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Construction of nano-structured functional thin films on flexible nanoimprinted polymer substrates with atomically patterned surfaces

Research Project

Project/Area Number 18K18995
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 28:Nano/micro science and related fields
Research InstitutionTokyo Institute of Technology

Principal Investigator

Yoshimoto Mamoru  東京工業大学, 物質理工学院, 教授 (20174998)

Project Period (FY) 2018-06-29 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2019: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2018: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Keywords原子レベルナノインプリント / ワイドギャップ半導体 / 超平坦ポリマー基板 / 導電性有機薄膜 / 酸化物薄膜 / ポリイミド / 原子ステップ構造 / フレキシブル電子素子 / ナノインプリント加工 / 超平坦ポリマー表面 / 単結晶薄膜 / ナノ構造 / 原子ステップ / 量子機能性 / ナノインプリント / ポリマー基板 / サファイアモールド / ナノコンタクトプリント / 超平坦基板 / 薄膜
Outline of Final Research Achievements

The aim of this project was to establish a fundamental and elemental technology for the creation of novel flexible electronic devices by depositing wide-gap oxides such as ZnO and Ga2O3 and conductive polymer films on the nanopatterned surface of polymer substrates such as polyimides by applying the atomic-level thermal nanoimprinting method for formation of a nano-periodic ultra-flat surface. We succeeded in nanopattern-transferring for polymer substrates using an atomic step ultra-flat sapphire mold with a height of about 0.3 nm. Room-temperature growth of high-performance ultra-smooth ZnO films on ultra-smooth polymers by PLD and room-temperature synthesis of oriented β-Ga2O3 crystal films by laser annealing on polymers with amorphous alumina/oriented ZnO double buffer layers were successfully achieved. Atom-stepped ultra-flat conductive organic thin films on polymers were also successfully prepared.

Academic Significance and Societal Importance of the Research Achievements

従来の量子機能電子素子やナノ構造を制御した光電子機能薄膜の構築にはシリコンなどの無機系基板が広く用いられてきたが、本成果により、独自に作製された原子ステップ型超平坦ポリマー基板は、次世代超機能フレキシブル電子デバイス薄膜の堆積用基板として極めて有望であることが実証された。また、高分子科学の観点からみて注目すべきは、高分子材料のようにミクロンオーダーの巨大分子鎖が複雑に絡み合う表面においても、モノマー分子サイズ(約0.5 nm)よりも小さな原子スケール(約0.3nm)の段差パターンが転写されたことである。

Report

(6 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (63 results)

All 2023 2022 2021 2020 2019 2018 Other

All Journal Article (13 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 13 results,  Open Access: 6 results) Presentation (48 results) (of which Int'l Joint Research: 13 results,  Invited: 1 results) Book (1 results) Remarks (1 results)

  • [Journal Article] Room-temperature fabrication of epitaxial ZnO thin films on polymer substrates coated with a seed layer of exfoliated β-Ga<sub>2</sub>O<sub>3</sub> single-crystal thin sheets by pulsed laser deposition2023

    • Author(s)
      Tomoaki Oga, Satoru Kaneko, Yutaka Majima, Hisashi Miyazaki, Akifumi Matsuda and Mamoru Yoshimoto
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 131 Issue: 5 Pages: 130-134

    • DOI

      10.2109/jcersj2.22152

    • ISSN
      1348-6535, 1882-0743
    • Year and Date
      2023-05-01
    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Crystallinity improvement of room-temperature PLD-deposited ZnO thin films on cyclo-olefin polymer substrates subject to surface-pretreatment with vacuum-UV-light irradiation2023

    • Author(s)
      Tomoaki Oga, Ryoya Kai, Naho Kaneko, Hisashi Miyazaki, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Journal Title

      J. Cryst. Growth

      Volume: 603 Pages: 127012-127012

    • DOI

      10.1016/j.jcrysgro.2022.127012

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Control of atomic ordering of LiNiO2 thin films on a sapphire substrate from rock-salt to layered structure using uniaxial compression2023

    • Author(s)
      Seo Okkyun、Kim Jaemyung、Tang Jiayi、Kumara L.S.R.、Kimoto Koji、Miki Kazushi、Matsuda Akifumi、Yoshimoto Mamoru、Sakata Osami
    • Journal Title

      Journal of Alloys and Compounds

      Volume: 945 Pages: 169177-169177

    • DOI

      10.1016/j.jallcom.2023.169177

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Fabrication of highly-oriented β-Ga2O3 thin film on ZnO/AlOx-buffered cyclo-olefin polymer substrate by excimer laser annealing at room temperature2023

    • Author(s)
      Ryoya Kai, Tomoaki Oga, Kazuki Watanabe, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 62 Issue: 4 Pages: 048003-048003

    • DOI

      10.35848/1347-4065/accc63

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electronic states of gallium oxide epitaxial thin films and related atomic arrangement2022

    • Author(s)
      Yanna Chen, Osami Sakata, Hiroyuki Morita, Akifumi Matsuda, Fanhao Jia, Okkyun Seo, Loku Singgappulige Rosantha Kumara, Toshiaki Ina, Eiichi Kobayashi, Jaemyung Kim, Chulho Song, Satoshi Hiroi, Natalia Palina, Yanfang Lou, Wei Ren, and Mamoru Yoshimoto
    • Journal Title

      Appl. Surf. Sci.

      Volume: 578 Issue: 1 Pages: 15809-15809

    • DOI

      10.1038/s41598-022-20078-x

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Characterization of vacuum ultraviolet-irradiated surface modification of CoO(111) crystal by low-energy atom scattering spectroscopy2022

    • Author(s)
      Tan G.、Fukuta H.、De Silva K. K. H.、Matsuda A.、Yoshimura M.、Yoshimoto M.、Umezawa K.
    • Journal Title

      Journal of Vacuum Science &amp; Technology A

      Volume: 40 Issue: 6 Pages: 063202-063202

    • DOI

      10.1116/6.0001971

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Solid-phase epitaxial crystallization of β-Ga2O3 thin film by KrF excimer laser irradiation from backside of NiO (111)-buffered α-Al2O3 (0001) substrate at room temperature2021

    • Author(s)
      Hiroyuki Morita, Takumi Matsushima, Kisho Nakamura, Kenta Kaneko, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Journal Title

      J. Vac. Sci. Technol.

      Volume: A39 Issue: 4 Pages: 043414-043417

    • DOI

      10.1116/6.0000996

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effect of MgO powder addition to alkali and alkaline-earth borosilicate glass paste on the acid durability and peel adhesion characteristics of Ag conductors formed with the glass paste2020

    • Author(s)
      Yusuke Tachibana, Akifumi Matsuda, and Mamoru Yoshimoto
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 128 Issue: 3 Pages: 142-148

    • DOI

      10.2109/jcersj2.19157

    • NAID

      130007804694

    • ISSN
      1348-6535, 1882-0743
    • Year and Date
      2020-03-01
    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] P-type amorphous vanadium oxide thin film fabricated by pulsed laser deposition2020

    • Author(s)
      Subaru Nakanishi, Yoshiharu Shinozaki, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 59 Issue: 7 Pages: 078004-078004

    • DOI

      10.35848/1347-4065/ab9ef7

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of ultra-flat c-axis oriented ZnO thin films on atomically stepped cyclo-olefin polymer (COP) substrates by pulsed laser deposition at RT2020

    • Author(s)
      Tomoaki Oga, Shiori Yamada, Naho Kaneko, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 59 Issue: 12 Pages: 128001-128001

    • DOI

      10.35848/1347-4065/abc65e

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Tuning of structural, optical band gap, and electrical properties of room-temperature-grown epitaxial thin films through the Fe2O3:NiO ratio2019

    • Author(s)
      Seo Okkyun、Tayal Akhil、Kim Jaemyung、Song Chulho、Chen Yanna、Hiroi Satoshi、Katsuya Yoshio、Ina Toshiaki、Sakata Osami、Ikeya Yuki、Takano Shiori、Matsuda Akifumi、Yoshimoto Mamoru
    • Journal Title

      Scientific Reports

      Volume: 9 Issue: 1 Pages: 4304-4304

    • DOI

      10.1038/s41598-019-41049-9

    • Related Report
      2019 Research-status Report 2018 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Solid-phase epitaxy and pressure-induced topotaxy of the VO2 and V2O3 thin films on sapphire using annealing under uniaxial compression2019

    • Author(s)
      Akifumi Matsuda, Yasuhisa Nozawa, Satoru Kaneko, and Mamoru Yoshimoto
    • Journal Title

      Applied Surface Science

      Volume: 480 Pages: 956-961

    • DOI

      10.1016/j.apsusc.2019.01.189

    • Related Report
      2019 Research-status Report 2018 Research-status Report
    • Peer Reviewed
  • [Journal Article] Construction of a lattice constant in an epitaxial magnesium oxide film deposited on a silicon substrate2019

    • Author(s)
      S. Kaneko, T. Tokumasu, M. Yasuii, Musa, A. Matsuda, and M. Yoshimoto
    • Journal Title

      Jpn. J. Appl. Phys. Vol.58 (2019)

      Volume: 58 Issue: SA Pages: SAAD06-SAAD06

    • DOI

      10.7567/1347-4065/aaec11

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Presentation] 熱ナノインプリントによるポリ乳酸シート表面の原子ステップ平坦化2023

    • Author(s)
      梅本琉花・前田優斗・大賀友瑛・金子智・吉本護・松田晃史
    • Organizer
      2023年応用物理学会春年会(上智大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] 新規熱電材料創製に向けた不純物添加非晶質酸化バナジウム系薄膜のUV光照射等による構造・ 電気特性制御2023

    • Author(s)
      大澤樹・庄司拓貴・金子健太・金子智・松田晃史・吉本護
    • Organizer
      2023年応用物理学会春年会(上智大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] ナノインプリント法およびパルスレーザー堆積を用いたポリマー表面上への金属ナノ粒子周期パターン形成2023

    • Author(s)
      島田侑果・前田優斗・大賀友瑛・金子智・吉本護・松田晃史
    • Organizer
      2023年応用物理学会春年会(上智大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] p/n半導性制御のための不純物ドープβ-Ga2O3薄膜の室温固相結晶化に向けたエキシマレーザーアニールプロセスの検討2023

    • Author(s)
      沼田拓実・甲斐稜也・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2023年応用物理学会春年会(上智大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] ポリマー基板上へのワイドギャップβ-Ga2O3配向性結晶薄膜のレーザーアニール室温合成2023

    • Author(s)
      甲斐稜也・沼田拓実・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2023年日本セラミックス協会春年会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Nanoimprint Formation of the Atomically Ultra-Smooth Surface of the PEDOT: PSS Conducting Polymer Thin Film for Flexible Optoelectronic Devices2022

    • Author(s)
      Yuto Maeda, Naho Kaneko, Tomoaki Oga, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
    • Organizer
      2022 MRS Fall Meeting & Exhibit (Boston, USA)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Room-Temperature Fabrication of Highly-Oriented β-Ga2O3 Thin Film on ZnO/AlOx-Buffered Cyclo-Olefin Polymer Substrate via Excimer Laser Annealing of Amorphous Thin Film2022

    • Author(s)
      Ryoya Kai, Tomoaki Oga, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
    • Organizer
      2022 MRS Fall Meeting & Exhibit (Boston, USA)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Lowering in Resistivity and Ultra-Flattening of AZO Thin Films on Cyclo-Olefin Polymer Substrates via Substrate-Surface Modification for Flexible Optoelectronics2022

    • Author(s)
      Tomoaki Oga, Ryoya Kai, Hisashi Miyazaki, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
    • Organizer
      2022 MRS Fall Meeting & Exhibit (Boston, USA)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Designing Carbon Cluster for Graphene Growth by Molecular Dynamics-Selection of Substrate Material, Crystal Orientation2022

    • Author(s)
      Satoru Kaneko, Manabu Yasui, Masahito Kurouchi, Chihiro Kato, Satomi Tanaka, Takashi Tokumasu, Shigeo Yasuhara, Tamio Endo, Musa Can, Ruei-Sung Yu, Kripasindhu Sardar, Sumanta Sahoo, Masahiro Yoshimura, Akifumi Matsuda, Mamoru Yoshimoto
    • Organizer
      2022 MRS Fall Meeting & Exhibit (Boston, USA)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of the atomically stepped surface of the spin-coated PEDOT:PSS conducting polymer thin film by thermal nanoimprinting2022

    • Author(s)
      Yuto Maeda, Naho Kaneko, Tomoaki Oga, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
    • Organizer
      The 22nd International Conference on Nanoimprint and Nanoprint Technology (NNT 2022) (Toyama, Jpn)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of atomic-scale thermal-nanoimprint patterning and surface modification of the polymer substrate on growth of functional oxide thin films2022

    • Author(s)
      Tomoaki Oga, Hisashi Miyazaki, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
    • Organizer
      The 22nd International Conference on Nanoimprint and Nanoprint Technology (NNT 2022) (Toyama, Jpn)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] シクロオレフィンポリマー基板への表面修飾がAZO薄膜の電気特性に与える影響2022

    • Author(s)
      大賀友瑛・宮﨑尚・金子智・松田晃史・吉本護
    • Organizer
      2022年応用物理学会秋年会(東北大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] 室温でのエキシマレーザーアニールにより作製した酸化物緩衝層付きポリマー基板上のβ-Ga2O3配向膜の構造及び光学特性の評価2022

    • Author(s)
      甲斐稜也・沼田拓実・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2022年応用物理学会秋年会(東北大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] 原子ステップ形状を有する超平坦PEDOT:PSS導電性ポリマー薄膜の作製と表面特性制御2022

    • Author(s)
      前田優斗・梅本琉花・島田侑果・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2022年応用物理学会秋年会(東北大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] 熱ナノインプリントによるポリ乳酸シート表面の形状制御と超平坦化2022

    • Author(s)
      梅本琉花・前田優斗・大賀友瑛・金子智・吉本護・松田晃史
    • Organizer
      2022年応用物理学会秋年会(東北大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] PLD合成したアモルファス酸化バナジウム系薄膜の紫外光照射及び一軸圧縮熱処理による電気特性制御2022

    • Author(s)
      大澤樹・庄司拓貴・金子健太・金子智・松田晃史・吉本護
    • Organizer
      2022年応用物理学会秋年会(東北大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] ナノインプリント法を用いたポリマー基板表面の薄膜周期パターン形成2022

    • Author(s)
      島田侑果・前田優斗・大賀友瑛・金子智・吉本護・松田晃史
    • Organizer
      2022年応用物理学会秋年会(東北大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] 室温でのエキシマレーザーアニーリングによる不純物ドープβ-Ga2O3薄膜の固相エピタキシャル成長と特性評価2022

    • Author(s)
      沼田拓実・甲斐稜也・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2022年応用物理学会秋年会(東北大学)
    • Related Report
      2022 Annual Research Report
  • [Presentation] シクロオレフィンポリマー基板上ZnO薄膜の低温PLD結晶成長に与える物理・化学的な基板表面修飾の効果2022

    • Author(s)
      大賀友瑛・宮崎尚・金子智・松田晃史・吉本護
    • Organizer
      2022年日本セラミックス協会秋季シンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] Rapid oriented crystallization of β-Ga2O3 thin films on flexible polymer substrates by excimer laser annealing2022

    • Author(s)
      Ryoya Kai, Kazuki Watanabe, Kenta Kaneko, Tomoaki Oga, Satoru Kaneko, Mamoru Yoshimoto, Akifumi Matsuda
    • Organizer
      The 5th International Conference for Young Researchers on Advanced Materials (ICYRAM 2022) (Kyushu, Jpn)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Highly-Oriented Wide-Bandgap Oxide Thin Films on the Surface-Modified Polymer Substrates by Room-Temperature UV Laser/Light Processes2022

    • Author(s)
      Tomoaki Oga, Ryoya Kai, Naho Kaneko, Kenta Kaneko, Satoru Kaneko, Hisashi Miyazaki, Akifumi Matsuda, and Mamoru Yoshimoto
    • Organizer
      2022 MRS Spring Meeting & Exhibit (Honolulu, USA)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] へき開したβ-Ga2O3 (100)をシード層としたポリマー基板上での機能性酸化物薄膜のエピタキシャル成長2022

    • Author(s)
      大賀友瑛・宮崎尚・金子智・松田晃史・吉本護
    • Organizer
      日本セラミックス協会 2022年年会
    • Related Report
      2021 Research-status Report
  • [Presentation] -Ga2O3単結晶へき開シード層を用いたポリマー基板上ZnO薄膜のエピタキシャル成長2022

    • Author(s)
      大賀友瑛・宮﨑尚・金子智・松田晃史・吉本護
    • Organizer
      2022年第69回 応用物理学会 春季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 紫外レーザーアニールによるポリマー基板上β-Ga2O3高配向膜の作製2022

    • Author(s)
      甲斐稜也・渡邉一樹・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2022年第69回 応用物理学会 春季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 熱ナノインプリントによるポリマー上PEDOT:PSS薄膜への原子ステップ形状転写2022

    • Author(s)
      前田優斗・金子奈帆・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2022年第69回 応用物理学会 春季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] エキシマレーザーアニーリングを用いたポリマー基板上におけるGa2O3薄膜の固相結晶化2021

    • Author(s)
      甲斐稜也・渡邉一樹・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2021年第82回 応用物理学会 秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 熱ナノインプリントパターンを有するポリマー基板上でのPEDOT:PSS薄膜の液相堆積2021

    • Author(s)
      前田優斗・金子奈帆・大賀友瑛・金子智・松田晃史・吉本護
    • Organizer
      2021年第82回 応用物理学会 秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 表面修飾したシクロオレフィンポリマー基板上におけるZnO薄膜の高配向成長と特性評価2021

    • Author(s)
      大賀友瑛・金子奈帆・金子智・松田晃史・吉本護
    • Organizer
      2021年第82回 応用物理学会 秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] ナノパターンポリマー基板上におけるリン酸Ca系薄膜の初期成長過程2021

    • Author(s)
      金子奈帆・前田優斗・大賀友瑛・林智広・Mondarte Evan Angelo・金子智・松田晃史・吉本護
    • Organizer
      2021年第82回 応用物理学会 秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 真空紫外光照射したシクロオレフィンポリマー基板上における酸化物薄膜の室温結晶成長2021

    • Author(s)
      大賀友瑛・金子奈帆・金子智・松田晃史・吉本護
    • Organizer
      日本セラミックス協会 2021年第34回秋季シンポジウム
    • Related Report
      2021 Research-status Report
  • [Presentation] Room-Temperature Growth of Ultra-Flat Transparent Conducting ZnO Thin Films on the Morphologically and Chemically Surface-Modified Polymer Substrates for Flexible Optoelectronics Devices2021

    • Author(s)
      Tomoaki Oga, Naho Kaneko, Kenta Kaneko, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Organizer
      2021 MRS Spring/Fall Meeting (USA, online)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nano-Scale Growth Study of Calcium Phosphate Thin Films on the Nanopatterned and Chemically-Modified Polymer Sheets for Flexible Apatite-Based Biodevices2021

    • Author(s)
      Naho Kaneko, Yuto Maeda, Tomoaki Oga, Kazuki Watanabe, Kenta Kaneko, Tomohiro Hayashi, Evan Angelo Mondarte, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Organizer
      2021 MRS Spring/Fall Meeting (USA, online)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Room-temperature highly-oriented growth of ZnO thin films on surface modified cyclic olefin polymer substrates2021

    • Author(s)
      Tomoaki Oga, Naho Kaneko, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Organizer
      Materials Research Meeting 2021 (MRM2021) (Yokohama, online)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nano-scale observation of calcium phosphate thin film growth on the nanopatterned and modified polymer surface2021

    • Author(s)
      Naho Kaneko, Yuto Maeda, Tomoaki Oga, Tomohiro Hayashi, Evan Angelo Quimada Mondarte, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
    • Organizer
      Materials Research Meeting 2021 (MRM2021) (Yokohama, online)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] 環状オレフィンポリマー基板への種々の表面修飾が及ぼすZnO薄膜の配向結晶成長への影響2021

    • Author(s)
      大賀友瑛・金子奈帆・金子智・松田晃史・吉本護
    • Organizer
      第68回 応用物理学会 春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 熱ナノインプリントによるナノパターンを有するポリマー基板上へのリン酸Ca系薄膜の堆積2021

    • Author(s)
      金子奈帆・大賀友瑛・大島淳史・金子智・松田晃史・吉本護
    • Organizer
      第68回 応用物理学会 春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 環状オレフィンポリマー基板表面への172nm真空紫外光照射が及ぼすZnO薄膜配向成長への影響2020

    • Author(s)
      大賀友瑛・大島淳史・金子奈帆・金子智・松田晃史・吉本護
    • Organizer
      第81回 応用物理学会 秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 導電性ポリマー被覆PETフィルムのナノインプリント平坦化と電気特性評価2020

    • Author(s)
      大島淳史・大賀友瑛・金子奈帆・金子智・松田晃史・吉本護
    • Organizer
      第81回 応用物理学会 秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] シクロオレフィンポリマー基板の真空紫外光処理によるZnO薄膜結晶成長への影響2020

    • Author(s)
      大賀友瑛・金子奈帆・大島淳史・金子智・松田晃史・吉本護
    • Organizer
      MRM Forum 2020
    • Related Report
      2020 Research-status Report
  • [Presentation] ソフト化学プロセスを用いたナノパターン高分子基板上でのリン酸Ca系薄膜の成長2020

    • Author(s)
      金子奈帆・大賀友瑛・大島淳史・金子智・松田晃史・吉本護
    • Organizer
      MRM Forum 2020
    • Related Report
      2020 Research-status Report
  • [Presentation] エキシマ光プロセスを用いたいた超平坦ポリマー基板上でのZnO薄膜の低温合成 と結晶配向化2019

    • Author(s)
      大賀友瑛・大島淳史・金子奈帆・金子智・松田晃史・吉本護
    • Organizer
      第80回 応用物理学会 秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 導電性ポリマー基板への原子・ナノレベル周期パターン転写と特性評価2019

    • Author(s)
      大島淳史・大賀友瑛・金子奈帆・金子智・松田晃史・吉本護
    • Organizer
      第80回 応用物理学会 秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] ポリマーに転写した原子レベルナノパターンの光・熱による形状制御2019

    • Author(s)
      金子奈帆・大賀友瑛・大島淳史・金子智・松田晃史・吉本護
    • Organizer
      第80回 応用物理学会 秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Fabrication of UV-sensitive semiconductor thin films on ultra-flat polymer sheets with 0.3 nm-high atomic step-and-terrace surface2019

    • Author(s)
      T. Oga, K. Iwasa, S. Yamada, H. Morita, S. Kaneko, A. Matsuda, M. Yoshimoto
    • Organizer
      2019 MRS Spring Meeting & Exhibit
    • Related Report
      2019 Research-status Report
  • [Presentation] 酸化物半導体薄膜の成長および特性に及ぼすポリマー基板表面における原子レベルパターンの影響2019

    • Author(s)
      大賀,岩佐,山田,金子,松田,吉本
    • Organizer
      第66回 応用物理学会(2019) 春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Atomic-scale flattened/patterned flexible substrates for nanomaterials formation2018

    • Author(s)
      松田、吉本
    • Organizer
      The 4th International Conference for Young Researchers on Advanced Materials (ICYRAM 2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] 周期的ナノパターン表面を有するポリマー基板上への酸化物半導体薄膜の作製と電気特性評価2018

    • Author(s)
      岩佐,大賀,土嶺,金子,松田,吉本
    • Organizer
      第79回 応用物理学会(2018) 秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] 0.3 nm高さの直線状原子ステップを有するPMMA及びポリイミドシートにおける光化学反応および成膜による表面特性の制御2018

    • Author(s)
      山田,岩佐,大賀,金子,松田,吉本
    • Organizer
      第79回 応用物理学会(2018) 秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Book] ナノインプリント技術ハンドブック2019

    • Author(s)
      応用物理学会・ナノインプリント技術研究会(編)(分担執筆:第1編))
    • Total Pages
      802
    • Publisher
      オーム社
    • ISBN
      9784274224485
    • Related Report
      2019 Research-status Report
  • [Remarks] 東京工業大学物質理工学院 吉本・松田研究室

    • URL

      http://www.yoshimoto.iem.titech.ac.jp/

    • Related Report
      2022 Annual Research Report 2021 Research-status Report 2020 Research-status Report 2019 Research-status Report 2018 Research-status Report

URL: 

Published: 2018-07-25   Modified: 2024-01-30  

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