Construction of nano-structured functional thin films on flexible nanoimprinted polymer substrates with atomically patterned surfaces
| Project/Area Number |
18K18995
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| Research Category |
Grant-in-Aid for Challenging Research (Exploratory)
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| Allocation Type | Multi-year Fund |
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| Review Section |
Medium-sized Section 28:Nano/micro science and related fields
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2018-06-29 – 2023-03-31
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| Project Status |
Completed (Fiscal Year 2022)
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| Budget Amount *help |
¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2019: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2018: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
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| Keywords | 原子レベルナノインプリント / ワイドギャップ半導体 / 超平坦ポリマー基板 / 導電性有機薄膜 / 酸化物薄膜 / ポリイミド / 原子ステップ構造 / フレキシブル電子素子 / ナノインプリント加工 / 超平坦ポリマー表面 / 単結晶薄膜 / ナノ構造 / 原子ステップ / 量子機能性 / ナノインプリント / ポリマー基板 / サファイアモールド / ナノコンタクトプリント / 超平坦基板 / 薄膜 |
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| Outline of Final Research Achievements |
The aim of this project was to establish a fundamental and elemental technology for the creation of novel flexible electronic devices by depositing wide-gap oxides such as ZnO and Ga2O3 and conductive polymer films on the nanopatterned surface of polymer substrates such as polyimides by applying the atomic-level thermal nanoimprinting method for formation of a nano-periodic ultra-flat surface. We succeeded in nanopattern-transferring for polymer substrates using an atomic step ultra-flat sapphire mold with a height of about 0.3 nm. Room-temperature growth of high-performance ultra-smooth ZnO films on ultra-smooth polymers by PLD and room-temperature synthesis of oriented β-Ga2O3 crystal films by laser annealing on polymers with amorphous alumina/oriented ZnO double buffer layers were successfully achieved. Atom-stepped ultra-flat conductive organic thin films on polymers were also successfully prepared.
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| Academic Significance and Societal Importance of the Research Achievements |
従来の量子機能電子素子やナノ構造を制御した光電子機能薄膜の構築にはシリコンなどの無機系基板が広く用いられてきたが、本成果により、独自に作製された原子ステップ型超平坦ポリマー基板は、次世代超機能フレキシブル電子デバイス薄膜の堆積用基板として極めて有望であることが実証された。また、高分子科学の観点からみて注目すべきは、高分子材料のようにミクロンオーダーの巨大分子鎖が複雑に絡み合う表面においても、モノマー分子サイズ(約0.5 nm)よりも小さな原子スケール(約0.3nm)の段差パターンが転写されたことである。
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Report
(6 results)
Research Products
(63 results)
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[Journal Article] Electronic states of gallium oxide epitaxial thin films and related atomic arrangement2022
Author(s)
Yanna Chen, Osami Sakata, Hiroyuki Morita, Akifumi Matsuda, Fanhao Jia, Okkyun Seo, Loku Singgappulige Rosantha Kumara, Toshiaki Ina, Eiichi Kobayashi, Jaemyung Kim, Chulho Song, Satoshi Hiroi, Natalia Palina, Yanfang Lou, Wei Ren, and Mamoru Yoshimoto
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Journal Title
Appl. Surf. Sci.
Volume: 578
Issue: 1
Pages: 15809-15809
DOI
Related Report
Peer Reviewed / Open Access / Int'l Joint Research
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[Presentation] Designing Carbon Cluster for Graphene Growth by Molecular Dynamics-Selection of Substrate Material, Crystal Orientation2022
Author(s)
Satoru Kaneko, Manabu Yasui, Masahito Kurouchi, Chihiro Kato, Satomi Tanaka, Takashi Tokumasu, Shigeo Yasuhara, Tamio Endo, Musa Can, Ruei-Sung Yu, Kripasindhu Sardar, Sumanta Sahoo, Masahiro Yoshimura, Akifumi Matsuda, Mamoru Yoshimoto
Organizer
2022 MRS Fall Meeting & Exhibit (Boston, USA)
Related Report
Int'l Joint Research
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[Presentation] Nano-Scale Growth Study of Calcium Phosphate Thin Films on the Nanopatterned and Chemically-Modified Polymer Sheets for Flexible Apatite-Based Biodevices2021
Author(s)
Naho Kaneko, Yuto Maeda, Tomoaki Oga, Kazuki Watanabe, Kenta Kaneko, Tomohiro Hayashi, Evan Angelo Mondarte, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
Organizer
2021 MRS Spring/Fall Meeting (USA, online)
Related Report
Int'l Joint Research
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