Development of MEMS tweezers with atomic force sensing function for soft material handling

• Project/Area Number: 19310089
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Microdevices/Nanodevices
• Research Institution: Shizuoka University
• Principal Investigator: HASHIGUCHI Gen Shizuoka University, 電子工学研究所, 教授 (70314903)
• Co-Investigator(Kenkyū-buntansha): HOSOGI Maho 静岡大学, 電子工学研究所, 助教 (50363180)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥13,260,000 (Direct Cost: ¥10,200,000、Indirect Cost: ¥3,060,000); Fiscal Year 2008: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2007: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
• Keywords: MEMSピンセット / 柔軟物把持 / 自励発振 / 原子間力 / 櫛歯アクチュエータ / MEMS / ピンセット / 原子間力センシング / 細胞マニピュレーション

Research Abstract

柔軟物質を把持するためのMEMSピンセットの開発と細胞把持実験を行った。柔軟物質を把持するために、MEMS振動を利用した原子間力検出機構をMEMSピンセットに付加した。また、細胞等の生体物質との親和性を考慮して、パリレンをプローブに被覆しMEMSピンセットの動作を確認した。さらに、クロレラを用いた細胞マニピュレーション実験を行い、把持力の制御及びクロレラの搬送実験を行った。

Research Products

• [Journal Article] Nanotweezers with surface detection and gripping force control system
  • Author(s): Takeshi Umemoto, Kenjiro Ayano, Masato Suzuki, Masatoshi Yasutake, Takashi Konno, Gen Hashiguchi
  • Journal Title: Jpn. J. Appl. Phys (accepted)
• [Journal Article] Nanotweezers with surface detection and gripping force control system
  • Author(s): Takeshi Umemoto, Kenjiro Ayano, Masato Suzuki, Masatoshi Yasutake, Takashi Konno, Gen Hashiguchi
  • Journal Title: Japan Journal of Applied Physics (in press)
  • Peer Reviewed
• [Presentation] SiO_2皮膜の金電極を有するAFMプローブの開発 (2008)
  • Author(s): 倉永 大資、細木 真保、橋口 原
  • Organizer: 機械学会IIP2008
  • Place of Presentation: 東京工業大学
  • Year and Date: 2008-03-17
• [Presentation] コムドライブアクチュエータを用いた変位計測 (2008)
  • Author(s): 鈴木 勝順、細木 真保、橋口 原
  • Organizer: 機械学会IIP2008
  • Place of Presentation: 東京工業大学
  • Year and Date: 2008-03-17
• [Presentation] 交流ブリッジ回路による櫛歯アクチュエータの駆動とそのセンサ応用 (2008)
  • Author(s): 青山 満、鈴木 勝順、橋口 原
  • Organizer: 機械学会IIP2008
  • Place of Presentation: 東京工業大学
  • Year and Date: 2008-03-17
• [Presentation] AFM tweezers with surface detection and gripping force control system (2008)
  • Author(s): T. Umemoto, K.Ayano, M. Suzuki, M. Yasutake, T. Konno, G. Hashiguchi
  • Organizer: 21st International Microprocesses and Nanotechnology Conference
  • Place of Presentation: JAL Resort Sea Hawk Hotel Fukuoka, Japan
• [Presentation] Development of 'NANO tweezers" with contact detection function (2008)
  • Author(s): K. Ayano, M. Suzuki, T. Konno, G. Hashiguchi
  • Place of Presentation: Okinawa, Japan
• [Presentation] SPICE Model for a Comb-Drive Actuator (2008)
  • Author(s): M. Hosogi, H. Ooiso, Y. Nishimori, N. Fujiwara, G. Hashiguchi
  • Organizer: The 25^<th> Sensor Symposium on Sensors, Micromachines, and Applied Systems
  • Place of Presentation: Okinawa, Japan
• [Presentation] AFM tweezers with surface detection, gripping force control system (2008)
  • Author(s): T. Umemoto, K. Ayano, M. Suzuki, M. Yasutake, T. Konno, G. Hashiguchi
  • Organizer: 21st International Microprocesses and Nanotechnology Conference
  • Place of Presentation: JAL Resort Sea Hawk Hotel Fukuoka, Japan
• [Presentation] Development of "NANO tweezers" with contact detection function (2008)
  • Author(s): K. Ayano, M. Suzuki, T. Konno, G. Hashiguchi
  • Organizer: The 25^<th> Sensor Symposium on Sensors, Micromachines and Applied Systems
  • Place of Presentation: Okinawa, Japan
• [Presentation] SPICE Model for a Comb -Drive Actuator (2008)
  • Author(s): M. Hosogi, H Ooiso, Y. Nishimori, N. Fujiwara, G. Hashiguchi
  • Organizer: The 25^<th> Sensor Symposium on Sensors, Micromachines, and Applied Systems
  • Place of Presentation: Okinawa, Japan
• [Presentation] Displacement measurement device using coupled comb-drive system (2007)
  • Author(s): Katuyori Suzuki, Kenji Ayano, Gen Hashiguchi
  • Organizer: 24th Sensor Symposium
  • Place of Presentation: 東京船堀
  • Year and Date: 2007-10-16
• [Patent(Industrial Property Rights)] 外力検知センサ (2008)
  • Inventor(s): 橋口原
  • Filing Date: 2008-06-05
• [Patent(Industrial Property Rights)] 外力検知センサー (2008)
  • Inventor(s): 橋口原
  • Industrial Property Rights Holder: 静岡大学
  • Filing Date: 2008-06-05
• [Patent(Industrial Property Rights)] プローブ針、カンチレバー及びそれらの製造方法 (2008)
  • Inventor(s): 橋口 原、民谷 栄一、斉藤 真人
  • Industrial Property Rights Holder: 静岡大学
  • Industrial Property Number: 2008-066777
  • Filing Date: 2008-03-17