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Realization of large capacity non-volatile memory using layered chalcogenides pn-junction selector

Research Project

Project/Area Number 18K14306
Research Category

Grant-in-Aid for Early-Career Scientists

Allocation TypeMulti-year Fund
Review Section Basic Section 36010:Inorganic compounds and inorganic materials chemistry-related
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Saito Yuta  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (50738052)

Project Period (FY) 2018-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2019: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2018: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywords層状カルコゲナイド / テルライド / pn接合 / 不揮発性メモリ用セレクタ / トポロジカル絶縁体 / 不揮発性メモリ / 相変化メモリ / セレクター
Outline of Final Research Achievements

In this project, we aim at fabricating and realizing a novel selector material for next-generation non-volatile memory devices. Heterostructure films consisting of Bi2Te3 and Sb2Te3 were fabricated by sputtering, and material properties as well as device performance were characterized. Since the atomic interdiffusion was observed at the heterostructure interfaces, an intermediate layer was deposited to prevent diffusion. Even though the electrical characteristics of device were not desired results, a new candidate for the interlayer material was proposed that will be promising for future development.

Academic Significance and Societal Importance of the Research Achievements

本研究を通して、Bi2Te3とSb2Te3の界面拡散挙動や、中間層による防止技術が確立できた。中間層は原子の拡散を防止するのに効果的であり、かつ、デバイス縦方向の電気抵抗に影響を与えることを実証した。これらの結果より、より電気的に絶縁体な物質を用いることで、所望の非線形電流-電圧特性が得られることが期待できる。材料とデバイス特性の関係を、原子レベルの界面分析によって明らかにした本研究は学術的に高い意義を有し、また、今後低消費電力電子デバイスを実現するための材料学的知見が得られたことから、その社会的意義も大きい。

Report

(3 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • Research Products

    (15 results)

All 2020 2019 2018

All Journal Article (4 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 4 results) Presentation (11 results) (of which Int'l Joint Research: 6 results,  Invited: 5 results)

  • [Journal Article] High-quality sputter-grown layered chalcogenide films for phase change memory applications and beyond2020

    • Author(s)
      Y. Saito, P. Fons, A. V Kolobov, K. Mitrofanov, K. Makino, J. Tominaga, S. Hatayama, Y. Sutou, M. Hase, J. D. Robertson
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 53 Issue: 28 Pages: 284002-284002

    • DOI

      10.1088/1361-6463/ab850b

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Origin of resistivity contrast in interfacial phase-change memory: The crucial role of Ge/Sb intermixing2019

    • Author(s)
      Saito Yuta、Kolobov Alexander V.、Fons Paul、Mitrofanov Kirill V.、Makino Kotaro、Tominaga Junji、Robertson John
    • Journal Title

      Applied Physics Letters

      Volume: 114 Issue: 13 Pages: 132102-132102

    • DOI

      10.1063/1.5088068

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] SSC 2018: Kolobov AV: Chalcogenide van der Waals superlattices: a case example of interfacial phase-change memory2019

    • Author(s)
      Saito Yuta、Fons Paul、Mitrofanov Kirill V.、Makino Kotaro、Tominaga Junji、Robertson John、Kolobov Alexander V.
    • Journal Title

      Pure and Applied Chemistry

      Volume: - Issue: 11 Pages: 1777-1786

    • DOI

      10.1515/pac-2019-0105

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] (Invited) Sputter Growth of Chalcogenide Superlattice Films for Future Phase Change Memory Applications2018

    • Author(s)
      Saito Yuta、Mitrofanov Kirill V、Makino Kotaro、Miyata Noriyuki、Fons Paul、Kolobov Alexander V.、Tominaga Junji
    • Journal Title

      ECS Transactions

      Volume: 86 Issue: 3 Pages: 49-54

    • DOI

      10.1149/08603.0049ecst

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Presentation] 相変化材料の材料設計指針とテルライド材料の新しい展開2020

    • Author(s)
      齊藤雄太
    • Organizer
      2020年第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 層状カルコゲナイドpn接合の作製とその界面および電子状態2020

    • Author(s)
      齊藤雄太、Paul Fons、牧野孝太郎、Kirill V. Mitrofanov、上杉文彦、竹口雅樹、Alexander V. Kolobov、富永淳二
    • Organizer
      2020年春期(第166回)日本金属学会講演大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Origin of electrical contrast in interfacial phase change memory2019

    • Author(s)
      Yuta Saito
    • Organizer
      Insulating Films on Semiconductors (INFOS 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Revisiting the growth mechanism of layered crystalline phase change materials by sputtering2019

    • Author(s)
      Yuta Saito, Alexander V. Kolobov, Paul Fons, Kirill V. Mitrofanov, Kotaro Makino, Junji Tominaga, Muneaki Hase, and John Robertson
    • Organizer
      European Phase Change and Ovonics Symposium 2019 (EPCOS2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 相変化メモリ用カルコゲナイド材料の開発2019

    • Author(s)
      齊藤雄太
    • Organizer
      2019年秋期(第165回)日本金属学会講演大会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Recent update on the growth of crystalline phase change materials by sputtering2019

    • Author(s)
      Yuta Saito, Paul Fons, Alexander V. Kolobov, Kirill V. Mitrofanov, Kotaro Makino, Junji Tominaga, Shogo Hatayama, Yuji Sutou, Muneaki Hase, and John Robertson
    • Organizer
      31st Symposium on Phase Change Oriented Science 2019 (PCOS2019)
    • Related Report
      2019 Annual Research Report
  • [Presentation] Sputter-grown 2D-TI/3D-TI stacking films in the Bi-Te binary system2018

    • Author(s)
      Yuta Saito, Paul Fons, Kotaro Makino, Kirill V. Mitrofanov, Fumihiko Uesugi, Masaki Takeguchi, Alexander V. Kolobov, and Junji Tominaga
    • Organizer
      New Trends in Topological Insulators (NTTI2018) and Narrow Gap Systems (NGS18)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Understanding the crystalline and electronic structure of GeTe/Sb2Te3 chalcogenide superlattices2018

    • Author(s)
      Yuta Saito, Alexander V. Kolobov, Paul Fons, Kirill V. Mitrofanov, Kotaro Makino, Junji Tominaga, and John Robertson
    • Organizer
      European Phase Change and Ovonics Symposium 2018 (EPCOS2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Sputter Growth of Chalcogenide Superlattice Films for Future Phase Change Memory Applications2018

    • Author(s)
      Yuta Saito, Kirill V. Mitrofanov, Kotaro Makino, N. Miyata, Paul Fons, Alexander V. Kolobov, and Junji Tominaga
    • Organizer
      Americas International Meeting on Electrochemistry and Solid State Science (AiMES) 2018
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Understanding the switching mechanism of interfacial phase change memory2018

    • Author(s)
      Yuta Saito, Alexander V. Kolobov, Paul Fons, Kirill V. Mitrofanov, Kotaro Makino, Junji Tominaga, and John Robertson
    • Organizer
      Non-Volatile Memory Technology Symposium (NVMTS) 2018
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Understanding the switching mechanism of GeTe/Sb2Te32018

    • Author(s)
      Yuta Saito, Alexander V. Kolobov, Paul Fons, Kirill V. Mitrofanov, Kotaro Makino, Junji Tominaga, and John Robertson
    • Organizer
      30th Symposium on Phase Change Oriented Science 2018 (PCOS2018)
    • Related Report
      2018 Research-status Report

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Published: 2018-04-23   Modified: 2021-02-19  

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