Molding multi-layered precise structures widely and seamlessly

• Project/Area Number: 19106003
• Research Category: Grant-in-Aid for Scientific Research (S)
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: NAKAO Masayuki 東京大学, 大学院・工学系研究科, 教授 (90242007)
• Co-Investigator(Kenkyū-buntansha): HAMAGUCHI Tetsuya 東京大学, 大学院・工学系研究科, 特任教授 (90345083) ; TSUCHIYA Kensuke 東京大学, 生産技術研究所, 准教授 (80345173)
• Project Period (FY): 2007 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥110,500,000 (Direct Cost: ¥85,000,000、Indirect Cost: ¥25,500,000); Fiscal Year 2011: ¥13,780,000 (Direct Cost: ¥10,600,000、Indirect Cost: ¥3,180,000); Fiscal Year 2010: ¥15,990,000 (Direct Cost: ¥12,300,000、Indirect Cost: ¥3,690,000); Fiscal Year 2009: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000); Fiscal Year 2008: ¥20,020,000 (Direct Cost: ¥15,400,000、Indirect Cost: ¥4,620,000); Fiscal Year 2007: ¥42,770,000 (Direct Cost: ¥32,900,000、Indirect Cost: ¥9,870,000)
• Keywords: ナノ・マイクロ加工 / 機械工作・生産工学 / 精密部品加工 / 超精密金型転写 / マイクロ・ナノデバイス / ナノインプリント / 高速プレス / ロール加工

Research Abstract

New replication methods of large-area multi-layered micro/nanostructures were developed. We proposed and demonstrated two methods ; iterative imprint method in which thin films are molded and bonded repeatedly and high-speed shearing method in which multilayered thin films preliminarily deposited are sheared together. We also developed roller-imprinting that continuously replicates micro/nanostructures.

Research Products

• [Journal Article] Injection compression molding of high-aspect-ratio nanostructures (2011)
  • Author(s): K. Nagato, T. Hamaguchi, M. Nakao
  • Journal Title: J. Vac. Sci. Technol. B Volume: Vol.29
  • Peer Reviewed
• [Journal Article] Effect of duty ratio of patterned surface on planarization by gas clusterion beams (2011)
  • Author(s): K.Nagato, N.Toyoda, N.Naito, H.Tani, Y.Sakane, I.Yamada, M.Nakao
  • Journal Title: J.Appl.Phys. Volume: 109 Issue: 7
  • DOI: 10.1063/1.3556783
  • Peer Reviewed
• [Journal Article] Slurry mixing device with microchannels for gelcasting (2011)
  • Author(s): K.Nagato, H, Hoshino, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: 88 Issue: 8 Pages: 1814-1816
  • DOI: 10.1016/j.mee.2011.01.033
  • Peer Reviewed
• [Journal Article] Field emission of vertically aligned carbon nanotubes patterned by pressing a microstructured mold and their fild-emission properties (2011)
  • Author(s): K.Nagato, S.Inoue, M.Furubayashi, S.Chiashi, S.Maruyama, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: 88 Issue: 8 Pages: 2700-2702
  • DOI: 10.1016/j.mee.2011.01.035
  • Peer Reviewed
• [Journal Article] Patterning of a-Fe2O3 nanowires by pressing a microstructured mold and their field-emission properties (2011)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: 88 Issue: 8 Pages: 2697-2699
  • DOI: 10.1016/j.mee.2011.01.051
  • Peer Reviewed
• [Journal Article] Injection compression molding of high-aspect-ratio nanostructures (2011)
  • Author(s): K.Nagato, T.Hamaguchi, M.Nakao
  • Journal Title: J.Vac.Sci.Technol.B Volume: 29 Issue: 6
  • DOI: 10.1116/1.3662405
  • Peer Reviewed
• [Journal Article] Effect of duty ratio of patterned surface on planarization by gas cluster ion beams (2011)
  • Author(s): K.Nagato, N.Toyoda, H.Naito, H.Tani, Y.Sakane, I.Yamada, M.Nakao, T.Hamaguchi
  • Journal Title: J.Appl.Phys. Volume: 109
  • Peer Reviewed
• [Journal Article] Slurry mixing device with microchannels for gelcasting (2011)
  • Author(s): K.Nagato, H.Hoshino, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: (in press)(掲載確定)
  • Peer Reviewed
• [Journal Article] Field emission of vertically aligned single walled carbon nanotubes patterned by pressing a microstructured mold (2011)
  • Author(s): K.Nagato, S.Inoue, S.Chiashi, S.Maruyama, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: (in press)(掲載確定)
  • Peer Reviewed
• [Journal Article] Patterning of a-Fe203 nanowires by pressing a microstructured mold and their field-emission properties (2011)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: (in press)(掲載確定)
  • Peer Reviewed
• [Journal Article] Iterative roller imprint of multilayered nanostructures (2010)
  • Author(s): K. Nagato, S. Sugimoto, T. Hamaguchi, M. Nakao
  • Journal Title: Microelectron. Eng. Volume: Vol.87 Pages: 1543-1545
  • Peer Reviewed
• [Journal Article] Rapid injection molding of high-aspect-ratio nanostructures (2010)
  • Author(s): S. Hattori, K. Nagato, T. Hamaguchi, M. Nakao
  • Journal Title: Microelectron. Eng. Volume: Vol.87 Pages: 1546-1549
  • Peer Reviewed
• [Journal Article] Iterative roller imprint of multilayered nanostructures (2010)
  • Author(s): K.Nagato, S.Sugimoto, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: 87 Pages: 1543-1545
  • Peer Reviewed
• [Journal Article] Field emission properties of discretely synthesized tungsten oxide nanowires (2010)
  • Author(s): M.Furubayashi, K.Nagato, H.Moritani, T.Aamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: 87 Pages: 1594-1596
  • NAID: 130004659138
  • Peer Reviewed
• [Journal Article] Rapid injection molding of high-aspect ratio nanostructures (2010)
  • Author(s): S.Hattori, K.Nagato, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. Volume: 87 Pages: 1546-1549
  • Peer Reviewed
• [Journal Article] Planarization of nonmagnetic films on bit patterned substrates by gas cluster ionbeams (2010)
  • Author(s): K.Nagato, H.Hoshino, H.Naito, T.Hirota, H.Tani, Y.Sakane, N.Toyoda, I.Yamada, M.Nakao, T.Hamaguchi
  • Journal Title: IEEE Trans.Magn. Volume: 46 Pages: 2504-2506
  • Peer Reviewed
• [Journal Article] Fabrication of antireflection-structured surface using vertical nanowires as an initial structure (2010)
  • Author(s): K.Nagato, H.Moritani, T.Hamaguchi, M.Nakao
  • Journal Title: J.Vac.Sci.Technol.B Volume: 28 Pages: 39-42
  • Peer Reviewed
• [Journal Article] Direct synthesis of a-Fe203 nanowires from sputtered thin film (2010)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Journal Title: J.Vac.Sci.Technol.B Volume: 28 Pages: 11-13
  • Peer Reviewed
• [Journal Article] Rapid thermal imprinting of high-aspect ratio nanostructures by dynamic heating of mold surface (2010)
  • Author(s): K.Nagato, S.Hattori, T.Hamguchi, M.Nakao
  • Journal Title: J.Vac.Sci.Technol.B Volume: 28 Pages: 122-124
  • Peer Reviewed
• [Journal Article] Iterative roller imprint of multilayered nanostructures (2010)
  • Author(s): K. Nagato, S. Sugimoto, T. Hamaguchi, M. Nakao
  • Journal Title: Microelectron.Eng. Vol. 87 Pages: 1543-1545
  • Peer Reviewed
• [Journal Article] Rapid injection molding of high-aspect-ratio nanostructures (2010)
  • Author(s): Hattori, K. Nagato, T. Hamaguchi, M. Nakao
  • Journal Title: Microelectron.Eng. Vol. 87 Pages: 1546-1549
  • Peer Reviewed
• [Journal Article] Iterative roller imprint of multilayered nanostructures (2010)
  • Author(s): K.Nagato, S.Sugimoto, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. 87 Pages: 1543-1545
  • Peer Reviewed
• [Journal Article] Rapid injection molding of high-aspect-ratio nanostructures (2010)
  • Author(s): S.Hattori, K.Nagato, T.Hamaguchi, M.Nakao
  • Journal Title: Microelectron.Eng. 87 Pages: 1546-1549
  • Peer Reviewed
• [Journal Article] Iterative imprint for multilayered nanostructures by feeding, vacuum forming, and bonding of sheets (2008)
  • Author(s): H. Suzuki, K. Nagato, S. Sugimoto, K. Tsuchiya, T. Hamaguchi, M. Nakao
  • Journal Title: J. Vac. Sci. Technol B Volume: Vol.26 Pages: 1753-1756
  • Peer Reviewed
• [Journal Article] Single-pass forming for three-dimensional microstructures by high-speed shearing of multilayer thin films (2008)
  • Author(s): T. Hamaguchi, H. Yonemoto, K. Nagato, K. Tsuchiya, M. Nakao
  • Journal Title: J. Vac. Sci. Technol B Volume: Vol.26 Pages: 1771-1774
  • Peer Reviewed
• [Journal Article] Sub-wavelength Pitched Cubic Mosaic Multi-layer Precisely Pressed by Nano-features Mold for Multi-functional Optical Elements (2008)
  • Author(s): M. Nakao, K. Nagato, H. Suzuki, T. Nishino, H. Yonemoto, H. Kaito, T. Hamaguchi and K. Tsuchiya
  • Journal Title: The 41st CIRP Conference on Manufacturing Systems Volume: Vol.1 Pages: 449-452
  • Peer Reviewed
• [Journal Article] Local Synthesis of Tungsten Oxide Nanowires by Current Heating of Designed Micropatterned Wires (2008)
  • Author(s): K. Nagato, Y. Kojima, K. Kasuya, H. Moritani, Tetsuya Hamaguchi, and Masayuki Nakao
  • Journal Title: Applied Physics Express Volume: Vol.1 Pages: 1-3
  • NAID: 10024292605
  • Peer Reviewed
• [Journal Article] Heat transfer in injection molding for reproduction of sub-micron-sized features (2008)
  • Author(s): M. Nakao, K. Tsuchiya, T. Sadamitsu, Y. Ichikohara, T. Ohba, T. Ooi
  • Journal Title: The International Journal of Advanced Manufacturing Technology Volume: Vol.38 Pages: 426-432
  • Peer Reviewed
• [Journal Article] Iterative imprint for multilayered nanostructures by feeding, vacuum forming, and bonding of sheets (2008)
  • Author(s): H. Suzuki, K. Nagato, S. Sugimoto, K. Tsuchiya, T. Hamaguchi, M. Nakao
  • Journal Title: J.Vac.Sci.Technol B Vol. 26 Pages: 1753-1756
  • Peer Reviewed
• [Journal Article] Single-pass forming for three-dimensional microstructures by high-speed shearing of multilayer thin films (2008)
  • Author(s): T. Hamaguchi, H. Yonemoto, K. Nagato, K. Tsuchiya, M. Nakao
  • Journal Title: J.Vac.Sci.Technol B Vol. 26 Pages: 1771-1774
  • Peer Reviewed
• [Journal Article] Sub-wavelength Pitched Cubic Mosaic Multi-layer Precisely Pressed by Nano-features Mold for Multi-functional Optical Elements (2008)
  • Author(s): M. Nakao, K. Nagato, H. Suzuki, T. Nishino, H. Yonemoto, H. Kaito, T. Hamaguchi, K. Tsuchiya
  • Journal Title: The 41st CIRP Conference on Manufacturing Systems Vol. 1 Pages: 449-452
  • Peer Reviewed
• [Journal Article] Local Synthesis of Tungsten Oxide Nanowires by Current Heating of Designed Micropatterned Wires (2008)
  • Author(s): K. Nagato, Y. Kojima, K. Kasuya, H. Moritani, Tetsuya Hamaguchi, Masayuki Nakao
  • Journal Title: Applied Physics Express Vol. 1
  • NAID: 10024292605
  • Peer Reviewed
• [Journal Article] Heat transfer in injection molding for reproduction of sub-micron-sized features (2008)
  • Author(s): M. Nakao, K. Tsuchiya, T. Sadamitsu, Y. Ichikohara, T. Ohba, T. Ooi
  • Journal Title: The International Journal of Advanced Manufacturing Technology Vol. 38 Pages: 426-432
  • Peer Reviewed
• [Journal Article] Iterative imprint for mjltilayered nanostructurex by feeding, vacuun forming, and bonding of sheets (2008)
  • Author(s): H. Suzuki, K. Nagato, S. suginoto, K. Tsuchiya, T. Hamafuchi, M. Nakao
  • Journal Title: J. Vac. Sci. Technol. B 26 Pages: 1753-1756
  • Peer Reviewed
• [Journal Article] Single-pass forming for three- dimensional microstructures by high-speed shearing of multilayer thin films (2008)
  • Author(s): T. Hamaguchi, H. Yonemoto, K. Nagatu, K. Tsuchiya, M. Nakao
  • Journal Title: J. Vac. Sci. Technol. B 26 Pages: 1771-1774
  • Peer Reviewed
• [Journal Article] Local Synthesis of Tungsten Oxide Nanowires by Current Heating of Designed Micropatterned Wires (2008)
  • Author(s): Keisuke Nagato, et, al.
  • Journal Title: Applied Physics Express 1
  • Peer Reviewed
• [Journal Article] Heat Transfer in Injection Molding for Reproduction of Sub-micron Sized Features (2008)
  • Author(s): M.Nakao, et. al.
  • Journal Title: The International Journal of Advanced Manufacturing Technology (CD-ROM)
  • Peer Reviewed
• [Journal Article] Sub-wavelength Pitched Cubic Mosaic Multi-layer Precisely Pressed by Nano-features Mold for Multi-functional Optical Elements (2008)
  • Author(s): M.Nakao, et. al.
  • Journal Title: The 41st CIRP Conference on Manufacturing Systems 印刷中(掲載確定)
  • Peer Reviewed
• [Presentation] 光導波路のための高速せん断加工の開発 (2012)
  • Author(s): 中林良太、下田誠、長藤圭介、井ノ上泰樹、千足昇平、丸山茂夫、濱口哲也、中尾政之
  • Organizer: 2011年度精密工学会春季大会
  • Place of Presentation: 首都大学東京南大沢キャンパス
  • Year and Date: 2012-03-15
• [Presentation] 光導波路のための高速せん断加工の開発 (2012)
  • Author(s): 中林良太, 下田誠, 長藤圭介, 井ノ上泰樹, 千足昇平, 丸山茂夫, 濱口哲也, 中尾政之
  • Organizer: 精密工学会春季大会
  • Place of Presentation: 首都大学東京南大沢キャンパス
  • Year and Date: 2012-03-15
• [Presentation] Photolithography with periodic multilayered resist film for photonic crystals (2011)
  • Author(s): M.Shimoda, K.Nagato, T.Hamaguchi, M.Nakao
  • Organizer: 24th International Microprocess and Nanotechnology Conference
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2011-10-26
• [Presentation] マイクロ流路におけるスラリー流の粒子法による解析 (2011)
  • Author(s): 池島翔太, 長藤圭介, 濱口哲也, 中尾政之
  • Organizer: 粉体工学会秋季研究発表会
  • Place of Presentation: 大阪アカデミア、大阪府
  • Year and Date: 2011-10-18
• [Presentation] 光学素子のための積層微細構造の製造 (2011)
  • Author(s): 下田誠, 長藤圭介, 濱口哲也,中尾政之
  • Organizer: 第3回マイクロ・ナノ工学シンポジウム(日本機械学会)
  • Place of Presentation: タワーホール船堀、東京都
  • Year and Date: 2011-09-26
• [Presentation] Morphology control of nickel oxide nanowires (2011)
  • Author(s): Kaname Sekiya, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: 37th International Conference on Micro and Nano Engineering
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2011-09-22
• [Presentation] Laser-scanning imprinting for large-area nanostructures (2011)
  • Author(s): Toshimi Sato, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: 37th International Conference on Micro and Nano Engineering
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2011-09-22
• [Presentation] Nanoparticle Control of Slurry Flow in Microchannel (2011)
  • Author(s): Shota Ikeshima, Keisuke Nagato, Kazuyasu Sugiyama, Shu Takagi, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: 11th IEEE International Conference on Nanotechnology
  • Place of Presentation: Portland, Oregon, USA
  • Year and Date: 2011-08-18
• [Presentation] Fabrication of antireflection structure by simple annealing of Fe film (2011)
  • Author(s): Daisuke Suehiro, Keisuke Nagato, Tetsuya Hamaguchi, M. Nakao
  • Organizer: 11th IEEE International Conference on Nanotechnology
  • Place of Presentation: Portland, Oregon, USA
  • Year and Date: 2011-08-16
• [Presentation] Reductive-Gas Sensor using Iron Oxide Nanowires (2011)
  • Author(s): Yuu Uriya, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: 11th IEEE International Conference on Nanotechnology
  • Place of Presentation: Portland, Oregon, USA
  • Year and Date: 2011-08-16
• [Presentation] Laser-Assisted Imprinting of Nanostructured Glass (2011)
  • Author(s): Toshimi Sato, Keisuke Nagato, Junho Choi, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: 11th IEEE International Conference on Nanotechnology
  • Place of Presentation: Portland, Oregon, USA(招待講演)
  • Year and Date: 2011-08-15
• [Presentation] 射出圧縮成形を用いたナノ構造の転写 (2011)
  • Author(s): 長藤圭介, 下田誠, 光田健洋, 濱口哲也, 中尾政之
  • Organizer: 次世代リソグラフィ(NGL)ワークショップ
  • Place of Presentation: 東京工業大学 蔵前会館(東京)
  • Year and Date: 2011-07-11
• [Presentation] Injection compression molding of high-aspect-ratio nanostructures (2011)
  • Author(s): K.Nagato, T.Hamaguchi, M.Nakao
  • Organizer: 55th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
  • Place of Presentation: Las Vegas, NV, USA
  • Year and Date: 2011-05-01
• [Presentation] Copper oxide nanowire arrays synthesized from sputtered Cu thin film (2011)
  • Author(s): K.Nagato, T.Hamaguchi, M.Nakao
  • Organizer: 55th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
  • Place of Presentation: Las Vegas, NV, USA
  • Year and Date: 2011-05-01
• [Presentation] 光学素子のための積層微細構造の製造 (2011)
  • Author(s): 下田誠、長藤圭介、濱口哲也、中尾政之
  • Organizer: 第3回マイクロ・ナノ工学シンポジウム(日本機械学会)
  • Place of Presentation: タワーホール船堀
• [Presentation] Effect of duty ratio of patterned surface on planarization by gas cluster ion beams (2010)
  • Author(s): K.Nagato, N.Toyoda, H.Naito, H.Tani, Y.Sakane, I.Yamada, M.Nakao.T.Hamaguchi
  • Organizer: Magnetism and Magnetic Materials(MMM)
  • Place of Presentation: Atlanta, USA
  • Year and Date: 2010-11-17
• [Presentation] Biomolecular-imaging device using light-addressed excitation on a photocatalyst substrate (2010)
  • Author(s): Atsushi Yamamoto, Jvn Suzurikawa, Keisuke Nagato, Tadashi, Tsukada, Aya Tanaka, Tetsuya Hamaguchi, Masayuki Nakac
  • Organizer: The 24 the American Society for Precision Engineering(ASPE)
  • Place of Presentation: Atlanta, USA
  • Year and Date: 2010-11-02
• [Presentation] Heat controlled injection molding of nanostructuredoptical elements (2010)
  • Author(s): Takehiro Mitsuda, Keisuke Nagato, Shuntaro Hattori, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: The 24 the American Society for Precision Engineering(ASPE)
  • Place of Presentation: Atlanta, USA
  • Year and Date: 2010-11-02
• [Presentation] Fast detection of micro defects using magnetic nondestructive testing methods (2010)
  • Author(s): Ryo Nakajima, Keisuke Nagato, Ysuhiro Kawamoto, Hirotoshi Kaito, Masayuki Nakao, Tetsuya Hamaguchi
  • Organizer: The 24 the American Society for Precision Engineering(ASPE)
  • Place of Presentation: Atlanta, USA
  • Year and Date: 2010-11-02
• [Presentation] Penetration of residual layer in nanoimphnt hthography by direct oxidation of photocatalytic films (2010)
  • Author(s): Makoto Shimoda, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: The 24 the American Society for Precision Engineering(ASPE)
  • Place of Presentation: Atlanta, USA
  • Year and Date: 2010-11-02
• [Presentation] Slurry mixing device with microchannels for gelcasting (2010)
  • Author(s): Hiroaki Hoshino, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: The 36th International Conference on Micro & Nano Engineering(MNE)
  • Place of Presentation: Genova, Italy
  • Year and Date: 2010-09-20
• [Presentation] Field emission of vertically aligned single walled carbon nanotubes patterned by pressing a microstructured mold (2010)
  • Author(s): Shota Inoue, Keisuke Nagato, Masaki Furubayashi, Shohei Chiashi, Shigeo Maruyama, Tetsuya Hamaguchi, Msayuki Nakao
  • Organizer: The 36th International Conference on Micro & Nano Engineering(MNE)
  • Place of Presentation: Genova, Italy
  • Year and Date: 2010-09-20
• [Presentation] Patterning of iron oxide nanowires by pressing a microstructuredmold (2010)
  • Author(s): Masaki Furubayashi, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
  • Organizer: The 36th International Conference on Micro & Nano Engineering(MNE)
  • Place of Presentation: Genova, Italy
  • Year and Date: 2010-09-20
• [Presentation] 繰返しローラインプリントを用いた積層ナノ構造の製造 (2010)
  • Author(s): 長藤圭介、杉本俊太郎、濱口哲也、中尾政之
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-19
• [Presentation] Direct synthesis of vertical a-Fe203 nanowires from sputtered Fe thin film (2010)
  • Author(s): K.Nagato, M.Furubayashi, T.Hamaguchi, M.Nakao
  • Organizer: The 54th internatinal conference on electron, ion, and photonbeam technology and nanofabrication(EIPBN)
  • Place of Presentation: Anchorage, AL, USA
• [Presentation] Rapid thermal imprint of high-aspect ratio nanostructures with dynamically heating of mold surface (2010)
  • Author(s): K.Nagato, S.Hattori, T.Hamaguchi, M.Nakao
  • Organizer: The 54th international conference on electron, ion, and photonbeam technology and nanofabrication(EIPBN)
  • Place of Presentation: Anchorage, AL, USA
• [Presentation] 射出成形を用いた高アスペクト比ナノ構造の転写 (2009)
  • Author(s): 服部俊太郎、長藤圭介、濱口哲也、中尾政之
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-09
• [Presentation] 射出成形を用いた高アスペクト比ナノ構造の転写 (2009)
  • Author(s): 服部俊太郎, 長藤圭介, 濱口哲也, 中尾政之
  • Organizer: 第70回応用物理学会学術講演会, 講演予稿集9a-D-4
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-09
• [Presentation] 射出成形を用いた高アスペクト比ナノ構造の転写 (2009)
  • Author(s): 服部俊太郎, 長藤圭介, 濱口哲也, 中尾政之
  • Organizer: 第70回応用物理学会学術演会
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-09
• [Presentation] 多層一括プレスによるフォトニック回路形成技術の開発 (2008)
  • Author(s): 西野俊樹、森井洋、鈴木秀明、笹井健史、土屋健介、濱口哲也、中尾政之
  • Organizer: 精密工学会春季講演会
  • Place of Presentation: 明治大
  • Year and Date: 2008-03-17
• [Presentation] 多層一括プレスによるフォトニック回路形成技術の開発 (2008)
  • Author(s): 西野 俊樹
  • Organizer: 精密工学会2008年春季大会
  • Place of Presentation: 東京
  • Year and Date: 2008-03-17
• [Remarks]
  • URL: http://hockey.t.u-tokyo.ac.jp/
• [Remarks]
  • URL: http://hockey.t.u-tokyo.ac.jp/