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Low density laser plasma source with various elements applicable to high repetition laser

Research Project

Project/Area Number 18K18749
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 14:Plasma science and related fields
Research InstitutionTokyo Institute of Technology

Principal Investigator

Nagai Keiji  東京工業大学, 科学技術創成研究院, 准教授 (30280803)

Project Period (FY) 2018-06-29 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2019: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2018: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Keywordsレーザープラズマ / レーザーターゲット / 高繰り返しレーザー / 量子線源 / 極端紫外光 (EUV) / 低密度材料 / 高分子電解質 / スズ / 液体金属 / ガリウム / 極端紫外線 / 量子線 / リチウム / ターゲット / 高繰り返し
Outline of Final Research Achievements

Low density materials can control plasma properties of laser absorption, which can enhance quantum beam generation. The recent practical extreme ultraviolet light (EUV) is the first industrial example of laser plasma source with low density targets. The easy-handling target source based on a hollow sub-millimeter microcapsule was fabricated from polyelectrolyte cationic and anionic surfactant on air bubbles. The lightweight microcapsules acted as a scaffold for surface coating by tin(IV) oxide nanoparticles (22-48%), and then dried. The microcapsules were ablated with a Nd:YAG laser (7.1x10^10 W/cm2, 1 ns) to generate 13.5 nm EUV relatively directed to laser incidence. The laser conversion efficiency (CE) at 13.5 nm 2% bandwidth from the tin-coated microcapsule (0.8%) was competitive compared with bulk tin (1%). The microcapsule aggregates will be utilized as a small scale/compact EUV source, and future quantum beam sources by changing the coating to other elements.

Academic Significance and Societal Importance of the Research Achievements

この成果は13.5 nm のEUVのみならず次世代の 6 nm EUV、炭素イオンビームほか 様々なレーザー誘起量子線用のターゲットに展開できるものである。本技術のニーズは高強度レーザー研究者から特に強く、そうした分野への展開を検討するために、最終年度には、ワークショップでレーザープラズマ型量子線発生の研究者との会合をもち、共同研究の可能性を議論できた。さらに、本研究課題の成果を活用して、通常は高額な装置となるEUV光を、研究室内で利用する試みにも予備的に取り組み始めた。これらを進めることで、本成果は微細加工のみならず、低原子番号材料(生体を含む)の高空間分解能分析、医療応用に繋がる。

Report

(3 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • Research Products

    (12 results)

All 2020 2019 2018 Other

All Int'l Joint Research (2 results) Journal Article (3 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 3 results,  Open Access: 3 results) Presentation (5 results) (of which Int'l Joint Research: 1 results) Remarks (2 results)

  • [Int'l Joint Research] University College Dublin(アイルランド)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] University College Dublin(アイルランド)

    • Related Report
      2018 Research-status Report
  • [Journal Article] Easy-handling minimum mass laser target scaffold based on sub-millimeter air bubble -An example of laser plasma extreme ultraviolet generation-"2020

    • Author(s)
      Christopher S. A. Musgrave, Shuntaro Shoji, Keiji Nagai
    • Journal Title

      Scientific Reports

      Volume: 10 Issue: 1 Pages: 5906-5906

    • DOI

      10.1038/s41598-020-62858-3

    • NAID

      120006877028

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Gallium-tin alloys as a low melting point liquid metal for repetition-pulse-laser-induced high energy density state towards compact pulse EUV sources2019

    • Author(s)
      Christopher S A Musgrave, Nan Lu, Rie Sato, Keiji Nagai
    • Journal Title

      RSC Adv.

      Volume: 9 Issue: 24 Pages: 13927-13932

    • DOI

      10.1039/c9ra01905g

    • NAID

      120006889029

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Electrochemically Synthesized Tin/Lithium Alloy To Convert Laser Light to Extreme Ultraviolet Light2018

    • Author(s)
      Nagai Keiji、Musgrave Christopher S. A.、Kuwata Naoaki、Kawamura Junichi
    • Journal Title

      ACS Omega

      Volume: 3 Issue: 10 Pages: 12422-12427

    • DOI

      10.1021/acsomega.8b01220

    • NAID

      120006602757

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] 高繰り返し用ターゲット材料2020

    • Author(s)
      長井圭治
    • Organizer
      高繰り返しターゲット供給 ・アライメント・計測技術に関する研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Target Fabrication and Supply for High Repetition Laser Application2019

    • Author(s)
      Keiji Nagai, Christopher S A Musgrave, Shuntaro Shoji, Kaori Hasegawa, Nan Lu
    • Organizer
      The Eleventh International Conference on Inertial Fusion Science and Applications, IFSA2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] レーザー生成高エネルギー密度プラズマ実験用極低密度ターゲットの連続供給に関わる材料開発2018

    • Author(s)
      長谷川香織、野村壮真、Christopher SA Musgrave、長井圭治
    • Organizer
      プラズマ・核融合学会第35回年会
    • Related Report
      2018 Research-status Report
  • [Presentation] Li/Sn合金ターゲットを用いた極端紫外線発生2018

    • Author(s)
      長井圭治、Christopher S A Musgrave、桑田直明、河村純一
    • Organizer
      第28回MRS-J年次大会
    • Related Report
      2018 Research-status Report
  • [Presentation] レーザープラズマ量子線源用低密度高分子材料のナノ構造制御2018

    • Author(s)
      野村壮真、長谷川香織、庄司俊太郎、Christopher SA Musgrave、長井圭治
    • Organizer
      第28回MRS-J年次大会
    • Related Report
      2018 Research-status Report
  • [Remarks] 長井研究室

    • URL

      http://ime.res.titech.ac.jp

    • Related Report
      2019 Annual Research Report 2018 Research-status Report
  • [Remarks] 東工大ニュース 高分子電解質のシャボン玉を使ってEUV(極端紫外線)発生に成功

    • URL

      https://www.titech.ac.jp/news/2020/046722.html

    • Related Report
      2019 Annual Research Report

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Published: 2018-07-25   Modified: 2021-02-19  

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