| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2020: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2019: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2018: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Outline of Final Research Achievements |
In this study, adsorption state of β-diketone molecules on magnetic metal surfaces were evaluated using the atomic layer etching process surface analysis system that we developed for this study. It was found that the presence of oxygen on the magnetic metal surfaces is important for the stable adsorption of β-diketone (hexafluoroacetylacetone and acetylacetone) molecules, and the metal oxide layer can be preferentially removed by heating the substrate. It was also found that even low-energy Ar+ ion irradiation (10-50eV) of an adsorbed pre-oxidized Ni causes breakdown of hexafluoroacetylacetone molecules on the surface.
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