Study on fabrication of scintillation detectors with periodic microstructures

• Project/Area Number: 18K07664
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 52040:Radiological sciences-related
• Research Institution: Gunma University
• Principal Investigator: MIURA Kenta 群馬大学, 大学院理工学府, 准教授 (40396651)
• Project Period (FY): 2018-04-01 – 2022-03-31
• Project Status: Completed (Fiscal Year 2021)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2020: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2018: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: 微細周期構造 / 発光体 / 光取り出し効率 / スパッタ / ZnO / 貴金属ナノ粒子 / 表面プラズモン共鳴 / 発光 / スパッタリング / 金属酸化物 / 金属ナノ粒子 / Zn / 共スパッタ / 赤色発光 / 蛍光体 / 干渉露光 / シンチレータ

Outline of Final Research Achievements

The demonstration of integrating a simple one-dimensional (1-D) periodic microstructure and a light-emitting zinc oxide (ZnO) thin film on a silicon substrate using a simple process with two-beam interference lithography and sputtering was presented. A 1-D microstructure composed of ZnO was obtained using our fabrication process without using a photomask and dry etching. The intensity of a photoluminescence peak observed from a sample with the periodic microstructure was approximately six times stronger than that without it. The light-extraction efficiency from the ZnO thin film seems to be improved by the integration of the 1-D periodic microstructure. Such techniques are also expected to be applied to improve performance of medical diagnosis systems using scintillators such as positron emission tomography (PET).

Academic Significance and Societal Importance of the Research Achievements

本研究により，シンチレーション検出器の光センサーへの蛍光の到達光量や到達時間の改善が見込まれ，LSO結晶を用いたシンチレーション検出器の時間分解能の向上が期待できることから，放射線医学における画像診断技術の発展への貢献および大きな社会的波及効果が期待できる．

Research Products

• [Journal Article] Characterization of Au-Doped Ta2O5 Thin Films Prepared Using a Simple Co-Sputtering Method (2021)
  • Author(s): 伊藤開，橋本祐也，三浦健太，野口克也，加田渉，花泉修
  • Volume: J104-C
  • Issue: 4
  • Pages: 98-100
  • DOI: 10.14923/transelej.2020PJF0001
  • ISSN: 1881-0217
  • Year and Date: 2021-04-01
  • Peer Reviewed
• [Journal Article] Evaluation of scintillation properties of α- and β-SiAlON phosphors under focused microbeam irradiation using ion-beam-induced luminescence analysis (2019)
  • Author(s): W. Kada, I. Sudic, N. Skukan, S. Kawabata, T. Satoh, J. Susaki, S. Yamada, T. Sekine, R.K. Parajuli, M. Sakai, K. Miura, M. Koka, N. Yamada, T. Kamiya, M. Jaksic, and O. Hanaizumi
  • Journal Title: Nuclear Instruments and Methods in Physics Research Section B Volume: 450 Pages: 157-162
  • DOI: 10.1016/j.nimb.2018.09.002
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Photoluminescence properties of Yb and Ag co-doped Ta2O5 thin films (2018)
  • Author(s): M. Kanakubo, K. Miura, K. Shimada, R. Fujii, K. Noguchi, W. Kada, and O. Hanaizumi
  • Journal Title: Key Engineering Materials Volume: 790 Pages: 43-47
  • DOI: 10.4028/www.scientific.net/kem.790.43
  • Peer Reviewed
• [Journal Article] Fabrication of two-dimensional arrays of fluorescent centers in single-crystalline diamond using particle beam writing (2018)
  • Author(s): M. Haruyama, Y. Suda, W. Kada, S. Onoda, T. Ohshima, K. Miura, and O. Hanaizumi
  • Journal Title: Key Engineering Materials Volume: 790 Pages: 48-54
  • DOI: 10.4028/www.scientific.net/kem.790.48
  • Peer Reviewed
• [Presentation] 共スパッタ法による貴金属添加ZnO系薄膜の作製とその発光特性の評価 (2022)
  • Author(s): 名倉悠斗，松井駿，三浦健太
  • Organizer: 2021年度（第12回）電気学会東京支部栃木・群馬支所研究発表会
• [Presentation] Cu/ZnOショットキー接合素子の作製と紫外光応答特性の評価 (2022)
  • Author(s): 大貫裕也，林義輝，三浦健太
  • Organizer: 2021年度（第12回）電気学会東京支部栃木・群馬支所研究発表会
• [Presentation] 共スパッタ法を用いた金添加酸化タンタル薄膜の作製と光触媒への応用に向けた基礎検討 (2020)
  • Author(s): 伊藤開，橋本祐也，三浦健太，野口克也，加田渉，花泉修
  • Organizer: 電子情報通信学会 電子部品・材料研究会
• [Presentation] Ion beam induced luminescence spectroscopy and imaging for microscopic characterization of radiation-tolerant scintillator of SiAlON (2019)
  • Author(s): W. Kada, T. Satoh, S. Yamada, M. Koka, N. Yamada, K. Miura, and O. Hanaizumi
  • Organizer: 24th International Conference on Ion Beam Analysis
  • Int'l Joint Research
• [Presentation] Measurement of a therapeutic carbon beam with a G2000 glass scintillator (2019)
  • Author(s): A. Yokoyama, W. Kada, M. Sakai, K. Miura, and O. Hanaizumi
  • Organizer: 24th International Conference on Ion Beam Analysis
  • Int'l Joint Research
• [Presentation] スパッタリング法によるAl添加Ta2O5薄膜の作製とその近赤外発光特性の評価 (2019)
  • Author(s): 小見航介，吉田祥人，三浦健太，野口克也，加田渉，花泉修
  • Organizer: 第35回日本セラミックス協会関東支部研究発表会
• [Presentation] Periodic microstructures for Improving light-extraction efficiencies of light-emitting ZnO/Si devices (2018)
  • Author(s): O. Matsumoto, M. Saito, D. Yamazaki, K. Noguchi, and K. Miura
  • Organizer: 23rd Microoptics Conference
  • Int'l Joint Research
• [Presentation] スパッタリング法を用いて作製したZnO/Ag/ZnO透明導電膜の評価 (2018)
  • Author(s): 内堀智樹，山本峻也，小辻澄人，三浦健太，野口克也，加田渉，花泉修
  • Organizer: 電子情報通信学会2018年ソサイエティ大会
• [Presentation] スパッタリング法によるZn過剰ZnO薄膜の作製と発光特性の評価 (2018)
  • Author(s): 山本峻也，内堀智樹，原祥大，三浦健太，野口克也，加田渉，花泉修
  • Organizer: 電子情報通信学会2018年ソサイエティ大会