Room temperature bonding in air for heterogeneous optical integration
| Project/Area Number |
18K18863
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| Research Category |
Grant-in-Aid for Challenging Research (Exploratory)
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| Allocation Type | Multi-year Fund |
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| Review Section |
Medium-sized Section 21:Electrical and electronic engineering and related fields
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| Research Institution | Kyushu University |
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Principal Investigator |
Takigawa Ryo 九州大学, システム情報科学研究院, 准教授 (80706846)
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| Project Period (FY) |
2018-06-29 – 2021-03-31
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| Project Status |
Completed (Fiscal Year 2020)
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| Budget Amount *help |
¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2020: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2018: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
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| Keywords | 大気低温接合 / 金属極薄膜接合 / 金属薄膜接合 / 簡便な常温接合 / 大気開放・局所活性化雰囲気 / 光素子実装・集積 / 表面活性化原子拡散接合 / 異種材料集積化 / 大気中常温実装 |
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| Outline of Final Research Achievements |
In this study, room temperature bonding of metal ultra-thin films in air is investigated for heterogeneous optical microsystem. Surface activation process of metal ultra-thin film in air is proposed. Based on acquired knowledge, room temperature bonding of oxide materials in air using Au ultra-thin film is demonstrated. These results show the potentials for fabricating future low-cost bonding machines.
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| Academic Significance and Societal Importance of the Research Achievements |
本成果は、真空・大気下における金属薄膜の表面活性化状態と接合メカニズム把握に繋がり学術的な価値は高い。また、大規模な真空引き装置を必要としない将来の簡便な大気中プロセス実現に寄与する可能性があり産業的にも価値があると考えられる。
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Report
(4 results)
Research Products
(10 results)
