PRODUCTION OF 3D-NANO-STRUCTURES BY MICRO-FABRICATION WITH DIRECT EXPOSURE OF HIGH-ENERGY ION BEAMS
| Project/Area Number |
19206105
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Nuclear engineering
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| Research Institution | Japan Atomic Energy Agency |
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Principal Investigator |
KAMIYA Tomihiro Japan Atomic Energy Agency, 放射線高度利用施設部, 課長 (70370385)
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| Co-Investigator(Kenkyū-buntansha) |
NISHIKAWA Hiroyuki 芝浦工業大学, 工学部, 教授 (40247226)
SEKI Shuuhei 大阪大学, 大学院・工学研究科, 教授 (30273709)
SUGIMOTO Masaki 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (90354943)
ISHII Yasuyuki 独立行政法人日本原子力研究開発機構, 放射線高度利用施設部, 研究副主幹 (00343905)
SATOH Takahiro 独立行政法人日本原子力研究開発機構, 放射線高度利用施設部, 研究副主幹 (10370404)
OHKUBO Takeru 独立行政法人日本原子力研究開発機構, 放射線高度利用施設部, 研究職 (40446456)
芳賀 潤二 独立行政法人日本原子力研究開発機構, 放射線高度利用施設部, 出向職員 (00414566)
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| Project Period (FY) |
2007 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥45,890,000 (Direct Cost: ¥35,300,000、Indirect Cost: ¥10,590,000)
Fiscal Year 2010: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
Fiscal Year 2009: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Fiscal Year 2008: ¥16,120,000 (Direct Cost: ¥12,400,000、Indirect Cost: ¥3,720,000)
Fiscal Year 2007: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
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| Keywords | ナノデバイス / マイクロマシン / マイクロビーム / 3Dナノ構造創製 / マスクレ描画 / ナノ細線 / MEMS / イオンマイクロビーム / マスクレス多重露光 / SU-8レジスト / 遊星歯車構造 / シングルイオンヒット描画 / マスクレス露光 / レジスト / 高アスペクト比 / 空間分解能 |
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| Research Abstract |
3D nano-fabrication technology making the best use of the feature of the high energetic ion microbeam of MeV or more was developed for the nano-device or the micro-machine production. In this study, various microbeam systems, which we previously developed to have the features of high spatial resolution, of high-density local energy deposition and of long range, were utilized to establish a maskless multi-exposure technique for the ion beam lithography. We obtained the prospect for the creation of three dimensional micro-structures including nano-wires.
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Report
(6 results)
Research Products
(34 results)
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[Journal Article] Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA2009
Author(s)
T.Kamiya, K.Takano, Y.Ishii, T.Satoh, M.Oikawa, T.Ohkubo, J.Haga, H.Nishikawa, Y.Furuta, N.Uchiya, S.Seki, M.Sugimoto
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Journal Title
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 267
Pages: 2317-2320
Related Report
Peer Reviewed
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[Journal Article] Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA2009
Author(s)
Kamiya, T, Takano, K, Ishii, Y, Satoh, T, Oikawa, M, Ohkubo, T, Haga, J, Nishikawa, H, Furuta, Y, Uchiya, N, Seki, S, Sugimoto, M
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Journal Title
Nuclear Instruments and Methods in Physics Research B-Beam Interactions with Materials and Atoms 267
Pages: 2317-2320
Related Report
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[Journal Article] Development of micromachining technology in ion microbeam system at TIARA, JAEA2009
Author(s)
Kamiya, T, Nisikawa, H, Satoh, T, Haga, J, Oikawa, M, Ishii, Y, Ohkubo, T, Uchiya, N, Furuta
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Journal Title
Applied Radiation and Isotopes 67
Pages: 488-491
Related Report
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[Presentation] Preliminary Study of Micro Processing for Polymer Targets by MeV Proton Beam Writings2009
Author(s)
Takano, K, Satoh, T, Ishii, Y, Kamiya, T, Ohkubo, T, Sugimoto, M, Nishikawa, H, Seki, S
Organizer
16th International Conference on Surface Modification of Materials by Ion Beams
Place of Presentation
Odaiba, Tokyo
Related Report
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[Presentation] MeV級イオンマイクロビームを利用した微細加工2008
Author(s)
高野勝昌, 佐藤隆博, 石井保行, 神谷富裕, 大久保猛, 杉本雅樹, 西川宏之, 関修平
Organizer
第27回法政大学イオンビーム工学研究所シンポジウム
Place of Presentation
東京 (法政大学小金井キャンパス)
Year and Date
2008-12-10
Related Report
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[Presentation] イオンマイクロビームを用いた3次元描画2008
Author(s)
高野勝昌, 佐藤隆博, 石井保行, 神谷富裕, 大久保猛, 杉本雅樹
Organizer
第21回タンデム加速器およびその周辺技術の研究会
Place of Presentation
群馬県高崎市、原子力機構高崎
Year and Date
2008-07-31
Related Report
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