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Measurement of 3-dimensional standard shape in micro-scale using whispering gallery mode resonance

Research Project

Project/Area Number 18K18803
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
Research InstitutionThe University of Tokyo

Principal Investigator

Michihata Masaki  東京大学, 大学院工学系研究科(工学部), 准教授 (70588855)

Co-Investigator(Kenkyū-buntansha) 高橋 哲  東京大学, 先端科学技術研究センター, 教授 (30283724)
Project Period (FY) 2018-06-29 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2019: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2018: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
KeywordsWGM / 光共振器 / 球体 / 直径 / テーパ光ファイバー / Whispering gallery mode / 光共振 / 屈折率 / 標準計測 / 微小球共振 / 微小球 / 直径計測 / モード解析 / テーパファイバー / 伝搬定数
Outline of Final Research Achievements

In this study, we propose the novel sphere measurement method using whispering gallery mode resonance. With which, we aim to achieve the 10 nm or better of the measurement uncertainty. In this project, we developed the measurement system first. Using the system, several resonant wavelengths were measured. From these measured wavelengths, the mode numbers were estimated. Accordingly, using the measured wavelengths and the estimated mode numbers, the diameter of the sphere was estimated, which was in a good agreement with the measured result by SEM. The maximum variation of the measurement was around 7 nm.

Academic Significance and Societal Importance of the Research Achievements

Whispering gallery modeは非常に小さくまたQ値の高い共振器が得られるため、例えば、センサーやフィルターなどで非常によく用いられる。一方で3次元共振器のため、非常に多くのモードが立ち、そのモード特性を正確に把握することは容易ではない。我々は、半径モード番号の特定手法お新たに提案し、その有効性を示すことができた。これはWGMを用いた研究において非常に重要性が高いと考えられる。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (22 results)

All 2021 2020 2019 2018

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 2 results) Presentation (19 results) (of which Int'l Joint Research: 7 results,  Invited: 5 results)

  • [Journal Article] In-Process Diameter Measurement Technique for Micro-Optical Fiber with Standing Wave Illumination2021

    • Author(s)
      Michihata Masaki、Zheng Zhao、Funaiwa Daiki、Murakami Sojiro、Kadoya Shotaro、Takahashi Satoru
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 4 Issue: 1 Pages: 28-36

    • DOI

      10.1007/s41871-020-00081-4

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of measuring system of whispering gallery mode resonances for evaluating a diameter of microsphere2019

    • Author(s)
      MICHIHATA Masaki、KOBAYASHI Yumeki、CHU Bohuai、TAKAMASU Kiyoshi、TAKAHASHI Satoru
    • Journal Title

      Transactions of the JSME (in Japanese)

      Volume: 85 Issue: 880 Pages: 19-00226-19-00226

    • DOI

      10.1299/transjsme.19-00226

    • NAID

      130007772938

    • ISSN
      2187-9761
    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Radial mode number identification on whispering gallery mode resonances for diameter measurement of microsphere2019

    • Author(s)
      Kobayashi Yumeki、Michihata Masaki、Zhao Zheng、Chu Bohuai、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Measurement Science and Technology

      Volume: 30 Issue: 6 Pages: 065201-065201

    • DOI

      10.1088/1361-6501/ab1241

    • Related Report
      2019 Research-status Report 2018 Research-status Report
    • Peer Reviewed
  • [Presentation] WGM共振を利用した微小級の直径計測(第14報) -WGM光強度分布センシングのためのガラスプローブ先端形状の検討-2020

    • Author(s)
      劉 羽辛,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第3報) -サブマイクロ光ファイバの計測のための測定原理の拡張-2020

    • Author(s)
      村上宗二郎,門屋祥太郎,道畑正岐,高橋 哲
    • Organizer
      2021年度精密工学会学術講演会春季大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] WGM共振を利用した微小球の直径計測(第13報) -光損失が共振波長に及ぼす影響の検討-2020

    • Author(s)
      劉 羽辛,門屋祥太郎,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会秋季大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Sensing near-field light distribution for microsphere measurement based on whispering gallery mode2019

    • Author(s)
      Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMTII2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] In-process measurement technique of micro-fiber diameter with interfered scattering pattern of two beam irradiation2019

    • Author(s)
      Masaki Michihata, Zheng Zhao, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMTII2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] System development for microsphere measurement based on whispering gallery mode resonance2019

    • Author(s)
      Masaki Michihata, Yumeki Kobayashi, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMQC2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Numerical analysis of near-field light intensity of whispering gallery mode on microsphere surface with SNOM probe2019

    • Author(s)
      Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      OPTM2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 光共振損失を用いたSPMプローブチップ評価に関する研究2019

    • Author(s)
      津田信道,儲 博懐,増井周造,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会春季大会
    • Related Report
      2019 Research-status Report
  • [Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第2報) -計測精度改善の検討-2019

    • Author(s)
      船岩大輝,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会春季大会
    • Related Report
      2019 Research-status Report
  • [Presentation] 2光束照明における光散乱検出に基づくマイクロ光ファイバー直径計測の基礎的研究2019

    • Author(s)
      道畑正岐,趙 正,高増 潔,高橋 哲
    • Organizer
      日本機械学会 2019年度年次大会
    • Related Report
      2019 Research-status Report
  • [Presentation] 微小球光共振を用いた形状標準のナノ精度計測2019

    • Author(s)
      道畑正岐
    • Organizer
      第153回微小光学研究会
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] 光共振を利用したマイクロ球形状のナノ精度計測2019

    • Author(s)
      道畑正岐,小林夢輝,趙 正,儲 博懐,高増 潔,高橋 哲
    • Organizer
      レーザー学会第39回年次大会
    • Related Report
      2018 Research-status Report
    • Invited
  • [Presentation] Ultra high precision diameter measurement of a microsphere based on whispering gallery mode resonances2018

    • Author(s)
      Masaki Michihata, Yumeki Kobayashi, Zheng Zhao, Bouhai Chu, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      The 1st JSPE affiliate workshop -Metrology and measurement
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Dielectric microsphere measurement using whispering gallery mode resonance2018

    • Author(s)
      Masaki Michihata
    • Organizer
      10th International Symposium on Precision Engineering Measurements and Instrument (ISPEMI 2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Measurement of a microsphere diameter with a picometer resolution using whispering gallery mode resonances2018

    • Author(s)
      Masaki Michihata
    • Organizer
      International Symposium on Optoelectronic Technology and Application (OTA 2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] WGM共振を利用した微小球の直径計測(第12報) -共振波長計測安定化に向けた測定装置の高度化-2018

    • Author(s)
      小林夢輝,儲 博懐,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2018年度精密工学会学術講演会秋季大会
    • Related Report
      2018 Research-status Report
  • [Presentation] Whispering gallery mode 共振を用いたマイクロ球径計測 -比較計測による計測精度評価-2018

    • Author(s)
      道畑正岐,小林夢輝,儲 博懐,高増 潔,高橋 哲
    • Organizer
      第12回日本機械学会生産加工・工作機械部門講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] WGM共振を利用した微小球の直径計測(第11報) -共振波長解析に基づく半径モード番号の推定-2018

    • Author(s)
      小林夢輝,趙 正,儲 博懐,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2018年度精密工学会学術講演会秋季大会
    • Related Report
      2018 Research-status Report
  • [Presentation] Analyzing tapered fiber - microsphere coupling for diameter measurement of microsphere using whispering gallery mode resonance2018

    • Author(s)
      Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      International Conference on Precision Engineering (ICPE) 2018
    • Related Report
      2018 Research-status Report

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Published: 2018-07-25   Modified: 2022-01-27  

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