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Development of a method for surface chemical analysis with atomic-depth resolution using multi-charge ions

Research Project

Project/Area Number 19360016
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

MOTOHASHI Kenji  Tokyo University of Agriculture and Technology, 大学院・共生科学技術研究院, 助教 (50251583)

Co-Investigator(Kenkyū-buntansha) KANAI Yasuyuki  独立行政法人理化学研究所, 山崎原子物理研究室, 先任研究員 (00177487)
Co-Investigator(Renkei-kenkyūsha) KANAI Yasuyuki  独立行政法人理化学研究所, 山崎原子物理研究室, 先任研究員 (00177487)
Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥12,480,000 (Direct Cost: ¥9,600,000、Indirect Cost: ¥2,880,000)
Fiscal Year 2008: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2007: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
Keywordsビーム応用 / 多価イオン / 表面分析 / 二次イオン質量分析 / 電子捕獲散乱 / 原子層選別 / 同時計測 / 二次電子 / 水素原子 / 面極性
Research Abstract

表面の原子層を選別しながら、表面構成原子の種類を高感度に特定できる表面分析法(表面化学分析法)を実現するため、多価イオンを用いた散乱粒子・二次粒子同時測定装置を開発した。多価イオンの持つ反応性の高さと状態選択性の高さを利用することにより、極めて少ない入射イオン量でありながら、表面第1層と第2層を区別しながら表面原子の種類を特定することに成功した。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (27 results)

All 2009 2008 2007 Other

All Journal Article (13 results) (of which Peer Reviewed: 13 results) Presentation (11 results) Book (2 results) Remarks (1 results)

  • [Journal Article] Surface Chemical Analysis usingMultiply Charged Ions2009

    • Author(s)
      K. Motohashi
    • Journal Title

      e-J.Surf. Sci. Nanotech 7

      Pages: 21-24

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Surface Chemical Analysis using Multiply Charged Ions2009

    • Author(s)
      K. Motohashi
    • Journal Title

      e-J. Surf. Sci. Nanotech. 7

      Pages: 21-24

    • NAID

      130004933999

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Protonsputtering from polycrystalline Al surface interactingwith highly charged ions at grazing incidence angle2007

    • Author(s)
      K. Motohashi and S. Tsurubuchi
    • Journal Title

      Nucl Instrum. Meth. Phys. Res. B 264

      Pages: 15-22

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Analyses of GaN (0001)and (0001) surfaces by highly-charged ions2007

    • Author(s)
      K. Motohashi, K. Hosoya, M. Imano, S.Tsurubuchi, and A. Koukitu
    • Journal Title

      Surf.Sci 601

      Pages: 5304-5308

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Secondary-Ion Emission in Grazing Collisions between Highly Charged Ions and Surfaces2007

    • Author(s)
      K. Motohashi, S. Tsurubuchi, and A. Koukitu
    • Journal Title

      J.Phys. : Conf. Ser 80

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 小特集多価イオン原子過程の基礎と拡がる応用研究2.2多価イオン-原子・分子・固体表面2007

    • Author(s)
      本橋健次
    • Journal Title

      プラズマ・核融合学会誌 83

      Pages: 665-670

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Proton sputtering from polycrystalline Al surface interacting with highly charged ions at gazing incidence angle2007

    • Author(s)
      Kenji Motohashi and Seiji Tsurubuchi
    • Journal Title

      Nucl. Instrum. Phys. B 264

      Pages: 15-22

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analyses of GaN (0001) and (0001) surfaces by highly-charged ions2007

    • Author(s)
      K. Motohashi, K. Hosoya, M. Imano, S. Tsurubuchi, and A. Koukitu
    • Journal Title

      Surf. Sci. 601

      Pages: 5304-5308

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Secondary-Ion Emission in Grazing Collisions between Highly Charged Ionsand Surfaces2007

    • Author(s)
      Kenji Motohashi, Seiji Tsurubuchi, and Akinori Koukitu
    • Journal Title

      J. Phys. Conf. Ser. 80

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 小特集 多価イオン原子過程の基礎と拡がる応用研究 2.2多価イオンー原子・分子・固体表面2007

    • Author(s)
      本橋健次
    • Journal Title

      J. Plasma Fusion Res. (プラズマ・核融合学会誌) 83

      Pages: 665-670

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Coincidence measurements ofsecondary ions and scattered ions in collision betweenslow Ar^<6+> and a GaN(0001) surface, s

    • Author(s)
      K. Motohashi
    • Journal Title

      J. Phys Conf.Ser. (accepted for publication)

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fragmentation and desorption inlow-energy highly charged ion collisions withmolecules and surfaces

    • Author(s)
      K. Motohashi
    • Journal Title

      J.Phys. : Conf. Ser. accepted for publication

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Secondary-ion emission from GaN(0001) anddodecanethiol/Au(111) surfaces irradiated with Ar^<q+> (q=4-8)

    • Author(s)
      K. Motohashi, M. Flores and Y. Kanai
    • Journal Title

      J.Phys. : Conf. Ser. accepted for publication

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Presentation] 低速多価イオン-固体表面衝突における二次粒子放出2009

    • Author(s)
      本橋健次
    • Organizer
      日本物理学会第64回年次大会
    • Place of Presentation
      立教学院池袋キャンパス
    • Year and Date
      2009-03-28
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Sputtering with slow highlycharged ions under glancing incidence2008

    • Author(s)
      Kenji Motohashi
    • Organizer
      The 8^<th> AsianInternational Seminar on Atomic and Molecular Physics
    • Place of Presentation
      University of WesternAustralia(Perth, Australia)
    • Year and Date
      2008-11-25
    • Related Report
      2008 Final Research Report
  • [Presentation] Sputtering with slow highly charged ions under glancing incidence2008

    • Author(s)
      Kenji Motohashi
    • Organizer
      The 8th Asian International Seminar on Atomic and Molecular Physics
    • Place of Presentation
      University of Western Australia (Perth, Australia)
    • Year and Date
      2008-11-25
    • Related Report
      2008 Annual Research Report
  • [Presentation] Surface chemical analysis using multiply charged ions2008

    • Author(s)
      Kenji Motohashi
    • Organizer
      International Symposium on Surface Science and Nanotechnology
    • Place of Presentation
      Waseda University(Japan)
    • Year and Date
      2008-11-11
    • Related Report
      2008 Final Research Report
  • [Presentation] Surface chemical analysis using multiply charged ions2008

    • Author(s)
      Kenji Motohashi
    • Organizer
      International Symposium on Surface Science and Nanotechnology
    • Place of Presentation
      Waseda University
    • Year and Date
      2008-11-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] 多価イオンのすれすれ角衝突によるチオール自己組織化単分子膜表面からの二次イオン放出2008

    • Author(s)
      本橋健次, M. Flores, 金井保之, 山崎泰規
    • Organizer
      日本物理学会2008年秋季大会
    • Place of Presentation
      岩手大学
    • Year and Date
      2008-09-21
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] 多価イオンを用いた表面原子層選別SIMSの開発I2008

    • Author(s)
      本橋健次
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学船橋キャンパス
    • Year and Date
      2008-03-27
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] 低速多価イオン-固体表面衝突における散乱粒子の二次元検出2007

    • Author(s)
      本橋健次
    • Organizer
      日本物理学会第62回年次大会
    • Place of Presentation
      北海道大学札幌キャンパス
    • Year and Date
      2007-09-21
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] 多価イオン照射固体表面からの散乱原子と二次粒子の同時計測2007

    • Author(s)
      本橋健次
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] Surface chemical analysis bymulticharge ion induced desorption2007

    • Author(s)
      Kenji Motohashi
    • Organizer
      The 10^<th> AsiaPacific Physics Conference
    • Place of Presentation
      POSTECH(Pohang, Korea)
    • Year and Date
      2007-08-23
    • Related Report
      2008 Final Research Report
  • [Presentation] Surface chemical analysis by multicharge ion induced desorption2007

    • Author(s)
      Kenji Motohashi
    • Organizer
      The 10th Asia Pacific Physics Conference
    • Place of Presentation
      Pohang, Korea
    • Year and Date
      2007-08-23
    • Related Report
      2007 Annual Research Report
  • [Book] ISSP10(Proceedings of the 10^<th> ISSP International Symposium in Nanoscience at Surfaces)2007

    • Author(s)
      K. Motohashi, K. Hosoya, M. Imano, S. Tsurubuchi,and A. Koukitu
    • Publisher
      ELSEVIER
    • Related Report
      2008 Final Research Report
  • [Book] ISSP10 (Proceedings of the 10th ISSP International Symposium in Nanoscience at Surfaces)2007

    • Author(s)
      K. Motohashi, K. Hosoya, M. Imano, S. Tsurubuchi, and A. Koukitu
    • Total Pages
      230
    • Publisher
      ELSEVIER
    • Related Report
      2007 Annual Research Report
  • [Remarks]

    • URL

      http://kenkyu-web.tuat.ac.jp/Profiles/3/0000231/profile.html

    • Related Report
      2007 Annual Research Report

URL: 

Published: 2007-04-01   Modified: 2016-04-21  

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