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Passivation of semiconductor and metal surfaces with organic monolayers

Research Project

Project/Area Number 19360024
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionThe Institute of Physical and Chemical Research

Principal Investigator

YAMADA Taro  The Institute of Physical and Chemical Research, 川合表面化学研究室, 専任研究員 (10174723)

Co-Investigator(Kenkyū-buntansha) 須藤 彰三  東北大学, 大学院・理学研究科, 教授 (40171277)
西山 勝彦  熊本大学, 自然科学研究科, 助教授 (10202243)
Co-Investigator(Renkei-kenkyūsha) SUTO Shozo  東北大学, 大学院・理学研究科, 教授 (40171277)
NISHIYAMA Katsuhiko  熊本大学, 工学部, 准教授 (10202243)
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2009: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2008: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2007: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
Keywords有機単分子層 / 表面不動態化 / ナノテクノロジー / ケイ素ウエハ表面 / アルミニウム表面 / 赤外吸収スペクトル / 吸着種振動解析 / リン脂質単分子層 / ケイ素ウエハ / アルミニウム / 赤外吸収分光法 / 有機吸着種 / 水素終端ケイ素表面 / 有機チオール / 吸着選択性 / 軌道放射光電子分光 / 臭化メチル
Research Abstract

Since the first year of this research period, FY2007, we continued the experiments collaborating with Tohoku Univ., Kumamoto Univ. and Stanford Univ. (USA). In FY2007, we ordered the equipments, and the equipments were delivered in the end. In FY2008, we achieved quite a few basic findings, led by the finding on the driving force of "hydrophohicity" of modified Si aided by synchrotron radiation. As for passivation of aluminum surfaces, a substantial progress was made until FY2009. This technology has been filed for patent application. The development infrared spectroscopy, despite some difficulties in sample preparation, ended up with strong signals of ultrathin molecular layers (less than 1 nm thick), which has been found to be applicable for organic molecules, such as phospholipids, in aqueous solution.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (37 results)

All 2010 2009 2008 2007 Other

All Journal Article (7 results) (of which Peer Reviewed: 2 results) Presentation (26 results) Book (2 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Preparation and Characterization of Ultraclean H:Si(111)-(1×1) Surfaces Studied by HREELS, AFM and STM-STS2009

    • Author(s)
      H. Kato, T. Taoka, S. Suto, S. Nishikata, G. Sazaki, K. Nakajima, T. Yamada, R. Czajka, A. Wawro, A. Kasuya
    • Journal Title

      e-Journal of Surface Science and Nano-Technology 7

      Pages: 557-562

    • NAID

      130004439150

    • Related Report
      2009 Final Research Report
  • [Journal Article] Preparation and Characterization of Ultraclean H:Si(111)-(1×1)Surfaces Studied by HREELS, AFM and STM-STS2009

    • Author(s)
      H.Kato, T.Taoka, S.Suto, S.Nishikata, G.Sazaki, K.Nakajima, T.Yamada, R.Czajka, A.Wawro, A.Kasuya
    • Journal Title

      e-Journal of Surface Science and Nano-Technology 7

      Pages: 557-562

    • NAID

      130004439150

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of an Ultra-clean and Atomically Controlled Hydrogen-terminated Si(111)-(1×1) Surface Revealed by HREELS, AFM and STM : Aqueous NH_4F Etching Process of Si(111)2007

    • Author(s)
      H. Kato, T. Taoka, S. Nishikata, G. Sazaki, T. Yamada, R. Czajka, A. Wawro, K. Nakajima, A. Kasuya, S. Suto
    • Journal Title

      Jpn.J.Appl.Phys. 46

      Pages: 5701-5705

    • Related Report
      2009 Final Research Report
  • [Journal Article] Identification of Allylamine and Allylalcohol Adsorbate on Hydrogen-terminated Si(111)2007

    • Author(s)
      T. Yamada, R. Yokomori, K. Shirasaka, H.S. Kato, Maki Kawai
    • Journal Title

      ECS Transactions 3

      Pages: 15-23

    • Related Report
      2009 Final Research Report
  • [Journal Article] Preparation of an Ultraclean and Atomically Controlled Hydrogen-Terminated Si(111)-(1x1)Surface Revealed by High Resolution Electron Energy Loss Spectroscopy, Atomic Force Microscopy, and Scanning Tunneling Microscopy : Aqueous NH_4F Etching Process of Si(111)2007

    • Author(s)
      Hiroki KATO, Takumi TAOKA, Susumu NISHIKATA, Gen SAZAKI, Taro YAMADA, Ryszard CZAJKA, Andrzej WAWRO, Kazuo NAKAJIMA, Atsuo KASUYA, Shozo SUTO
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 5701-5705

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct interaction of water ice with hydrophobic methyl-terminated Si(111)

    • Author(s)
      I. Waluyo, H. Ogasawara, M. Kawai, A. Nilsson, T. Yamada
    • Journal Title

      J.Phys.Chem.C. in press

    • Related Report
      2009 Final Research Report
  • [Journal Article] Blocking Oxidation of Al Surfaces with Organic Thiol Monolayers Cured by Electron Beam

    • Author(s)
      S. Nomura, T. Yamada, M. Kawai
    • Journal Title

      Chem Lett. in press

    • NAID

      10027468602

    • Related Report
      2009 Final Research Report
  • [Presentation] 半導体及び金属表面の有機単分子層による修飾と不活性化2010

    • Author(s)
      山田太郎
    • Organizer
      平成21年度日本表面科学会東北北海道支部講演会
    • Place of Presentation
      仙台市
    • Year and Date
      2010-03-10
    • Related Report
      2009 Final Research Report
  • [Presentation] 半導体及び金属表面の有機単分子層による修飾と不活性化2010

    • Author(s)
      山田太郎
    • Organizer
      平成21年度日本表面科学会東北北海道支部講演会
    • Place of Presentation
      宮城県仙台市
    • Year and Date
      2010-03-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] In situ STMおよび赤外吸収分光法を用いた脂質単分子膜の分子スケール観測2009

    • Author(s)
      松永宗一郎、山田太郎、川合真紀
    • Organizer
      表面・界面スペクトロスコピー2009
    • Place of Presentation
      北海道札幌市
    • Year and Date
      2009-12-05
    • Related Report
      2009 Annual Research Report
  • [Presentation] Al(111)の不動態化のための有機単分子層の探索2009

    • Author(s)
      野村周平、山田太郎、川合眞紀
    • Organizer
      表面・界面スペクトロスコピー2009
    • Place of Presentation
      札幌市
    • Year and Date
      2009-12-04
    • Related Report
      2009 Final Research Report
  • [Presentation] Al(111)の不動態化のための有機単分子層の探索2009

    • Author(s)
      野村周平、山田太郎、川合眞紀
    • Organizer
      表面・界面スペクトロスコピー2009
    • Place of Presentation
      北海道札幌市
    • Year and Date
      2009-12-04
    • Related Report
      2009 Annual Research Report
  • [Presentation] Passivation of Al(111) with organic and inorganic adlayers2009

    • Author(s)
      山田太郎, 川合眞紀
    • Organizer
      56th AVS
    • Place of Presentation
      米国サンホゼ市
    • Year and Date
      2009-11-15
    • Related Report
      2009 Final Research Report
  • [Presentation] Passivation of Al(111)with organic and inorganic adlayers2009

    • Author(s)
      山田太郎, 川合眞紀
    • Organizer
      American Vacuum Society 56th International Symposiums
    • Place of Presentation
      米国カリフォルニア州サンホゼ市
    • Year and Date
      2009-11-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] Synchrotron X-ray spectroscopic study of H_2O interacting with methyl-terminated Si(111)2009

    • Author(s)
      山田太郎, I. Waluyo, H. Ogasawara, 川合眞紀, A. Nilsson
    • Organizer
      2009 SSRL/LCLS Workshop
    • Place of Presentation
      米国メンロパーク市
    • Year and Date
      2009-10-19
    • Related Report
      2009 Final Research Report
  • [Presentation] Synchrotron X-ray spectroscopic study of H_2O interacting with methyl-terminated Si(111)2009

    • Author(s)
      山田太郎, Iradwikanari Waluyo, 小笠原寛人, 川合眞紀, Anders Nilsson
    • Organizer
      2009 SSRL/LCLS Users' Meeting and Workshops
    • Place of Presentation
      米国カリフォルニア州メンロパーク市
    • Year and Date
      2009-10-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Synchrotron X-ray spectroscopic study of H_2O interacting with methyl-terminated Si(111)2009

    • Author(s)
      山田太郎, I. Waluyo, H. Ogasawara, 川合眞紀, A. Nilsson
    • Organizer
      ICESS-11
    • Place of Presentation
      奈良市
    • Year and Date
      2009-10-07
    • Related Report
      2009 Final Research Report
  • [Presentation] Synchrotron X-ray spectroscopic study of H_2O interacting with methyl-terminated Si(111)2009

    • Author(s)
      山田太郎, Iradwikanari Waluyo, 小笠原寛人, 川合眞紀, Anders Nilsson
    • Organizer
      11th International Conference on Electronic Spectroscopy and Structure
    • Place of Presentation
      奈良県奈良市
    • Year and Date
      2009-10-07
    • Related Report
      2009 Annual Research Report
  • [Presentation] H:Si(111)-(1×1)表面の初期酸化過程2009

    • Author(s)
      加藤大樹、瀧川知昭、中矢博樹、山田太郎、粕谷厚生、須藤彰三
    • Organizer
      2009年秋季日本物理学会
    • Place of Presentation
      熊本市
    • Year and Date
      2009-09-25
    • Related Report
      2009 Final Research Report
  • [Presentation] H:Si(111)-(1×1)表面の初期酸化過程2009

    • Author(s)
      加藤大樹、瀧川知昭、中矢博樹、山田太郎、粕谷厚生、須藤彰三
    • Organizer
      日本物理学会 2009年秋季大会e
    • Place of Presentation
      熊本県熊本市
    • Year and Date
      2009-09-25
    • Related Report
      2009 Annual Research Report
  • [Presentation] メチル終端Si(111)表面上の水分子の軌道放射X線分光による研究2009

    • Author(s)
      山田太郎、I. waluyo、小笠原寛人、川合眞紀、A. Nilsson
    • Organizer
      2009年秋季応用物理学会
    • Place of Presentation
      富山市
    • Year and Date
      2009-09-10
    • Related Report
      2009 Final Research Report
  • [Presentation] メチル終端Si(111)表面上の水分子の軌道放射X線分光による研究2009

    • Author(s)
      山田太郎、I.Waluyo、小笠原寛人、川合眞紀、A.Nilsson
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山県富山市
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Synchrotron X-ray spectroscopic study of H_2O interacting with methyl-terminated Si(111)2009

    • Author(s)
      山田太郎, I. Waluyo, H. Ogasawara, 川合眞紀, A. Nilsson
    • Organizer
      ECOSS 26
    • Place of Presentation
      イタリア パルマ市
    • Year and Date
      2009-09-01
    • Related Report
      2009 Final Research Report
  • [Presentation] Synchrotron X-ray spectroscopic study of H_2O interacting with methyl-terminated Si(111)2009

    • Author(s)
      山田太郎, Iradwikanari Waluyo, 小笠原寛人, 川合眞紀, Anders Nilsson
    • Organizer
      26th European Congress on Surface Science
    • Place of Presentation
      イタリア パルマ市
    • Year and Date
      2009-09-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] 水素及び重水素終端Si(111)-(1×1)の表面フォノン2009

    • Author(s)
      加藤大樹、山田太郎、粕谷厚生、須藤彰三
    • Organizer
      2009年春季日本物理学会
    • Place of Presentation
      東京都豊島区
    • Year and Date
      2009-03-27
    • Related Report
      2009 Final Research Report
  • [Presentation] 水素及び重水素終端Si(111)-(1×1)の表面フォノン2009

    • Author(s)
      加藤大樹、山田太郎、粕谷厚生、須藤彰三
    • Organizer
      日本物理学会2009年春季大会
    • Place of Presentation
      東京都豊島区
    • Year and Date
      2009-03-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] Preparation and Characterization of Ultra-clean H:Si(111)-(1×1) Surfaces Studied by HREELS, AFM and STM-STS2008

    • Author(s)
      H. Kato, 田岡琢巳, S. Nishikata, G. Sazaki, 山田太郎, R. Czajka, A. Wawro, K. Nakajima, 粕谷厚生, S. Suto
    • Organizer
      The 8th Japan-Russia Seminar on Semiconductor Surfaces
    • Place of Presentation
      仙台市
    • Year and Date
      2008-10-21
    • Related Report
      2009 Final Research Report
  • [Presentation] H:Si(111)-(1×1)表面の初期酸化過程の研究II2008

    • Author(s)
      瀧川知昭、中矢博樹、山田太郎、粕谷厚生、須藤彰三
    • Organizer
      2008年秋季日本物理学会
    • Place of Presentation
      盛岡市
    • Year and Date
      2008-09-21
    • Related Report
      2009 Final Research Report
  • [Presentation] H:Si(111)-(1×1)表面の初期酸化過程の研究II2008

    • Author(s)
      瀧川知昭、中矢博樹、山田太郎、粕谷厚生、須藤彰三
    • Organizer
      日本物理学会2008年秋季大会
    • Place of Presentation
      岩手県盛岡市
    • Year and Date
      2008-09-21
    • Related Report
      2008 Annual Research Report
  • [Presentation] Reactivity of n-type/p-type H:Si(111)for Photoadsorption of CH_3Br2007

    • Author(s)
      T.Yamada, H.Ozawa, H.S.Kato, M.Kawai
    • Organizer
      54rd American Vacuum Society International Symposium
    • Place of Presentation
      米国シアトル市
    • Year and Date
      2007-10-18
    • Related Report
      2007 Annual Research Report
  • [Presentation] Reactivity of n-type/p-type H:Si(111) for Photoadsorption of CH_3Br2007

    • Author(s)
      山田太郎, Ozawa, H.S. Kato, 川合眞紀
    • Organizer
      54th AVS
    • Place of Presentation
      米国シアトル市
    • Year and Date
      2007-10-08
    • Related Report
      2009 Final Research Report
  • [Presentation] 高品位H:Si(111)1×1表面作成法と表面フォノン2007

    • Author(s)
      加藤大樹, 田岡琢巳, 西方督, 佐崎元, 山田太郎、R. Czajka、A. wawro、中嶋一雄、粕谷厚生、須藤彰三
    • Organizer
      第62回日本物理学会
    • Place of Presentation
      札幌市
    • Year and Date
      2007-09-21
    • Related Report
      2009 Final Research Report
  • [Presentation] 高品位H:Si(111)1×1表面作成法と表面フォノン2007

    • Author(s)
      加藤大樹、田岡琢巳、西方督、佐崎元、山田太郎、R.Czajka、A.Wawro、中嶋一雄、粕谷厚生、須藤彰三
    • Organizer
      日本物理学会第62回年次大会
    • Place of Presentation
      北海道札幌市
    • Year and Date
      2007-09-21
    • Related Report
      2007 Annual Research Report
  • [Book] Modified Electrodes(Modification of Silicon Wafer Surfaces with Small Organic Moieties)(T. Yamada)Encyclopedia of Electrochemistry Vol.102007

    • Author(s)
      A.J. Bard, M. Staratmann, M. Fujihira, I. Rubinstein, J.F. Rusling eds.
    • Publisher
      Wiley
    • Related Report
      2009 Final Research Report
  • [Book] 表面・界面(日本化学会編)第5版実験化学講座 第24巻2007

    • Author(s)
      谷口功・山田太郎編
    • Publisher
      丸善
    • Related Report
      2009 Final Research Report
  • [Remarks] ホームページ

    • URL

      http://www.riken.jp/lab-www/surf-chem/bio/IndexJ/index.html

    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] 酸化防止膜皮膜金属の製造方法および酸化防止膜皮膜金属2010

    • Inventor(s)
      山田太郎
    • Industrial Property Rights Holder
      独立行政法人理化学研究所
    • Filing Date
      2010-07-30
    • Related Report
      2009 Final Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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