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Modeling of orientation-dependent etching of silicon and effects of ions in the solution

Research Project

Project/Area Number 19201026
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionNagoya University

Principal Investigator

SATO Kazuo  Nagoya University, 工学研究科, 教授 (30262851)

Co-Investigator(Kenkyū-buntansha) SHIKIDA Mitsuhiro  名古屋大学, 大学院・工学研究科, 准教授 (80273291)
PREM Pal  名古屋大学, 大学院・工学研究科, COE研究員(当時) (20444416)
KIMURA Yasuo  東北大学, 電気通信研究所, 助教 (40312673)
GOSALVEZ Miguel  名古屋大学, 大学院・工学研究科, COE研究員 (10377814)
Co-Investigator(Renkei-kenkyūsha) GOSALVEZ Miguel  ヘルシンキ工科大学, 研究員
HYNNINEN Teemu  ヘルシンキ工科大学, 研究員
FERRANDO Nestor  バレンシア工科大学, 研究助手
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥44,200,000 (Direct Cost: ¥34,000,000、Indirect Cost: ¥10,200,000)
Fiscal Year 2009: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2008: ¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000)
Fiscal Year 2007: ¥21,450,000 (Direct Cost: ¥16,500,000、Indirect Cost: ¥4,950,000)
Keywordsシリコン / 結晶 / 異方性エッチング / 不純物イオン / 界面活性剤 / 固液界面 / FTIR
Research Abstract

We investigated wet anisotropic etching of single crystal silicon using alkaline solutions. We clarified the mechanisms of easily changeable anisotropy in the etch rate by a small change in the etching solution contents. It was clarified both theoretically and experimentally that a cupper ion as an impurity in etching solution significantly suppresses etch rate and deteriorates etched surface roughness. Also, we clarified a mechanism of dramatic anisotropy change occurring by a small amount of surfactant added to etching solution. This was first found by our in-situ FTIR observation of liquid-solid interface between etching solution and silicon. By utilizing the variable anisotropy in etch rate, we invented new fabrication processes for 3D microstructures for MEMS applications with a minimal process cost.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (129 results)

All 2010 2009 2008 2007 Other

All Journal Article (60 results) (of which Peer Reviewed: 52 results) Presentation (47 results) Book (10 results) Remarks (8 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

    • Author(s)
      M.A. Gosalvez, Prem. Pal, B. Tang, K. Sato
    • Journal Title

      Sensors and Actuators A, Physical 157

      Pages: 91-95

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato, H. Yi
    • Journal Title

      J. Micromechanics and Microengineering 20

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes2010

    • Author(s)
      Prem Pal, K. Sato
    • Journal Title

      Microsystem Technologies 0956-5(in press)

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Octree-Search Kinetic Monte Carlo2010

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
    • Journal Title

      Sensors and Actuators A (Physical in press, accepted Feb.)

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching (Study of micromachining of single crystal silicon)2010

    • Author(s)
      Prem Pal, K. Sato
    • Journal Title

      日本機械学会論文集C2編「マイクロ・ナノ工学シンポジウム小特集」 (in press, accepted Feb.)

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: Etching mechanism and advanced application2010

    • Author(s)
      Prem Pal, M.A. Gosalvez, K. Sato
    • Journal Title

      Japanese Journal of Applied Physics (in press, accepted Feb.)

    • NAID

      40017116129

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

    • Author(s)
      M.A.Gosalvez, Prem.Pal, B.Tang, K.Sato
    • Journal Title

      Sensors and Actuators A, Physical 157

      Pages: 91-95

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010

    • Author(s)
      Y.Xing, M.A.Gosalvez, K.Sato, H.Yi
    • Journal Title

      Journal of Micromechanics and Microengineering 20

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes2010

    • Author(s)
      Prem Pal, K.Sato
    • Journal Title

      Microsystem Technologies, (DOI 10.1007/s00542-009-0956-5) (in press, Online published)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Octree-Search Kinetic Monte Carlo2010

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
    • Journal Title

      Sensors and Actuators A, Physical, accepted Feb. '10 (in press)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching (Study of micromachining of single crystal silicon)2010

    • Author(s)
      Prem Pal, K.Sato
    • Journal Title

      日本機械学会論文集C2編「マイクロ・ナノ工学シンポジウム小特集」 (in press)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide : Etching mechanism and advanced application2010

    • Author(s)
      Prem Pal, M.A.Gosalvez, K.Sato
    • Journal Title

      Japanese Journal of Applied Physics, accepted Feb. '10 (in press)

    • NAID

      40017116129

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article]2010

    • Author(s)
      M.A.Gosalvez(分担執筆)
    • Journal Title

      Handbook of Silicon Based MEMS Materials and Technologies(Elsevier)

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

    • Author(s)
      Prem Pal, K. Sato, M. Shikida, M.A. Gosalvez
    • Journal Title

      Sensors and Actuators A 154-2(Physical)

      Pages: 192-203

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Suspended Si microstructures over controlled depth micromachined cavities for MEMS based sensing devices2009

    • Author(s)
      Prem Pal, K. Sato
    • Journal Title

      Sensor Letters 40725

      Pages: 11-16

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography2009

    • Author(s)
      Prem Pal, K. Sato
    • Journal Title

      J. Micromechanics and Microengineering 40682

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining2009

    • Author(s)
      Prem Pal, K. Sato
    • Journal Title

      J. Micromechanics and Microengineering 40835

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nieminen, Discrete and continuous cellular automata for the simulation of propagating surfaces2009

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
    • Journal Title

      Sensors and Actuators A 155(Physical)

      Pages: 98-112

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

    • Author(s)
      B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, et. al.
    • Journal Title

      Sensors and Actuators A 156-2(Physical)

      Pages: 334-341

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009

    • Author(s)
      M.A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura, K. Ishibashi
    • Journal Title

      J. Micromechanics and Microengineering 40896

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, et al.
    • Journal Title

      J. Microelectromechanical Systems 40712

      Pages: 1345-1356

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Complex three-dimensional structures in Si{100} using wet bulk micromachining2009

    • Author(s)
      Prem Pal, K.Sato
    • Journal Title

      Journal of Micromechanics and Microengineering 19-10

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Discrete and continuous cellular automata for the simulation of propagating surfaces2009

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
    • Journal Title

      Sensors and Actuators A, Physical 155

      Pages: 98-112

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

    • Author(s)
      B.Tang, Prem Pal, M.A.Gosalvez, M.Shikida, K.Sato, et al.
    • Journal Title

      Sensors and Actuators A, Physical 156-2

      Pages: 334-341

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions : Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009

    • Author(s)
      M.A.Gosalvez, B.Tang, Prem Pal, K.Sato, Y.Kimura, K.Ishibashi
    • Journal Title

      Journal of Micromechanics and Microengineering 19-12

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution : Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009

    • Author(s)
      Prem Pal, K.Sato, M.A. Gosalvez, Y. Kimura, K.Ishibashi, et al.
    • Journal Title

      Journal of Microelectromechanical Systems 18-6

      Pages: 1345-1356

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article]2009

    • Author(s)
      佐藤一雄(監修・分担執筆)
    • Journal Title

      マイクロ・ナノデバイスのエッチング技術((株)シーエムシー出版)

      Pages: 3-27

    • Related Report
      2009 Annual Research Report
  • [Journal Article]2009

    • Author(s)
      式田光宏(監修・分担執筆)
    • Journal Title

      マイクロ・ナノデバイスのエッチング技術((株)シーエムシー出版)

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

    • Author(s)
      Prem Pal, K.Sato, M.Shikida, M.A.Gosalvez
    • Journal Title

      Sensors and Actuators A, Physical 154-2

      Pages: 192-203

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Suspended Si microstructures over controlled depth micromachined cavities for MEMS based sensing devices2009

    • Author(s)
      Prem Pal, K.Sato
    • Journal Title

      Sensor Letters 7-1

      Pages: 11-16

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography2009

    • Author(s)
      Prem Pal, K.Sato
    • Journal Title

      Journal of Micromechanics and Microengineering 19-5

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article]2009

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      ドライ・ウエットエッチング技術全集((株)技術情報協会)

      Pages: 159-175

    • Related Report
      2008 Annual Research Report
  • [Journal Article]2009

    • Author(s)
      佐藤一雄(分担執筆)
    • Journal Title

      MEMS/NEMS工学全集((株)テクノシステム)

      Pages: 111-115

    • Related Report
      2008 Annual Research Report
  • [Journal Article]2009

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      MEMS/NEMS工学全集((株)テクノシステム)

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Effect of Cu impurities on wet etching of Si (110): formation of trapezoidal hillocks2008

    • Author(s)
      T. Hynninen, M.A. Gosalvez, A.S. Foster, H. Tanaka, K. Sato
    • Journal Title

      New Journal of Physics 10

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Analytical solution of the Continuous Cellular Automaton for anisotropic etching2008

    • Author(s)
      M.A. Gosalvez, Y, Xing, K. Sato
    • Journal Title

      J. Microelectromechanical Systems 40591

      Pages: 410-431

    • NAID

      120001101515

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Atomistic methods for the simulation of evolving surface2008

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
    • Journal Title

      J. Micromechanics and Microengineering 40681

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M. Shikida
    • Journal Title

      ECS Transactions 40771

      Pages: 133-140

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a Quartz Tuning-Fork Probe with a Sharp Tip for AFM Systems2008

    • Author(s)
      H. Hida, M. Shikida, K. Fukuzawa, S. Murakami, Ke. Sato, K. Asaumi, Y. Iriye, Ka. Sato
    • Journal Title

      Sensors and Actuators A 148-1(Physical)

      Pages: 311-318

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si2008

    • Author(s)
      Hynninen, A.S. Foster, M.A. Gosalvez, K. Sato, et. al.
    • Journal Title

      J. Physics: Condensed Matter 20

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Atomistic methods for the simulation of evolving surface2008

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
    • Journal Title

      Journal of Micromechanics and Microengineering 18-5

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, K.Sato, M.Shikida
    • Journal Title

      ECS Transactions 16-8

      Pages: 133-140

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a Quartz Tuning-Fork Probe with a Sharp Tip for AFM Systems2008

    • Author(s)
      H.Hida, M.Shikida, K.Fukuzawa, S.Murakami, et al.
    • Journal Title

      Sensors and Actuators A, Physical 148-1

      Pages: 311-318

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si2008

    • Author(s)
      T.Hynninen, A.S.Foster, M.A.Gosalvez, K.Sato, et al.
    • Journal Title

      Journal of Physics : Condensed Matter 20

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article]2008

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      薄膜ハンドブック第2版((株)オーム社)

      Pages: 1089-1091

    • Related Report
      2008 Annual Research Report
  • [Journal Article]2008

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      ウェットエッチングのメカニズムと処理パラメータの最適化(サイエンス&テクノロジー(株))

      Pages: 67-91

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Effect of Cu impurities on wet etching of Si(110):formation of trapezoidal hillocks2008

    • Author(s)
      T. Hynninen, M. A. Gosalvez, A. S. Foster, H. Tanaka, and K. Sato
    • Journal Title

      New Journal of Physics vol.10電子ジャーナル#13033

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analytical solution of the Continuous Cellular Automaton for anisotropic etching2008

    • Author(s)
      M. A. Gosalvez, Y, Xing, and K. Sato
    • Journal Title

      Journal of Microelectromechanical Systems (印刷中)

    • NAID

      120001101515

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An atomistic introduction to anisotropic etching2007

    • Author(s)
      M.A. Gosalvez, K. Sato, A. Foster, et. al
    • Journal Title

      J. Micromechanics and Microengineering 40650

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si (110)2007

    • Author(s)
      M.A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A. Foster, R. Nieminen, K. Sato
    • Journal Title

      J. Micromechanics and Microengineering 40650

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication techniques of convex comers in a (100)-silicon wafer using bulk micromachining: a review2007

    • Author(s)
      Prem Pal, K. Sato, Sudhir Chandra
    • Journal Title

      J. Micromechanics and Microengineering 40833

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Journal Title

      J. Micromechanics and Microengineering 40864

      Pages: 2299-2307

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] First-principles calculations of Cu adsorption on an H-terminated Si surface2007

    • Author(s)
      A.S. Foster, M.A. Gosalvez, T. Hynninen, R.M. Nieminen, K. Sato
    • Journal Title

      Physical Review B 27942

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures2007

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato
    • Journal Title

      New Journal of Physics 9

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] An atomistic introduction to anisotropic etching2007

    • Author(s)
      M. A. Gosalvez, K. Sato, A. Fostee, et. al.
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17,no.4

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Faster simulations of step bunching during anisotropic etching:formation of zigzag structures on Si(110)2007

    • Author(s)
      M. A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A. Foster, R. Nieminen and K. Sato
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17,no.4

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication techniques of convex comers in a(100)-silicon wafer using bulk micromachining: a review2007

    • Author(s)
      Prem Pal, K. Sato and Sudhir Chandra
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17

      Pages: 2299-2307

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First-principles calculations of Cu adsorption on an H-terminated Si surface2007

    • Author(s)
      A. S. Foster, M. A. Gosalvez, T. Hynninen, R. M. Nieminen, and K. Sato
    • Journal Title

      Physical Review B vol.76,no.7論文#075315

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures2007

    • Author(s)
      Y. Xing, M. A. Gosalvez and K. Sato
    • Journal Title

      New Journal of Physics vol.9電子ジャーナル#436

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Advanced MEMS applications using orientation dependent adsorption of surfactant molecules in TMAH solution2010

    • Author(s)
      Pram Pal, K. Sato, M.A. Gosalvez, B. Tang, H. Hida
    • Organizer
      5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT)
    • Place of Presentation
      Perth, Australia(accepted Feb)
    • Year and Date
      2010-06-09
    • Related Report
      2009 Final Research Report
  • [Presentation] Advanced MEMS applications using orientation dependent adsorption of surfactant molecules in TMAH solution2010

    • Author(s)
      Pram Pal, K.Sato, M.A.Gosalvez, B.Tang, H.Hida
    • Organizer
      5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), accepted Feb. '10
    • Place of Presentation
      Perth, Australia
    • Year and Date
      2010-06-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication Methods Based on Wet Bulk Micromachining for the Realization of Advanced MEMS Structures2009

    • Author(s)
      Prem Pal, K. Sato
    • Organizer
      15th Intl. Workshop on the Physics of Semiconductor Devices
    • Place of Presentation
      New Delhi, India
    • Year and Date
      2009-12-15
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] dvanced wet etch bulk micromachining in {100} silicon wafers2009

    • Author(s)
      Prem Pal, K. Sato
    • Organizer
      2009 MRS Fall Meeting
    • Place of Presentation
      Boston, USA
    • Year and Date
      2009-11-30
    • Related Report
      2009 Final Research Report
  • [Presentation] Advanced wet etch bulk micromachining in {100} silicon wafers2009

    • Author(s)
      Prem Pal, K.Sato
    • Organizer
      2009 MRS Fall Meeting
    • Place of Presentation
      Boston, USA
    • Year and Date
      2009-11-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Wet etched complex three dimensional MEMS structures2009

    • Author(s)
      Prem Pal, K. Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋市
    • Year and Date
      2009-11-08
    • Related Report
      2009 Final Research Report
  • [Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009

    • Author(s)
      B. Tang, M.A. Gosalvez, Prem Pal, S. Itoh, H. Hida, M. Shikida, K. Sato
    • Organizer
      ntl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋市
    • Year and Date
      2009-11-08
    • Related Report
      2009 Final Research Report
  • [Presentation] Continuous Cellular Automaton for the propagation of advancing fronts featuring surface morphologies: Realistic simulation of wet etching for MEMS applications2009

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋市
    • Year and Date
      2009-11-08
    • Related Report
      2009 Final Research Report
  • [Presentation] Wet etched complex three dimensional MEMS structures2009

    • Author(s)
      Prem Pal, K.Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009

    • Author(s)
      B.Tang, M.A.Gosalvez, Prem Pal, S.Itoh, H.Hida, M.Shikida, K.Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Continuous Cellular Automaton for the propagation of advancing fronts featuring surface morphologies : Realistic simulation of wet etching for MEMS applications2009

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching2009

    • Author(s)
      Prem Pal, K. Sato
    • Organizer
      日本機械学会マイクロ・ナノ工学専門会議第1回シンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2009-10-15
    • Related Report
      2009 Final Research Report
  • [Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, H. Hida, B. Tang, S. Ito, Y. Kimura, K. Ishibashi, M. Niwano
    • Organizer
      第26回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2009-10-15
    • Related Report
      2009 Final Research Report
  • [Presentation] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching2009

    • Author(s)
      Prem Pal, K.Sato
    • Organizer
      日本機械学会マイクロ・ナノ工学専門会議第1回シンポジウム
    • Place of Presentation
      東京 タワーホール船堀
    • Year and Date
      2009-10-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009

    • Author(s)
      Prem Pal, K.Sato, M.A.Gosalvez, H.Hida, B.Tang, S.Ito, Y.Kimura, K.Ishibashi, M.Niwano
    • Organizer
      第26回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京 タワーホール船堀
    • Year and Date
      2009-10-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] Anisotropic nature of Si surface during wet alkaline etching; Effects of cations and surfactants2009

    • Author(s)
      K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal, Y. Kimura
    • Organizer
      The 5th International Colloquium, Micro-Tribology
    • Place of Presentation
      Milowka, Poland
    • Year and Date
      2009-09-20
    • Related Report
      2009 Final Research Report
  • [Presentation] Anisotropic nature of Si surface during wet alkaline etching ; Effects of cations and surfactants2009

    • Author(s)
      K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal, Y.Kimura
    • Organizer
      The 5th International Colloquium, Micro-Tribology
    • Place of Presentation
      Milowka, Poland
    • Year and Date
      2009-09-20
    • Related Report
      2008 Annual Research Report
  • [Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures2009

    • Author(s)
      K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal
    • Organizer
      Intl. Conf. on Materials for Advanced Technologies
    • Place of Presentation
      Singapore
    • Year and Date
      2009-06-28
    • Related Report
      2009 Final Research Report
  • [Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures(invited)2009

    • Author(s)
      K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal
    • Organizer
      Intl.Conf.on Materials for Advanced Technologies
    • Place of Presentation
      Singapore
    • Year and Date
      2009-06-28
    • Related Report
      2008 Annual Research Report
  • [Presentation] Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching2009

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato
    • Organizer
      15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
    • Place of Presentation
      Denver, USA(Transducers)
    • Year and Date
      2009-06-21
    • Related Report
      2009 Final Research Report
  • [Presentation] Surfactant in TMAH for new shapes of silicon MEMS components; its orientation dependent adsorption detected by infrared spectroscopy2009

    • Author(s)
      Prem. Pal, K. Sato, H. Hida, M.A. Gosalvez, Y. Kimura, et. al.
    • Organizer
      15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
    • Place of Presentation
      Denver, USA(Transducers)
    • Year and Date
      2009-06-21
    • Related Report
      2009 Final Research Report
  • [Presentation] Selective removal of micro-corrugation by anisotropic wet etching2009

    • Author(s)
      N. Inagaki, H. Sasaki, M. Shikida, K. Sato
    • Organizer
      15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
    • Place of Presentation
      Denver, USA(Transducers)
    • Year and Date
      2009-06-21
    • Related Report
      2009 Final Research Report
  • [Presentation] Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching2009

    • Author(s)
      Y.Xing, M.A.Gosalvez, K.Sato
    • Organizer
      15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-21
    • Related Report
      2008 Annual Research Report
  • [Presentation] Surfactant in TMAH for new shapes of silicon MEMS components ; its orientation dependent adsorption detected by infrared spectroscopy2009

    • Author(s)
      Prem.Pal, K.Sato, H.Hida, M.A.Gosalvez, Y.Kimura, et al.
    • Organizer
      15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-21
    • Related Report
      2008 Annual Research Report
  • [Presentation] Selective removal of micro-corrugation by anisotropic wet etching2009

    • Author(s)
      稲垣徳幸, 佐々木光, 式田光宏, 佐藤一雄
    • Organizer
      15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-21
    • Related Report
      2008 Annual Research Report
  • [Presentation] Science in MEMS: A Plenty of room for multidisciplinary research2009

    • Author(s)
      K. Sato
    • Organizer
      JSME-IIP/ASME-ISPS Joint Conf. Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      つくば市
    • Year and Date
      2009-06-17
    • Related Report
      2009 Final Research Report
  • [Presentation] Science in MEMS : A Plenty of Room for Multidisciplinary Research(keynote)2009

    • Author(s)
      佐藤一雄
    • Organizer
      JSME-IIP/ASME-ISPS Joint Conf.Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      つくば市 国際会議場
    • Year and Date
      2009-06-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] Silicon microfluidic channels and microstructures by one step photolithography2009

    • Author(s)
      Prem Pal, K. Sato
    • Organizer
      Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
    • Place of Presentation
      Rome
    • Year and Date
      2009-04-01
    • Related Report
      2009 Final Research Report
  • [Presentation] Silicon microfluidic channels and microstructures by one step photolithography2009

    • Author(s)
      Prem Pal, 佐藤一雄
    • Organizer
      Symp.on Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP)
    • Place of Presentation
      Rome, Italy
    • Year and Date
      2009-04-01
    • Related Report
      2008 Annual Research Report
  • [Presentation] Micromachined sealed cavities by silicon wafer bonding for the formation of microstructures of desired thickness using TMAH etching2008

    • Author(s)
      Prem Pal, K. Sato
    • Organizer
      ntl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋市
    • Year and Date
      2008-11-06
    • Related Report
      2009 Final Research Report
  • [Presentation] Micromachined sealed cavities by silicon wafer bonding for the formation of microstructures of desired thickness using TMAH etching2008

    • Author(s)
      Prem Pal, 佐藤一雄
    • Organizer
      Intl.Symp.on Micro-NanoMechatronics and Human Science(MHS)
    • Place of Presentation
      名古屋市 名古屋大学
    • Year and Date
      2008-11-06
    • Related Report
      2008 Annual Research Report
  • [Presentation] A comparative study of non-ionic surfactants in TMAH for conformal wet anisotropic etching on (100)-Si wafers2008

    • Author(s)
      Prem Pal, K. Sato
    • Organizer
      第25回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      那覇市
    • Year and Date
      2008-10-22
    • Related Report
      2009 Final Research Report
  • [Presentation] A comparative study of non-ionic surfactants in TMAH for conformal wet anisotropic etching on(100)-Si wafers2008

    • Author(s)
      Prem Pal, 佐藤一雄
    • Organizer
      第25回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      宜野湾市 沖縄コンベンションセンター
    • Year and Date
      2008-10-22
    • Related Report
      2008 Annual Research Report
  • [Presentation] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M. Shikida
    • Organizer
      PRiME'08 214th ECS Meeting
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-10-12
    • Related Report
      2009 Final Research Report
  • [Presentation] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, 佐藤一雄, 式田光宏
    • Organizer
      PRiME'08 214th ECS Meeting
    • Place of Presentation
      Honolulu, Hawaii
    • Year and Date
      2008-10-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] memsのサイエンス-単結晶シリコンのエッチング特性, 機械特性の新知見2008

    • Author(s)
      佐藤一雄
    • Organizer
      応用物理学会第129回結晶工学分科会研究会
    • Place of Presentation
      京都市
    • Year and Date
      2008-07-02
    • Related Report
      2009 Final Research Report
  • [Presentation] MEMSのサイエンス--単結晶シリコンのエッチング特性, 機械特性の新知見(招待講演)2008

    • Author(s)
      佐藤一雄
    • Organizer
      応用物理学会第129回結晶工学分科会研究会
    • Place of Presentation
      京都市 キャンパスプラザ京都
    • Year and Date
      2008-07-02
    • Related Report
      2008 Annual Research Report
  • [Presentation] 結晶異方性ウェットエッチングによるスキャロッピングの選択除去に関する研究2008

    • Author(s)
      稲垣徳幸, 佐々木光, Prem Pal, 式田光宏, 佐藤一雄
    • Organizer
      電気学会センサ・マイクロマシン部門研究会
    • Place of Presentation
      仙台市
    • Year and Date
      2008-06-12
    • Related Report
      2009 Final Research Report
  • [Presentation] 結晶異方性ウェットエッチングによるスキャロッピングの選択除去に関する研究2008

    • Author(s)
      稲垣徳幸, 佐々木光, Prem Pal, 式田光宏, 佐藤一雄
    • Organizer
      電気学会センサ・マイクロマシン部門研究会
    • Place of Presentation
      仙台市 戦災復興記念館
    • Year and Date
      2008-06-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Gosalvez and M. Shikida, Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      SPIE MOEMS-MEMS (Proc. SPIE Vol. 6882)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2008-01-19
    • Related Report
      2009 Final Research Report
  • [Presentation] Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      SPIE MOEMS-MEMS(Proc. SPIE Vol.6882)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2008-01-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures2008

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato
    • Organizer
      IEEE Intl. Conf. MEMS08
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Related Report
      2009 Final Research Report
  • [Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      IEEE Intl. Conf. MEMS08
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Related Report
      2009 Final Research Report
  • [Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      IEEE Intl. Conf. MEMS08, p327-330
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures2008

    • Author(s)
      Y. Xing, M. A. Gosalvez and K. Sato
    • Organizer
      IEEE Intl. Conf. MEMS08, p323-326
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] Novel wet anisotropic etching process for the realization of new shapes of silicon MEMS structures2007

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      IEEE Intl. Conf. MHS07 & Micro-Nano COE
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-11-13
    • Related Report
      2009 Final Research Report
  • [Presentation] Novel wet anisotropic etching process for the realization of new shapesof silicon MEMS structures2007

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      IEEE Intl. Conf. MHS07 & Micro-Nano COE, p499-504
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-11-13
    • Related Report
      2007 Annual Research Report
  • [Book] Handbook of Silicon Based MEMS Materials and Technologies2010

    • Author(s)
      M. A. Gosalvez(分担執筆)
    • Publisher
      Elsevier
    • Related Report
      2009 Final Research Report
  • [Book] ドライ・ウエットエッチング技術全集2009

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      (株)技術情報協会
    • Related Report
      2009 Final Research Report
  • [Book] MEMS/NEMS工学全集2009

    • Author(s)
      佐藤一雄(分担執筆)
    • Publisher
      (株)テクノシステム
    • Related Report
      2009 Final Research Report
  • [Book] MEMS/NEMS工学全集2009

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      (株)テクノシステム
    • Related Report
      2009 Final Research Report
  • [Book] マイクロ・ナノデバイスのエッチング技術2009

    • Author(s)
      佐藤一雄(監修・分担執筆)
    • Publisher
      (株)シーエムシー出版
    • Related Report
      2009 Final Research Report
  • [Book] マイクロ・ナノデバイスのエッチング技術2009

    • Author(s)
      式田光宏(監修・分担執筆)
    • Publisher
      (株)シーエムシー出版
    • Related Report
      2009 Final Research Report
  • [Book] 薄膜ハンドブック第2版2008

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      (株)オーム社
    • Related Report
      2009 Final Research Report
  • [Book] ウェットエッチングのメカニズムと処理パラメータの最適化2008

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      サイエンス&テクノロジー(株)
    • Related Report
      2009 Final Research Report
  • [Book] Comprehensive Microsystems Vol. 1(Wet etching)2007

    • Author(s)
      K. Sato, M. Shikida (分担執筆)
    • Publisher
      Elsevier
    • Related Report
      2009 Final Research Report
  • [Book] Comprehensive Microsystems Uol.1, Wet etching2007

    • Author(s)
      K. Sato, M. Shikida(分担執筆)
    • Publisher
      Elsevier Ltd
    • Related Report
      2007 Annual Research Report
  • [Remarks] 佐藤一雄:MEMSデバイスの技術と応用,(社)日本技術士会中部支部春季例会,ウインク愛知(2010.3.27)

    • Related Report
      2009 Final Research Report
  • [Remarks] 佐藤一雄:MEMSに科学を:シリコン結晶異方性エッチングの物理化学,第2回名古屋大学高等研究院セミナー,名古屋大学シンポジオンホール,(2010.1.15)

    • Related Report
      2009 Final Research Report
  • [Remarks] 学術雑誌“Nature"名古屋大学研究紹介に登場.Spotlight on Nagoya, Nature, 461, 8 Oct. 2009

    • Related Report
      2009 Final Research Report
  • [Remarks] 佐藤一雄:MEMS入門:岐阜県立中津高校サマーセミナー,名古屋大学(2009.8.5)

    • Related Report
      2009 Final Research Report
  • [Remarks]

    • URL

      http://www.mech.nagoya-u.ac.jp/mems/

    • Related Report
      2009 Final Research Report
  • [Remarks]

    • URL

      http://www.mech.nagoya-u.ac.jp/mems/

    • Related Report
      2009 Annual Research Report
  • [Remarks]

    • URL

      http://www.mech.nagoya-u.ac.jp/mems/

    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://www.kaz.mech.nagoya-u.ac.jp/

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] シリコン微細構造体の製造方法2010

    • Inventor(s)
      佐藤一雄, Prem Pal
    • Industrial Property Rights Holder
      名古屋大学
    • Industrial Property Number
      2009-172553
    • Filing Date
      2010-07-23
    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] シリコン微細構造体の製造方法及び微細流路デバイスの製造方法2009

    • Inventor(s)
      佐藤一雄, Prem Pal
    • Industrial Property Rights Holder
      名古屋大学
    • Industrial Property Number
      2008-312338
    • Filing Date
      2009-12-08
    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] シリコン微細構造体の製造方法2009

    • Inventor(s)
      佐藤一雄, Prem Pal
    • Industrial Property Rights Holder
      名古屋大学
    • Industrial Property Number
      2009-172553
    • Filing Date
      2009-07-23
    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] シリコン微細構造体の製造方法及び微細流路デバイスの製造方法2008

    • Inventor(s)
      佐藤一雄, Prem Pal
    • Industrial Property Rights Holder
      名古屋大学
    • Industrial Property Number
      2008-312338
    • Filing Date
      2008-12-08
    • Related Report
      2008 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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