| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2020: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2018: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Outline of Final Research Achievements |
Bottom surface smoothing of high aspect ratio hole by EB polishing was proposed. As a basic study for control of magnetic field, magnet was set under the hole bottom surface, and magnetic field lines near the workpiece in large-area EB irradiation were calculated by electric magnetic field analysis. The magnetic field lines distributions show that the EB can be guided to the hole bottom surface since electrons tend to spirally move along the magnetic field lines. Experimental results clarified that the bottom surface of high aspect ratio hole can be uniformly smoothed by guiding the EB to the surface under control of magnetic field.
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