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Selective growth of ultra-long grain in metal thin film for microelectronic application

Research Project

Project/Area Number 18K14139
Research Category

Grant-in-Aid for Early-Career Scientists

Allocation TypeMulti-year Fund
Review Section Basic Section 30010:Crystal engineering-related
Research InstitutionShimane University

Principal Investigator

Pham Hoang Anh  島根大学, 学術研究院理工学系, 助教 (60750213)

Project Period (FY) 2018-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2020: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2019: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2018: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
KeywordsThin film / Single Crystal / Laser annealing / Metal film / Crystal orientation / Crystal growth / Microstructure control / Characterization / Aluminum film / Gold film / Selective growth / Single crystal / Selective grain growth / Crystallization
Outline of Final Research Achievements

In this research project, we have successfully grown single-grain crystal stripes on thermal-evaporated Al thin films, and sputter-deposited Au thin films by using laser beam scanning. We have established the conditions necessary for the growth of single-grain crystal on Au thin film by laser beam scanning. For single-grain crystal growth on metal thin films, the laser beam should be controlled to maintain a complete melt pool without excessive ablation. A SiO2 capping layer thicker than 400 nm is required. The mechanism of single-grain crystal growth and its crystal orientation selection was elucidated.

Academic Significance and Societal Importance of the Research Achievements

We have grown single-grain crystal line on Al and Au thin films. The laser parameters have been determine to control the crystal orientation of the crystals. The mechanism of crystal orientation selection has been clarified. The results have applications in microelectronic and plasmonic devices.

Report

(5 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (12 results)

All 2022 2021 2020 2019 2018

All Journal Article (2 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 2 results) Presentation (10 results) (of which Int'l Joint Research: 4 results)

  • [Journal Article] Rapid annealing of Au thin films by micron chevron-shaped laser beam scanning toward growth of single-grain crystal2021

    • Author(s)
      Pham Anh Hoang、Fukunaga Naruki、Yeh Wenchang、Morito Shigekazu、Ohba Takuya
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SB Pages: SBBK06-SBBK06

    • DOI

      10.35848/1347-4065/abdf22

    • Related Report
      2021 Annual Research Report 2020 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Selective growth of single-grain crystal in Al thin film by micron chevron-shaped laser beam scanning2019

    • Author(s)
      Pham Anh Hoang、Yeh Wenchang、Morito Shigekazu、Ohba Takuya
    • Journal Title

      Thin Solid Films

      Volume: 672 Pages: 100-103

    • DOI

      10.1016/j.tsf.2019.01.023

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Orientation selection of single-grain crystal grown in Au thin films by micron chevron-shaped laser beam scanning2022

    • Author(s)
      Pham Hoang Anh
    • Organizer
      日本金属学会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Growth of single-grain crystal on SiO2 sandwiched Au films by micron chev-ron-shaped laser beam scanning2021

    • Author(s)
      Pham Hoang Anh
    • Organizer
      SSDM 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth of single-grain crystal in Au thin films by using micron chevron-shaped laser beam scanning2021

    • Author(s)
      Pham Hoang Anh
    • Organizer
      第168回日本金属学会春期講演大会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Growth of single-grain crystal in Au thin films by using micron chevron-shaped laser beam scanning2021

    • Author(s)
      A.H. Pham, N. Fukunaga, W. Yeh, S. Morito, T. Ohba, T. Hayashi
    • Organizer
      日本金属学会2021年春期講演大会
    • Related Report
      2020 Research-status Report
  • [Presentation] Rapid annealing of metal thin films by micron chevron-shaped laser beam scanning2020

    • Author(s)
      A.H. Pham, N. Fukunaga, W. Yeh, S. Morito, T. Ohba
    • Organizer
      SSDM 2020
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Selective growth of single-grain lines in Al thin film by laser annealing2019

    • Author(s)
      A.H. Pham, N. Fukunaga, W. Yeh, S. Morito, T. Ohba
    • Organizer
      ICAMN2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Au薄膜のレーザ走査による結晶粒成長2019

    • Author(s)
      福永匠来、Pham Hoang Anh、森戸茂一、林泰輔
    • Organizer
      第62回日本鉄鋼協会・第59回日本金属学会中国四国支部講演大会
    • Related Report
      2019 Research-status Report
  • [Presentation] Selective grain growth in gold thin films by micron chevron-shaped laser beam scanning2019

    • Author(s)
      Pham Hoang Anh、福永 匠来、葉 文昌、森戸茂一、大庭 卓也、林 泰輔
    • Organizer
      第165回日本金属学会秋期講演大会
    • Related Report
      2019 Research-status Report
  • [Presentation] Laser scanning crystallization of metal thin films2019

    • Author(s)
      Pham Hoang Anh
    • Organizer
      Japan Institute of Metals and Materials, Spring meetings 2019
    • Related Report
      2018 Research-status Report
  • [Presentation] Selective growth of single-grain lines in Al thin film by laser annealing2018

    • Author(s)
      Pham Hoang Anh
    • Organizer
      SSDM2018 (International Conference on Solid State Devices and Materials)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research

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Published: 2018-04-23   Modified: 2023-01-30  

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