Room temperature bonding in air for heterogeneous optical integration

• Project/Area Number: 18K18863
• Research Category: Grant-in-Aid for Challenging Research (Exploratory)
• Allocation Type: Multi-year Fund
• Review Section: Medium-sized Section 21:Electrical and electronic engineering and related fields
• Research Institution: Kyushu University
• Principal Investigator: Takigawa Ryo 九州大学, システム情報科学研究院, 准教授 (80706846)
• Project Period (FY): 2018-06-29 – 2021-03-31
• Project Status: Completed (Fiscal Year 2020)
• Budget Amount: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000); Fiscal Year 2020: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2018: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
• Keywords: 大気低温接合 / 金属極薄膜接合 / 金属薄膜接合 / 簡便な常温接合 / 大気開放・局所活性化雰囲気 / 光素子実装・集積 / 表面活性化原子拡散接合 / 異種材料集積化 / 大気中常温実装

Outline of Final Research Achievements

In this study, room temperature bonding of metal ultra-thin films in air is investigated for heterogeneous optical microsystem. Surface activation process of metal ultra-thin film in air is proposed. Based on acquired knowledge, room temperature bonding of oxide materials in air using Au ultra-thin film is demonstrated. These results show the potentials for fabricating future low-cost bonding machines.

Academic Significance and Societal Importance of the Research Achievements

本成果は、真空・大気下における金属薄膜の表面活性化状態と接合メカニズム把握に繋がり学術的な価値は高い。また、大規模な真空引き装置を必要としない将来の簡便な大気中プロセス実現に寄与する可能性があり産業的にも価値があると考えられる。

Research Products

• [Journal Article] 大気中低温接合技術による光導波路集積 (2020)
  • Author(s): 多喜川 良
  • Journal Title: レーザー学会第546回研究会報告 Volume: - Pages: 19-22
• [Journal Article] Ultrathin adhesive layer between LiNbO3 and SiO2 for bonded LNOI waveguide applications (2019)
  • Author(s): Takigawa Ryo、Higurashi Eiji、Asano Tanemasa
  • Journal Title: Japanese Journal of Applied Physics Volume: 58 Issue: SJ Pages: SJJE06-SJJE06
  • DOI: 10.7567/1347-4065/ab24b6
  • NAID: 210000156854
  • Peer Reviewed
• [Journal Article] Ultrathin adhesive layer between LiNbO3 and SiO2 for bonded LNOI waveguide applications (2019)
  • Author(s): Ryo Takigawa, Eiji Higurashi, Tanemasa Asano
  • Journal Title: Japanese Journal of Applied Physics Volume: accepted
  • NAID: 210000156854
  • Peer Reviewed
• [Journal Article] Residual Stress in Lithium Niobate Film Layer of LNOI/Si Hybrid Wafer Fabricated Using Low-Temperature Bonding Method (2019)
  • Author(s): Ryo Takigawa, Toru Tomimatsu, Eiji Higurashi, Tanemasa Asano
  • Journal Title: Micromachine Volume: 10 Issue: 2 Pages: 136-136
  • DOI: 10.3390/mi10020136
  • Peer Reviewed / Open Access
• [Journal Article] Surface Activated Bonding of LiNbO3 and GaN at Room Temperature (2018)
  • Author(s): Ryo Takigawa, Eiji Higurashi and Tanemasa Asano
  • Journal Title: ECS transactions Volume: 86 Issue: 5 Pages: 207-213
  • DOI: 10.1149/08605.0207ecst
  • Peer Reviewed
• [Presentation] 大気中低温接合技術による光導波路集積 (2020)
  • Author(s): 多喜川 良
  • Organizer: レーザー学会第546回研究会
  • Invited
• [Presentation] Surface activation of Au films using vacuum ultraviolet irradiation for low-temperature bonding in air (2019)
  • Author(s): Ryo Takigawa, Haruichi Kanaya
  • Organizer: The 8th Internatinal Conference on BioSensors, BioMedical Devices, Bio MEMS/NEMS & Applications 2019 (Bio4Apps2019)
  • Int'l Joint Research
• [Presentation] 接合中間層がLNOI光導波路特性に及ぼす影響調査 (2019)
  • Author(s): 多喜川良、日暮栄治、浅野種正
  • Organizer: エレクトロニクス実装学会
• [Presentation] Room-temperature wafer bonding of LiNbO3 and SiO2 using sub-nanometer Fe films (2018)
  • Author(s): Ryo Takigawa, Eiji Higurashi and Tanemasa Asano
  • Organizer: 23rd Microoptics Conference (MOC2018)
  • Int'l Joint Research
• [Presentation] Surface Activated Bonding of LiNbO3 and GaN at Room Temperature (2018)
  • Author(s): Ryo Takigawa, Eiji Higurashi and Tanemasa Asano
  • Organizer: ECS meeting
  • Int'l Joint Research