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Realization of a method to visualize the distribution of threading dislocations and point defects in semiconductor crystals

Research Project

Project/Area Number 18K19028
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 30:Applied physics and engineering and related fields
Research InstitutionTohoku University

Principal Investigator

Kojima Kazunobu  東北大学, 多元物質科学研究所, 准教授 (30534250)

Co-Investigator(Kenkyū-buntansha) 谷川 智之  大阪大学, 工学研究科, 准教授 (90633537)
Project Period (FY) 2018-06-29 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2019: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2018: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Keywords窒化ガリウム / 全方位フォトルミネセンス / 多光子顕微鏡 / 点欠陥 / 貫通転位
Outline of Final Research Achievements

An optical measurement system based on an integrating sphere was built up to perform the omnidirectional photoluminescence (ODPL) spectroscopy under the multiple-photon absorption (MPA) condition. The detection sensitivity of the system was verified to be enough high by the quantification of quantum efficiency of radiation in a GaN crystal. Photoluminescence (PL) spectra and PL decay lifetime were realized to be drastically changed when the excitation depth was varied. Such the sensitive variation of PL spectra and lifetimes arises from the self-absorption and surface recombination processes of the crystal.

Academic Significance and Societal Importance of the Research Achievements

近年成長技術の発展が著しいGaN自立結晶の、さらなる高品質化に寄与するものと考えられる。特に、貫通転位密度が非常に低いGaN基板を用いてもなお、デバイス性能のばらつきなどが多数報告されている。本手法を用いて点欠陥濃度の分布が明らかとなれば、このような歩留まりの問題に対して有効なアプローチを講じることができると期待できる。また、無機・有機を問わず、他の直接遷移型半導体における光物性評価においても有用な分光技術になるものと期待する。

Report

(3 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • Research Products

    (11 results)

All 2020 2019 2018

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 2 results) Presentation (9 results) (of which Int'l Joint Research: 5 results,  Invited: 2 results)

  • [Journal Article] Roles of carbon impurities and intrinsic nonradiative recombination centers on the carrier recombination processes of GaN crystals2020

    • Author(s)
      K. Kojima, F. Horikiri, Y. Narita, T. Yoshida, H. Fujikura, and S. F. Chichibu
    • Journal Title

      Applied Physics Express

      Volume: 13 (1) Issue: 1 Pages: 0120041-4

    • DOI

      10.7567/1882-0786/ab5adc

    • NAID

      210000157633

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Quantification of the quantum efficiency of radiation of a freestanding GaN crystal placed outside an integrating sphere2019

    • Author(s)
      K. Kojima, K. Ikemura, and S. F. Chichibu
    • Journal Title

      Applied Physics Express

      Volume: 12 (6) Issue: 6 Pages: 0620101-4

    • DOI

      10.7567/1882-0786/ab2165

    • NAID

      210000156009

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] GaN結晶の輻射量子効率に対して炭素不純物および非輻射再結合中心が及ぼす影響2020

    • Author(s)
      小島一信,堀切文正,成田好伸,吉田丈洋,藤倉序章,秩父重英
    • Organizer
      2020年 第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 多光子励起による窒化ガリウム結晶の時間分解フォトルミネセンス分光(1)2019

    • Author(s)
      谷川智之,小島一信,粕谷拓生,秩父重英,田中敦之,本田善央,天野浩,上向井正裕,片山竜二
    • Organizer
      2019年 第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 多光子励起による窒化ガリウム結晶の時間分解フォトルミネセンス分光(2)2019

    • Author(s)
      小島一信,谷川智之,粕谷拓生,上向井正裕,片山竜二,田中敦之,本田善央,天野浩,秩父重英
    • Organizer
      2019年 第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Optical characterization and gain calculation of AlGaN quantum wells2019

    • Author(s)
      K. Kojima
    • Organizer
      1st International Workshop on AlGaN based UV-Laser diodes
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Dependences of external quantum efficiency of radiation and photoluminescence lifetime on the carbon concentration in GaN on GaN structures2019

    • Author(s)
      K. Kojima, F. Horikiri, Y. Narita, T. Yoshida, and S. F. Chichibu
    • Organizer
      13th International Conference on Nitride Semiconductors (ICNS-13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quantum efficiency of radiation in wide bandgap semiconductors2018

    • Author(s)
      K. Kojima and S. F. Chichibu
    • Organizer
      19th International Conference on Physics of Light-Matter Coupling in Nanostructures (PLMCN19)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Relationship between internal quantum efficiency of radiation and photoluminescence lifetime in a ZnO single crystal2018

    • Author(s)
      K. Kojima and S. F. Chichibu
    • Organizer
      The 10th International Workshop on ZnO and Other Oxide Semiconductors (IWZnO2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Influence of Self Absorption in Two-Photon-Excitation Photoluminescence of GaN2018

    • Author(s)
      T. Tanikawa, T. Fujita, K. Kojima, S. F. Chichibu, and T. Matsuoka
    • Organizer
      The 19th International Conference on Metal Organic Vapor Phase Epitaxy (ICMOVPE-19)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] GaNの二光子励起フォトルミネッセンス測定における自己吸収の影響2018

    • Author(s)
      谷川智之,小島一信,秩父重英,松岡隆志
    • Organizer
      2018年 第65回応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report

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Published: 2018-07-25   Modified: 2021-02-19  

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