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A Newly Developed of Advanced Nano-pattern Generator with Large Work Area (ANGEL) and Investigation on the Nano-machinability

Research Project

Project/Area Number 19206017
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

SHINNO Hidenori  Tokyo Institute of Technology, 精密工学研究所, 教授 (40196639)

Co-Investigator(Kenkyū-buntansha) YOSHIOKA Hayato  東京工業大学, 精密工学研究所, 准教授 (90361758)
SAWANO Hiroshi  東京工業大学, 精密工学研究所, 助教 (40514295)
Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥48,490,000 (Direct Cost: ¥37,300,000、Indirect Cost: ¥11,190,000)
Fiscal Year 2008: ¥28,210,000 (Direct Cost: ¥21,700,000、Indirect Cost: ¥6,510,000)
Fiscal Year 2007: ¥20,280,000 (Direct Cost: ¥15,600,000、Indirect Cost: ¥4,680,000)
Keywordsマザーマシン / ナノ加工 / ナノ加工特性 / ナノモーション制御 / 微細形状創成 / 超精密加工システム / ナノ位置決め / 多軸同時制御 / ナノパターン / ナノメートル位置決め / 超精密加工 / 高安定構造 / 超微細加工 / ナノ運動制御
Research Abstract

本研究では先端科学技術分野で重要となる広領域を対象とする超精密加工を実現するため,広域ナノパターンジェネレータ(ANGEL) と称する超精密加工システムの開発を行なっている.システムを構成する機構部,センサ部,制御部などの各構成要素は,理想的な構造を実現するために新たに開発したものである.開発した加工システムの性能評価を行なった結果,加工対象表面に所要のナノメートルオーダの微細加工を実現可能であることを確認している.

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (42 results)

All 2009 2008 2007 Other

All Journal Article (23 results) (of which Peer Reviewed: 14 results) Presentation (15 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] A High Performance Tilting Platform Driven by Hybrid Actuator2009

    • Author(s)
      Hidenori SHINNO, Hatato YOSHIOKA, Mamoru HAYASHI
    • Journal Title

      Annals of the CIRP(Annals of the International Academy for Production Engineering) Vol.58 No.1

      Pages: 363-366

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] マイクロ温度センサを用いた超精密切削加工の適応制御2009

    • Author(s)
      吉岡勇人
    • Journal Title

      日本機械学会誌 Vol.112

      Pages: 143-143

    • NAID

      110007081493

    • Related Report
      2008 Final Research Report
  • [Journal Article] 超精密加工機「ANGEL」の特徴と今後の展開2009

    • Author(s)
      吉岡勇人, 新野秀憲
    • Journal Title

      型技術 Vol.24

      Pages: 103-106

    • NAID

      40016576140

    • Related Report
      2008 Final Research Report
  • [Journal Article] 特集 未来技術 【超精密加工機"ANGEL"】2009

    • Author(s)
      新野秀憲, 吉岡勇人
    • Journal Title

      生産財マーケティン Vol.46

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] マイクロ温度センサを用いた超精密切削加工の適応制御2009

    • Author(s)
      吉岡勇人
    • Journal Title

      日本機械学会誌 112

      Pages: 143-143

    • NAID

      110007081493

    • Related Report
      2008 Annual Research Report
  • [Journal Article] 超精密加工機「ANGEL」の特徴と今後の展開2009

    • Author(s)
      吉岡勇人, 新野秀憲
    • Journal Title

      型技術 24

      Pages: 103-106

    • NAID

      40016576140

    • Related Report
      2008 Annual Research Report
  • [Journal Article] 特集未来技術【超精密加工機"ANGEL"】.2009

    • Author(s)
      新野秀憲, 吉岡勇人.
    • Journal Title

      生産財マーケティング 46

    • Related Report
      2008 Annual Research Report
  • [Journal Article] 集束イオンビームによる硬ぜい性材料のナノ加工に関する研究2008

    • Author(s)
      高橋信彦, 吉岡勇人, 新野秀憲
    • Journal Title

      精密工学会誌 Vol.74

      Pages: 491-497

    • NAID

      110006668362

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design and Nanomotion Control of a Noncontact Stage with Squeeze Bearings2008

    • Author(s)
      Hayato YOSHIOKA, Toshimichi GOKAN, Hidenori SHINNO
    • Journal Title

      International Journal of Automation Technology Vol.2

      Pages: 18-23

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 完全非接触XY平面位置決めテーブルを用いた微細加工2008

    • Author(s)
      吉岡勇人
    • Journal Title

      日本機械学会誌 Vol.111

      Pages: 129-129

    • Related Report
      2008 Final Research Report
  • [Journal Article] A Newly Developed Long Stroke Vertical Nano-Motion Platform with Gravity Compensation2008

    • Author(s)
      M. Takahashi, H. Yoshioka, H. Shinno
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing Vol.2

      Pages: 356-365

    • NAID

      130000080808

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] An Adaptive Control of Ultraprecision Machining with an In-Process Micro- Sensor2008

    • Author(s)
      M. Hayashi, H. Yoshioka, H. Shinno
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing Vol.2

      Pages: 322-331

    • NAID

      130000080810

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] A Newly Developed Long Stroke Vertical Nano-Motion Platform with Gravity Compensation2008

    • Author(s)
      M. Takahashi, H. Yoshioka, H. Shinno
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing 2

      Pages: 356-365

    • NAID

      130000080808

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An Adaptive Control of Ultraprecision Machining with an In-Process Micro-Sensor2008

    • Author(s)
      M. Hayashi, H. Yoshioka, H. Shnno
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing 2

      Pages: 322-331

    • NAID

      130000080810

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 集束イオンビームによる硬ぜい性材料のナノ加工に関する研究2008

    • Author(s)
      高橋信彦, 吉岡勇人よ新野秀憲
    • Journal Title

      精密工学会誌 74

      Pages: 491-497

    • NAID

      110006668362

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design and Nanomotion Control of a Noncontact Stage with Squeeze Bearings2008

    • Author(s)
      Hayato YOSHIOKA, Toshimichi GOKAN, Hidenori SHINNO
    • Journal Title

      International Journal of Automation Techonology 2

      Pages: 18-23

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 完全非接触XY平面位置決めテーブルを用いた微細加工2008

    • Author(s)
      吉岡勇人
    • Journal Title

      日本機械学会誌 111

      Pages: 129-129

    • Related Report
      2007 Annual Research Report
  • [Journal Article] A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining2007

    • Author(s)
      Hidenori SHINNO, Hayato YOSHIOKA, Koichi TANIGUCHI
    • Journal Title

      Annals of the CIRP(Annals of the International Academy for Production Engineering) Vol.56, No.1

      Pages: 369-327

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 油空圧機器と超精密加工技術-流体制御技術の適用による3次元ナノ加工の実現-2007

    • Author(s)
      新野秀憲, 吉岡勇人
    • Journal Title

      油空圧技術 Vol.47

      Pages: 1-6

    • Related Report
      2008 Final Research Report
  • [Journal Article] 超精密加工機のハードウエア技術2007

    • Author(s)
      新野秀憲, 吉岡勇人
    • Journal Title

      機械の研究 Vol.60

      Pages: 67-72

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining2007

    • Author(s)
      Hidenori SHINNO, Hayato YOSHIOKA, Koichi TANIGUCHI
    • Journal Title

      Annals of the CIRP (Annals of the International Academy for Production Engineering) 56

      Pages: 369-372

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 油空圧機器と超精密加工技術=流体制御技術の適用による3次元ナノ加工の実現=2007

    • Author(s)
      新野秀憲, 吉岡勇人
    • Journal Title

      油空圧技術 47

      Pages: 1-6

    • Related Report
      2007 Annual Research Report
  • [Journal Article] 超精密加工機のハードウエア技術2007

    • Author(s)
      新野秀憲, 吉岡勇人
    • Journal Title

      機械の研究 60

      Pages: 67-72

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Ultraprecision Machining System for Fabricating Nano-Devices2009

    • Author(s)
      M. Takahashi, H. Yoshioka, H. Shinno
    • Organizer
      The 9th euspen International Conference
    • Place of Presentation
      スペイン・サンセバスチャン
    • Year and Date
      2009-06-04
    • Related Report
      2008 Final Research Report
  • [Presentation] High Torque and High Precision Rotary Table System Driven by Hybrid Actuator2009

    • Author(s)
      M. Hayashi, H. Yoshioka, H. Shinno
    • Organizer
      The 9th euspen International Conference
    • Place of Presentation
      スペイン・サンセバスチャン
    • Year and Date
      2009-06-04
    • Related Report
      2008 Final Research Report
  • [Presentation] ハイブリッドアクチュエータを用いた高トルク高精度回転機構の開発2008

    • Author(s)
      林遵, 吉岡勇人, 新野秀憲
    • Organizer
      第7回日本機械学会生産加工・工作機械部門講演会
    • Place of Presentation
      岐阜県・長良川国際会議場
    • Year and Date
      2008-11-22
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Adaptive Control for Ultraprecision Machining Using an In-Process Micro Thermosensor2008

    • Author(s)
      Hayato YOSHIOKA, Mamoru HAYASHI, Hidenori SHINNO
    • Organizer
      The 13th International Machine Tool Engineers' Conference
    • Place of Presentation
      東京・東京ビッグサイト
    • Year and Date
      2008-10-30
    • Related Report
      2008 Final Research Report
  • [Presentation] Vertical Nano- Positioning Stage with Noncontact Gravity Compensator2008

    • Author(s)
      H. SHINNO, M. TAKAHASHI, H. YOSHIOKA
    • Organizer
      The 13th International Machine Tool Engineers' Conference
    • Place of Presentation
      東京・東京ビッグサイト
    • Year and Date
      2008-10-30
    • Related Report
      2008 Final Research Report
  • [Presentation] Adaptive Control for Ultraprecision Machining Using an In-Process Micro Thermosensor.2008

    • Author(s)
      Hayato YOSHIOKA, Mamoru HAYASHI, Hidenori SHINNO.
    • Organizer
      The 13th International Machine Tool Engineers' Conference
    • Place of Presentation
      東京・東京ビッグサイト
    • Year and Date
      2008-10-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Vertical Nano-Positioning Stage with Noncontact Gravity Compensator.2008

    • Author(s)
      Hidenori SHINNO, Motohiro TAKAHASHI, Hayato YOSHIOKA.
    • Organizer
      The 13th International Machine Tool Engineers' Conference
    • Place of Presentation
      東京・東京ビッグサイト
    • Year and Date
      2008-10-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Vertical Nano-Positioning System for Precision Machine2008

    • Author(s)
      H. Yoshioka, M. Takahashi, H.Shinno
    • Organizer
      The 8th euspen International Conference
    • Place of Presentation
      スイス・チューリッヒ
    • Year and Date
      2008-05-20
    • Related Report
      2008 Final Research Report
  • [Presentation] Vertical Nano-Positioning System for Precision Machine2008

    • Author(s)
      H. Yoshioka, M. Takahashi, H. Shinno
    • Organizer
      8th euspen International Conference
    • Place of Presentation
      スイス・チューリッヒ
    • Year and Date
      2008-05-20
    • Related Report
      2008 Annual Research Report
  • [Presentation] An Adaptive Control of Ultraprecision Machining with an In-Process Micro-Sensor2007

    • Author(s)
      Mamoru HAYASHI, Hayato YOSHIOKA, Hidenori SHINNO
    • Organizer
      The 4th International conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2007-11-07
    • Related Report
      2008 Final Research Report
  • [Presentation] A Newly Developed Compact Nano-Positioning Table System Using Squeeze Bearing2007

    • Author(s)
      Toshimichi GOKAN, Hayato YOSHIOKA, Hidenori SHINNO
    • Organizer
      The 4th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2007-11-07
    • Related Report
      2008 Final Research Report
  • [Presentation] Vertical Nano-Positioning System with Gravity Compensator2007

    • Author(s)
      Motohiro TAKAHASHI, Hayato YOSHIOKA, Hidenori SHINNO
    • Organizer
      The 4th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2007-11-07
    • Related Report
      2008 Final Research Report
  • [Presentation] Vertical Nano-Positioning System with Gravity Compensator2007

    • Author(s)
      Motohiro TAKAHASHI, Hayato YOSHIOKA, Hidenori SHINNO
    • Organizer
      The 4th International conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2007-11-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] A Newly Developed Compact Nano-Positioning Table System Using Squeeze Bearing2007

    • Author(s)
      Toshimichi GOKAN, Hayato YOSHIOKA, Hidenori SHINNO
    • Organizer
      The 4th International conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2007-11-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] An Adaptive Control of Ultraprecision Machining with an In-Process Micro-Sensor2007

    • Author(s)
      Mamoru HAYASHI, Hayato YOSHIOKA, Hidenori SHINNO
    • Organizer
      The 4th International conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2007-11-07
    • Related Report
      2007 Annual Research Report
  • [Remarks] "1 ナノメートル分解能持つ切削加工機開発東工大完全非接触の機械構造",p.14,科学技術・大学欄,日刊工業新聞 朝刊,2008年11月24 日

    • Related Report
      2008 Final Research Report
  • [Remarks] "加工機向け駆動装置重量物,高精度に保持東工大 1万分の1度で制御",p.22,科学技術欄,日刊工業新聞朝刊,2009年4月10 日

    • Related Report
      2008 Final Research Report
  • [Patent(Industrial Property Rights)] ロータリアクチュエータ2009

    • Inventor(s)
      吉岡勇人, 新野秀憲, 林遵
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2009-042043
    • Filing Date
      2009-02-25
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Patent(Industrial Property Rights)] 重力補償機構及びそれを用いる鉛直方向位置決め装置2007

    • Inventor(s)
      吉岡勇人, 新野秀憲
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2007-194124
    • Filing Date
      2007-07-27
    • Related Report
      2008 Final Research Report 2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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