (WCPEC-7)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research

URL: 

Published: 2018-04-23   Modified: 2022-01-27  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi