Development of Sequential Self-Assembly Technique for MEMS

• Project/Area Number: 19310088
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Microdevices/Nanodevices
• Research Institution: Kyoto University
• Principal Investigator: TABATA Osamu Kyoto University, 工学研究科, 教授 (20288624)
• Project Period (FY): 2007 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥19,890,000 (Direct Cost: ¥15,300,000、Indirect Cost: ¥4,590,000); Fiscal Year 2009: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000); Fiscal Year 2008: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000); Fiscal Year 2007: ¥13,000,000 (Direct Cost: ¥10,000,000、Indirect Cost: ¥3,000,000)
• Keywords: マイクロファブリケーション / セルフ・アセンブル / マイクロシステム / MEMS / 機能コンポーネント / DNA / セルフアセンブル / ナノコンポーネント / 自己組織化 / マニピュレーション / 光誘起誘電泳動

Research Abstract

A development of a sequential self-assembly (SSA) technique to assemble functional components on a micro electro mechanical systems (MEMS) by self-assembly with controlling the assembly order was carried out. Feasibility study of several different approaches such as a contact potential difference, optically induced dielectrophoresis, template assisted self-assembly, and DNA mediated self-assembly were performed. Furthermore, a new modeling method of self-assembly for the component size from millimeter to micrometer scale was proposed and its validity was confirmed experimentally. Consequently, DNA mediated SSA technique under controlled ambient temperature was proved to be the most promising approach.

Research Products

• [Journal Article] Micro/Nano Assembly as a Key to SENS (Synthetic Engineering for Nano Systems) (2008)
  • Author(s): Osamu Tabata
  • Journal Title: ECS Transactions Vol.16 Pages: 49-64
  • Peer Reviewed
• [Journal Article] DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル (2008)
  • Author(s): 日下部達哉, 種村友貴, 樋口雄一, 菅野公二, 土屋智由, 田畑修
  • Journal Title: 粉体工学会 45(3) Pages: 156-161
  • NAID: 10021172043
  • Peer Reviewed
• [Journal Article] DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル (2008)
  • Author(s): 日下部達哉, 種村友貴, 樋口雄一, 菅野公二, 土屋智由, 田畑
  • Journal Title: 粉体工学会 45 Pages: 156-161
  • NAID: 10021172043
  • Peer Reviewed
• [Journal Article] Micro/Nano Assembly as a Key to SENS (Synthetic Engineering for Nano Systems) (2008)
  • Author(s): Osamu Tabata
  • Journal Title: ECS Transactions 16 Pages: 49-64
  • Peer Reviewed
• [Journal Article] Versatile Method of Sub-Micro Particle Pattern Formation Using Self-Assembly and Two-Step Transfer (2007)
  • Author(s): Takashi Ozaki, Koji Sugano, Member, Toshiyuki Tsuchiya, Osamu Tabata
  • Journal Title: Journal of Microelectromechanical Systems 16(3) Pages: 746-752
  • Peer Reviewed
• [Journal Article] 2種類の液滴の界面張力を用いた逐次積層セルフアセンブル (2007)
  • Author(s): 樋口雄一, 菅野公二, 土屋智由, 田畑修
  • Journal Title: 電気学会センサ・マイクロマシン準部門誌 127-E(4) Pages: 214-220
  • NAID: 130000083853
  • Peer Reviewed
• [Journal Article] 2 種類の液滴の界面張力を用いた逐次積層セルフアセンブル (2007)
  • Author(s): 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修
  • Journal Title: 電気学会センサ・マイクロマシン準部門誌 127-E Pages: 1-9
  • NAID: 130000083853
  • Peer Reviewed
• [Journal Article] Versatile Method of Sub-Micro Particle Pattern Formation Using Self-Assembly and Two-Step Transfer (2007)
  • Author(s): Takashi Ozaki, Koji Sugano, Member, Toshiyuki Tsuchiya and
  • Journal Title: Journal of Microelectromechanical Systems 16 Pages: 746-752
  • Peer Reviewed
• [Presentation] DNA-Grafted-Polymer Mediated Self-Assembly of Micro Components (2010)
  • Author(s): G. Lopez, et al.
  • Organizer: The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
  • Place of Presentation: Xiamen, China
  • Year and Date: 2010-01-22
• [Presentation] Fabrication Platform for Configurable Nanosystem (2009)
  • Author(s): O. Tabata
  • Organizer: The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering
  • Place of Presentation: Tainan, Taiwan
  • Year and Date: 2009-10-19
• [Presentation] Modeling of Self-face-alignment Process Using Contact Potential Difference (2009)
  • Author(s): R. Sato, T. Tanemura, G. Lopez, M. Serry, K. Sugano, T. Tsuchiya, O. Tabata
  • Organizer: International Conference on Electronics Packaging
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2009-04-15
• [Presentation] SEQUENTIAL AND SELECTIVE SELF-ASSEMBLY OF MICRO COMPONENTS BY DNA GRAFTED POLYMER (2009)
  • Author(s): T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O.
  • Organizer: The 22nd IEEE International Conference on Micro Electro Mechanical Systems
  • Place of Presentation: Sorrento, Italy
  • Year and Date: 2009-01-29
• [Presentation] DNA as an Intelligent Adhesive for Self Assembly of Micro/Nano Components (2008)
  • Author(s): Osamu Tabata
  • Organizer: 2nd IEEE Int. Conf. on Nano/Molecular Medicine and Engineering
  • Place of Presentation: Suzhou, China
  • Year and Date: 2008-11-26
• [Presentation] ナノバイオ材料の自己組織化によるナノ・マイクロシステム構築 (2008)
  • Author(s): 田畑修
  • Organizer: 第4回オルガテクノ2008, オルカテクノビジネステクニカルセミナー
  • Place of Presentation: 東京
  • Year and Date: 2008-10-29
• [Presentation] Micro/Nano assembly as a key to SENS (Synthetic Engineering for Nano Systems) (2008)
  • Author(s): Osamu Tabata
  • Organizer: Pacific Rim Meeting on Electrochemical and Solid-state Science (PRiME2008)
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2008-10-13
• [Presentation] MEMSとナノテクノロジーのシームレス融合技術 -実装技術への期待と可能性- (2008)
  • Author(s): 田畑修
  • Organizer: エレクトロニクス実装学会
  • Place of Presentation: 京都
  • Year and Date: 2008-09-18
• [Presentation] Gold Nanoparticle Patterning using Combination of Self-Assembly and 2-Step Transfer (2008)
  • Author(s): Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata
  • Organizer: Application of Intelligent Particles and Sensors in Environmental and Process Engineering
  • Place of Presentation: Penang, Malaysia
  • Year and Date: 2008-08-24
• [Presentation] MEMS/MS and Assembly as Key Components and Technology for Advanced System (2008)
  • Author(s): Osamu Tabata
  • Organizer: The First Japan-Egypt International Symposium on Science and Technology (EJICST 2008)
  • Place of Presentation: Alexandria, Egypt
  • Year and Date: 2008-08-24
• [Presentation] セルフアセンブルによるマイクロ/ナノコンポーネントのMEMSへの集積化 (2008)
  • Author(s): 佐藤亮, 種村友貴, 菅野公二, 土屋智由, 田畑修
  • Organizer: エレクトロニクス実装学会関西ワークショップ
  • Place of Presentation: 大阪
  • Year and Date: 2008-07-11
• [Presentation] Contact Potential Difference for Face Alignment of Subniillimeter Components with Cheiical Reaction (2008)
  • Author(s): T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, I. Tsuchiya
  • Organizer: FNANO2008
  • Place of Presentation: Salt Lake, USA
  • Year and Date: 2008-04-25
• [Presentation] Micro/Nano assembly as a key to realize NEMS (2008)
  • Author(s): Osamu Tabata
  • Organizer: FNANO2008
  • Place of Presentation: Salt Lake, USA
  • Year and Date: 2008-04-25
• [Presentation] Particle Assembly as a Key Approach to Realize NEMS (2008)
  • Author(s): Osamu Tabata
  • Organizer: 17th APHS Seminar
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2008-04-12
• [Presentation] Micro/Nano assembly as a key technology for NEMS (2008)
  • Author(s): Osamu Tabata
  • Organizer: The 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
  • Place of Presentation: Hainan, China
  • Year and Date: 2008-01-15
• [Presentation] Manipulation system for nano/micro componentsintegration via transpotation and self-assembly (2008)
  • Author(s): Yuichi Higuchi, Tatsuya Kusakabe, Tomoki Tanemura, Koji Sugano,
  • Organizer: the 21st IEEE International Conference on Micro Electro Mechanical Systems
  • Place of Presentation: Tucson, USA
• [Presentation] Gold nanopatice patterning by self-assembly and tranferfor LSPR based sensing (2008)
  • Author(s): Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya and Osamu
  • Organizer: The 21st IEEE International Conference on Micro Electro Mechanical Systems
  • Place of Presentation: Tucson, USA
• [Presentation] DNA mediated seqential self-assembly of nano/microcomponents (2008)
  • Author(s): Tatsuya Kusakabe, Tomoki Tanemura, Yuichi Higuchi, Koji
  • Organizer: The 21st IEEE International Conference on Micro Electro Mechanical Systems
  • Place of Presentation: Tucson, USA
• [Presentation] Contact potential differnce for seqential assembly and face alignment of submillimater components (2008)
  • Author(s): Tomoki Tanemura, Yuichi Higuchi, Tatsuya Kusakabe, Koji Sugano,
  • Organizer: The 21st IEEE International Conference on Micro Electro Mechanical Systems
  • Place of Presentation: Tucson, USA
• [Presentation]
  • Author(s): G. Lopez, T. Tanemura, R. Sato, T. Saeki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, , M. Maeda
  • Organizer: The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
  • Place of Presentation: Xiamen, China
• [Book] システム/制御/情報 (2009)
  • Author(s): 田畑修
  • Total Pages: 5
  • Publisher: システム制御情報学会論文誌
• [Remarks]
  • URL: http://www.nms.me.kyoto-u.ac.jp/
• [Remarks]
  • URL: http://www.nms.me.kyoto-u.ac.jp
• [Remarks]
  • URL: http://www.nms.me.kyoto-u.ac.jp/
• [Patent(Industrial Property Rights)] 塩基配列を用いた部品の組み立て装置及び組み立て方法 (2008)
  • Inventor(s): 田畑修
  • Industrial Property Rights Holder: 国立大学法人京都大学
  • Filing Date: 2008-09-30
• [Patent(Industrial Property Rights)] 配列を用いた部品の組み立て装置及び組み立て方法 (2008)
  • Inventor(s): 田畑修
  • Industrial Property Rights Holder: 京都大学
  • Industrial Property Number: 2008-253183
  • Filing Date: 2008-09-30
• [Patent(Industrial Property Rights)] 光誘起誘電泳動装置 (2007)
  • Inventor(s): 田畑修
  • Industrial Property Rights Holder: 国立大学法人京都大学
  • Filing Date: 2007-06-07
• [Patent(Industrial Property Rights)] 光誘起誘電泳動装置 (2007)
  • Inventor(s): 田畑 修
  • Industrial Property Rights Holder: 京都大学
  • Industrial Property Number: 2007-162824
  • Filing Date: 2007-06-20