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Development of scalable micro-stereolithography using spatial light moduration

Research Project

Project/Area Number 18K13667
Research Category

Grant-in-Aid for Early-Career Scientists

Allocation TypeMulti-year Fund
Review Section Basic Section 18020:Manufacturing and production engineering-related
Research InstitutionYokohama National University

Principal Investigator

Furukawa Taichi  横浜国立大学, 大学院工学研究院, 助教 (70749043)

Project Period (FY) 2018-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2018: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords光造形法 / 3Dプリンティング / 空間光変調 / 光硬化性樹脂 / マルチスケール / スケーラブル / 付加加工 / 光造形
Outline of Final Research Achievements

We developed a multi-scale stereolithography system that can control the curing spot size of the photopolymer by a spatial light modulator. For nano-scale to micro-scale fabrication, a donut-shaped curing inhibition beam (785 nm) was spatially overlapped on the focal spot of curing laser (405 nm) to reduce the curing spot size. It was confirmed that the cured line width was narrowed by irradiating the two beams. For sub-milli scale or more largescale fabrication, the focal spot size of 405 nm laser was controlled by changing the numerical aperture (NA) of the objective lens. We demonstrated multi-scale fabrication of conductive metal structures by photoreduction using objective lenses having NA of 0.65 and 0.1.
To realize fabrication according to the various focal spot size, we also developed and demonstrated an autofocusing method by simple image processing. We have also succeeded in mass-production in a wide area using the autofocusing method.

Academic Significance and Societal Importance of the Research Achievements

光造形法の加工線幅や造形速度は装置に依存しており、著しく異なるスケールを同一装置で造形する方法の開発は発展途上である。生物模倣デバイス、マイクロマシン・マイクロデバイスなどの多くは、様々なスケールの構造から構成されていることが多く、要求される最小の加工線幅に合わせて造形装置ですべてのデバイスを造形すると非現実的な造形時間が必要となる。本研究によって、幅広い加工線幅でナノスケールからセンチメートルスケールの造形を実現できれば、これまでに多くの装置・プロセス・時間を必要とした加工が同一装置かつ短時間で作製可能になり、光造形法の応用範囲を拡大することができる。

Report

(3 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • Research Products

    (7 results)

All 2020 2019 2018

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 2 results) Presentation (5 results) (of which Int'l Joint Research: 2 results)

  • [Journal Article] Simple autofocusing method by image processing using transmission images for large-scale two-photon lithography2020

    • Author(s)
      Y. Fujishiro, T. Furukawa, and S. Maruo
    • Journal Title

      Optics Express

      Volume: 28 Issue: 8 Pages: 12342-12351

    • DOI

      10.1364/oe.390486

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Multi-scale laser direct writing of conductive metal microstructures using a 405-nm blue laser2020

    • Author(s)
      T. Komori, T. Furukawa, M. Iijima, S. Maruo
    • Journal Title

      Optics Express

      Volume: 28 Issue: 6 Pages: 8363-8370

    • DOI

      10.1364/oe.388593

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] 青色レーザーを用いた導電性金属パターンの直接描画法2019

    • Author(s)
      古川太一,小森拓真,飯島志行,丸尾昭二
    • Organizer
      第10回マイクロ・ナノ工学シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] A single-photon microstereolithography system for the production of high-aspect-ratio structures2019

    • Author(s)
      Shingo Kozaki, T. Furukawa, and S. Maruo
    • Organizer
      International Symposium on SSS Laser Processing (3S-LP)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] A simple autofocus system for large-scale, two-photon microstereolithography2019

    • Author(s)
      Yoko Fujishiro, T. Furukawa, and S. Maruo
    • Organizer
      International Symposium on SSS Laser Processing (3S-LP)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] 青色レーザーを用いた高精細マイクロ光造形システムの開発2018

    • Author(s)
      狐崎進吾,野田洋平,古川太一,丸尾昭二
    • Organizer
      日本機械学会2018年次大会
    • Related Report
      2018 Research-status Report
  • [Presentation] オートフォーカス機能を備えた2光子マイクロ光造形装置の開発2018

    • Author(s)
      藤城陽子,古川太一,丸尾昭二
    • Organizer
      ロボティクス・メカトロニクス講演会 2018 in Kitakyushu
    • Related Report
      2018 Research-status Report

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Published: 2018-04-23   Modified: 2021-02-19  

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